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Å Œ Ÿ «” Ö «Y c l0 n É; c 8 ýA 0 < gX c lc Ü R β -In 2 S 3 U c lT c l8 ý ö n ÚP X ì Ä — ¤V R Ë

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~ à Ì} Œ • ? /_  „    î  r ì ø Í [ þ t _  1 l x% i † < Æ& h   1 l x`  ¦ F g Ä »l  ~ ½ ӄ   :

£ ¤$ í (PIDC: photoinduced discharge characteristics) ~ ½ ÓZ O Ü ¼– Ð › ¸  % i  .

PACS numbers: 68.55.-a, 78.20.-e

Keywords: β-In

2

S

3

~ à Ì} Œ •, \ P % ƒo  ´ òõ , \  -t  {  ç ß –  , F g Ä »l  ~ ½ ӄ   : £ ¤$ í

I. " e  ] Ø

A III 2 B V I 3 (A III =Ga, In, Tl ü < B V I =S, Se, Te)+ þ A_ 



o½ + ËÓ ü t ì ø ͕ ¸^ ‰[ þ t“ É r I € ª œ \  -t    ¨ 8 Š`  ¦ 0 Aô  Ç þ j& h  % ò % i  _

 \  -t  {  ç ß –  õ  Z  }“ É r f  ¨ à º > à º M :ë  H \  F g„    (op- toelectronic) x 9 F g l „  $ í (photovoltaic) 6 £ x6   x`  ¦ 0 Aô  Ç „  



 í ß –\ O _  F « і Ð" f ´ ú §“ É r › ' a d ” `  ¦ = å J “ ¦ e ”   [1,2]. s [ þ t ì

ø ͕ ¸^ ‰ î  r X <" f In 2 S 3 õ  ° ú  “ É r III-VI7 á ¤  o½ + ËÓ ü t ì ø ͕ ¸^ ‰_  Ó

ü t$ í “ É r › ¸$ í q \     ß ¼>  % ò † ¾ Ó`  ¦ ~ à Γ ¦, I7 á ¤ " é ¶ ™ è_  ' ‘ 

– РÒ'  II-VI7 á ¤  o½ + ËÓ ü t ì ø ͕ ¸^ ‰\ " f % 3 `  ¦ à º \ O   H D h\  v

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¦ < É ª p – Ðî  r Ó ü t$ í `  ¦ % 3 `  ¦ à º e ” `  ¦  כ Ü ¼– Ð l @ /  ) a  . { 9 ì ø Í

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h Ü ¼– Ð In 2 S 3 “ É r   † < Ê ½ ¨› ¸\  ¦ ë ß –× ¼  H X <, s M : S !  oÓ ü t (sul- fide)“ É r { 9 ~ ½ Ó& ñ >  (cubic) ¢ ¸  H ¹ ¢ ¤ ~ ½ Ó& ñ >  (hexagonal close packed) ½ ¨› ¸\  ¦ + þ A$ í  9 € ª œs “ : r  o [ þ t (cation sites) _  { 9

 Ò q # Qe ”   (/ B N ç ß –ç  H: D 19 4h -I4/amd) [3]. In 2 S 3 “ É r S (sulfur) _  Z  }“ É r 7 £ x l · ú šÜ ¼– Ð “  K   o† < Æ| ¾ ӏ : r& h “   › ¸$ í

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ñ ~ ½ Ó& ñ >  ½ ¨› ¸\  ¦ ° ú   H β-In 2 S 3 s  ÷ &t ë ß –, 400 ∼ 754 C

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: r • ¸ % ò % i \ " f  H { 9 ~ ½ Ó& ñ >  ½ ¨› ¸\  ¦ ° ú   H α-In 2 S 3 s  ÷ &“ ¦, 754 ∼ 1090 C (Ö 6 x& h ) % ò % i \ " f  H  Œ ™~ ½ Ó& ñ >  (trigonal) ½ ¨

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#

Q§ >   [4]. ¢ ¸ô  Ç In 2 S 3 ~ à Ì} Œ •“ É r î ß –& ñ $ í (stability) [5], \  - t

 {  ç ß –   (2∼2.3 eV) [6], È Ò" î • ¸ (transparency) Õ ªo “ ¦

E-mail: [email protected]

F

g„  • ¸^ ‰  1 l x (photoconductor behavior) [7] M :ë  H \ , ´ ú §

“ É

r l Õ ü t& h “   6 £ x6   x[ þ t \  @ / # Œ €  •5 Å q ) a t " é ¶Ó ü t| 9 s  . ˜ Ð :

Ÿ x CIS (CuInSe 2 , CuInS 2 ) Õ ªo “ ¦ CdTe\  ¦ l œ í– Ð ô  Ç I 

€

ª œ „  t  (solar cell)[ þ t \ " f F g l „  $ í ] X ½ + Ë (photovoltaic junction)“ É r CdS ¢ - aØ  æ 8 £ x (buffer layer)`  ¦ s 6   x # Œ ] j Œ •

÷

&% 3   [8]. ¨ 8 Š â & h “   › ' a& h \ " f Cd_   6   x“ É r CIS ~ à Ì} Œ • I 

€

ª œ „  t [ þ t \ " f x  >   ) a  . ¢ ¸ CdS_  {  ç ß –  “ É r  ú ª“ É r 

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© œ (short wavelength)[ þ t \ " f €  •ç ß –_  F g † < Æ& h  f  ¨ à º ’ < Hz  ´_ 

