Ë à Ã Å P c ly ¢8 ý > H ¹ Å Ö «Y c l; c 8 ý X ¢ U c lT c l V R ËX ê s

(1)

ß O

Ë à Ã Å P c ly ¢8 ý > H ¹ Å Ö «Y c l; c 8 ý X ¢ U c lT c l V R ËX ê s

"

kU £ Ó

í{ © @ / < Æ § î ß â F g < Æõ , Á ºî ß 534-701

» ç ¡g ` @

F

gÅ Ò Ð| @ / < Æ î ß â F g < Æõ , F gÅ Ò 506-701 (2009¸ 1 Z 4 20{ 9 ~ Ã Î6 £ §)

l

ó ø Í` ¦ r r v 9 d > l Ö ¦# Q y ¸ Ð 7 £ x Ã Ìr ( ` ¦ M :_ ³ ð t + þ A ¸\ ¦ Û ¼ß ¼o _ ç ´ òõ ü < Û ¼ w

# Qa A ´ òõ \ ¦ ¸¿ º ¦ 9ô Ç kinetic Monte Carlo r Ó ý tY Us Ü ¼ Ð Ð ¤ . r 7 £ x Ã Ì_ â Ä º, ¦& ñ ) a

~

½

Ó0 Ay \ " f_ 7 £ x Ã Ì\ q K } 9 l 7 £ x 9, + þ A$ í ÷ & H ü _ l Ö ¦l ¸ t H כ ` ¦ Ð ¤ .

r 7 £ x Ã Ì\ " f Ðs H l Ö ¦l Å Òl & h Ü ¼ Ð H l Ö ¦l _ 1 l x` ¦ ^ ¦ Ã º e % 3 ¦, s כ É r ~ ½ Ó0 Ay

\

É r l Ö ¦l o\ ¦ ì ø Í% ò ô Ç כ s . s Qô Ç ³ ð t + þ A_ s H steering ´ òõ \ _ ô Ç þ j © 8 £ x-_ Û

¼ ü _ â _ q @ /g A& h íl 7 £ x Ã Ì x 9 ¸\ l H כ ` ¦ S X % i .

PACS numbers: 68.35.-p, 68.37.-d

Keywords: Û ¼w # Qa A ´ òõ , ~ Ã Ì} $ í © , KMC r Ó ý tY Us

I. " e Â ] Ø

þ

j H [ þ t# Q ~ Ã Ì} $ í © \ " f ³ ð _ + þ A © ` ¦ % ò ¾ Ó` ¦ z u

H [ jÂ Ò& h ½ ¨ ¸" é ¶o \ @ /ô Ç ' ad s 7 £ x ¦ e [1].

$ í

© ª d \ % ò ¾ Ó` ¦ p u H כ ¹ [ þ t × æ © @ /& h Ü ¼ Ð ' ad s

\ O % 3 ~ 7 £ x Ã Ì õ & ñ ¸ Dijken 1 p x_ [2,3] steering ´ òõ \

@

/ô Ç µ 1 Ï³ ð s Ê ê Á ºr ½ + É Ã º \ O H כ ¹ è × æ_ Ð ³ ð _

} 9 l ü _ + þ A © \ ß ¼> % ò ¾ Ó` ¦ Å Ò H כ ¹ è × æ

H כ s S X ÷ &% 3 . 7 £ x Ã Ì " é ¶ ü < Ð@ / " é ¶ s _

©

ñ 6 x\ _ K C & h s 6 f# Qt H steering ´ òõ \ _ ô Ç

íl 7 £ x Ã Ì x 9 ¸_ ì r í\ q @ /g A$ í s µ 1 ÏÒ q t ¦ [3], s כ s

³ ð t + þ A_ s \ ¦ ë ß H H כ s Ð# & [4,5].

ô

Ç¼ # Lu 1 p x\ _ K l Ö ¦# Q y ¸ Ð MBE $ í © ` ¦ Ã º '

# , Ð@ /\ ¦ r r v H â Ä º ü É r s ` Ø Ô>

÷

&# Q 3 " é ¶& h ¸ } @ / + þ A$ í ÷ & H כ ` ¦ [6] z ´+ « >Ü ¼

Ð Ð% i . s Qô Ç } 9 # Q ³ ð s ¸ } @ /\ ¦ + þ A$ í

)

a ü _ ` (shadowing) ´ òõ \ _ ô Ç כ Ü ¼ Ð [ O " î

¦ e Ü ¼ [6,7] Ô ¦¢ - a 9, Cu(001) ³ ð \ Cu\ ¦ 7 £ x Ã Ì

H â Ä º steering ´ òõ t ¦ 9 ½ + É M : ¸ ú [ O " î | ¨ c Ã º e

6 £ §s Ð# & [5].

:

r ½ ¨ H r 7 £ x Ã Ìs ~ ½ Ó0 Ay ` ¦ â 9 7 £ x Ã Ì

H â Ä º H ³ ð t + þ A_ s \ ¦ ` ´ òõ H Ó ü t : r steering ´ òõ t ¦ 9ô Ç Kinetic Monte Carlo (KMC) r

Ó ý tY Us Ü ¼ Ð [ O " î ¦ ô Ç . Cu(001) ³ ð 0 A\

Cu\ ¦ 7 £ x Ã Ìr v H 1 l x7 á x $ í © \ ô Ç& ñ # ¦ 9ô Ç . 7 £ x

Ã

Ì ~ ½ Ó0 Ay \ } 9 l ü _ l Ö ¦l s

9, l ó ø Í` ¦ r r v " f 7 £ x Ã Ì H â Ä º, ³ ð É r Ð

d > } 9 # Qt H כ ` ¦ Ð ¤ . s Qô Ç ³ ð t + þ A_

s H steering ´ òõ \ _ ô Ç q @ /g A& h íl 7 £ x Ã Ì x 9 ¸

\

l H כ ` ¦ S X ½ + É כ s .

