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ÉU ê sX N Ë CdS ‰ ˜ m+ s ÇX N Ë U c lT c l8 ý Ì ¦ R Ä Z ذ Ë Ñ] K ¡X ì Ä — ¤V R Ë Ž ì ŏ Œ

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ÉU ê sX N Ë CdS ‰ ˜ m+ s ÇX N Ë U c lT c l8 ý Ì ¦ R Ä Z ذ Ë Ñ] K ¡X ì Ä — ¤V R Ë Ž ì ŏ Œ

™ »6 0^ ï B

3

l q" é ¶ @ /† < Ɠ § _ …ß ¼” ¸õ † < ƃ  ½ ¨™ è, @ /„   302-729

¦

? # Ü 

Ø 

æ z Œ ™@ /† < Ɠ § Ó ü t o † < Æõ , @ /„   305-764

L

| ÷ 7 B6 0

3

l q" é ¶ @ /† < Ɠ § F g·„   Ó ü t o † < Æõ , @ /„   302-729 (2006¸   6 Z 4 26{ 9  ~ à Î6 £ §)

\ P

# 4  & h 8 £ x $ í  © œZ O `  ¦ s 6   x # Œ “ ¦¾ ¡ §| 9 _  { 9 ~ ½ Ó& ñ CdS/GaAs(100) ~ à Ì} Œ •s  $ í  © œ÷ &% 3  . $ í  © œ  ) a ~ à Ì} Œ • [

þ

t“ É r F g † < Æ& h  : £ ¤$ í `  ¦ · ú ˜ ˜ Ðl  0 A # Œ ì  rF g † < Æ& h  Ó s qw n ™ èp à Ôo  (spectroscopic ellipsometry)\  ¦  6   x 

#

Œ z  ´“ : r \ " f 1.5 - 8.7 eV  s  Ÿ í— : r \  -t  # 3 0 A\ " f 8 £ ¤& ñ ÷ &% 3  . 8 £ ¤& ñ  ) a X <s ' [ þ t“ É r Ä » Ä »„  † < Êà º Û

¼& 7 ˜à Ô! 3  < ε(E) > = < ε

1

(E) > + i < ε

2

(E) > \    è ß – E

0

, E

1

, E

2

, E

00

, E

01

ü < ° ú  “ É r e ” > & h  ½ ¨› ¸

\

 ¦ ƒ  ½ ¨ % i  . ¢ ¸ô  Ç ~ à Ì} Œ •_  4 Ÿ ¤ ™ è Ä »„  † < Êà ºü < x 9 ] X ô  Ç › ' a > \  ¦ t “ ¦ e ”   H Ï ã J] X t à º n(E), ™ è F g > à º k(E), ì ø Í > à º R(E) Õ ªo “ ¦ f  ¨ à º> à º α(E)ü < ° ú  “ É r F g † < Æ& h  : £ ¤$ í \  › ' a # Œ ƒ  ½ ¨ % i  . : £ ¤ y  ì  rF g † < Æ

&

h

 Ó s qw n ™ èp à Ôo \  ¦ s 6   x ô  Ç s    ƒ  ½ ¨\ " f   è ß – — ¸Ž  H e ” > & h  x ß ¼[ þ t“ É r 300 K \ " f % ƒ6 £ § Ü ¼– Ð › ' a8 £ ¤ ÷ &

% 3  .

PACS numbers: 70, 78.20.C

Keywords: CdS, ì  rF g † < Æ& h  Ó s qw n ™ èp à Ôo , \ P # 4  & h 8 £ x $ í  © œZ O , Ä »„  † < Êà º

I. " e  ] Ø

CdS  H II-VI7 á ¤  o½ + ËÓ ü t ì ø ͕ ¸^ ‰– Ð" f \  -t  Ì “ s“ É r €  • 2.5 eV & ñ • ¸\  ¦ t “ ¦ e ”  . ¢ ¸ô  Ç f ” ] X …  ;s + þ A ì ø ͕ ¸^ ‰– Ð" f   ü

@‚  õ  r  F g‚   ì  rF g % ò % i \ " f ´ òõ & h Ü ¼– Ð  Ö ¸6   x ½ + É Ã º e ”

  H F g„  • ¸ „  t \  V , o   6   x ÷ &# Qt “ ¦ e ”  . s  Qô  Ç Ó ü t

| 9

“ É r ¢ ¸ô  Ç ' õ AÒ  o % ò % i  Ò'   ü @‚   % ò % i  t  q ‚  + þ A F g † < Æ



© œu , Ô  ¦ç  H| 9  I € ª œ „  t , Õ ªo “ ¦ Õ ª µ 1 Ú_  F g„     © œu \ 

@

/é ß –y  B § 4 & h s   [1-3]. I € ª œ„  t _  F g È Òõ 8 £ x Ü ¼– Ð   6

 

x ÷ &  H CdS ~ à Ì} Œ •“ É r Z  }“ É r F g È Òõ • ¸ü < ± ú “ É r q $ † ½ Ó, Õ ªo 

“

¦ 7 £ x ‚ Ã Ì  ) a ~ à Ì} Œ •_  : £ ¤$ í s  ç  H{ 9 K     H X < s  Qô  Ç : £ ¤$ í [

þ

t“ É r $ í  © œ› ¸| `  ¦ › ¸] X † < ÊÜ ¼– Ð" f S \ ‰1 p q ½ + É Ã º e ”  . CdS_  Z

 }“ É r F g f  ¨ à º> à ºü < Ï ã J] X t à º\  ¦ & ñ S X ‰ >  · ú ˜l  0 A # Œ



€ ª œô  Ç F g„     © œu _  [ O > ü < ì  r$ 3 s  € 9 à º Ô  ¦     .