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¶ “  s   ) a  . Õ ª QÙ ¼– Ð CdS\  ¦  6   x t  · ú §  H  8 V , “ É r {  ç

ß –   ì ø ͕ ¸^ ‰\  @ /ô  Ç ƒ  ½ ¨  H þ j   H \  ´ ú §“ É r ƒ  ½ ¨ Õ ªÒ  ¨[ þ t \  _

K " f ' Ÿ K 4 R 𠏓 ¦ e ”   [1,8]. r  F g % ò % i \ " f È Òõ Ö  ¦ (70 ∼ 80 %)`  ¦ ”   In 2 S 3    & ñ ~ à Ì} Œ •“ É r F g l „  § 4  „  t  (photovoltaic cell)[ þ t _  F g † < Æ& h “   ‚ ½ Ó (optical window)Ü ¼

–

Ð" f  6   x| ¨ c à º e ” `  ¦ ÷  r ë ß –  m  , z  ´] j– Ð CdS 8 £ x[ þ t \  a

% ~“ É r @ /^ ‰¾ ¡ §`  ¦ ½ ¨$ í ½ + É Ã º e ”   [9,10]. CdS 5 Å q Ü ¼– Ð Cu\  ¦ S X

‰ í ß –r ( ” Ü ¼– Ð" f F g l „  $ í ] X ½ + Ë_  ] j Œ •\  › ' a ô  Ç ˜ Г ¦[ þ t \  _

 €   CdS_  % ƒ6 £ § Y > Y > 8 £ x[ þ t“ É r p+ þ AÜ ¼– Ð  7 >  ÷ & 9 1 l x 7

á x] X ½ + Ë (homojunction)`  ¦ + þ A$ í ô  Ç  [11]. s    < É ª p – Ðî  r

&

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`  ¦ s 6   x # Œ ë ß –{ 9  In 2 S 3 5 Å q Ü ¼– Ð Cu\  ¦ S X ‰ í ß –r ~  ´ à º e ” 



€  , Y > Y > 8 £ x[ þ t“ É r CuInS 2 – Ð  † 1  à º• ¸ e ” Ü ¼ 9, Õ ª כ “ É r I

€ ª œ „  t \  @ /ô  Ç  © œ{ © œy  a % ~“ É r f  ¨ à º Ó ü t| 9 s  | ¨ c ÷  r ë ß –   m

  F g l „  $ í ] X ½ + Ë_  ] j Œ •“ É r ~ 1 >  z  ´‰ & ³| ¨ c à º e ”  . Õ ª Q Ù

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 ¦ ] j Œ •   H  כ s  l Õ ü t& h Ü ¼– Ð  | à Ðf ”  # Œ In 2 S 3 ~ à Ì} Œ •[ þ t

“ É

r F g  o† < Æ 7 £ x ‚ Ã Ì (PCD:photochemical deposition) [12],  o

-144-

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< Æ ì  r Á º \ P ì  r K  (chemical spray pyrolysis) [13], " é ¶   8 £ x 7

£

x ‚ Ã Ì (atomic layer deposition) [14], ì ø Í6 £ x$ í 7 £ x µ 1 Ï (reac- tive evaporation) [15], \ P  7 £ x µ 1 Ï (thermal evaporation) [10, 16],   › ¸  ) a  µ 1 Ï 7 £ x ‚ Ã Ì (modulated flux deposition) [17]

Õ

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 )

a In 2 S 3 ~ à Ì} Œ •õ  : £ ¤$ í \  › ' a ô  Ç ƒ  ½ ¨_  Y > Y > ˜ Г ¦[ þ t ë ß –s  e ” 

%

3   [10,16,19,21–23]. s  ˜ Г ¦[ þ t _  @ / Òì  r \ " f In 2 S 3 ~ Ã Ì }

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 Ç F g † < Æ& h  : £ ¤$ í \  @ /ô  Ç ƒ  ½ ¨  H  Ö ¸ µ 1 Ïy  s À Ò# Qt “ ¦ e ” t  ë

ß –, Õ ª s ü @_  Ó ü t$ í õ  6 £ x6   x \  › ' a ô  Ç ƒ  ½ ¨  H Z > – Ð \ O  .  



" f  f ” • ¸ ² D G ? /ü @& h Ü ¼– Ð ƒ  ½ ¨  Ö ¸1 l x s   Ҕ  ô  Ç III-VI7 á ¤



o½ + ËÓ ü t ì ø ͕ ¸^ ‰“   β-In 2 S 3 ~ à Ì} Œ •`  ¦ ”  / B N7 £ x ‚ Ã Ì Z O Ü ¼– Ð ] j Œ •

“ ¦ ”  / B N \ " f_  \ P % ƒo  “ : r • ¸\    É r ½ ¨› ¸& h , F g † < Æ& h  : £ ¤

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%

i † < Æ& h   1 l x (dynamical behavior) [25]\  ¦ › ¸  % i  .

