SUS304z º ÷ m ǔ ôc Ü R Œ £ ;w Š à à ŠŒ Ÿ «; c" e  ¹ ÅP à à ŠŒ Ÿ «4 T U — ¤V R ËÊ Ý QMS õ u § T “ Ó Þ” X ¢ ” ¼ Ä Z Ø° q • ¤X N Ë

SUS304z º ÷ m ǔ  ôc Ü R Œ £ ;w Š à à ŠŒ Ÿ «; c" e  ¹ ÅP  à à ŠŒ Ÿ «4 T U  — ¤V R ËÊ Ý QMS õ u § T  “ Ó Þ” X ¢ ” ¼ Ä Z Ø°  q • ¤X N Ë

ý

—

¡Š û B¬ £ ^∗ · , > ÷ 7 Bg ` @ · + ä   ¢ 9é s

ô 

Dz D G ³ ðï  r õ † < ƃ  ½ ¨" é ¶ Ó ü t o ³ ðï  r Â Ò ”  / B NG ' p' , @ /„   305-600

I. Arakawa

Department of Physics, Gakushuin University, Tokyo, Japan (2005¸   2 Z 4 21{ 9  ~ à Î6 £ §, 2005¸   6 Z 4 2{ 9  þ j7 á x‘ : r ~ à Î6 £ §)

SUS304 F « Ñ, „  K ƒ   ³ ð€  % ƒo , 2é ß – ' ˜ Ð* 3 á Ô C l , Õ ªo “ ¦ & h { © œô  Ç Ï ã L l  õ & ñ `  ¦ : Ÿ x K  • ¸² ú ˜· ú š§ 4 s  10

⁻¹⁰

Pa“   F G “ ¦”  / B N © œu \  ¦ ] j Œ • % i  . s   © œu \  F G “ ¦”  / B N6   x s “ : r > s t  [ j > hü < | 9 | ¾ Óì  r$ 3 l  ô  Ç

>

h\  ¦  ҂ Ã Ì “ ¦ s “ : r > s t _  „  o  s “ : r õ  ESD s “ : r ì  r Ÿ í, · ú š§ 4 : £ ¤$ í , Õ ªo “ ¦ ï ß –À Ól ^ ‰  Òì  r· ú š : £ ¤$ í

`

 ¦ › ¸  % i  . F G “ ¦”  / B N \ " f  Òì  r· ú š z  ´+ « >  õ  ¸ ú ˜ · ú ˜ 9”   @ /– Ð 6   x l _  ï ß –À ÓÛ ¼_  @ / Òì  r“ É r H

2

e ” s  S X

‰ “  ÷ &% 3 Ü ¼
 ¸ ú ˜ · ú ˜ 9t t  · ú §“ É r fluorine • ¸ { 9 Â Ò Ÿ í† < Ê÷ &# Q e ” 6 £ §`  ¦ · ú ˜ à º e ” % 3  .

PACS numbers: 07.03.K, 07.03.D

Keywords: F G “ ¦”  / B N, „  · ú š,  Òì  r· ú š, „   Ø  æ  » 1 Ïo , à º™ è

I. " e  ] Ø

” ¸
 " é ¶  l Õ ü t ° ú  “ É r l œ íõ † < Æ_  µ 1 τ  \   H F G' õ A& ñ ”   /

B

N¨ 8 Š â \  @ /ô  Ç כ ¹½ ¨ / å L   >  7 £ x  “ ¦ e ”   H X < Õ ª  

¨ 8

Š ⠓ É r œ í“ ¦”  / B N s 
 F G “ ¦”  / B N (extremely high vacuum, XHV) l Õ ü t – Ð 0 p x  . Õ ª Q
 ’  ø @$ í e ”   H F G “ ¦”  / B N µ

1 ÏÒ q ts 
 > 8 £ ¤ l Õ ü t“ É r  f ”  S X ‰ w n ÷ &t  · ú §€ Œ ¤“ ¦  € ª œô  Ç F 

«

Ñ, ] X  , C l ~ ½ ÓZ O  1 p x`  ¦ s 6   xô  Ç ƒ  ½ ¨ ”  ' Ÿ ÷ &“ ¦ e ”   [1–3]. XHV\  ¦ z  ´‰ & ³ l  0 AK " f  H 6   x l \ " f_  » 1 ÏÛ ¼ € ª œ

`

 ¦ ×  ¦ s   H  כ s  B Ä º ×  æ כ ¹  . t F K  t  Û ¼_ …“  Y UÛ ¼ Û ¼

 9

, · ú ˜À Òp ³ o u ½ + ËF K, 1 l x, Õ ªo “ ¦ w  ³ o u  ïh A 1 p x s  » 1 ÏÛ ¼

|

¾ Ós  & h “ É r ”  / B N F « і Ð · ú ˜ 94 R e ”  . : £ ¤ y  SUS304  H » 1 Ï

Û ¼| ¾ ӕ ¸ ´ ú §t  · ú §“ ¦ ° ú כs  q “ §& h  $ § 4 ½ + É ÷  rë ß –  m    /

B

N • ¸ ~ 1 l  M :ë  H \  ”  / B N6   x l  F « і Ð  © œ ´ ú §s   6   x ÷ &“ ¦ e ”