þ

j   H \   H 10 % s  © œ_  ´ òÖ  ¦`  ¦ ° ú   H CdS/CdTe ~ à Ì} Œ •`  ¦ ]

j Œ • # Œ ˜ Г ¦ ÷ &% 3   [4]. q 2 Ÿ ¤ CdS ~ à Ì} Œ •\  @ /ô  Ç ´ ú §“ É r F

g † < Æ& h  ƒ  ½ ¨[ þ t s  þ j   H  t  t 5 Å q& h Ü ¼– Ð ƒ  ½ ¨ ÷ &“ ¦ e ”  “ ¦

½

+ Ét  • ¸ [5-9] Ó s qw n ™ èp à Ôo \  ¦ s 6   x ô  Ç ˜ Г ¦  H Õ ª t  ´ ú §

E-mail: [email protected]

t

 · ú §“ É r z  ´& ñ s  . { 9 ~ ½ Ó& ñ CdS_  F g † < Æ& h  : £ ¤$ í `  ¦ · ú ˜l  0 A

# Œ Ó s qw n ™ èp à Ôo \  ¦ s 6   x # Œ ˜ Г ¦ô  Ç \ V– Ѝ  H Hofmann [10]1 p x s  ˜ Г ¦ô  Ç e ” > & h  x ß ¼\  › ' a ô  Ç  כ ÷  r s  9 s  כ ¢ ¸ ô

 Ç 90 K\ " f s À Ò# Q& ’ l  M :ë  H \  300 K\ " f  H  f ”  ˜ Г ¦

÷

&t  · ú §€ Œ ¤ . Õ ª ü @ Ó s qw n ™ èp à Ôo \  › ' a ô  Ç Y > Y > ë  H‰  ³[ þ t s 

˜

Г ¦ ÷ &% 3 Ü ¼  í  H à ºô  Ç { 9 ~ ½ Ó& ñ CdS\  › ' a ô  Ç  כ “ É r ˜ Г ¦ ÷ &

t

 · ú §€ Œ ¤  [11,12].

‘

: r ƒ  ½ ¨\ " f { 9 ~ ½ Ó& ñ CdS/GaAs(100) ~ à Ì} Œ •“ É r \ P # 4  & h 8 £ x

$ í

 © œZ O  (hot-wall epitaxy; HWE)\  _  # Œ $ í  © œr (  Ü ¼ 9 Ò 

re  ¦[ þ t _  F g † < Æ& h  Ä »„   © œÃ º\  ¦ · ú ˜ ˜ Ðl  0 A # Œ 300 K\ 

"

f ì  rF g † < Æ& h  Ó s qw n ™ èp à Ôo  (spectroscopic ellipsometry;

SE)\  ¦  6   x # Œ 8 £ ¤& ñ ÷ &% 3  . Õ ª   õ – Ð ~ à Ì} Œ •_  4 Ÿ ¤ ™ è Ä »

„

  © œÃ º ε

1

(E), ε

2

(E) \  @ / # Œ · ú ˜ à º e ” % 3 Ü ¼ 9, s    Ä »

„

 † < Êà ºü < y © œ >  ƒ  › ' a ) a Ï ã J] X t à º n(E), ™ è F g > à º k(E), ì

ø Í > à º R(E) Õ ªo “ ¦ f  ¨ à º> à º α(E) 1 p x`  ¦ ƒ  ½ ¨ % i  .

¢

¸ô  Ç Ã º† < Æ& h Ü ¼– Ð > í ß –  ) a s > • ¸† < Êà º\  ¦ s 6   x # Œ y Œ •y Œ •_  e ”

> & h  x ß ¼\  ¦ ½ ¨ % i  .

-240-

(2)

II. ÷ m Ç ] M ö

‘

: r ƒ  ½ ¨\   6   x ) a ~ à Ì} Œ •[ þ t“ É r \ P # 4  & h 8 £ x $ í  © œZ O \  _  

#

Œ $ í  © œ÷ &% 3  . ~ à Ì} Œ • $ í  © œr  l ó ø Í “ : r • ¸  H 380

C s % 3  Ü

¼ 9 " é ¶ « Ñ Òü < \ P # 4 Â Ò “ : r • ¸  H y Œ •y Œ • 570

C ü < 540

C % i 



. $ í  © œ  ) a ~ à Ì} Œ •_    & ñ ½ ¨› ¸\  ¦ · ú ˜ ˜ Ðl  0 A # Œ X-‚    r ] X

 Û ¼& 7 ˜à Ô! 3 `  ¦ s 6   x # Œ ì  r$ 3  % i “ ¦ ¿ ºa   H Û ¼& 7 ˜à Ԗ П í

ž

Ðp ' \  _ ô  Ç ì ø Í  Û ¼& 7 ˜à Ô! 3 \  _  # Œ €  • 1 µm & ñ • ¸

–

Ð   & ñ ÷ &% 3  . ~ à Ì} Œ •_  F g † < Æ& h  : £ ¤$ í `  ¦ · ú ˜l  0 A # Œ  6   x

 )

a SE  © œu   H ¿ »à ԏ : r Ï þ ›á Ôü < ] j 7 H Ï þ ›á Ô\  ¦ F g " é ¶ Ü ¼– Ð  6   x

  H “ ¦”  / B N  ü @‚  % ò % i _  ì  rF g Ó s qw n ™ èp à Ôo  (Woolam VUV-VASE system) \  _ K " f 8 £ ¤& ñ ÷ &% 3  . { 9 ~ ½ Ó& ñ CdS