II. ÷ m Ç ] M ö

1. β-In 2 S 3 U c lT c l8 ý < g º

β-In 2 S 3 ~ à Ì} Œ •`  ¦ ] j Œ • l  0 A # Œ  o† < Æ| ¾ ӏ : r& h “   ç  H{ 9  ô

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B

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s

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\  ¦ ë ß –7 á ¤   H ç  H{ 9 ô  Ç  o½ + ËÓ ü t`  ¦ % 3 l  0 A # Œ ½ + Ë$ í 6   x Ó  r e

 ¦`  ¦ 3 rpm _  5 Å q • ¸– Ð ý aÄ º– Ð  r„  r &  Å Ò% 3   [26]. ] j› ¸

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a β-In 2 S 3 é # Qo \  ¦ ”  / B N7 £ x ‚ Ã Ì  © œu  (Edward E 306A)? /

\

  © œ‚ Ã Ì “ ¦ €  • 1 × 10 −6 Torr _  ”  / B N \ " f ITO Ä »o  l  ó

ø Í\  7 £ x ‚ Ã Ì % i  . ITO l ó ø Í`  ¦ [ j' ‘  6   xÓ  o? /\  { Œ ™   H Ê ê 7 £ x À

Óà º– Ð '  ½ ¨# Q œ í6 £ §  [ j' ‘ l \ " f  [ j— : r (acetone) Ü ¼– Ð [

j' ‘  “ ¦  r  7 £ x À Óà º– Ð '  ç  H  6 £ §   É r | 9 ™ è Û ¼– Ð Ô  ¦

#

Q" f | › ¸r &   6   x % i  . 1 r_  7 £ x ‚ à Ì`  ¦ l  0 AK  €  • 2.5 g _  In 2 S 3 é # Qo \  ¦  Û ¼Ö ¿ (basket) + þ AI _  [ j b ” 

(ceramic)`  ¦ { 9 ˜ 2 ³ % û Û ¼J $ ™ (W) ˜ Ðà Ô (boat) 5 Å q \  V , # Q Ø  æ ì

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\

V\ P `  ¦ Ÿ í† < Ê # Œ 30ì  r ? /ü @– Ð % i “ ¦, 7 £ x ‚ à Ìr _  l ó ø Í“ : r

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2. — ¤V R Ë • ¤X N Ë

7

£

x ‚ Ã Ì Ê ê\  r « Ñ[ þ t“ É r 30ì  r 1 l x î ß – ”  / B N „  l – Ð 5 Å q \ " f 200, 300, 400 C _  \ P % ƒo \  ¦ r ' Ÿ  % i  . \ P % ƒo  “ : r

•

¸\  ¦ 7 £ x † < Ê\     r « э  H € Œ ™& h  r (dark red grayish) Ò 

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³

ð€   + þ A © œ“ É r Å Ò  „    ‰ & ³p  â (SEM:scanning electron microscope, JSM-6400) Ü ¼– Ð 8 £ ¤& ñ % i Ü ¼ 9,  o† < Æ| ¾ ӏ : r& h 

“

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£ ¤& ñ % i  . ¢ ¸ 7 £ x ‚ Ã Ì  ) a ~ à Ì} Œ •_    & ñ ½ ¨› ¸  H X-‚    r] X 

>

 (XRD:X-ray diffractometer, Siemens D5005)\  ¦ s 6   x

# Œ › ¸  % i “ ¦,  6   x ) a X-‚  _   © œ“ É r 1.5418 ˚ A s % 3 



. Å Ò  % ò % i “ É r 2θ\  ¦ 10 ∼ 60  s – Ð % i  . UV- Vis-NIR (ultraviolet-visible-near infrared) ì  rF g F g • ¸>  (spectrophotometer, Shimadzu MPS-5000)\  ¦ s 6   x # Œ z 

´“ : r \ " f F g f  ¨ à º\  ¦ 8 £ ¤& ñ # Œ F g † < Æ& h “   \  -t  {  ç ß –  

`

 ¦ % 3 % 3  . „    î  r ì ø Í _  + þ AI , Å Ò' Ÿ  r ç ß –, „    î  r ì ø Í  0

l

x • ¸ Õ ªo “ ¦ s 1 l x • ¸\  ¦ ½ ¨ l  0 A # Œ F g Ä »l  ~ ½ ӄ   : £ ¤$ í

`

 ¦ › ¸  % i  . F g Ä »l  ~ ½ ӄ   : £ ¤$ í “ É r $  [ þ t s  β-In 2 Se 3

~ Ã

Ì} Œ •_  : £ ¤$ í `  ¦ 8 £ ¤& ñ ô  Ç ~ ½ ÓZ O  [27]@ /– Ð r ' Ÿ  % i  . 7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ •õ  200, 300, 400 C – Ð 30ì  r 1 l x î ß – ”  / B N „  l 

–

Ð\ " f \ P % ƒo ô  Ç β-In 2 S 3 ~ à Ì} Œ •`  ¦ @ / © œÜ ¼– Ð 8 £ ¤& ñ % i  .

III. + s ÇÊ Ý õ m Í w в  o

Å

Ò  „    ‰ & ³p  â `  ¦ s 6   x # Œ 7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ •`  ¦

› '

a ¹ 1 Ïô  Ç   õ  L :  F M ô  Ç ³ ð€    © œõ  é ß –€    © œ`  ¦ % 3 `  ¦ à º e ” % 3  Ü

¼ 9, Õ ª ¿ ºa   H €  • 1.2 µm– Ð 8 £ ¤& ñ ÷ &% 3  . ¢ ¸ \  -t  ì  r í

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é # Qo _   â Ä º [S]/[In] q  1.27– Ð" f q “ §& h  ç  H{ 9 ô  Ç $ í ì

 r q – Ð › ¸$ í ÷ &% 3 “ ¦, β-In 2 S 3 ~ à Ì} Œ •_   â Ä º S 6 fµ 1 Ï$ í s  Z

 }“ É r 7 á x À Ó_  $ í ì  r Ü ¼– Ð [S]/[In] q  0.82– Ð" f Ins  ´ ú §s 

”

> r F  (In-rich)ô  Ç . Fig. 1\  β-In 2 S 3 é # Qo ü < ~ à Ì} Œ •_  X-‚    r] X  Û ¼& 7 ˜à Ô! 3 [ þ t`  ¦   ? /% 3  . 8 £ ¤& ñ  ) a X-‚    r] X  Û

¼& 7 ˜à Ô! 3 \    è ß – x ß ¼ (peak)\  @ /ô  Ç €   t à º (h k l)

(3)

Fig. 1. X-ray diffraction patterns of as-deposited film (a), β-In 2 S 3 films annealed at 200 C (b), 300 C (c), 400 C (d) for 30 min in vacuum, β-In 2 S 3 bulk (e).

