°
Ç Ö ¨ £ ; ¹ ÅP à Ã Å «4 ¼Y c lc Ü R ? _ß Ã Å7 _ ü m Ç à Ã Å « Ó ÞM 8 ý m ½
ý
¡ û B¬ £ ∗ · » . > ?
ô
Dz D G ³ ðï r õ < Æ ½ ¨" é ¶ | Ä Ìl Õ ü t ½ ¨Â Ò, @ / 305-600 (2007¸ 1 Z 4 31{ 9 ~ à Î6 £ §)
¿
º > h_ s : r > s t ü < ô Ç > h_ ï ß À Ól ^ ì r$ 3 l Â Ò Ã Ì ) a Û ¼_ Y UÛ ¼ Û ¼ 9 304 / B N6 x l ? /\ > r F
H H
2, C, CH
4, H
2O, CO, CO
2_ Â Òì r · ú ` ¦ ª ô Ç ¸| \ " f 8 £ ¤& ñ % i . Õ ª õ s : r > s t
\
¦ & » 1 ÏÛ ¼ r ( ` ¦ M : ~ ½ ÓØ ¦ ) a l ^ H Å Ò Ð H
2ü < H
2O s % 3 Ü ¼ 9 > s t \ Õ ª 7 á x À Óü < ª s
² ú
| Ã Û . þ j@ / 235
◦C t / B N6 x l \ ¦ Ï ã L H õ & ñ \ " f ï ß À ÓÛ ¼\ ¦ ¸ ô Ç õ Ï ã L H 1 l x î ß \ H H
2O ü <
CO ´ ú §s ~ ½ ÓØ ¦ ÷ &% 3 Ü ¼ Ï ã L l = å Q è ß Ê ê 627 r ç ß â õ ô Ç + ' © : r \ " f_ l ^ H 97 % s © s H
2e
`
¦ S X ½ + É Ã º e % 3 .
PACS numbers: 07.03.K, 07.03.D
Keywords: s : r > s t , ï ß À Ól ^ ì r$ 3 l , » 1 Ïl ^ , / B N, Ï ã L l
I. " e  ] Ø
þ
j H \ H ì ø Í ¸^ / B N& ñ s n Û ¼e ¦ Y Us ] j ¸ 1 p x õ ° ú É r ' õ
A& ñ / B N s 9 כ ¹ô Ç / B M \ " f H / B N © u ? /_ · ú (total pressure) Ð l ^ ¸$ í õ ª ` ¦ ½ ¨Z > H Â Òì r · ú (partial pressure) 8 £ ¤& ñ \ 8 ´ ú § É r ' a d ` ¦ t l r % i . @ / Â
Òì r _ ' é ß / B N/ B N& ñ É r ¦ / B N` ¦ 9 כ ¹ Ð Ù ¼ Ð © u
\
H þ j èô Ç ô Ç> h s © _ ¦ / B N 8 £ ¤& ñ 6 x \ P 6 £ §F G o
/ B N > s t (hot cathode ionization gauge) Â Ò Ã Ì÷ &# Q e
. Õ ª Q \ P 6 £ §F G o / B N > s t (s s : r > s t
¦ < Ê) H 9 F ' pà Ô\ ¦ 1000
◦C s © \ P # \ P
\
¦ Ò q t$ í l ¸ ¦ Ø æ Z O (electron bombardment method) Ü ¼ Ð > s t \ ¦ » 1 ÏÛ ¼ (outgassing) ½ + É M : Õ ªo
×
¼\ 150 ∼ 200 V ¦ · ú ` ¦ # : r ¸\ ¦ Ã º ;
◦C t
` ¦ o Ù ¼ Ð > s t ^ \ " f ~ ½ ÓØ ¦ ÷ & H l ^ _ 7 á x À Óü <
ª s ª Ù ¼ Ð [1, 2] â Ä º\ " f H # Q " s : r > s t
H : £ ¤ Ã ºô Ç / B N& ñ \ 6 x H כ s ] jô Ç& h { 9 Ã º ¸ e .