II. S ö o Ú7 _T Ó Å U ê s0 n É

7 £

x Ã Ì õ & ñ s H $ í © 1 l x% i < Æ` ¦ í < Êr v l 0 AK KMC r Ó ý tY Us \ molecular dynamics (MD) r Ó ý tY Us

` ¦ ½ + Ë % i . 7 £ x Ã Ì ) a " é ¶ _ S X í ß ` ¦ í < Êô Ç $ í © õ

&

ñ

É r KMC r Ó ý tY Us ` ¦ : x # s À Ò# Q& ¦, 7 £ x Ã Ì õ & ñ

É

r MD\ ¦ : x # ½ ¨ & ³÷ &% 3 . MD r Ó ý tY Us \ " f 6 x ô

Ç Ã º[ þ t É r 6 £ §õ ° ú . ³ ð " é ¶ ü < { 9 " é ¶ s _ (

J $ [ > É r U (r) = 4D[(σ/r)

¹²

− (σ/r)

⁶

]õ ° ú É r Lennard Jones + þ AI \ ¦ 6 x % i ¦, # l " f D = 0.4093 eV, σ = 2.338 ˚ A, [8]s . MD r Ó ý tY Us > í ß \ " f 7 £ x Ã Ì " é ¶ H

© Z } É r 7 £ x Ã Ì8 £ x Ð 11 a

z

Z }s \ " f Å Ò# Q F Gy (θ)õ ~ ½ Ó0 Ay (φ)Ü ¼ Ð { 9 ô Ç . 7 £ x Ã Ì " é ¶ ³ ð _ " é ¶

ÐÂ Ò' 0.9 a

nn

o s Ð H] X > ÷ & ' § 4 ` ¦

~ Ã

Î ÷ &4 A Ð f 0 Au \ " f © î r 0 Au

\

" é ¶ \ ¦ ` ¦ 9Z ~ H כ Ü ¼ Ð MD > í ß É r = å Qè ß . MD r Ó

ý

tY Us \ " f 7 £ x Ã Ì " é ¶ _ ³ ð \ ] X H½ + É M : s p 7 £ x Ã Ì

-115-

(2)

Fig. 1. Illustration of some diffusion processes taken into account in simulation and definition of azimuthal angle φ and polar angle θ. Inset: the neighboring atoms of a moving atom considered in the simulation.

)

a ¸ H " é ¶ [ þ t` ¦ ¦& ñ r { 9 7 á x_ one atom MD > í ß s

.

MD > í ß \ " f % 3 # Q þ j7 á x 0 Au \ ¦ KMC r Ó ý tY Us s

) 6 x H ¦& ñ ) a 0 Au Ð 7 Å Ò H õ & ñ s 9 כ ¹

9, : r ½ ¨\ " f H MD > í ß \ " f % 3 # Q 0 Au ü < x-y

¨ î

© © î r 7 £ x Ã Ì 0 p xô Ç 0 Au \ ¦ 7 £ x Ã Ì 0 Au

Ð Z ~ ¤ . r Ó ý tY Us \ " f step 0 A\ B j² ú 2 ; 0 Au _

7 £ x Ã Ì É r ) 6 x t · ú § ¤ . " f MD > í ß \ " f_ þ j 7

á

x 0 Au B j² ú 2 ; 0 Au H~ ½ Ó{ 9 M : ] X ì ø Í É r © 5 p x â ì2 £ §s ÷ &

9, Qt ì ø Í É r y © â ì2 £ §s ) a [9]. ô Ç 0 Au \

"

é

¶ \ ¦ ` ¦ 9Z ~Ü ¼ " fÂ Ò' s Ê ê 6 £ § 7 £ x Ã Ì | s z ´'

|

¨

c M : t H KMC r Ó ý tY Us \ _ ô Ç 7 £ x Ã Ì " é ¶ _ S X í ß s

z ´' ) a .

³

ð \ " f_ " é ¶ _ S X í ß É r §¨ 8 S X í ß ` ¦ ) 6 x t · ú §

¦, fcc + þ AI _ 0 Au Ð s 1 l xë ß ` ¦ ) 6 xô Ç . 0

Au H ¦& ñ ÷ &% 3 ¦, H 400 × 400 ß ¼l _ fcc(001)

³

ð s 608 £ x Z ~# e H + þ AI s . _ Û ¼ 0 A\ " f_ S X í ß +

þ

AI H Fig.1 insetõ ° ú s 5> h_ ] X " é ¶ \ ¦ ¦ 9Ù þ ¡ ¦,

0 p xô Ç 2

⁵

7 á x_ S X í ß © # 4 ° ú כ × æ\ " f ° ú כs q 5 p wô Ç כ ` ¦ Ó

ü

# Q 67 á xÜ ¼ Ð _ ¦o oK 6 x % i . s ü @\ > é ß

H~ ½ Ó_ ES © # 4 s kink ¸" fo 0 Au _ S X í ß © # 4 57 á x À

Ó\ ¦ í < Ê # 8 ú x 11> h_ S X í ß © # 4 ` ¦ 6 x % i . 6 x ô

Ç S X í ß © # 4 É r Furmann 1 p xs [10] Cu(001) ³ ð _ ~ Ã Ì}

$ í

© r Ó ý tY Us ` ¦ : xK % 3 É r ° ú כ` ¦ s 6 x % i . s [ þ t 7 H

E4 0.68 eV

E5 0.40 eV

E6 0.18 eV

ES barrier (ES) 0.07 eV (0.42+0.07 eV) ES barrier (kink site) 0.035 eV

jump frequency(ν

0

) 3.6 × 10

¹²

deposition rate (F

0

) 0.00416 ML/s

ë

H\ " f Å Ò# Qt t · ú § H ES (Ehrlich-Schwoebel) © # 4 ° ú כ

É

r 0.07 eV Ð % i ¦, Õ ª × æ\ " f kink 0 Au Ð b # Qt H

â

Ä º H 0.035 eV\ ¦ 6 x % i . Å Òכ ¹ S X í ß © # 4 _ ³ ðr

H Fig. 1õ ° ú ¦ ° ú כ É r Table 1\ \ P ÷ &# Q e . > é ß ¸

"

fo \ ¦ S X í ß | ¨ c M : H © # 4 E2° ú כ É r r Ó ý tY Us r ç

ß

` ¦ ¦ 9 · ú 9 ° ú כ Ð H 0.40 eV\ ¦ 6 x % i .

Õ

ª Q s ° ú כs õ \ H % ò ¾ Ó` ¦ Å Òt · ú § H H כ É r s

p Ð# & [5].

7 £

x Ã Ì ~ ½ Ó0 Ay (azimuthal angle) φ H Fig. 1õ ° ú s (110)- ~ ½ Ó ¾ Ó\ @ /ô Ç y ¸\ ¦ ´ ú 9, F Gy (polar angle) θ H ³ ð Ã ºf Z O õ s À Ò H y Ü ¼ Ð, ¸ H õ H d

>

l Ö ¦# Q y θ = 80

^◦

\ " f_ 7 £ x Ã Ìs . Fig. 1\

· p כ õ ° ú s r 5 Å q§ 4 ω H ~ ½ Ó0 Ay φ_ r 5 Å q§ 4 s

. r Ó ý tY Us \ " f r 7 £ x Ã Ì É r Ð@ /\ ¦ r r v t · ú §

¦ { 9 c _ ~ ½ Ó0 Ay ` ¦ or v H ~ ½ ÓZ O Ü ¼ Ð ½ ¨ & ³Ù þ ¡ .

r y ¸ H r Ó ý tY Us ½ ¨ & ³ © _ ë H] j Ð ` (% 3 ` (% 3

>

or ( ¦, B 0.01 ML 7 £ x Ã Ì Ê ê y ¸\ ¦ or ( .