Fig. 2. SEM images for the sample surfaces of as- deposited β-In 2 Se 3 films (a), annealed at 200 C (b), 300 C (c), and 400 C (d) for 30 min in vacuum.

° ú

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6   x # Œ > í ß – % i  .

1

d 2 = h 2 + k 2 a 2 + l 2

c 2 (1)

>

í ß –ô  Ç €  ç ß –  o _  ° ú כs  In 2 S 3 é ß –  & ñ `  ¦ 8 £ ¤& ñ ô  Ç ì  r ´ ú ˜ X-

‚

   r] X > _  €  ç ß –  o  ° ú כ [29]õ  ¸ ú ˜ { 9 u  % i  . Fig. 1\ 

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f 7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ • (a)õ  200 C – Ð \ P % ƒo ô  Ç r « Ñ (b) \ " f  H  r] X  x ß ¼\  ¦ ^  ¦ à º \ O % 3 “ ¦, 300 C – Ð \ P % ƒo ô  Ç r

« Ñ (c)\ " f  H  r] X  x ß ¼    l  r  Œ •  9, 400 C

–

Ð \ P % ƒo ô  Ç r « Ñ (d)\ " f  H 2θ  27.4   H % ƒ\ " f & ñ ~ ½ Ó& ñ

>

 β-In 2 S 3 _  (1 0 9) €  \  @ /ô  Ç  r] X  x ß ¼   z Œ ™`  ¦ ^  ¦ Ã

º e ”  . ¢ ¸   É r  Œ •“ É r  r] X  x ß ¼, 7 £ ¤ 2θ  14.2   H % ƒ\ " f (1 0 3), 28.6   H % ƒ\ " f (2 0 6), 33.2   H % ƒ\ " f (0 0 12), 43.6   H % ƒ\ " f (1 0 15), 47.7   H % ƒ\ " f (2 2 12), 55.9



 H % ƒ\ " f (4 1 9) €  \  @ /ô  Ç  r] X  x ß ¼   z Œ ™`  ¦ ^  ¦ à º e ”

 . X-‚    r] X  Û ¼& 7 ˜à Ô! 3 Ü ¼– РÒ'  S X ‰ “  ô  Ç   õ  7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ •“ É r & ñ ~ ½ Ó& ñ >  ½ ¨› ¸s “ ¦ ¶ ú ˜‚ ½ Ó  © œÃ º  H a=7.62

˚ A ü < c=32.33 ˚ A – Ð   z Œ ¤ . s  ° ú כ“ É r  ƒ  ½ ¨ [ þ t _    õ  [

þ t [2,10,30] Õ ªo “ ¦ JCPDS [29]\    è ß – a=7.619 ˚ A ü <

c=32.329 ˚ A _  ° ú כõ • ¸ ¸ ú ˜ { 9 u † < Ê`  ¦ · ú ˜ à º e ”  .   " f ”   /

B

N 7 £ x ‚ à Ìô  Ç β-In 2 S 3 ~ à Ì} Œ •“ É r 7 £ x ‚ Ã Ì Ê ê 400 C s  © œ_  “ : r • ¸\ 

"

f \ P % ƒo † < ÊÜ ¼– Ð" f (1 0 9) ~ ½ ӆ ¾ ÓÜ ¼– Ð ‚  × þ ˜& h Ü ¼– Ð $ í  © œ  ) a



  & ñ (poly-crystalline) + þ AI _  β-In 2 S 3 “    כ Ü ¼– Ð Ò q ty Œ •

 )

a  . Fig. 2 (a)  H 7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ •_  „  >  ~ ½ ÓØ  ¦ Å Ò



 „    ‰ & ³p  â (FESEM:field emission scanning electron microscope) ³ ð€   + þ A © œ`  ¦    · p Õ ªa Ë >s  . Fig. 2 (b)  H 200 C – Ð \ P % ƒo ô  Ç r « Ñ_  ³ ð€   + þ A © œ`  ¦   ? /  H Õ ªa Ë >

Ü

¼– Ð \ P % ƒo  t  · ú §“ É r r « Ñü < ² ú ˜o  €  • 320 nm ß ¼l _  ì ø Í

"

é

¶+ þ A — ¸€ ª œ (semi-circular shaped) ½ ¨› ¸_  { 9  [ þ t s  S X ‰ í ß – ]

jô  ǝ ) a (diffusion limited) $ í  © œ`  ¦ % i 6 £ §`  ¦ · ú ˜ à º e ”  .