~ Ã

Ì} Œ •_  8 £ ¤& ñ # 3 0 A  H 1.5 eV \ " f 8.7 eV_  % ò % i s % 3 Ü ¼ 9 { 9

 y Œ •“ É r 70

s % 3 “ ¦ z  ´“ : r \ " f 8 £ ¤& ñ % i  .

r

« Ñ 8 £ ¤& ñ s „  \  r « Ñ_  ³ ð€    } 9 l   overlayer_  Ã

º& ñ s  s À Ò# Qt t  · ú §€ Œ ¤l  M :ë  H \  ellipsometric data[ þ t

–

РÒ'  % 3 “ É r Ä »„  † < Êà º Û ¼& 7 ˜à Ô! 3 “ É r Ä »  Ä »„  † < Êà º (1) d ”  _

 < ε(E) >– Ð % ƒo ÷ &% 3  . Ä ºo   H r « Ñ\  ¦ 8 £ ¤& ñ l  „  

\

 é ß –t  â ìØ Ô  H B jò ø Í`  ¦ \  '  ½ ¨  H  Œ •\ O ë ß – à º' Ÿ Ù þ ¡“ ¦ / B N l 

\

 _ ô  Ç š ¸% i s   í ß – o\  ¦ ~ ½ Ót  l  0 AK  â ìØ Ô  H “ ¦í  H • ¸

| 9

™ èÛ ¼ 5 Å q \ " f 8 £ ¤& ñ ÷ &% 3  . s    8 £ ¤& ñ \ " f { 9  €  \ 

@

/ # Œ à ºf ”  (s)õ  à º¨ î (p)Ü ¼– Ð ”  1 l x   H ¼ # F g ) a $ í ì  r

\

 › ' a # Œ   & ñ  ) a ì  rF g † < Æ& h  ~ ½ Ó0 Ay Œ •õ  0 A © œy Œ •s  & ñ x 9  

>

 8 £ ¤& ñ ÷ &% 3  . Õ ª QÙ ¼– Ð ~ à Ì} Œ •_  4 Ÿ ¤ ™ è Ä »  Ä »„  † < Êà º  H

¿

º 0 A © œ — ¸4 S q (two-phase model)\  _  # Œ   & ñ ÷ &% 3  .

< ε(E) >= ε

a

{sin

2

φ + sin

2

φ tan

2

φ[(1 − ρ)/(1 + ρ)]

2

} (1)

#

Œl " f ρ = tan Ψe

i∆

; ε

a

= n

2a

= 1 õ  φ  H y Œ •y Œ • ¹ ¡ § f ”

s   H B | 9 _  Ä » Ä »„  † < Êà ºü < y Œ ™t  F g _  { 9  y Œ •s  .

III. + s ÇÊ Ý õ m Í w в  o

Fig. 1“ É r GaAs(100) l ó ø Í 0 A\  $ í  © œr †   € ª œ| 9 _  CdS é ß –  & ñ ~ à Ì} Œ •_    & ñ ½ ¨› ¸\  ¦ › ¸  l  0 A # Œ 8 £ ¤& ñ ô

 Ç XRD Û ¼& 7 ˜à Ô! 3 `  ¦    · p . Õ ªa Ë >\ " f ^  ¦ à º e ”   H  כ

%

ƒ! 3  GaAs l ó ø Í_  (100) €  `  ¦   " f { 9 ~ ½ Ó& ñ “   CdS €  s 

$ í

 © œ÷ &% 3 6 £ §`  ¦ · ú ˜ à º e ”  . (200) €  _   r] X  x ß ¼ (400)

€

 _   r] X  x ß ¼˜ Ð   H  כ `  ¦ ^  ¦ à º e ”   H X < s  כ “ É r 7 £ x ‚ à Ì

 )

a CdS ~ à Ì} Œ •_  ¿ ºa  “ ¦Ø ԓ ¦   & ñ $ í s  a % ~    H  כ `  ¦ ˜ Ð

#

Œï  r  . ¢ ¸ô  Ç CdSü < GaAs y Œ •y Œ •_  (200)ü < (400)  r] X x  ß

¼ë ß –s  y © œ >  › ' a8 £ ¤ ÷ &“ ¦   É r x ß ¼  H „  ) € › ' a8 £ ¤ ÷ &t  · ú §



 H  כ Ü ¼– Ð ˜ Ð  $ í  © œ  ) a — ¸Ž  H CdS ~ à Ì} Œ •s  (100) €   ~ ½ ӆ ¾ Ó _

 { 9 ~ ½ Ó& ñ ½ ¨› ¸   H  כ `  ¦ · ú ˜ à º e ” % 3  .

Fig. 1. The XRD pattern of cubic CdS/GaAs(100) epi- layer. The inset represents the FWHM of the DCRC of CdS epilayer.

Fig. 2. The pseudodielectric function < ε(E) > spectra of cubic CdS/GaAs(100) epilayer obtained from the SE measurement at room temperature.

Fig. 2  H CdS é ß –  & ñ ~ à Ì} Œ •_  Ä »„  † < Êà º Û ¼& 7 ˜à Ô! 3  ε(E)\  ¦    · p  כ s  . Õ ªa Ë >\ " f y Œ •y Œ •_   o¶ ú ˜³ ð[ þ t“ É r Cardona ü < Greenaway ³ ðr Z O `  ¦ s 6   x # Œ   ? /% 3   [13]. Õ ªa Ë >\    è ß –  ü < ° ú  s  — ¸Ž  H e ” > & h  x ß ¼[ þ t“ É r L :

 F

M ô  Ç ½ ¨› ¸\  ¦ ˜ Ð# Œï  r  . €  $  2.52 eV   H % ƒ\ " f      H x

ß ¼  H E

0

e ” > & h  x ß ¼\  ¦    · p . s  כ “ É r „   @ /ü <

(3)

Table 1. The critical point energy between the valence band and the conduction band in optical spectra of CdS epilayer.