$ í

© ª d _ ' ¸ Ð } 9 l (roughness)ü < ü ì ø Í

â

, ü _ l Ö ¦l \ ¦ 6 x % i . l Ö ¦l ° ú כ É r w =

√ < h

²

> − < h >

²

. Ð ½ ¨ % i ¦, # l " f h H ³ ð _ Z } s

s . : £ ¤Z > ô Ç / å Ls \ O Ü ¼ " é ¶ s _ þ j ] X o

H a

nn

Ü ¼ Ð Í Ç x ¦, Ã ºf ~ ½ Ó ¾ Ó ô Ç8 £ x Z }s H a

z

` ¦ 6 x ô

Ç . # l " f, a

nn

= a/ √

2, s ¦ 8 £ xç ß o a

z

= a/2, Õ ª o

¦ a H Cu_ © Ã ºs .

III. + s Ç Ê Ý

7 £

x Ã Ì" é ¶ _ { 9 y ` ¦ l Ö ¦ ^ 7 £ x Ã Ì" é ¶ _ ~ ½ Ó0 Ay ` ¦

r r v 9 7 £ x Ã Ìr v H > í ß ` ¦ % i . 7 £ x Ã Ì" é ¶ _ { 9

y θ H l ó ø Í_ surface normal\ @ /K 80 ¸ y ¸ Ð ¦

&

ñ

r ( ¦, r s r | ¨ c M : ~ ½ Ó0 Ay φ H 0 ¸ Ð (110) ~ ½ Ó

¾

Ós . 1 ML { © 60 ¸, 90 ¸, 180 ¸, 270 ¸, 360 ¸ m r

r v H â Ä º\ @ /K > í ß % i .

(3)

Fig. 2. Surface roughness as a function of coverage and rotational speed ω. Substrate temperature T = 240 K, θ = 80

^◦

. Inset: roughness as a function of the rotational speed of deposition angle φ at a coverage of 30 ML.

r r v 9 30 ML t 7 £ x Ã Ìr ³ ð _ } 9 l H Õ ª a

Ë

> 2ü < ° ú . r r v H â Ä º ¦& ñ ) a ~ ½ Ó0 Ay Ü ¼ Ð 7 £ x Ã Ì r

כ \ q K } 9 l & כ ` ¦ ^ ¦ Ã º e . 30 ML 7

£

x Ã Ìr ( ` ¦ M :_ } 9 l ° ú כ É r Fig. 2 insetü < ° ú s s

& h # Q ¸ # 3 0 A î ß s t ë ß r 5 Å q ¸ \ ¦Ã º2 ¤ } 9 l

7 £ x H â ¾ Ó É r S X ½ + É Ã º e . { 9 & ñ ô Ç r 5 Å q§ 4

`

¦ Å # Q" f H â Ä º 8 s © } 9 l H 7 £ x t · ú § H כ ¸ S

X

½ + É Ã º e . s õ H r 7 £ x Ã Ìs } 9 l \ ¦ ß ¼>

9, r 5 Å q ¸ Ö ¼w n =Ã º2 ¤ ¦& ñ ) a ~ ½ Ó0 Ay \ @ /ô Ç 7 £ x Ã Ì õ

Ä » K } 9 l t H â ¾ Ó` ¦ Ð כ s .

r r v 9 7 £ x Ã Ìr v H â Ä º + þ A$ í ) a ü 4 _ l Ö ¦ l

H Fig. 3õ ° ú s 1/4 Å Òl m 0 A © s # QF M 9 1 l x

H + þ AI Ð H כ ` ¦ ^ ¦ Ã º e . 7 £ x Ã Ì| ¾ Ós 7 £ x

; ¤ É r & h # Q4 R ü 4 _ l Ö ¦l & h q 5 p wK t H

כ

` ¦ ^ ¦ Ã º e . ¦& ñ ) a ~ ½ Ó0 Ay \ @ /ô Ç 7 £ x Ã Ì õ & h

õ q §K Ð (Fig. 3) 4> h _ l Ö ¦l H IL-sideü <

P-side_ s ° ú כ & ñ ¸_ l Ö ¦l \ ¦ t 9, 7 £ x Ã Ì| ¾ Ós 7 £ x

< Ê\ © É r IL-sideü < q 5 p wô Ç l Ö ¦l \ ¦ ° ú

>

÷ & H כ ` ¦ ^ ¦ Ã º e . Fig. 3_ inset H 20 ML-30 ML 7

£

x Ã Ìr v H 1 l xî ß ü 4> h ~ ½ Ó ¾ Ó _ ¨ î ç H l Ö ¦l ü < l Ö

¦l _ ¼ # \ ¦ Õ ª 2 ; Õ ªa Ë >s . 4> h _ ¨ î ç H l Ö ¦l H

r 5 Å q ¸ü < _ Á º ' a > 1 l x{ 9 ô Ç ° ú כ` ¦ Ðs ¦ e ¦, r

5 Å q ¸ \ ¦Ã º2 ¤ 4 _ l Ö ¦l ¼ # & h # Qt H כ ` ¦

^

¦ Ã º e .

l

ó ø Í` ¦ r r v 9 7 £ x Ã Ìr v ³ ð _ } 9 l H ¦& ñ

)

a ~ ½ Ó0 Ay _ â Ä º Ð 8 } 9 # Qt 9, + þ A$ í ) a ü l Ö ¦ l

H © @ /& h Ü ¼ Ð t 9, r ç ß \ 1 l x H + þ A

Fig. 3. Average facet orientation of the four side of mound with substrate rotation. The deposition angle θ = 80

^◦

and the rotation speed of substrate is 60

^◦

/ML.

For comparison, the average facet orientation on each side of the mounds (IL, illuminated; SH, shadowed; P, perpendicular) in the case of fixed azimuthal angle are represented as dotted line. inset : average facet orienta- tion (solid circle) and fluctuation (error bar) as a function of rotational speed.

Fig. 4. Snapshot at coverage of 40 ML. Polar angle θ = 80

^o

and azimuthal angles φ are (a) 0

^◦

, (b) 30

^◦

, (c) 45

^◦

each other.