" f / B N/ B N& ñ × æ _ ï ß À Ól ^ ë H ] j\ ¦ \ · ú ¦ @ /
%
© u _ ¸% i ` ¦ × ¦ # ] j¾ ¡ § _ Ò q tí ß $ í ` ¦ Z } s H ´ ò õ
¸ l @ /½ + É Ã º e Ü ¼Ù ¼ Ð ' é ß / B N í ß \ O _ Ò q tí ß $ í õ Ã º Ö
¦ ¾ Ó © \ l # ¦ s ½ ¨\ ¦ Ã º' % i .
: r 7 Hë H \ " f H / B N6 x l _ Ï ã L l , > s t _ on/off, > s
t _ » 1 ÏÛ ¼ 1 p x # Q É r ¸| \ " f / B N6 x l ? /\ e
H > r F H ï ß À Ól ^ _ 7 á x À Óü < ª ` ¦ & ñ | ¾ Ó& h Ü ¼ Ð 8 £ ¤& ñ
l 0 A # Û ¼_ Y UÛ ¼ Û ¼ 9 304 Ð ] j ) a / B N6 x l \
∗
E-mail: [email protected]
ô
Ç > h_ ï ß À Ól ^ ì r$ 3 l (residual gas analyzer, RGA)ü <
]
j ¸ r É r ¿ º > h_ s : r > s t \ ¦ Â Ò Ã Ì ¦ ¸|
\
É r 8 £ ¤& ñ õ \ ¦ Ð ¦ # / B N l Õ ü t [ þ t s y y É r
^ / B N& ñ \ " f ï ß À ÓÛ ¼_ 7 á x À Óü < ª ` ¦ \ V8 £ ¤ H X < ¸¹ ¡ § s
÷ & ¸2 ¤ % i .
II. ÷ m Ç] M öX ê sV õ m Í U ê s0 n É
Fig. 1 É r : x& h Bayard-Alpert s : r > s t (BA s
: r > s t )_ ½ ¨ ¸ (a)ü < 9 F ' pà Ô ¦ : r Ü ¼ Ð \ P ) a s
: r > s t _ (b)s . s : r > s t \ ¦ s 6 x ô Ç · ú § 4 8 £ ¤
&
ñ _ " é ¶ o H \ P ) a 9 F ' pà Ô\ " f \ P ~ ½ ÓØ ¦ H X
< s \ P / B N × æ \ e H ì r ü < Ø æ[ t # Ò q t$ í
)
a ª s : r` ¦ 7 £ x; ¤ # Õ ª ª s : r _ Ã º\ ¦ · ú § 4 Ü ¼ Ð ¨ 8
H ~ ½ ÓZ O s . " f Õ ªa Ë > (b)\ " f% ! 3 ¦ : r Ü ¼ Ð \ P
)
a 9 F ' pà Ô Å Ò F « Ñ[ þ t _ : r ¸\ ¦ Z } # » 1 ÏÛ ¼_ " é ¶
s ÷ &Ù ¼ Ð s \ ¦ × ¦ s l 0 Aô Ç ½ ¨ ¸ ª > ' ÷ &
¦ e . { 9 ì ø Í& h Ü ¼ Ð s : r > s t _ · ú § 4 8 £ ¤& ñ # 3 0 A H Fig.
(a) _ 9 F ' pà Ô (filament, F), Õ ªo × ¼ (grid, G), Ã º| 9 l (collector, C) _ l < Æ& h ½ ¨ ¸ x 9 C u \ ² ú
.