C.P. Assign. Calculate Reflec.t SC-OPW SC-LD SE This work

(eV) [15] (eV) [15] (eV) [15] (eV) [14] (eV) [16] (eV) [10] (eV)

E

0

Γ

ν15

→ Γ

c1

2.01 2.55 2.70 1.80 - 2.52

E

1

L

ν3

→ L

c1

5.49 5.30 4.90 4.20 5.00 5.02

X

5ν

→ X

1c

6.50 7.50 6.30 5.60 6.30 6.46

E

2

X

5ν

→ X

5c

6.80 - 7.10 6.70 7.10 6.92

Σ

ν4

→ Σ

ν1

7.21 - - - - -

E

00

Γ

ν15

→ Γ

c15

6.82 6.40 7.60 6.90 7.40 7.48

E

10

L

ν3

→ L

c3

8.32 8.88 8.50 8.80 8.30 8.34

„

 • ¸@ /  s  Ú Ôw n =À Ҁ © œ % ò % i _  Γ-» ¡ ¤`  ¦   " f { 9 # Q   H Γ

v15

→ Γ

v1

 ½ ™× ¼ç ß – …  ;s \  _  # Œ { 9 # Q   H  כ Ü ¼– Ð · ú ˜ 9 4

R e ”   [14,15]. s  x ß ¼ \  -t   H Ó ü t| 9 s  t “ ¦ e ”   H

“

¦Ä »_  F g † < Æ& h  \  -t  Ì “ sõ   _  { 9 u  % i  . Table 1\ 

˜

Ð# Œï  r  ü < ° ú  s  \  -t  Ì “ s“ É r Zunger 1 p x \  _  # Œ s  : r

&

h Ü ¼– Ð > í ß –  ) a ° ú כ“   2.01 eV\  ¦ ] jü @ “ ¦ — ¸Ž  H z  ´+ « >° ú כ[ þ t s

 2.50 eV   H % ƒ\ " f   z Œ ¤  [15]. : £ ¤ y  Cardona 1 p x \  _

 # Œ ˜ Г ¦  ) a ì ø Í  Û ¼& 7 ˜à Ô! 3 \ " f Ä »„   © œÃ º ° ú כ“ É r Ä ºo  _

 z  ´+ « >   õ ü < €  • 0.30 eV & ñ • ¸ s – Ð ß ¼>  s    t

 · ú §€ Œ ¤ . Õ ª Q  Hofmann 1 p x s  Ó s qw n ™ èp à Ôo \  ¦ s 6   x

# Œ 70 K\ " f S \ ‰1 p q ô  Ç e ” > & h  x ß ¼[ þ t _  ˜ Г ¦\ " f  H E

0

° ú

כ`  ¦   ? /t  3 l wÙ þ ¡  [10]. Õ ª QÙ ¼– Ð 300 K\ " f Ó s qw n ™ è p

à Ôo \  ¦ s 6   x # Œ ½ ¨ô  Ç E

0

e ” > & h  x ß ¼  H ‘ : r ƒ  ½ ¨\ " f

%

ƒ6 £ § Ü ¼– Ð ˜ Г ¦   H  כ s  .

5.0 eV   H % ƒ\ " f „   @ /ü < „  • ¸@ /  s  L

v3

→ L

c1

…

 ;s \  _  # Œ µ 1 ÏÒ q t   H e ” > & h  x ß ¼  H E

1

x ß ¼s  . { 9  ì

ø Í& h Ü ¼– Ð II-VI7 á ¤  o½ + ËÓ ü t ì ø ͕ ¸^ ‰\ " f E

1

x ß ¼  H y © œô  Ç " l o r

— : r ´ òõ – Ð “   # Œ   É r # Q‹ "  x ß ¼˜ Ð • ¸ ß ¼>    è ß –



  H  כ s  s p  ´ ú §“ É r ë  H‰  ³`  ¦ : Ÿ x # Œ · ú ˜ 94 R e ”   [16-19].

Fig. 2 _  ε

2

(E) Û ¼& 7 ˜à Ô! 3 \ " f ˜ Ѝ  H  כ % ƒ! 3  Ä ºo _  SE Û ¼

&

7 ˜à Ô! 3 \ " f• ¸ % i r  E

1

x ß ¼  © œ{ © œy  ß ¼>    è ß –  כ `  ¦

^

 ¦ e ”  . Table 1\ " f ˜ Ѝ  H  כ % ƒ! 3  ì ø Í \  _  # Œ % 3 # Q”   E

1

x ß ¼_    õ [ þ t“ É r Ó s qw n ™ èp à Ôo \  ¦ s 6   x # Œ % 3 “ É r    õ

ü <  © œ{ © œô  Ç s \  ¦ ˜ Г   . Õ ª Q  Hofmann 1 p x \  _  

#

Œ Ó s qw n ™ èp à Ôo \  ¦ s 6   x # Œ % 3 # Q”   ° ú כ“ É r Ä ºo _  ƒ  ½ ¨ ü

< q 5 p w ô  Ç   õ \  ¦ ˜ Ð# Œ ï  r   [10].