I

Ð H כ ` ¦ Ð ¤ . s Qô Ç r 7 £ x Ã Ì\ " f Ð# t

H õ H 7 £ x Ã Ì " é ¶ _ { 9 ~ ½ Ó ¾ Óõ ³ ð ~ ½ Ó ¾ Óõ _

'

a> 7 £ ¤ 7 £ x Ã Ì ~ ½ Ó0 Ay \ É r s \ l ½ + É כ s .

7 £

x Ã Ìr ~ ½ Ó0 Ay \ É r $ í © ª d _ s \ ¦ ¦¹ 1 Ï % i

. { 9 " é ¶ _ 7 £ x Ã Ì y ¸ × æ F Gy θ H ¸¿ º 80 ¸ Ð d

>

l Ö ¦# Q y ¸_ 7 £ x Ã Ìs 9, ~ ½ Ó0 Ay φë ß 0 ¸\ " f 90 ¸

t or v H r Ó ý tY Us > í ß ` ¦ % i . õ Ð $ í

©

+ þ AI H Fig. 4ü < ° ú s 7 £ x Ã Ì " é ¶ _ ~ ½ Ó0 Ay φü < Á º ' a

> ¸¿ º > é ß s (110) ~ ½ Ó ¾ ÓÜ ¼ Ð + þ A$ í ÷ &% 3 ¦, É r : £ ¤

&

ñ

~ ½ Ó ¾ ÓÜ ¼ Ð ¾ Ó H ü É r Ðs t · ú § ¤ .

~

½

Ó0 Ay \ É r ³ ð } 9 l H Fig. 5ü < ° ú . 30 ML 7 £ x

Ã

Ìr ( ` ¦ M :_ } 9 l H Fig. 5. insetü < ° ú ¦, φ = 45

^◦

{ 9 M

: þ j è ° ú כ` ¦ Ðs ¦ e . } 9 l _ Û ¼H { 9 a A t Ã º β\ ¦

Ð [11] φ = 4

^◦

{ 9 M : 0.89s ¦ 30

^◦

\ " f 0.90, 15

^◦

\ " f 0.93, Õ ªo ¦ 0

^◦

\ " f 0.94 Ð ~ ½ Ó0 Ay s 0 ¸ 90 ¸ Ð ° ú Ã º 2

¤ β ° ú כs & & . Amar 1 p x\ _ [7], θ = 0

^◦

Ã º

(4)

Fig. 5. Surface roughness as a function of coverage and deposition azimuthal angle φ. Substrate temperature T

= 240 K, θ = 80

^o

. Inset: roughness as a function of the deposition angle φ at a coverage of 30 ML.

f

{ 9 _ â Ä º, β H 0.5 H~ ½ Ós 9, F Gy θ l Ö ¦# Q| 9 Ã º 2

¤ 1.0Ü ¼ Ð ] X H H כ Ü ¼ Ð Ð ¦ ¦ e . } 9 l ° ú כ _

¸ H ß ¼t ë ß { 9 & ñ ô Ç â ¾ Ó` ¦ Ðs ¦ e Ü ¼ 9, β° ú כ ¸ 1

l

x{ 9 ô Ç â ¾ Ó` ¦ Ð כ Ü ¼ Ð ^ ¦ M : @ /g A$ í s © H φ = 45

^◦

â Ä º © W = } 9 # Q $ í © s s À Ò# Qt H כ ` ¦ ó

ø

Íé ß ½ + É Ã º e .

~

½

Ó0 Ay \ É r ü l Ö ¦l H Fig. 6(a)ü < ° ú . l Ö ¦ l

° ú כ É r ü facet_ ¨ î ç H ~ ½ Ó ¾ ÓÜ ¼ Ð Í Ç x [12].

7 £

x Ã Ì" é ¶ _ { 9 ~ ½ Ó ¾ Óõ Å Ò Ð H _ l Ö ¦l H Ø Ô

¦, ü \ _ K 9t H ì ø Í@ / _ l Ö ¦l H ¢ - aë ß K t

H â ¾ Ó` ¦ Ðs ¦ e ¦, φ = 0

^◦

â Ä º õ H z ´+ « > õ

ü < ¸ ú { 9 u ô Ç [3].

r 7 £ x Ã Ì_ â Ä º H l Ö ¦l _ 1 l x É r ~ ½ Ó0 Ay

\

É r ü l Ö ¦l s \ l ô Ç . s \ ¦ S X l 0 A

# r 7 £ x Ã Ì ( r 5 Å q§ 4 60

^◦

/ML)_ â Ä º ü ý a8 £ ¤ _

l Ö ¦l ë ß ` ¦ ô Ç Å Òl 1 l xî ß Õ ªo Fig. 6(b)_ { 2 ³" é ¶ õ

° ú ¦, # l " f l Ö ¦l ° ú כ É r ¨ î ç H (4> h ¨ î ç H) l Ö ¦l

° ú

כõ _ s s . Õ ªo ¦ Fig. 6(a)_ ~ ½ Ó0 Ay \ É r ü

_ l Ö ¦l × æ\ " f ü ý a8 £ ¤ \ @ /ô Ç l Ö ¦l ë ß Õ ªo

360

^◦

r 7 £ x Ã Ì\ " f # Q " r ç ß \ " f ü l Ö ¦l H Õ ª s r ç

ß

7 £ x Ã Ì õ & ñ _ ¾ º& h ) a õ { 9 כ s . # Q " r ç ß \ " f ü

ý a8 £ ¤_ l Ö ¦l \ ¦ Õ ª s 180 ¸ ë ß p u r H 1 l xî ß _

õ Ð Ð ¦ ¾ º& h r & ¨ î ç H° ú כ` ¦ Õ ªo Fig. 6(b)_ z

´ õ ° ú ¦, r 7 £ x Ã Ì_ õ ({ 2 ³" é ¶)ü < ¸ ú { 9 u H

כ

` ¦ S X ½ + É Ã º e .

s

\ _ ô Ç íl 7 £ x Ã Ìx 9 ¸_ s \ l ô Ç . s \ ¦ S X

Fig. 6. (a)Average facet orientation of the four side of mound as a function of the deposition angle φ for the cov- erage of 30 ML. Substrate temperature is 240 K and po- lar angle θ = 80

^◦

. Open and solid circles(triangle) signify the facet orientation of the left(bottom) side and right (top) side of mound respectively. (b) Slope of the left side of mound with substrate rotation with ω = 60