Fig. 2 _ © u H : r z ´+ « >\ " f l ^ · ú § 4 ½ ¨C \ ¦ × ¦ s l
0 A # © 6 x l ¸o x Û ¼ (orifice) Ð ì r ½ + É ) a & ñ · ú Z O
(constant pressure method) ¦ / B N ³ ðï r l [3]ü < ° ú É r
½
¨ ¸s . s © u H / B N6 x l (vacuum chamber), ¦ /
B
N C l © u (pumping system), ] j ¸ r ü < ª s
-307-
É
r ¿ º > h_ s : r > s t , ô Ç > h_ ï ß À Ól ^ ì r$ 3 l 1 p x Ü ¼ Ð
½
¨$ í ÷ &# Q e . / B N6 x l H Û ¼_ Y UÛ ¼ Û ¼ 9 304 Ð ] j
÷ &% 3 Ü ¼ 9 ¸o x Û ¼\ ¦ × æd Ü ¼ Ð © y 6 x l _ t 2 £ § õ Z } s H y y 30 cmü < 50 cms . ¦ / B N6 x C l * 3 á
Ô Ð H | 9 è\ @ /ô Ç C l 5 Å q ¸ 500 L/s ' Ðì r * 3 á
Ô (turbomolecular pump)\ ¦ 6 x % i Ü ¼ 9 $ / B N C Ê ê
*
3 á Ô Ð H C l 5 Å q ¸ 200 L/min. Ð' o * 3 á Ô (rotary vane pump) 6 x ÷ &% 3 . 6 x l \ ¦ Ï ã L H X < 6 x ) a y ' [
þ
t É r 6 x l _ ü @# 4 \ Y J ¦À Ò Â Ò Ã Ì # Ï ã L H : r ¸ ç H{ 9
¸2 ¤ % i Ü ¼ 9 : r ¸ H þ j@ / 350
◦C t ` ¦w n = Ã º e ¸ 2
¤ ] j ÷ &% 3 .
¿
º > h_ s : r > s t H Granville-Phillips r _ Stabil-ion > s t [4]ü < Ulvac r _ AxTran > s t [5, 6] 6 x ÷ &% 3 Ü ¼ 9 ½ ¨ì r` ¦ ~ 1 > l 0 A # y y IG
1õ IG
2 Ð ³ ðr % i . s s : r > s t [ þ t É r 8 £ ¤& ñ # 3 0 A 1 × 10
−11∼ 1 × 10
−2Pa s s 9 & ³F © ¾ ¡ § o ) a o /
B
N > s t × æ \ " f H q §& h Ô ¦S X ¸ (uncertainty)
"
f ¦ / B N _ & ñ S X ô Ç 8 £ ¤& ñ \ © & h ½ + Ëô Ç כ Ü ¼ Ð · ú 94 R e
. Table 1 É r ¿ º > h_ s : r > s t ª ` ¦ כ ¹ ô Ç כ Ü ¼
Ð ü @ ' a É r ¸¿ º F K5 Å q Ü ¼ Ð / B N ÷ &# Q e ¦ 9 F ' pà Ô F « Ñ
H IG
1 É r ) í Û ¼J $ s ¦ IG
2 H Ir/Y
2O
3s . ¢ ¸ô Ç ª _ I
e H 9 F ' pà Ô À Ó Ð IG
1 É r 4 mA s ¦ IG
2 H 1 mA s 9
»
1 Ïl ^ ~ ½ ÓZ O É r ¿ º> h Ø æ Z O (electron bombard- ment method)` ¦ 6 x % i . ª \ H IG
1õ IG
2_ Ô ¦ S X
¸ (uncertainty) y y 10 %ü < 15 % Ð " î r ÷ &# Q e
. Â Òì r · ú 8 £ ¤& ñ \ 6 x ) a ï ß À Ól ^ ì r$ 3 l H Stanford Research System r _ RGA200 s % 3 Ü ¼ 9 \ -t
H 70 eV, 9 F ' pà Ô À Ó H 1 mA Ð ¦& ñ ÷ &% 3 .
: r ½ ¨_ 3 l q& h s ª ô Ç ¨ 8 â ¸| \ " f Û ¼_ Y UÛ ¼ Û ¼
9
304 / B N6 x l ? /Â Ò\ > r F H ï ß À Ól ^ _ ¸$ í õ ª
`
¦ 8 £ ¤& ñ l 0 Aô Ç כ s Ù ¼ Ð " f Ð É r ¸| \ " f_ z ´+ « >
õ É r õ \ É r % ò ¾ Ó` ¦ p u t · ú § ô Ç .
" f IG
1õ IG
2_ > s t on/off x 9 » 1 ÏÛ ¼ on/off\ _ ô
Ç Â Òì r · ú 8 £ ¤& ñ õ 6 x l _ Ï ã L l \ É r : £ ¤$ í z ´+ « >` ¦ " f Ð ç
ß [ O s \ O ¸2 ¤ & ñ K í H " fü < ] X \ Ã º' % i .