¢

¸ô  Ç 6.46 eVü < 6.92 eV\ " f   è ß – ¿ º> h_  E

2

x ß ¼



 z Œ ¤ . s  Qô  Ç x ß ¼  H y Œ •y Œ • X

5v

→ X

1c

ü < X

5v

→ X

3c

…

 ;s \  _  # Œ µ 1 ÏÒ q t   H  כ Ü ¼– Ð · ú ˜ 94 R e ”   [15]. Zungr 1

p

x \  _  # Œ ˜ Г ¦  ) a ì ø Í  Û ¼& 7 ˜à Ô! 3 _    õ \ " f  H [ j > h _

 E

2

x ß ¼      H  כ Ü ¼– Ð ˜ Г ¦ ÷ &% 3   [15]. Õ ª Q  Õ

ª ü @   É r ´ ú §“ É r ë  H‰  ³\ " f  H Table 1 \ " f ˜ Ð# ŒÅ ҍ  H  כ % ƒ

!

3  ¿ º > h_  x ß ¼ë ß –s  ” > r F    H  כ Ü ¼– Ð ˜ Г ¦ ÷ &% 3  . Ó ü t : r

Fig. 3. The refractive index n(E) and the extinction co- efficient k(E) spectra of cubic CdS/GaAs(100) epilayer obtained from the SE measurement at room tempera- ture.

· ú

¡" f ƒ  / å L ô  Ç  כ % ƒ! 3  Ä ºo _    õ • ¸ ¿ º > h_  x ß ¼ë ß –s  ” > r F

 % i “ ¦ s  Qô  Ç   õ   H Hofmann 1 p x s  Ó s qw n ™ èp à Ôo \  ¦ s

6   x # Œ ˜ Г ¦ô  Ç 6.40 eVü < 6.90 eV_    õ ü < ß ¼>   Ø Ô t

 · ú §“ É r 6.46 eV ü < 6.92 eV_    õ \  ¦ % 3 % 3  . Γ

v15

→ Γ

c15

…

 ;s \  _  # Œ 7.48 eV   H % ƒ\ " f   è ß – E

00

x ß ¼ › ' a8 £ ¤

÷

&% 3  . Table 1\ " f ˜ Ð# ŒÅ ҍ  H  כ % ƒ! 3  @ / Òì  r _    õ [ þ t E

2

x ß ¼_  0 Au ˜ Ð  Z  }“ É r \  -t  % ò % i \ " f   z Œ ¤ . Ä º o

_    õ [ þ t“ É r Hofmann 1 p x s  ˜ Г ¦ô  Ç   õ ü < q 5 p w ô  Ç ° ú כ

`

 ¦ ˜ Ð% i  .



t } Œ •Ü ¼– Ð 8.34 eV % ò % i    H % ƒ\ " f Γ

v15

→ Γ

c15

…  ;s 

(4)

Fig. 4. The reflectivity R(E) and the absorption coeffi- cient α(E) spectra of cubic CdS/GaAs(100) epilayer ob- tained from the SE measurement at room temperature.

\

 _  # Œ E

10

x ß ¼ › ' a8 £ ¤ ÷ &% 3  . s  x ß ¼  H Table 1 \ 



 è ß –  כ % ƒ! 3  Zunger 1 p x s  > í ß –ô  Ç ° ú כõ  Hofmann 1 p x s  SE – Ð 8 £ ¤& ñ ô  Ç ° ú כõ   H q 5 p w ô  Ç   õ – Ð   z Œ ¤Ü ¼  ì ø Í  Û ¼

&

7 ˜à Ô! 3 \  _ ô  Ç ° ú כõ   H  © œ{ © œy    É r ° ú כ`  ¦ ˜ Ð# Œ Å Ò% 3  . s 



  ƒ  ½ ¨\ " f Ä ºo _    õ   H Hofmann 1 p x s  Ó s qw n ™ èp à Ô o

\  ¦ s 6   x # Œ ˜ Г ¦ô  Ç   õ ü < — ¸Ž  H % ò % i \ " f q 5 p w ô  Ç  â

†

¾ Ó`  ¦ ˜ Ð% i Ü ¼ , E

0

x ß ¼  H Ä ºo _    õ \ " fë ß – % 3 % 3    H

 כ

`  ¦ · ú ˜ à º e ”  . ¢ ¸ô  Ç Ä ºo _    õ ü < Hofmann 1 p x _     õ

\  ¦ q “ §K ^  ¦ M : @ /^ ‰– Ð Ä ºo _    õ [ þ t s  €  •ç ß – Z  }“ É r \ 



-t  % ò % i \ " f      H  כ `  ¦ › ' a8 £ ¤ ½ + É Ã º e ” % 3  .

Fig. 3“ É r SE \  _  # Œ 8 £ ¤& ñ  ) a CdS/GaAs(100) é ß –

 

& ñ ~ à Ì} Œ •_  Ï ã J] X  t à º n(E)ü < ™ è F g > à º k(E)_  z  ´+ « >

X

<s ' \  ¦ ˜ Ð# Œï  r  . s  Qô  Ç Ï ã J] X  t à º n(E), ™ è F g > à º k(E) ° ú  “ É r F g † < Æ& h  Û ¼& 7 ˜à Ô! 3 “ É r { 9 ì ø Í& h Ü ¼– Ð z  ´6   x& h “   † < Ê Ã

º– Ð" f ~ 1 >  % 3 `  ¦ à º e ” “ ¦ Ä »„  † < Êà º ε(E)ü < y © œ >  ƒ  

› '

a ÷ &# Q e ”  . 4 Ÿ ¤ ™ è Ï ã J] X t à º “ ¦ { 9 (  # Qt   H n

(E)  H n

(E) = n(E) + ik(E) = ε(E)

1/2

– Ð   è ­ q à º e ”