^◦

/ML (solid circle). For comparison, the accumulated averaged slope (solid line) of left facet of mound in the case of fixed azimuthal angle. inset : slope of left side as a function of azimuthal angle.

l 0 AK (1,1,5)-facet\ ¦ t H 88 £ x ü ` ¦ + þ A$ í r & Z

~ ¦ Õ ª 0 A\ " é ¶ \ ¦ MD r Ó ý tY Us > í ß ë ß Ü ¼ Ð " é ¶

\

¦ Á º 0 A Ð Í Òo H r Ó ý tY Us ` ¦ Ã º' Ù þ ¡ . r Ó ý tY Us

ß ¼l H 60 × 60Ü ¼ Ð, x, y ~ ½ Ó ¾ ÓÜ ¼ Ð Å Òl & h â >

¸| ` ¦ Å Ò% 3 ¦, " f 88 £ x ü s 60 a

nn

ç ß Ü ¼ Ð

´ n

(5)

Fig. 7. Deposition flux distribution calculated by a MD simulation. Atoms were deposited on an eight-layer-high mound surrounded by (1,1,5)-facets at angle θ = 80

^◦

and (a) φ = 0

^◦

, (b) φ = 45

^◦

, and (c) substrate rotate with dφ/dt = 18

^◦

/ML. The deposition flux distribution is shown as a grey scale, where a brighter tone indicates a higher flux.

y ¸ Ð 7 £ x Ã Ìr & ü _ 0 Au Z > íl 7 £ x Ã Ì x 9 ¸\ ¦ Ð

¤ ¦, õ H Fig. 7õ ° ú s " î Ü ¼ Ð Í Ç x ¦, 7 £ x Ã Ì S X Ò

¦s Z } É r 0 Au \ ¦ µ 1 ß É r Ò os . ¢ , aA á ¤\ " f " é ¶ { 9

H φ = 0

^◦

Fig. 7(a)_ â Ä º, ü ¢ , aA á ¤ _ 7 £ x Ã Ìx 9

¸ Z } t 9, ~ ½ Ó0 Ay s 45 ¸ Fig. 7(b)_ â Ä º, ü

¢ ,

aA á ¤õ A A á ¤ facet_ 7 £ x Ã Ìx 9 ¸ Z } כ s Ð .

7 £

"

fo ¨ î ç H Ð Z } É r 7 £ x Ã Ì x 9 ¸\ ¦ Ðs ¦ e ¦, ì ø Í Ê

ê É r steering ´ òõ ü < ` ´ òõ Ð 7 £ x Ã Ìx 9 ¸ ± ú É r % ò

% i

Û ¼_ 4> h ¸" fo ¸¿ º Z } É r 7 £ x Ã Ìx 9 ¸\ ¦ Ðs ¦ e H

&

h

s ¦& ñ ) a ~ ½ Ó0 Ay Ü ¼ Ð 7 £ x Ã Ìô Ç (a)(b)_ â Ä ºü < ½ ¨Z > ) a

.

~

½

Ó0 Ay \ É r } 9 l , ü _ l Ö ¦l H s Qô Ç í l

7 £ x Ã Ìx 9 ¸ü < ° ú ¡ É r ' aº s e . Cu(100) ³ ð \ " f Cu

"

é

¶ \ ¦ 7 £ x Ã Ìr ~ ´ M :, 7 £ x Ã Ì y ¸ θ 7 £ x½ + ÉÃ º2 ¤ 7 £ ¤ glanc- ing K | 9 Ã º2 ¤ } 9 l 7 £ xô Ç H כ É r ¸ ú · ú 94 R e .

Õ

ªo ¦ s כ _ " é ¶ s steering ´ òõ \ _ K ¨ î ç H Ð Z }

É

H 7 £ x Ã Ì " é ¶ M :ë He s Ð# & [5].

MD > í ß \ _ ô Ç íl 7 £ x Ã Ìx 9 ¸ü < KMC r Ó ý tY Us Ü

¼ Ð 30 ML 7 £ x Ã Ìr ( ` ¦ M :_ õ ü < q § Fig. 8õ

° ú

º8 £ ¤ Å Ò _ (ý aÄ º8 £ ¤ facet í < Ê) 7 £ x Ã Ìx 9 ¸ü < facet_ l Ö

¦l \ ¦ q § # Õ ª§ 4 . } 9 l l Ö ¦l ¸¿ º íl 7 £ x

Ã

Ìx 9 ¸ ì r í â ¾ Óõ ¸ ú { 9 u H כ ` ¦ S X ½ + É Ã º e .

s

õ H ³ ð ½ ¨ ¸_ ~ ½ Ó0 Ay _ > r$ í s steering ´ òõ ü <

° ú

s 7 £ x Ã Ì" é ¶ _ íl x 9 ¸ ì r í\ U ·> _ > rô Ç H כ

`

¦ _ p ô Ç .

r 7 £ x Ã Ì\ É r } 9 l 7 £ x H steering ´ òõ \ _ ô Ç

íl 7 £ x Ã Ì x 9 ¸ s Ð [ O " î | ¨ c Ã º e . Fig. 7(a)(b)ü <

Fig. 8. Compare roughness (slope) at coverage of 30 ML and deposition flux. Substrate temperature is 240 K and polar angle θ = 80

^◦

. (a) Roughness(closed circle) and deposition flux on top-terrace (open circle). (b) Slope of left side (closed square) and right side (open square) of mound, and deposition flux of left edge (closed circle) and right edge (open circle) of mound.

° ú

s ¦& ñ ) a ~ ½ Ó0 Ay \ @ /ô Ç 7 £ x Ã Ì_ â Ä º " é ¶ { 9

H ~ ½ Ó ¾ Ó_ 7 £ x Ã Ì x 9 ¸ 7 £ xô Ç ì ø Í z ´ » _ Õ ªa Ë > % ò

% i

_ x 9 ¸ ± ú . Õ ª Q r 7 £ x Ã Ì Fig. 7(c)\ ¦

Ð top-_ Û ¼ ¸ H ¸" fo H~ ½ Ó_ 7 £ x Ã Ì x 9 ¸ Z }

כ ` ¦ ^ ¦ Ã º e . ¸" fo H~ ½ Ó\ b # Q " é ¶ [ þ t É r Ã »

÷

& " f D h Ðî r ü 8 £ x` ¦ + þ A$ í | ¨ c S X Ò ¦` ¦ Z }s > ÷ & 9, ¸

"

fo H~ ½ Ó_ Z } É r 7 £ x Ã Ìx 9 ¸ H } 9 l 7 £ x ) a .