III. + s ÇÊ Ý õ m Í w ² o
Fig. 3 É r 6 x l _ · ú § 4 s ± ú É r 10
−7Pa \ " f > s t IG
1õ IG
2\ ¦ ( ` ¦ M :ü < , ` ¦ M : ~ ½ ÓØ ¦ ) a l ^ _ ª õ ¸$ í
`
¦ 8 £ ¤& ñ ô Ç כ s . # l \ " f 8 £ ¤& ñ ) a l ^ H H
2, C, CH
4, H
2O, CO, CO
2s % 3 Ü ¼ 9, : r z ´+ « >\ [ þ t # Ql
¸ õ s [ þ t l ^ _ ~ ½ ÓØ ¦ | ¾ Ós © ´ ú § ¤Ü ¼Ù ¼ Ð Â Òì r
· ú
Ø ¦ l ^ Ð & ñ % i . Fig. 3\ " f à º¨ î » ¡ ¤ É r e _ _
Fig. 1. Schematic diagram of hot cathode ionization gauge. (a) gauge geometry, G; grid, F; filament, C; col- lector (b) photo of ionization gauge.
Fig. 2. Schematic diagram of the experimental system.
IG; ionization gauge, RGA; residual gas analyzer, TMP;
turbomolecular pump, RP; rotary pump.
è
HF K Ü ¼ Ð " f Ð É r M :\ 8 £ ¤& ñ ô Ç IG
1õ IG
2_ z ´+ « > õ
Ð " f Ð ' a$ í É r ) \ O Ü ¼ 9 à ºf » ¡ ¤ É r l ^ Z > Ð : r Â Ò ì
r · ú s . > s t \ ¦ & l 6 x l _ þ j@ / ¸² ú / B N ¸ (ul- timate pressure) \ " f ï ß À Ól ^ H @ / Òì r H
2ü < H
2O s % 3 Ü
¼ 9 s © I \ " f IG
1> s t \ ¦ ( ` ¦ M : Ð l ^ H Å Ò
Ð H
2, H
2O, CO s % 3 . s [ þ t l ^ _ · ú § 4 É r > s t \ ¦
í H ç ß / å L y ` ¦ y ¤ " f" fy y è # 10ì r s
â
õ Ù þ ¡` ¦ M : H H
2, H
2O, CO í H Ü ¼ Ð · ú § 4 s Z } ¤ . IG
2>
s t \ ¦ % 6 £ § ( ` ¦ M : ¸ ~ ½ ÓØ ¦ ) a l ^ H Å Ò Ð H
2, H
2O
Table 1. Detail specifications of the two hot cathode ionization gauges. The term EB denotes electron bombardment degassing.
Gauge Measurement Filament Ie Type of Degas No. of
No. pressure (Pa) Envelope
material (mA) degas power pre-degas
IG
11 × 10
−9−7 × 10
−2Metal W 4 EB 20 W unknown
IG
25 × 10
−11−1 × 10
−2Metal Ir/Y
2O
31 EB - unknown
Fig. 3. The partial pressures of H
2, C, CH
4, H
2O, CO, and CO
2of the Stabil-ion gauge (IG
1) and AxTran gauge (IG
2) with repeatedly gauge on and off.
Fig. 4. The partial pressures of H
2, C, CH
4, H
2O, CO, and CO
2of the Stabil-ion gauge (IG
1) and AxTran gauge (IG
2) with repeatedly degas on and off.
x 9
COs % 3 Ü ¼ 9 : £ ¤ y H
2ü < CO_ · ú § 4 s / å L > 7 £ x
% i / å L > y èô Ç + ' r " f" fy y è % i Ü ¼
H
2O _ · ú § 4 y è H @ /^ Ð " f" fy s À Ò# Q & .