 . Õ ªa Ë >\ " f Γ-Ÿ í“  à Ô\ " f l " é ¶   H E

0

x ß ¼ü < L-Ÿ í

“

 à Ô\ " f l " é ¶   H E

1

x ß ¼  H y Œ •y Œ • 2.52 eVü < 5.02 eV

\

" f " î S X ‰ >       H  כ `  ¦ ˜ Ð# Œï  r  . : £ ¤ y  \  -t  Ì “ s

\

 K { © œ   H E

0

x ß ¼ü < 2D " l or — : r _  l # Œ– Ð µ 1 ÏÒ q t ) a E

1

x

ß ¼  H Ï ã J] X  t à º n(E)\ " f ˜ Ð   H ™ è F g > à º k(E)\ " f

Fig. 5. Fits to the second derivatives of the pseudodielec- tric constant < ε(E) > spectrum of CdS/GaAs(100) epi- layer obtained from the SE measurement at room tem- perature. To show the quality of the fits clearly, we re- duced the number of the data points in the graph by one-fourth. The circle and the square are the SE data, and the solid line and dash-dotted line are the fitted data.

 s

`›   " î S X ‰ >       H  כ `  ¦ ^  ¦ à º e ”  . ¢ ¸ô  Ç E

2

(X), E

10

(Γ) Õ ªo “ ¦ E

00

(L) x ß ¼ü < ° ú  “ É r   É r x ß ¼[ þ t % i r  ™ è F

g > à º k(E)\ " f Ì º§  >       H  כ `  ¦ ^  ¦ à º e ”  .

Fig. 4  H SE \  _  # Œ 8 £ ¤& ñ  ) a CdS/GaAs(100) ~ à Ì} Œ •_  Ã

ºf ” { 9   ì ø Í Ö  ¦ R(E) ü < α(E)\  @ /ô  Ç F g † < Æ& h  Û ¼& 7 ˜à Ô! 3 

`

 ¦ ˜ Ð# Œï  r  . % 3 # Q”   Û ¼& 7 ˜à Ô! 3 \ " f y Œ •y Œ •_  e ” > & h [ þ t s  Ì

º§  >       H  כ `  ¦ ^  ¦ à º e ”  . à ºf ”  { 9   ì ø Í Ö  ¦ R(E) ü < ° ú  “ É r F g † < Æ& h  Û ¼& 7 ˜à Ô! 3 “ É r z  ´6   x& h “   † < Êà º– Ð" f ~ 1 

>

 % 3 `  ¦ à º e ” “ ¦ Ï ã J] X  t à º n(E), ™ è F g > à º k(E)ü < f ” ] X 

&

h “   ƒ  › ' a s  e ” Ü ¼ 9 ¢ ¸ô  Ç ì  rF g _ ” > r$ í `  ¦ ˜ Ð# Œï  r  . F g † < Æ

&

h  \  -t  Ì “ s E

0

\  K { © œ÷ &  H x ß ¼– Ð" f 2.52 eV\ " f % 3 # Q

”

  e ” > & h  x ß ¼  H Ì º§  >       H  כ `  ¦ ^  ¦ à º e ”  .

s

 x ß ¼  H f  ¨ à º 8 £ ¤& ñ s   È Òõ  8 £ ¤& ñ   õ – РÒ'  ~ 1 >  % 3 

`

 ¦ à º e ” “ ¦ ¢ ¸ô  Ç ´ ú §“ É r ˜ Г ¦ ”  ' Ÿ ÷ &“ ¦ e ”  . Cardona 1 p x

“

É r GaAs l ó ø Í\ " f As 0 A\  $ í  © œ  ) a { 9 ~ ½ Ó& ñ CdS ~ à Ì} Œ •8 £ x _

 ì ø Í ü < f  ¨ à º 8 £ ¤& ñ Ü ¼– РÒ'  % 3 “ É r \  -t  Ì “ s E

g

 2.50 eV  “ ¦ ˜ Г ¦ % i   [20]. ¢ ¸ô  Ç Desnica 1 p x“ É r SiO

2

l ó ø Í 0

A\  $ í  © œô  Ç CdS  ” ¸   & ñ \  @ /ô  Ç \  -t  Ì “ s E

g

 2.50 eV – Ð   z Œ ¤“ ¦ \  -t _  F g † < Æ& h  x 9 • ¸ 7 £ x \     \ 



-t  Ì “ s“ É r 7 £ x ô  Ç “ ¦ ˜ Г ¦ % i   [21]. ¢ ¸ô  Ç þ j   H \   H



€ ª œô  Ç $ í  © œ ~ ½ ÓZ O õ  \ P % ƒo  ´ òõ \    É r CdS _  f  ¨ à º8 £ ¤

&

ñ   õ – Ð S \ ‰1 p q ô  Ç \  -t  Ì “ s\  @ /ô  Ç ˜ Г ¦ s # Qt “ ¦ e ” 



 [22-26]. : £ ¤ y  Zhai 1 p x“ É r  s ß ¼– Ð  t " é ¶ ) a  r† < Æ& h  Ã

º› ¸ 7 £ x ‚ Ã Ì (microwave-assisted chemical bath deposition;

MA-CBD)Z O Ü ¼– Ð $ í  © œr †   CdS\  @ / # Œ È Òõ ü < f  ¨ à º Û

¼& 7 ˜à Ô! 3  8 £ ¤& ñ \  _ ô  Ç \  -t  Ì “ ss  2.51 eV “ ¦ ˜ Г ¦ 

% i

  H X < [22] s    õ   H ‘ : r ƒ  ½ ¨\ " f Ó s qw n ™ èp à Ôo – Ð ½ ¨

(5)