Fig. 2 (c) ü < 2 (d)  H 300 C ü < 400 C \ " f \ P % ƒo ô  Ç r 

«

Ñ[ þ t \  @ /ô  Ç „  >  ~ ½ ÓØ  ¦ Å Ò  „    ‰ & ³p  â ³ ð€   + þ A © œ`  ¦ y Œ • y

Œ

•    · p . \ P % ƒo  “ : r • ¸_  7 £ x ü <  8Ô  ¦ # Q 200 C – Ð \ P 

%

ƒo ô  Ç r « Ñ\ " f › ' a8 £ ¤ ÷ &  H ì ø Í" é ¶+ þ A — ¸€ ª œ ½ ¨› ¸_  { 9  [ þ t

“ É

r ó ø Í © œ ½ ¨› ¸– Ð ³ ð€  \   ê ø Í >  $ í  © œ  9, 300 C – Ð \ P 

%

ƒo ô  Ç r « Ñ_  ³ ð€  \ " f  H €  • 400 nm ß ¼l _  ó ø Í © œ { 9   [

þ

t s   € ª œ >  ì  r Ÿ í “ ¦ e ” 6 £ §`  ¦ · ú ˜ à º e ”  . 400 C – Ð \ P 

%

ƒo ô  Ç  â Ä º €  • 160 nm ß ¼l \  ¦ ”   ó ø Í © œ ½ ¨› ¸ { 9  [ þ t s

 q “ §& h  ç  H{ 9  >  ì  r Ÿ í  9, 300 C – Ð \ P % ƒo ô  Ç r « Ñ

\

 q K  ³ ð€    } 9 l  ¢ ¸ô  Ç a % ~  & ’ 6 £ §`  ¦ ^  ¦ à º e ”  . X-‚  



r] X  ì  r$ 3  x 9 „  >  ~ ½ ÓØ  ¦ Å Ò  „    ‰ & ³p  â ì  r$ 3 Ü ¼– РÒ'  400 C – Ð \ P % ƒo  ½ + É  â Ä º   & ñ $ í õ  ³ ð€   + þ AI   © œ a % ~

“

É r β-In 2 S 3 ~ à Ì} Œ •`  ¦ $ í  © œr ~  ´ à º e ” 6 £ §`  ¦ · ú ˜ à º e ” % 3  . 7 £ x

‚ Ã

Ì  ) a β-In 2 S 3 ~ à Ì} Œ •õ  200 C ∼ 400 C  t  \ P % ƒo ô  Ç r 

«

Ñ[ þ t \  @ / # Œ z  ´“ : r \ " f F g f  ¨ à º Û ¼& 7 ˜à Ô! 3 `  ¦ 8 £ ¤& ñ % i 



. — ¸Ž  H r « Ñ_  F g f  ¨ à º Û ¼& 7 ˜à Ô! 3 \ " f 720 nm   H % ƒ\ " f _

 / å L  ô  Ç F g f  ¨ à º_  7 £ x \  ¦ › ' a8 £ ¤ % i  . s  / å L  ô  Ç 7 £ x 



 H f ” ] X  „  s  \  -t  {  ½ ¨› ¸\  ¦ ”   ì ø ͕ ¸^ ‰_  l œ í f  ¨ Ã

º é ß –\ " f F g f  ¨ à º\  _ ô  Ç  כ { 9  à º e ”   [12]. F g f  ¨ à º >  Ã

º ፠ H l œ í f  ¨ à º é ß –   H % ƒ F g f  ¨ à º Û ¼& 7 ˜à Ô! 3 [ þ t – РÒ'  >  í

ß –½ + É Ã º e ” “ ¦ { 9   F g € ª œ  \  -t  hν_  † < Êà º– Ð" f   ? /

#

Q”   . Fig. 3“ É r F g f  ¨ à º > à º_  ] jY  L õ  { 9   F g \  -t 



s _  › ' a > \  ¦    · p  כ s  . f ” ] X  „  s { 9  M : F g f  ¨ à º

>

à ºü < { 9   F g   \  -t   s _  › ' a >   H  6 £ § d ”  (2)ü <

° ú    [31].

(αhν) 2 ∼ (hν − E g ) (2)

(4)

Fig. 3. Photon energy vs. (αhν) 2 of β-In 2 S 3 films for as-deposited (a) and annealed at 200 C (b), 300 C (c), 400 C (d) for 30 min in vacuum.

#

Œl " f, h  H Planck  © œÃ ºs “ ¦, ν  H { 9   F g € ª œ _  ”  1 l x Ã

ºs  . F g † < Æ& h “   \  -t  ç ß –   (E g ) “ É r Fig. 3 \     · p



ü < ° ú  s  (αhν) 2 =0 \  @ /ô  Ç • ¸³ ð_  f ” ‚  `  ¦ ü @¶ ú š † < ÊÜ ¼– Ð

"

f % 3   H  . f ” ] X  F g „  s   H s  Õ ªa Ë >\ " f f ” ‚  \  _ K  S X ‰

“

 ÷ &“ ¦, 7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ •õ  \ P % ƒo ô  Ç ~ à Ì} Œ •[ þ t _  F g † < Æ

&

h “   {  ç ß –  “ É r 1.7 eV ∼ 1.84 eV  t     % i  . s  ° ú כ[ þ t

“ É

r   É r q 5 p w ô  Ç III-VI7 á ¤  o½ + ËÓ ü t ì ø ͕ ¸^ ‰“   β-In 2 Se 3 [27], InS [32] ü < q “ § | ¨ c à º e ” “ ¦, γ-In 2 S 3 _  \  -t  {  ç ß –  õ 