Fig. 4 H Fig. 3 õ ° ú É r ~ ½ ÓZ O Ü ¼ Ð IG
1õ IG
2\ ¦ » 1 Ïl ^ (outgassing) r ( ` ¦ M :ü < × æ t % i ` ¦ M : è ß l ^ _ Â
Òì r · ú ` ¦ 8 £ ¤& ñ ô Ç כ s . IG
1_ » 1 Ïl ^ Û ¼ À » u \ ¦ ( ` ¦ M
: í H ç ß & h Ü ¼ Ð ¸ H l ^ _ · ú § 4 s / å L > 7 £ x % i
Fig. 5. The partial pressures changes of gases according to status of the chamber.
Ü
¼ 9 : £ ¤ y H
2ü < CO_ · ú § 4 s © Z } ¤ . Õ ª Q H
2O ü
< CO
2 H · ú § 4 _ 7 £ x ü < y è 5 Å q ¸ É r l ^ \ q K B
Ä º Ö ¼§ 4 . s © I \ " f » 1 Ïl ^ Û ¼ À » u \ ¦ , ` ¦ M : l ^
· ú
§ 4 s / å L > y è % i Ü ¼ 9 : £ ¤ y H
2_ y è| ¾ Ós s `
´ ú § ¤ ¦, s © I \ ¦ > 5 Å q Ä »t Ù þ ¡` ¦ M : 6 x l _ · ú § 4 É r @ / Â
Òì r H
2O ü < H
2s % 3 Ü ¼ H
2O @ /Â Òì r` ¦ t % i .
" f s > s t H Ï ã L l õ & ñ \ " f à ºì r s Ø æì r > ] j
÷ &t · ú § ¦ Õ ªM : t à ºì r` ¦ ´ ú §s í < Ê ¦ e : r
¸ ` ¦ y \ ~ ½ ÓØ ¦ ) a כ Ü ¼ Ð Ð . IG
2\ ¦ » 1 Ïl
^
r ( ` ¦ M : ¸ ´ ú § É r l ^ [ þ t s ~ ½ ÓØ ¦ ÷ &% 3 Ü ¼ 9 ª s ´ ú § É r í
H " f H H
2, CO, CO
2, CH
4, H
2O Õ ªo ¦ Cs % 3 . s [ þ t
@
/Â Òì r _ l ^ H Ð y è l r % i Ü ¼ H
2O ë ß É r
"
f" fy 7 £ x H â ¾ Ó` ¦ Ð% i . 5ì r s â õ ô Ç + ' » 1 Ï l
^ \ ¦ × æ t % i ` ¦ M : ¸ H l ^ _ · ú § 4 s / å L > y
è % i Ü ¼ H
2O H ¸y 9 " f" fy y è H â ¾ Ó` ¦ Ð
%
i . » 1 Ïl ^ \ ¦ ¢ - a y × æ t ¦ 7ì r s t z ¤` ¦ M : 6 x l
\ z É r l ^ _ @ /Â Òì r É r H
2O ü < H
2s % 3 Ü ¼ 9 É r l
^
_ · ú § 4 É r 2 × 10
−7Pa s Ð © @ /& h Ü ¼ Ð ± ú ¤ . ¿ º
>
s t _ z ´+ « > õ \ ¦ ° ú s Z ~ ¦ q § l 0 AK " f H z ´ +
«
>¨ 8 â õ ¸| ¸ ° ú Ù ¼ Ð IG
1_ z ´+ « >s = å Q è ß + '
>
s t IG
2\ @ /ô Ç z ´+ « >` ¦ 0 A # IG
1` ¦ ¢ - a y ã ¼ ¦ Ï ã L l
\ ¦ 150
◦C Ð 24r ç ß Ã º' ô Ç Ê ê 72r ç ß 1 l x î ß r 6 x l
\
¦ Ø æì r > C l # ¸² ú / B N ¸ IG
1` ¦ z ´+ « > l
õ
° ú É r 10
−7Pa s ÷ & ¸2 ¤ ô Ç + ' 6 £ § z ´+ « >` ¦ > 5 Å q % i
.