IV. + s Ç Â ] Ø

~

½

(6)

Û ¼ ¢ ¸ H ü â _ íl 7 £ x Ã Ì x 9 ¸ Ð ¸ ú [ O " î ½ + É Ã º e

H כ ` ¦ S X % i .

Y c

p w Ã U Ø ô

[1] J. W. Evans, P. A. Thiel and M. C. Bartelt, Surf.

Sci. Rep. 61, 1 (2006).

[2] S. V. Dijken, L. C. Jorritsma and B. Poelsema, Phys.

Rev. Lett. 82, 4038 (1999).

[3] S. V. Dijken, L. C. Jorritsma and B. Poelsema, Phys.

Rev. B 61, 14047 (2000).

[4] J. Seo, S.-M. Kwon, H.-Y. Kim and J.-S. Kim, Phys.

Rev. B 67, R121402 (2003).

[5] Jikeun Seo, Hye-Young Kim and J-S Kim, J. Phys.

(cond. mat.) 19, 486001 (2007).

Phys. Rev. B 77, 235423 (2007).

[8] D. E. Sanders and A. E. DePristo, Surf. Sci. 254, 341 (1991).

[9] J. G. Amar and F. Family, Phys. Rev. B 54, 14742 (1996).

[10] I. Furman, O. Biham, Jiang-Kai Zuo, A. K. Swan and J. F. Wendelken, Phys. Rev. B 62, R10649 (2000); H. Mehl, O. Biham, I. Furman and M.

Karimi, Phys. Rev. B 61, 2106 (1999).

[11] The fitting region for scaling exponent β are 10-30 ML, and crossover are not found in these region.

[12] The local slope defined as reference [5] is used. For

steps with terrace widths of 1.5 and 2.5 a

nn

, the

corresponding local slopes are those of the (113)-

and (115)-facets, respectively.

(7)

Thin-film Growth by Glancing Angle Deposition with Substrate Rotation

Jikeun Seo

Department of Opthalmic Optics, Chodang University, Muan 534-701

S. H. Kim

Department of Ophthalmic Optics, Kwangju Health College, Gwanju 506-701 (Received 20 January 2009)

We observed the surface morphology during epitaxial growth by glancing angle deposition with substrate rotation. Kinetic Monte Carlo simulations incorporating molecular dynamics simulations were used to consider dynamic effects, such as steering and screening effects. In the case of deposition with substrate rotation, we observed an increase in surface roughness and a steeper slope of the mound compared to growth at a fixed azimuthal angle. The periodic oscillation of the mound slope observed in deposition with substrate rotation originated from the azimuthal-angle dependence of the mound slope. We found that the growth morphology was mainly caused by the inhomogeneous deposition flux, induced by steering effects, on the top terrace and on the front facet of mound.

PACS numbers: 68.35.-p, 68.37.-d

Keywords: Steering effect, Thin film growth, KMC simulation

Ë à Ã Å P c ly ¢8 ý > H ¹ Å  Ö «Y c l; c 8 ý X ¢ U c lT c l V R ËX ê s

ß O

Ë à Ã Å P c ly ¢8 ý > H ¹ Å  Ö «Y c l; c 8 ý X ¢ U c lT c l V R ËX ê s

"

kU £ Ó



í{ © @ / < Æ § î ß  â F g < Æõ , Á ºî ß  534-701



» ç ¡g ` @

F

gÅ Ò Ð| @ / < Æ î ß  â F g < Æõ , F gÅ Ò 506-701 (2009¸  1 Z 4 20{ 9  ~ Ã Î6 £ §)

l

ó ø Í`  ¦ r  r v  9 d   >  l Ö  ¦# Q  y   ¸ Ð 7 £ x Ã Ìr (  `  ¦ M :_  ³ ð  t + þ A ¸\  ¦ Û ¼ß ¼o _ ç ´ òõ ü < Û ¼ w

# Qa A ´ òõ \  ¦  ¸¿ º  ¦ 9ô  Ç kinetic Monte Carlo r Ó ý tY Us   Ü ¼ Ð  Ð  ¤ . r  7 £ x Ã Ì_   â Ä º,  ¦& ñ  ) a

~

½

Ó0 Ay  \ " f_  7 £ x Ã Ì\  q K   } 9 l  7 £ x  9, + þ A$ í ÷ &  H   ü _  l Ö  ¦l  ¸   t   H  כ `  ¦  Ð  ¤ .

r  7 £ x Ã Ì\ " f  Ðs   H l Ö  ¦l  Å Òl & h Ü ¼ Ð     H l Ö  ¦l _    1 l x`  ¦ ^  ¦ Ã º e  % 3  ¦, s   כ  É r ~ ½ Ó0 Ay  

\

   É r l Ö  ¦l    o\  ¦ ì ø Í% ò ô  Ç  כ s  . s  Qô  Ç ³ ð  t + þ A_  s   H steering ´ òõ \  _ ô  Ç þ j © 8 £ x-_  Û

¼    ü _   â    _  q @ /g A& h    íl  7 £ x Ã Ì x 9  ¸\  l     H  כ `  ¦ S X   % i  .

PACS numbers: 68.35.-p, 68.37.-d

Keywords: Û ¼w # Qa A ´ òõ , ~ Ã Ì}   $ í  © , KMC r Ó ý tY Us  

I. " e Â ] Ø

þ

j  H [ þ t# Q ~ Ã Ì}   $ í  © \ " f ³ ð  _  + þ A © `  ¦ % ò  ¾ Ó`  ¦ z u 





H [ jÂ Ò& h ½ ¨ ¸" é ¶o \  @ /ô  Ç  ' ad  s  7 £ x  ¦ e    [1].

$ í

 ©   ª d  \  % ò  ¾ Ó`  ¦ p u   H כ ¹  [ þ t ×  æ  © @ /& h Ü ¼ Ð  ' ad   s

 \ O % 3 ~  7 £ x Ã Ì õ & ñ  ¸ Dijken 1 p x_  [2,3] steering ´ òõ \ 

@

/ô  Ç µ 1 Ï³ ð s Ê ê Á ºr ½ + É Ã º \ O   H כ ¹ è ×  æ_    Ð ³ ð  _

  } 9 l     ü _  + þ A © \  ß ¼>  % ò  ¾ Ó`  ¦ Å Ò  H כ ¹ è ×  æ 

   H  כ s  S X   ÷ &% 3  . 7 £ x Ã Ì " é ¶ ü <  Ð@ / " é ¶   s _ 



©

 ñ  6 x\  _ K  C & h s  6 f# Qt   H steering ´ òõ \  _ ô  Ç



íl  7 £ x Ã Ì x 9  ¸_  ì  r í\  q @ /g A$ í s  µ 1 ÏÒ q t  ¦ [3], s  כ s

 ³ ð  t + þ A_  s \  ¦ ë ß   H   H  כ s   Ð# &    [4,5].