_  q 5 p w   [32]. F g Ä »l  ~ ½ ӄ   : £ ¤$ í z  ´+ « >“ É r β-In 2 S 3

~ Ã

Ì} Œ • ³ ð€  \  Å Ò{ 9  ) a F g ` O Û ¼ (light pulse)\  _ K  Ò q t$ í

 )

a „    î  r ì ø Í [ þ t s  ~ à Ì} Œ •`  ¦ – Ð| 9  Q" f F g ` O Û ¼ Å Ò{ 9 

÷

&  H ì ø Í@ /¼ # \  • ¸² ú ˜ >  ÷ &  H  כ Ü ¼– Ð s \  @ /ô  Ç ` O Û ¼_ 



1 l x`  ¦ á Ôo Ó  rá Ô (pre-amplifier)– Ð 7 £ x; Ÿ ¤ # Œ š ¸z  ´– ÐÛ ¼ ï á

Ô (oscilloscope)– Ð › ' a8 £ ¤ ½ + É Ã º e ”  . Fig. 4  H 7 £ x ‚ Ã Ì  ) a β- In 2 S 3 ~ à Ì} Œ • (a)õ  400 C – Ð \ P % ƒo ô  Ç r « Ñ (b)\   s # Q Û

¼ „  · ú š (bias voltage)`  ¦   % 3 `  ¦ M :_  F g Ä »l  ~ ½ ӄ   : £ ¤$ í

`

 ¦    · p š ¸z  ´– ÐÛ ¼ ïá Ô_   ² D G (trace) s  . F g ` O Û ¼

í

 H ç ß –& h Ü ¼– Ð r « Ñ_  ³ ð€  \  › ¸ ÷ &€   β-In 2 S 3 ³ ð€  \ " f

„

   î  r ì ø Í  Ò q t$ í  ) a  . s M : Ò q t$ í  ) a „    î  r ì ø Í   H F g

` O

Û ¼ t 5 Å q ÷ &  H r ç ß –õ    t   H í  H ç ß –_  2> h_  r ç ß – % ò

%

i Ü ¼– Ð  ¾ º# Q”   . 7 £ ¤ „    î  r ì ø Í  r « Ñ\  ¦ – Ð| 9  Q

"

f ì ø Í@ /¼ # _  „  F G \  • ¸² ú ˜ l  r  Œ •   H r ç ß –\  Á º › ' a ô  Ç

% ò

% i õ  F g ` O Û ¼   t   H í  H ç ß –_  „    î  r ì ø Í [ þ t s  ™ è Y >

÷ &  H % ò % i Ü ¼– Ð  ¾ º# Q”   .   " f F g ` O Û ¼   t 



 H í  H ç ß –_  „    î  r ì ø Í [ þ t s  ™ èY > ÷ &  H % ò % i \ " f  H „    î

 r ì ø Í [ þ t s  t à º † < Êà º& h Ü ¼– Ð y Œ ™™ è >   ) a  . Å Ò' Ÿ  r ç ß –

Fig. 4. Oscilloscope trace of the photoexcited carrier for : (a) as-deposited, (b) β-In 2 S 3 film annealed at 400 C for 30 min in vacuum.

(transit time)“ É r r ç ß –\    É r „  · ú š_     oÖ  ¦ s     l  r 



Œ

•½ + É M : t _  r ç ß –Ü ¼– Ð & ñ _ ÷ &Ù ¼– Ð s \  ¦ & ñ S X ‰ >    

&

ñ l  0 A # Œ r ç ß –\    É r „  · ú š_     oÖ  ¦ (dV /dt)`  ¦ · ú ˜



  ô  Ç  [33]. Fig. 5  H Fig. 4\  ¦ p ì  r # Œ    · p  כ Ü ¼

–

Ð" f x» ¡ ¤ Ü ¼– Ð    · p r ç ß –_  l ï  r“ É r F g  F G Ü ¼– Ð Ò q t$ í

 )

a „    î  r ì ø Í \  _ K  + þ A$ í ÷ &  H œ íl  „  0 A þ j@ /“   r 

&

h Ü ¼– Ð % i Ü ¼ 9, ¶ ú š{ 9  ) a Õ ªa Ë >“ É r ì ø Í@ /¼ #  „  F G Ü ¼– Ð s 1 l x

# Œ » ¡ ¤& h  ) a „    î  r ì ø Í [ þ t – Ð “  ô  Ç dV /dt ¿ º× ¼ Qt > 



  l  r  Œ •½ + É M : t _  Å Ò' Ÿ  r ç ß –`  ¦ 8 £ ¤& ñ l  0 AK " f dV /dt  { 9 & ñ ô  Ç Â Òì  r`  ¦ S X ‰ @ /ô  Ç Õ ªa Ë >s  . Fig. 5_  (a)  H

\ P

% ƒo  „  _  ~ à Ì} Œ •\  @ /ô  Ç  כ s “ ¦, (b)  H 400 C – Ð \ P % ƒ o

 # Œ + þ A$ í  ) a β-In 2 S 3 ~ à Ì} Œ •\  @ /ô  Ç  כ Ü ¼– Ð 8 £ ¤& ñ  ) a Å Ò' Ÿ  r

ç ß –“ É r y Œ •y Œ • 24 µsü < 17 µss % 3  . Fig. 4\ " f ^  ¦ à º e ”   H



ü < ° ú  s , š ¸z  ´– ÐÛ ¼ ïá Ô Û ¼ß ¼ 2 ; (screen)  © œ_  à ºf ”  ¼ # 

†

¾ Ó (vertical deflection)s  0 AA á ¤ (upward or positive) Ü ¼– Ð

†

¾ Ó €   € ª œ/ B N ³ ðÀ Ó (hole drift)s “ ¦,  A A á ¤ (downward or

negative) Ü ¼– Ð † ¾ Ó €   „    ³ ðÀ Ó (electron drift)s  . ¢ ¸

(5)

Fig. 5. dV/dt vs. t for the samples: as-deposited (a), and annealed at 400 C (b). The inset shows the magnified ones for (a) and (b).