Fig. 5 H IG
1x 9 IG
2_ # Q ¸| , Ï ã L l : r ¸ 1 p x ª ô
Ç ¨ 8 â \ " f / B N6 x l _ · ú õ H
2, C, CH
4, H
2O, CO, CO
2l ^  Òì r · ú ` ¦ 8 £ ¤& ñ # Õ ª 2 ; כ s . # l \ " f à º
¨ î
» ¡ ¤ É r Table 2 \ · p כ õ ° ú s / B N6 x l _ ª ô Ç
¨ 8
â ¸| [ þ t s ¦ Ã ºf » ¡ ¤ É r y y É r ¸| \ " f : r l ^ _
· ú § 4 s . s p ¸ ú · ú 9 X < Ð Û ¼_ Y UÛ ¼ Û ¼ 9 /
B
N6 x l \ ¦ Ï ã L l \ H H
2ü < H
2O Å Ò ) a ï ß À Ól ^ s % 3 Ü
¼ Ï ã L l Ê ê\ H H
2O H _ ] j ÷ & ¦ H
2ë ß Å Ò Ð z
H H כ ` ¦ ~ 1 > S X ½ + É Ã º e % 3 . Õ ª Q H
2Ï ã L l õ
& ñ \ " f ç ß m 7 £ x H â ¾ Ó` ¦ Ð% i H X <, s s Ä » H Ï
ã
L l õ & ñ \ " f Û ¼_ Y UÛ ¼ Û ¼ 9 / B N6 x l s : r > s t 1
p
x _ F « Ñ\ " f b # Q4 R : r H
2¸ ú C l ÷ &t · ú § ¦ ï ß À
Ól ^ Ð z e l M :ë H s . > s t IG
1õ IG
2\ ¦ ( ` ¦ M
: ¸ 6 x l \ H H
2Å Ò Ð ´ ú § ¤Ü ¼ > s t _ » 1 ÏÛ ¼\ ¦ (
` ¦ M : H H
2s ü @\ CO ¸ ´ ú §s Ø ¦ ÷ &% 3 . @ /^ Ð > s
t » 1 ÏÛ ¼\ ¦ ( ` ¦ M : IG
1\ _ ~ ½ ÓØ ¦ ) a l ^ _ ª s IG
2 Ð ´ ú § ¤ . s _ © H s Ä » H Table 1 _ ª \
"
f ^ ¦ Ã º e 1 p w s IG
1_ 9 F ' pà Ô À Ó 4 mA Ð IG
2_ 1 mA Ð s ` Z } l M :ë H s l ¸ ¦ > s t ] j \
6 x ) a F « Ñ : £ ¤$ í M :ë H{ 9 Ã º ¸ e Ü ¼ s \ ¦ " î S X > ½ ¨ ì
r t H 3 l wÙ þ ¡ . Ï ã L H : r ¸\ ¦ 126
◦C t ` ¦§ 4 ` ¦ M : H H
2O · ú § 4 s : r ¸ © 5 p x \ q Y VK " f 7 £ x % i Ü ¼ 9, : r ¸
\
¦ 235
◦C t ` ¦§ 4 ` ¦ M : H
2 H > 5 Å q 7 £ x % i Ü ¼ H
2O
H & h y è % i . Ï ã L l \ ¦ u ¦ © : r \ " f / B N6 x l
\
z e H l ^ H H
2@ /Â Òì r s ¦ CO ¸ { 9 Â Ò z e
% 3 .