ô



Ç¼ # Lu 1 p x\  _ K  l Ö  ¦# Q  y   ¸ Ð MBE $ í  © `  ¦ Ã º '



 # ,  Ð@ /\  ¦ r  r v   H  â Ä º   ü  É r  s `   Ø Ô> 

÷

&# Q 3 " é ¶& h    ¸ }  @ / + þ A$ í ÷ &  H  כ `  ¦ [6] z ´+ « >Ü ¼



Ð  Ð% i  . s  Qô  Ç  } 9 # Q  ³ ð  s    ¸ }  @ /\  ¦ + þ A$ í

 )

a   ü _  `  (shadowing) ´ òõ \  _ ô  Ç  כ Ü ¼ Ð [ O " î 



¦ e  Ü ¼  [6,7] Ô  ¦¢ - a   9, Cu(001) ³ ð  \  Cu\  ¦ 7 £ x Ã Ì

  H  â Ä º steering ´ òõ  t   ¦ 9 ½ + É M : ¸ ú  [ O " î | ¨ c Ã º e



6 £ §s   Ð# &    [5].

 :

r   ½ ¨  H r  7 £ x Ã Ìs   ~ ½ Ó0 Ay  `  ¦    â  9 7 £ x Ã Ì 





H  â Ä º     H ³ ð  t + þ A_  s \  ¦ `  ´ òõ   H Ó ü t : r steering ´ òõ  t   ¦ 9ô  Ç Kinetic Monte Carlo (KMC) r

Ó ý tY Us   Ü ¼ Ð [ O " î  ¦  ô  Ç . Cu(001) ³ ð  0 A\ 

Cu\  ¦ 7 £ x Ã Ìr v   H 1 l x7 á x $ í  © \  ô  Ç& ñ #   ¦ 9ô  Ç . 7 £ x

 Ã

Ì ~ ½ Ó0 Ay  \      } 9 l     ü _  l Ö  ¦l  s  

  9, l ó ø Í`  ¦ r  r v   " f 7 £ x Ã Ì   H  â Ä º, ³ ð   É r  Ð

 d   >   } 9 # Qt   H  כ `  ¦  Ð  ¤ . s  Qô  Ç ³ ð  t + þ A_ 

s   H steering ´ òõ \  _ ô  Ç q @ /g A& h    íl  7 £ x Ã Ì x 9  ¸

\

 l     H  כ `  ¦ S X   ½ + É  כ s  .

II. S ö o Ú7 _T  Ó Å U ê s0 n É

7

£

x Ã Ì õ & ñ s    H $ í  ©  1 l x% i  < Æ`  ¦  í < Êr v l  0 AK  KMC r Ó ý tY Us   \  molecular dynamics (MD) r Ó ý tY Us 





`  ¦   ½ + Ë % i  . 7 £ x Ã Ì ) a " é ¶ _  S X í ß `  ¦  í < Êô  Ç $ í  © õ 

&

Ë à Ã Å P c ly ¢8 ý > H ¹ Å Ö «Y c l; c 8 ý X ¢ U c lT c l V R ËX ê s

Ë à Ã Å P c ly ¢8 ý > H ¹ Å Ö «Y c l; c 8 ý X ¢ U c lT c l V R ËX ê s

kU £ Ó

í{ © @ / < Æ § î ß â F g < Æõ , Á ºî ß 534-701

» ç ¡g ` @

gÅ Ò Ð| @ / < Æ î ß â F g < Æõ , F gÅ Ò 506-701 (2009¸ 1 Z 4 20{ 9 ~ Ã Î6 £ §)

ó ø Í` ¦ r r v 9 d > l Ö ¦# Q y ¸ Ð 7 £ x Ã Ìr ( ` ¦ M :_ ³ ð t + þ A ¸\ ¦ Û ¼ß ¼o _ ç ´ òõ ü < Û ¼ w

# Qa A ´ òõ \ ¦ ¸¿ º ¦ 9ô Ç kinetic Monte Carlo r Ó ý tY Us Ü ¼ Ð Ð ¤ . r 7 £ x Ã Ì_ â Ä º, ¦& ñ ) a

Ó0 Ay \ " f_ 7 £ x Ã Ì\ q K } 9 l 7 £ x 9, + þ A$ í ÷ & H ü _ l Ö ¦l ¸ t H כ ` ¦ Ð ¤ .

r 7 £ x Ã Ì\ " f Ðs H l Ö ¦l Å Òl & h Ü ¼ Ð H l Ö ¦l _ 1 l x` ¦ ^ ¦ Ã º e % 3 ¦, s כ É r ~ ½ Ó0 Ay

É r l Ö ¦l o\ ¦ ì ø Í% ò ô Ç כ s . s Qô Ç ³ ð t + þ A_ s H steering ´ òõ \ _ ô Ç þ j © 8 £ x-_ Û

¼ ü _ â _ q @ /g A& h íl 7 £ x Ã Ì x 9 ¸\ l H כ ` ¦ S X % i .

Keywords: Û ¼w # Qa A ´ òõ , ~ Ã Ì} $ í © , KMC r Ó ý tY Us

j H [ þ t# Q ~ Ã Ì} $ í © \ " f ³ ð _ + þ A © ` ¦ % ò ¾ Ó` ¦ z u

H [ jÂ Ò& h ½ ¨ ¸" é ¶o \ @ /ô Ç ' ad s 7 £ x ¦ e [1].

© ª d \ % ò ¾ Ó` ¦ p u H כ ¹ [ þ t × æ © @ /& h Ü ¼ Ð ' ad s

\ O % 3 ~ 7 £ x Ã Ì õ & ñ ¸ Dijken 1 p x_ [2,3] steering ´ òõ \

/ô Ç µ 1 Ï³ ð s Ê ê Á ºr ½ + É Ã º \ O H כ ¹ è × æ_ Ð ³ ð _

} 9 l ü _ + þ A © \ ß ¼> % ò ¾ Ó` ¦ Å Ò H כ ¹ è × æ

H כ s S X ÷ &% 3 . 7 £ x Ã Ì " é ¶ ü < Ð@ / " é ¶ s _

ñ 6 x\ _ K C & h s 6 f# Qt H steering ´ òõ \ _ ô Ç

íl 7 £ x Ã Ì x 9 ¸_ ì r í\ q @ /g A$ í s µ 1 ÏÒ q t ¦ [3], s כ s

³ ð t + þ A_ s \ ¦ ë ß H H כ s Ð# & [4,5].