ô

 Ç „    s 1 l x • ¸ü < „    î  r ì ø Í  0 l x • ¸  H Ó ü t o & h “   — ¸4 S qõ  I. P. Batra 1 p x [34] _  s  : r`  ¦ s 6   x # Œ > í ß –½ + É Ã º e ” Ü ¼ 9,

„

   î  r ì ø Í _  Å Ò' Ÿ  r ç ß – t T ü <   # Qï  r „  · ú š  s _  › ' a > 



 H

t T = dD

µV (3)

s

“ ¦, # Œl " f d  H r « Ñ_  ¿ ºa , D  H ¿ º „  F G (top and bottom electrodes)  s _   o , µ  H ³ ðÀ Ó s 1 l x • ¸ Õ ªo 

“

¦ V   H   # Qï  r „  · ú šs  . r ç ß –\  @ /ô  Ç dV/dt_  Õ ªA á Ô

–

РÒ'  8 £ ¤& ñ  ) a t T ü < d ”  (3)Ü ¼– РÒ'  ¿ ºa  1.2 µm“   7 £ x

‚ Ã

Ì  ) a β-In 2 S 3 ~ à Ì} Œ •_  ³ ðÀ Ó € ª œ/ B N s 1 l x • ¸  H µ h ∼ 2.1 × 10 −2 cm 2 /Vs s % 3 “ ¦, 400 C – Ð \ P % ƒo   ) a ~ à Ì} Œ •\  @ / # Œ

½

¨ô  Ç ³ ðÀ Ó € ª œ/ B N s 1 l x • ¸  H µ h ∼ 1.1 × 10 −2 cm 2 /Vs s % 3 



. 7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ •õ  400 C – Ð \ P % ƒo   ) a ~ à Ì} Œ •\  @ / ô

 Ç ³ ðÀ Ó € ª œ/ B N s 1 l x • ¸  H III-VI7 á ¤  o½ + ËÓ ü t ì ø ͕ ¸^ ‰\ " f InS (29 cm 2 /Vs) [35] ˜ Ð   H  ™ è  Œ •“ É r ° ú כs t ë ß – β-In 2 Se 3

~ Ã

Ì} Œ • (8.1 × 10 −2 cm 2 /Vs) [27] ü <  H  _  { 9 u ô  Ç . 7 £ x ‚ à Ì

 )

a β-In 2 S 3 ~ à Ì} Œ •õ  400 C \ P % ƒo   ) a ~ à Ì} Œ •_  r « Ñ ³ ð€  \ 

"

f „    î  r ì ø Í  0 l x • ¸  H y Œ •y Œ • ∼ 6.4 × 10 18 / cm 3 õ  ∼1.7

× 10 19 /cm 3 s % 3 Ü ¼ 9, s  ° ú כ“ É r InS (∼ 10 19 /cm 3 ) [35] ü <



 H  _  { 9 u  % i “ ¦, β-In 2 Se 3 ~ à Ì} Œ • (∼ 2.4 × 10 16 /cm 3 ) [27] ˜ Ð   H  H ° ú כs % 3  . # Œl " f „    î  r ì ø Í  0 l x • ¸_  >  í

ß – [34]“ É r n (d,t)= (κ/4πqµ)t −1 `  ¦ s 6   x % i Ü ¼ 9, κ  H Ä »

„

   © œÃ º– Ð" f é ß –  & ñ β-In 2 S 3 _  Ä »„    © œÃ º ° ú כ“   6.5\  ¦ 2 [

# Œ > í ß – % i   [32]. 7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ •õ  400 C \ P 

%

ƒo   ) a ~ à Ì} Œ •“ É r à ºf ”  ¼ # † ¾ Ós  0 AA á ¤ Ü ¼– Ð † ¾ Ó l  M :ë  H \  € ª œ /

B

N ³ ðÀ Ós “ ¦ p+ þ A „  • ¸s  . s   H Marsillac 1 p x [36] s  β- In 2 Se 3 \  @ /K  ˜ Г ¦ô  Ç  כ õ • ¸ ¸ ú ˜ { 9 u ô  Ç . ¢ ¸ \ P % ƒo  “ : r

•

¸\  ¦ 7 £ x † < Ê\     € ª œ/ B N s 1 l x • ¸ü < Å Ò' Ÿ  r ç ß –“ É r y Œ ™™ è 

%

i Ü ¼ , „    î  r ì ø Í  0 l x • ¸  H 7 £ x  % i  .

IV. + s Ç Â ] Ø

”

 / B N7 £ x ‚ à ÌZ O Ü ¼– Ð ITO l ó ø Í 0 A\  β-In 2 S 3 ~ à Ì} Œ •`  ¦ ] j Œ •

# Œ ”  / B N „  l – Ð 5 Å q \ " f 30ì  r 1 l x î ß – 200 C ∼ 400 C   t

 \ P % ƒo ô  Ç Ê ê X-‚    r] X , ì  rF g F g • ¸> , Å Ò  „    ‰ & ³p 

 â

z  ´+ « > Õ ªo “ ¦ F g Ä »l  ~ ½ ӄ   : £ ¤$ í `  ¦ › ¸ ô  Ç   õ   H  6 £ § õ

 ° ú  s  כ ¹€  •½ + É Ã º e ”  . X-‚    r] X  z  ´+ « >   õ \  _  €  

¶ ú

˜‚ ½ Ó  © œÃ º  H a=7.62 ˚ A ü < c=32.33 ˚ A – Ð" f & ñ ~ ½ Ó& ñ > “     

†

< Ê Û ¼x 3 A q ½ ¨› ¸s  9, \ P % ƒo  “ : r • ¸\  ¦ 7 £ x † < Ê\     (1 0 9) ~ ½ ӆ ¾ ÓÜ ¼– Ð ‚  × þ ˜& h Ü ¼– Ð $ í  © œ H † d`  ¦ · ú ˜ à º e ” % 3  . Å Ò  „  