Fig. 6 É r Fig. 5 ü < ° ú É r ¸| \ " f_ H
2, C, CH
4, H
2O, CO, CO
2Â Òì r · ú ` ¦ Ñ þ ì rÖ ¦ Ð ³ ðr % i . > s t \ ¦ & l
íl © I \ " f H H
2O 54 % Ð © ´ ú §s > r F
%
i Ü ¼ > s t IG
1` ¦ ( ` ¦ M : H H
2Â Òì r · ú s 71 % Ð 7 £ x
% i ¦ IG
1` ¦ r , ` ¦ M : H H
2O r 78 % Ð 7 £ x
% i . s s Ä » H > s t \ ¦ ( ` ¦ M : ~ ½ ÓØ ¦ ) a { 9 Â Ò H
2O
C l ÷ &t · ú § ¦ 6 x l ³ ð \ f ¨ à Ì÷ &% 3 l M :ë H{ 9 כ s
. > s t IG
2\ ¦ & » 1 ÏÛ ¼ r ( ` ¦ M : H H
275
% t 7 £ x Ù þ ¡Ü ¼ 9, IG
2\ ¦ , ` ¦ M : H H
2O 78 % t 7
£
x H כ ` ¦ · ú Ã º e % 3 H X < s s Ä » ¸ IG
1_ â Ä ºü <
ð ø Ít Ð 6 x l ? /Â Ò ³ ð \ f ¨ Ã Ì ) a { 9 Â Ò H
2O C l
÷
&t · ú § ¤l M :ë H{ 9 כ Ü ¼ Ð ó ø Íé ß ) a . s õ \ ¦ Ð s
: r > s t \ f ¨ Ã Ì ) a ¸% i Ó ü t` ¦ ] j l 0 A # » 1 ÏÛ ¼ r v
6 x l _ H
2O Â Òì r · ú ` ¦ 7 £ x r v H כ ¹ s ÷ &Ù ¼ Ð
6 x H > s t ^ _ Ï ã L l \ _ ô Ç » 1 ÏÛ ¼\ ¦ Ø æ ì
r y K / B N& ñ ? /_ ï ß À ÓÛ ¼ ª ` ¦ × ¦{ 9 Ã º e Ü ¼Ù ¼ Ð Å Ò _
K ½ + É כ Ü ¼ Ð ó ø Íé ß ) a . ² D G IG
2_ » 1 ÏÛ ¼ Ê ê 7ì r s
Table 2. Details of the chamber status of the ultrahigh vacuum chamber.
Number System status References Ultimate pressure
1 before bake-out
2 Gauge on
3 After 5 min. with gauge on 4 First degas on
5 40 second after degas off IG
16 2 min. after degas on 7 2 min. after degas off 8 10 min. after degas off
Waited to get ultimate
9 pressure again Pumping again
10 Gauge on
11 After 5 min. with gauge on 12 First degas on
13 40 second after first degas off IG
214 2 min. after degas on 15 7 min. after degas off 16 1 hour after bake-out (50
◦C) 17 168 min. after bake-out (100
◦C) 18 394 hours after bake-out (126
◦C)
19 508 hours after bake-out (235
◦C) bake-out 20 531 hours after bake-out (110
◦C)
21 577 hours after bake-out (22
◦C) 22 627 hours after bake-out (22
◦C)
â
õ Ù þ ¡` ¦ M : 6 x l _ l ^ Â Òì r · ú É r H
2, C, CH
4, H
2O, CO, CO
2\ @ /K y y 63.6 %, 2.4 %, 5.0 %, 7.4 %, 15.
6 %, Õ ªo ¦ 6.0 %e ` ¦ · ú Ã º e % 3 . ¸ ú · ú 9 @ / Ð Û ¼ _
Y UÛ ¼ Û ¼ 9 / B N6 x l \ ¦ ± ú É r : r ¸ Ð ½ ¨Ö ¦ M : H H
2O
· ú
§ 4 s Z } ¤Ü ¼ 235
◦C Ð ½ ¨î r Ê ê r ç ß s Ø æì r > â õ
ô Ç + '\ H 6 x l ? /\ > r F H l ^ @ /Â Òì r H
2e ` ¦ S X
½ + É Ã º e % 3 .
IV. + s Ç Â ] Ø
]
j ¸ r ü < ª s É r ¿ º > h_ s : r > s t ü < ô Ç > h _
ï ß À Ól ^ ì r$ 3 l Â Ò Ã Ì ) a Û ¼_ Y UÛ ¼ Û ¼ 9 304 / B N 6
x l ? /\ > r F H H
2, C, CH
4, H
2O, CO, CO
2_ 7 á x À Ó ü
< ª ` ¦ ª ô Ç ¸| \ " f 8 £ ¤& ñ % i . Õ ª õ ª s
É
r s : r > s t \ ¦ & » 1 ÏÛ ¼ r ( ` ¦ M : ~ ½ ÓØ ¦ ) a l ^
H Å Ò Ð H
2ü < H
2O s % 3 Ü ¼ 9 > s t \ Õ ª 7 á x À Óü < ª
É
r ¸F Km s \ ¦ Ð% i . 9 F ' pà Ô F « Ñ IG
1 H ) í Û ¼ J $
s ¦ IG
2 H Ir/Y
2O
3 Ð " f Ð Ø Ô ¦ 9 F ' pà Ô À Ó ¸ y
y 4 mAü < 1 mA Ð ² ú | Ã ÛÜ ¼Ù ¼ Ð l ^ ~ ½ ÓØ ¦ | ¾ Ó ¸ ² ú | Ã ÛÜ ¼
Fig. 6. Relative partial pressures changes in percent ac- cording to status of the chamber.