ô

 Ç 2.52 eVü <  © œ{ © œy  { 9 u    H  כ `  ¦ ^  ¦ à º e ”  . ¢ ¸ô  Ç Õ ª a Ë

>\    è ß –  כ % ƒ! 3  f  ¨ à º Û ¼& 7 ˜à Ô! 3 õ  ì ø Í  Û ¼& 7 ˜à Ô! 3 _  5.02 eV Â Ò   H \ " f      H E

1

x ß ¼  H y © œô  Ç s  " é ¶& h  " l o r

— : r ´ òõ \  _  # Œ   É r # Q‹ "  x ß ¼˜ Ð • ¸ " î S X ‰ >   

z Œ ¤ . s   H Cardona 1 p x s  ì ø Í  Û ¼& 7 ˜à Ô! 3 õ  f  ¨ à º Û ¼& 7 ˜ à

Ô! 3 \ " f ½ ¨ô  Ç 5.0 eV Â Ò   H \ " f S \ ‰1 p q ô  Ç  כ õ   © œ{ © œy  { 9  u

   H  כ Ü ¼– Ð   z Œ ¤  [20]. ô  Ǽ #  6.46 eVü < 6.92 eV\ 

"

f      H ¿ º> h_  E

2

x ß ¼• ¸ % i r  · ú ¡\ " f ˜ Ð# Œï  r 4 Ÿ ¤

™

è Ä »„   © œÃ ºü < 4 Ÿ ¤ ™ è Ï ã J] X t à º Û ¼& 7 ˜à Ô! 3 ˜ Ð • ¸ Ì º§  > 



 z Œ ¤ . ¢ ¸ô  Ç 7.3 eV\ " f      H E

00

e ” > & h  x ß ¼  H R(E) ü < α(E) Û ¼& 7 ˜à Ô! 3 \ " f  © œ{ © œy  y © œô  Ç x ß ¼– Ð   z Œ ¤ Ü

¼  " l or — : r \  l # Œ\  _ ô  Ç E

1

x ß ¼˜ Ð   H  Œ •>     



 H  כ Ü ¼– Ð › ' a8 £ ¤ ÷ &% 3  . Õ ª Q  E

10

x ß ¼  H  © œ{ © œy  €  •ô  Ç x

ß ¼– Ð › ' a8 £ ¤ ÷ &% 3  .

Fig. 5  H ì  rF g Ó s qw n ™ èp à Ôo \  _  # Œ 8 £ ¤& ñ  ) a CdS/GaAs(100) ~ à Ì} Œ •_  s   p ì  r ° ú כÜ ¼– Ð Ä »„  † < Êà º Û ¼

&

7 ˜à Ô! 3 , d

2

ε(E)/dE

2

`  ¦   ? /% 3  . \  -t   ½ ™× ¼ ½ ¨› ¸   s

 e ” > & h \  › ' a ô  Ç ε(E) Û ¼& 7 ˜à Ô! 3 \ " f › ' a8 £ ¤ ) a ½ ¨› ¸_  ì  r

$ 3

“ É r SE X <s ' \  _ K  0 p x “ ¦ SE X <s ' _  s   p  ì

 r“ É r Û ¼& 7 ˜à Ô! 3 \  @ /ô  Ç ì  r$ 3 `  ¦ ~ 1 >  ½ + É Ã º e ”  . ¢ ¸ô  Ç " î S X

‰ ô  Ç e ” > & h  x ß ¼\  ¦ · ú ˜ ^  ¦ à º e ”   H  © œ& h s  e ” l • ¸ 



. e ” > & h [ þ t _  & ñ S X ‰ ô  Ç 0 Au \  ¦ · ú ˜l  0 A # Œ à º† < Æ& h Ü ¼– Ð

>

í ß –  ) a (2) d ” õ  ° ú  “ É r s > • ¸† < Êà º_  d ” `  ¦  6   x ½ + É Ã º e ” 

“

¦ S \ ‰1 p q ) a X <s ' [ þ t“ É r s  " é ¶& h  e ” > & h [ þ t`  ¦ ° ú   H ì  r$ 3  6

 

x ‚   — ¸€ ª œ (analytical line-shapes)Ü ¼– Ð ³ ð‰ & ³½ + É Ã º e ”   [27,28].

< ε(E) >= C − Aln(E − E

i

− iΓ) exp[iΦ] (2)

#

Œl " f à ºd ” “ É r \  -t  E, V , # Qt l   © œÃ º Γ, ”  ; Ÿ ¤ A, 0 A



© œy Œ • Φü < ° ú  “ É r W 1 > h_   B j' [ þ t – Ð ½ ¨$ í ÷ &# Q e ”  . Õ ª a Ë

>\ " f " é ¶ õ  W 1— ¸ — ¸+ þ A“ É r 8 £ ¤& ñ  ) a SE X <s ' \  ¦   ? /“ ¦ z 

´‚  õ  { 9 & h   W‚  “ É r x h A ) a X <s ' \  ¦    · p . Õ ªa Ë >\ 

"

f ˜ Ðs   H  כ % ƒ! 3  z  ´+ « >° ú כõ  x h A° ú כ“ É r „   Ÿ í— : r \  -t  # 3  0

A\  ¦ : Ÿ x # Œ ¸ ú ˜ { 9 u  % i  . s  Qô  Ç X <s ' – РÒ'   s `›   Ì

º§  ô  Ç E

0

, E

1

e ” > & h  x ß ¼[ þ t s       H  כ `  ¦ ^  ¦ à º e ” 

%

3  . ¢ ¸ô  Ç SE X <s ' _  p ì  r“ É r Fig. 2 _  Û ¼& 7 ˜à Ô! 3 ˜ Ð 

 s

`›    8 ± ú ˜ \  v “ ¦ Û  æ  Òô  Ç ½ ¨› ¸\  ¦ t “ ¦ e ” % 3 “ ¦ „   Ÿ í— : r

\

 -t  % ò % i \    5 g" f z  ´+ « >° ú כ\  @ /ô  Ç e ” > & h  B > h  à º _

 _ ” > r$ í `  ¦ “ ¦¹ 1 Ͻ + É Ã º e ” % 3  .