 ‰ & ³p  â z  ´+ « >\ " f  H ³ ð€  “ É r In s  ´ ú §s  ” > r F    H  כ Ü ¼

–

Ð   z Œ ¤“ ¦, \ P % ƒo  “ : r • ¸\  ¦ 7 £ x † < Ê\     { 9 >  ß ¼l 

&

h   & t €  " f   & ñ  o÷ &  H  כ Ü ¼– Ð   z Œ ¤ . z  ´“ : r \ " f 8

£ ¤& ñ  ) a F g † < Æ& h “   \  -t  {  ç ß –  “ É r 7 £ x ‚ Ã Ì  ) a β-In 2 S 3 ~ à Ì} Œ •

\

 @ / # Œ  H 1.84 eV s % 3 “ ¦, 400 C – Ð \ P % ƒo ô  Ç r « Ñ\ 

@

/ # Œ  H 1.7 eV – Ð \ P % ƒo  “ : r • ¸ 7 £ x † < Ê\     y Œ ™™ è

% i  . F g Ä »l  ~ ½ ӄ   : £ ¤$ í z  ´+ « >Ü ¼– РÒ'  7 £ x ‚ Ã Ì  ) a β-In 2 S 3

~ Ã

Ì} Œ •õ  400 C – Ð \ P % ƒo ô  Ç r « Ñ\  @ / # Œ  H € ª œ/ B N ³ ðÀ Ó s

% 3  . ¢ ¸ô  Ç s 1 l x • ¸, „    î  r ì ø Í  0 l x • ¸ Õ ªo “ ¦ Å Ò' Ÿ  r  ç

ß –`  ¦ > í ß –½ + É Ã º e ” % 3 Ü ¼ 9, Õ ª ° ú כ“ É r y Œ •y Œ • µ h ∼ 2.1 × 10 −2 cm 2 /Vs ü < µ h ∼ 1.1 × 10 −2 cm 2 /Vs, ∼ 6.4 × 10 18 /cm 3 ü <

∼ 1.7 × 10 19 /cm 3 Õ ªo “ ¦ 24 µsü < 17 µs– Ð > í ß –÷ &% 3  .



 " f β-In 2 S 3 ~ à Ì} Œ •“ É r  ü @‚   % ò % i \ " f_  F g„    x 9 F g l

„  $ í 6 £ x6   x`  ¦ 0 Aô  Ç „    í ß –\ O _  F « і Ð" f s 6   x 0 p x 



.

V. P c p 8 ý ò k >

s

 ƒ  ½ ¨  H 2007¸  • ¸  â  © œ@ /† < Ɠ § † < ÆÕ ü t”  < É ª t " é ¶  \ O ƒ  

½

¨q  (RPP-2007-019)\  _  # Œ à º' Ÿ ÷ &% 3 Ü ¼ 9, s \  y Œ ™



× ¼w n m  .

(6)

Y

c p w Š à U Ø ”  ô

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Physical Properties of β-In 2 S 3 Thin Films grown by Using Vacuum Evaporation

Jeoung Ju Lee, Jong Duk Lee, Byeong Yeol Ahn and Kun Ho Kim Department of Physics and Research Institute of Natural Science,

Gyeongsang National University, Jinju 660-701 (Received 2 May 2008)

β-In

2

S

3

films were prepared on indium-tin-oxide (ITO)-coated glass substrates by using thermal evaporation. The crystallization was achieved by annealing the as-deposited films in a vacuum electric furnace. X-ray diffraction spectra showed that the crystal structure of the β-In

2

S

3

films was that of a tetragonal defect spinel structure with lattice constants a = 7.62 ˚ A and c = 32.33 ˚ A and that the crystals were preferentially grown with a (1 0 9) orientation. The optical energy band gap, measured at room temperature, of the as-deposited β-In

2

S

3

film was 1.84 eV and decreased to about 1.7 eV upon annealing in a vacuum electric furnace at temperatures from 200

C to 400

C. The dynamical behavior of the charge carriers in the β-In

2

S

3

film was investigated by using photoinduced discharge characteristics (PIDC) techniques.

PACS numbers: 68.55.-a, 78.20.-e

Keywords: β-In

2

S

3

, Annealing effect, Optical band gap, PIDC

E-mail: [email protected]

수치

Fig. 1. X-ray diffraction patterns of as-deposited film (a), β-In 2 S 3 films annealed at 200 ◦ C (b), 300 ◦ C (c), 400 ◦ C (d) for 30 min in vacuum, β-In 2 S 3 bulk (e).
Fig. 4. Oscilloscope trace of the photoexcited carrier for : (a) as-deposited, (b) β-In 2 S 3 film annealed at 400 ◦ C for 30 min in vacuum.
Fig. 5. dV/dt vs. t for the samples: as-deposited (a), and annealed at 400 ◦ C (b). The inset shows the magnified ones for (a) and (b).

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