Õ ª ª õ 7 á x À Ó\ ¦ & ñ | ¾ Ó& h Ü ¼ Ð z ´+ « >Ù þ ¡ H X < _ p e
¦ Ò q ty ô Ç . s õ H / B N& ñ \ & h ½ + Ëô Ç > s t × þ \
Ö
¸6 x s 0 p x 9, ô Ç © u \ # Q > s t \ ¦ Â Ò Ã Ì 1
l
x r \ & » 1 ÏÛ ¼ r v 6 x l ? /_ · ú § 4 ` ¦ ß ¼> Z } s
H כ ¹ s ÷ &Ù ¼ Ð Å Ò_ K ô Ç . ¢ ¸ô Ç Û ¼_ Y UÛ ¼ Û ¼
9
304 / B N6 x l \ ¦ þ j@ / 235
◦C t ` ¦ o " f ï ß À ÓÛ ¼
\
¦ ¸ ô Ç õ : r ¸\ ¦ ` ¦ o H 1 l x î ß \ H H
2O ´ ú §s ~ ½ Ó Ø
¦ ÷ &% 3 Ü ¼ Ï ã L l = å Q ¦ 627 r ç ß s â õ ô Ç + ' © : r \
"
f_ ï ß À ÓÛ ¼ H 97 % s © s H
2e ` ¦ · ú Ã º e % 3 .
: r& h Ü ¼ Ð / B N/ B N& ñ \ " f / B N6 x l _ F « Ñ Â Ò Ã Ì ) a s : r
>
s t _ Ã º ª s 6 x l ? /Â Ò\ ï ß > r H l ^ ¸$ í õ
Õ ª ª \ ß ¼> % ò ¾ Ó` ¦ p u Ù ¼ Ð 6 x _ t d s כ
¹½ ¨ ) a .
Y
c p w à U Ø ô
[1] S. K. Bae, S. Y. In, K. H. Chung, Y. B. Lee and Y.
H. Shin, Vacuum Engineering (The Korea Economy Daily, Seoul, 2000), p. 342
[2] A. Roth, Vacuum Technology, 2nd ed. (North- Holland, New York, 1982), p. 310
[3] F. Watanabe, Vacuum 52, 333 (1999).
[4] Granville-phillips Company, Stabil-ion vacuum mea- surement system, No. 370, 1 (1999).
[5] Ulvac Inc., Axtran ISX2 ultra-high vacuum gauge in- struction manual, No. 010912, 1 (2000).
[6] H. Akimichi, T. Arai and I. Arakawa, J. Vacuum 40, 20 (1997).
Residual Gases in a Stainless-steel Vacuum Chamber with Hot-cathode Ionization Gauges Attached
S. S. Hong
∗and J. T. Kim
Department of Advanced Technology, Korea Research Institute of Standards and Science, Daejeon 305-600 (Received 31 January 2007)
The partial pressures of H
2, C, CH
4, H
2O, CO, and CO
2were measured for various stainless- steel 304 chamber statuses with two different types of hot cathode ionization gauges and a residual gas analyzer. When the ionization gauges were turned on and degassed, the dominant outgassing species were H
2and H
2O, but slightly different quantities and species were seen for different gauges.
The residual gases were measured during bake-out up to 235
◦C, and H
2O and CO evolved during the bake-out, but H
2was more than 97 % of the total after 627 hours had elapsed.
PACS numbers: 07.03.K, 07.03.D
Keywords: Ionization gauge, Residual gas analyzer, Outgassing, Vacuum, Bake-out
∗