IV. + s Ç Â ] Ø

“

¦¾ ¡ §| 9 _  CdS/GaAs(100) ~ à Ì} Œ •“ É r HWE Z O \  _  # Œ

$ í

 © œ÷ &% 3  . $ í  © œ  ) a ~ à Ì} Œ •[ þ t“ É r X-‚    r] X  J ‡  `  ¦ ì  r$ 3 ô  Ç

 

õ  { 9 ~ ½ Ó& ñ ½ ¨› ¸\  ¦ ° ú   H  כ Ü ¼– Ð S X ‰ “  ÷ &% 3  . SE 8 £ ¤& ñ Ü ¼

–

РÒ'  y Œ •y Œ •_  e ” > & h  x ß ¼[ þ t s  Ì º§  >       H  כ

`

 ¦ · ú ˜ à º e ” % 3 Ü ¼ 9 : £ ¤ y  2.52 eV_  0 Au \ " f      H x

ß ¼  H E

0

x ß ¼  H F g † < Æ& h  \  -t  Ì “ sõ  { 9 u  % i  . y © œô  Ç s

 " é ¶& h  " l or — : r _  l # Œ\  _  # Œ 5.02 eV   H % ƒ\ " f  

   H E

1

e ” > & h  x ß ¼• ¸ % i r  Ì º§  >    è ß –   H  כ

`

 ¦ · ú ˜ à º e ” % 3  . ¢ ¸ô  Ç ¿ º > h_  E

2

, E

00

Õ ªo “ ¦ E

10

x ß ¼[ þ t

“ É

r " î S X ‰ >    z Œ ¤ . ¢ ¸ô  Ç s > • ¸† < Êà º\  _  # Œ ½ ¨ 

#

Œ”   s  " é ¶& h  p ì  r _    õ [ þ t \  _  # Œ & ñ S X ‰ ô  Ç e ” > & h  x

ß ¼[ þ t _  0 Au \  ¦ · ú ˜ à º e ” % 3  . ‘ : r ƒ  ½ ¨\ " f à º' Ÿ ô  Ç s  Q ô

 Ç { 9 ~ ½ Ó& ñ CdS é ß –  & ñ ~ à Ì} Œ •_  SE 8 £ ¤& ñ   õ [ þ t“ É r 300 K

\

" f % ƒ6 £ § Ü ¼– Ð ˜ Г ¦   H  כ Ü ¼– Ð" f  © œ{ © œô  Ç _ p  e ”  .

P

c p 8 ý ò k >

s

  7 Hë  H“ É r 2005¸  • ¸ & ñ  ÒF " é ¶ Ü ¼– Ð ô  Dz D G † < ÆÕ ü t”  < É ª F é ß – _

 t " é ¶`  ¦ ~ à Î  ƒ  ½ ¨÷ &% 3 6 £ § (KRF-2005-075-C00012).

Y

c p w Š à U Ø ”  ô

[1] L. Ward, in Handbook of Optical Constants of Solid II, edited by E. D. Palik (Academic, Boston, 1991), p. 579.

[2] I. Broser, C. Frike, B. Lummer, R. Heitz, H. Prrls and A. Hoffman, J. Cryst. Growth 117, 788 (1992).

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Phys. 95, 1056 (2004).

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The Optical Properties of a Cubic CdS Epilayer Obtained by Using Spectroscopic Ellipsometry

D. J. Kim

Institute of Science and Thecnology, Mokwon University, Daejeon 302-729 T. G. Koo

Department of Physics, Chungnam National University, Daejeon 305-764 Y. D. Choi

Department of Optical & Electronic Physics, Mokwon University, Daejeon 302-729 (Received 26 June 2006)

Cubic CdS epilayers were grown on GaAs(100) substrates by using a hot-wall epitaxy method.

The crystal structure of the grown epilayer was confirmed to be a cubic structure by using X- ray diffraction, and the optical properties of the layer were studied over a wide photon en- ergy range from 1.0 to 8.5 eV at room temperature by using spectroscopic ellipsometry. The obtained data were analyzed for the critical points of the pseudodielectric function spectra,

< ε(E) > = < ε

1

(E) > + i < ε

2

(E) >, such as the E

0

, E

1

, E

2

, E

00

, and E

10

structures.

Also, the pseudodielectric-function-related optical constants of CdS, such as the refractive index n(E), the extinction coefficient k(E), the reflectivity R(E), and the absorption coefficient α(E), are presented and analyzed. Note that all the structures were observed, for the first time, at 300 K by using ellipsometric measurements.

PACS numbers: 70, 78.20.C

Keywords: CdS, Spectroscopic ellipsometry, Hot-wall epitaxy, Dielectric function

E-mail: [email protected]

수치

Fig. 2. The pseudodielectric function &lt; ε(E) &gt; spectra of cubic CdS/GaAs(100) epilayer obtained from the SE measurement at room temperature.
Table 1. The critical point energy between the valence band and the conduction band in optical spectra of CdS epilayer.
Fig. 4. The reflectivity R(E) and the absorption coeffi- coeffi-cient α(E) spectra of cubic CdS/GaAs(100) epilayer  ob-tained from the SE measurement at room temperature.

참조

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