Ç¼ # Lu 1 p x\ _ K l Ö ¦# Q y ¸ Ð MBE $ í © ` ¦ Ã º '

# , Ð@ /\ ¦ r r v H â Ä º ü É r s ` Ø Ô>

&# Q 3 " é ¶& h ¸ } @ / + þ A$ í ÷ & H כ ` ¦ [6] z ´+ « >Ü ¼

Ð Ð% i . s Qô Ç } 9 # Q ³ ð s ¸ } @ /\ ¦ + þ A$ í

)

a ü _ ` (shadowing) ´ òõ \ _ ô Ç כ Ü ¼ Ð [ O " î

¦ e Ü ¼ [6,7] Ô ¦¢ - a 9, Cu(001) ³ ð \ Cu\ ¦ 7 £ x Ã Ì

H â Ä º steering ´ òõ t ¦ 9 ½ + É M : ¸ ú [ O " î | ¨ c Ã º e

6 £ §s Ð# & [5].

:

r ½ ¨ H r 7 £ x Ã Ìs ~ ½ Ó0 Ay ` ¦ â 9 7 £ x Ã Ì

H â Ä º H ³ ð t + þ A_ s \ ¦ ` ´ òõ H Ó ü t : r steering ´ òõ t ¦ 9ô Ç Kinetic Monte Carlo (KMC) r

Ó ý tY Us Ü ¼ Ð [ O " î ¦ ô Ç . Cu(001) ³ ð 0 A\

Cu\ ¦ 7 £ x Ã Ìr v H 1 l x7 á x $ í © \ ô Ç& ñ # ¦ 9ô Ç . 7 £ x

Ã

Ì ~ ½ Ó0 Ay \ } 9 l ü _ l Ö ¦l s

9, l ó ø Í` ¦ r r v " f 7 £ x Ã Ì H â Ä º, ³ ð É r Ð

d > } 9 # Qt H כ ` ¦ Ð ¤ . s Qô Ç ³ ð t + þ A_

s H steering ´ òõ \ _ ô Ç q @ /g A& h íl 7 £ x Ã Ì x 9 ¸

l H כ ` ¦ S X ½ + É כ s .

II. S ö o Ú7 _T Ó Å U ê s0 n É

x Ã Ì õ & ñ s H $ í © 1 l x% i < Æ` ¦ í < Êr v l 0 AK KMC r Ó ý tY Us \ molecular dynamics (MD) r Ó ý tY Us

` ¦ ½ + Ë % i . 7 £ x Ã Ì ) a " é ¶ _ S X í ß ` ¦ í < Êô Ç $ í © õ

É r KMC r Ó ý tY Us ` ¦ : x # s À Ò# Q& ¦, 7 £ x Ã Ì õ & ñ

É

r MD\ ¦ : x # ½ ¨ & ³÷ &% 3 . MD r Ó ý tY Us \ " f 6 x ô

Ç Ã º[ þ t É r 6 £ §õ ° ú . ³ ð " é ¶ ü < { 9 " é ¶ s _ (

J $ [ > É r U (r) = 4D[(σ/r)

]õ ° ú É r Lennard Jones + þ AI \ ¦ 6 x % i ¦, # l " f D = 0.4093 eV, σ = 2.338 ˚ A, [8]s . MD r Ó ý tY Us > í ß \ " f 7 £ x Ã Ì " é ¶ H

© Z } É r 7 £ x Ã Ì8 £ x Ð 11 a

Z }s \ " f Å Ò# Q F Gy (θ)õ ~ ½ Ó0 Ay (φ)Ü ¼ Ð { 9 ô Ç . 7 £ x Ã Ì " é ¶ ³ ð _ " é ¶

ÐÂ Ò' 0.9 a

o s Ð H] X > ÷ & ' § 4 ` ¦

Î ÷ &4 A Ð f 0 Au \ " f © î r 0 Au

" é ¶ \ ¦ ` ¦ 9Z ~ H כ Ü ¼ Ð MD > í ß É r = å Qè ß . MD r Ó

tY Us \ " f 7 £ x Ã Ì " é ¶ _ ³ ð \ ] X H½ + É M : s p 7 £ x Ã Ì

)

a ¸ H " é ¶ [ þ t` ¦ ¦& ñ r { 9 7 á x_ one atom MD > í ß s

.

MD > í ß \ " f % 3 # Q þ j7 á x 0 Au \ ¦ KMC r Ó ý tY Us s

) 6 x H ¦& ñ ) a 0 Au Ð 7 Å Ò H õ & ñ s 9 כ ¹

9, : r ½ ¨\ " f H MD > í ß \ " f % 3 # Q 0 Au ü < x-y

© © î r 7 £ x Ã Ì 0 p xô Ç 0 Au \ ¦ 7 £ x Ã Ì 0 Au

Ð Z ~ ¤ . r Ó ý tY Us \ " f step 0 A\ B j² ú 2 ; 0 Au _

7 £ x Ã Ì É r ) 6 x t · ú § ¤ . " f MD > í ß \ " f_ þ j 7

x 0 Au B j² ú 2 ; 0 Au H~ ½ Ó{ 9 M : ] X ì ø Í É r © 5 p x â ì2 £ §s ÷ &

9, Qt ì ø Í É r y © â ì2 £ §s ) a [9]. ô Ç 0 Au \

¶ \ ¦ ` ¦ 9Z ~Ü ¼ " fÂ Ò' s Ê ê 6 £ § 7 £ x Ã Ì | s z ´'

c M : t H KMC r Ó ý tY Us \ _ ô Ç 7 £ x Ã Ì " é ¶ _ S X í ß s

z ´' ) a .

ð \ " f_ " é ¶ _ S X í ß É r §¨ 8 S X í ß ` ¦ ) 6 x t · ú §

¦, fcc + þ AI _ 0 Au Ð s 1 l xë ß ` ¦ ) 6 xô Ç . 0

Au H ¦& ñ ÷ &% 3 ¦, H 400 × 400 ß ¼l _ fcc(001)

ð s 608 £ x Z ~# e H + þ AI s . _ Û ¼ 0 A\ " f_ S X í ß +

AI H Fig.1 insetõ ° ú s 5> h_ ] X " é ¶ \ ¦ ¦ 9Ù þ ¡ ¦,

0 p xô Ç 2

7 á x_ S X í ß © # 4 ° ú כ × æ\ " f ° ú כs q 5 p wô Ç כ ` ¦ Ó