  [4, 5]. XHV\  ¦ z  ´‰ & ³ l  0 Aô  Ç ”  / B N6   x l _  ³ ð€  % ƒ o

 l Õ ü t – Ѝ  H „  K ƒ   , „  l l >  ƒ   , TiN  ïh A, BN  ï h A 1 p x s  e ”   H X < 6   x l _  » 1 ÏÛ ¼Ö  ¦“ É r ³ ð€  % ƒo  ~ ½ ÓZ O s 
 l

Õ ü t \     ´ ú §s  ² ú ˜ ”   . ‘ : r z  ´+ « >\ " f  H ? /Â Ò ³ ð€  `  ¦

 â

€  % ƒo ô  Ç + ' „  K ƒ   ô  Ç SUS304\  ¦ ”  / B N6   x l – Ð  6   x

% i  .

'

˜ Ð* 3 á ԍ  H “ ¦”  / B N s 
 œ í“ ¦”  / B N C l ÷  rë ß –  m   10

⁻¹⁰

Pa s  _  XHV z  ´‰ & ³\ • ¸  6   x s  0 p x  . ‘ : r

∗

E-mail: [email protected]; Tel: 042-868-5122 Fax: 042-868-5645

ƒ 

½ ¨  H { 9 ì ø Í& h “   ~ ½ ÓZ O Ü ¼– Ð XHV z  ´‰ & ³ # ŒÂ Ò\  › ' aô  Ç ƒ  

½

¨ Å Ò 3 l q& h s % 3 Ü ¼Ù ¼– Ð ™  ¥ y   6   x ÷ &  H ' ˜ Ð* 3 á Ô\  ¦ C  l

 © œu – Ð  6   x % i  . Õ ª Q
 XHV z  ´‰ & ³\   H B Ä º Z  }“ É r Ã

º™ è_  · ú š» ¡ ¤ q  (compression ratio) € 9 כ ¹ Ù ¼– Ð 
_  '

˜ Ð* 3 á Ԗ Ѝ  H # Q 9Ä ºÙ ¼– Ð ¿ º> h_  * 3 á Ô\  ¦ f ” § > =– Ð ƒ     

#

Œ  6   x % i  .

„ 

· ú š (total pressure) 8 £ ¤& ñ 6   x Ü ¼– Ð æ ¼s   H \ P 6 £ §F G „  o 

”

 / B N > s t  (hot cathode ionization gauge, s   s “ : r >  s

t  “ ¦ † < Ê)  H “ ¦”  / B N x 9  œ í“ ¦”  / B N 8 £ ¤& ñ \  V , o   6   x ÷ &

“

¦ e ” Ü ¼ 9 ‰ & ³F  10

⁻¹⁰

Pa s  _  F G “ ¦”  / B N  t  8 £ ¤& ñ ½ + É Ã º e ”

  H Ä »{ 9 ô  Ç ”  / B N > 8 £ ¤ l s l • ¸  . s “ : r > s t \  ¦ s 6   x

# Œ XHV t  8 £ ¤& ñ % ò % i `  ¦ V , y   H X <  H š ¸  כ ¹“  “ É r [ j

t – Ð ½ ¨ì  r ÷ &  H X < s [ þ t“ É r ƒ  $ í X-ray ´ òõ , „   Ø  æ  » 1 Ï o

 (electron stimulated desorption, ESD) s “ : r„  À Ó, Õ ªo 

“

¦ > s t  F « Ñ\ " f
š ¸  H » 1 ÏÛ ¼ (outgassing)s  . s 

×

 æ X-ray ´ òõ   H > s t _  c + t 7 ˜'  0 Au 
 Ï ã T l  1 p x`  ¦   Ë

¨# Q" f s \  ¦ é ß –  
 ×  ¦ s   H ~ ½ ÓZ O Ü ¼– Ð s p  K   ÷ &

%

3  .  © œ d ” y Œ • >  @ /¿ º÷ &“ ¦ e ”   H ESD s “ : r„  À Ӎ  H Å Ò

–

Ð > s t _  Õ ªo × ¼ „  F G \  Ø  æ[  t   H „   \  _ K  Ò q t$ í

 )

a  כ Ü ¼– Ð Õ ª € ª œ“ É r Õ ªo × ¼_  ß ¼l  x 9  F « Ñ, Õ ªo “ ¦ € 9   F '

pà Ô\ " f µ 1 ÏÒ q t   H \ P „    „  À Ó_  € ª œ\  _ K    & ñ  ) a   [6]. 1 l q{ 9 _  Leybold  r \ " f  H ESD „  À Ó\  ¦ é ß – l  0

Aô  Ç ì ø Í ó ø Í (reflector)`  ¦  © œ‚ à Ìô  Ç Extractor > s t \  ¦ [ j

>

 þ jœ í– Ð > hµ 1 Ï # Œ  © œ¾ ¡ § o % i   [7,8]. þ j  H \   H { 9 ‘ : r

-394-

s

“ r„  À Ó\ ¦ ì r o K ? /" f \  -t # Œõ l  (energy filter)– Ð ESD s “ : r„  À Óë ß –`  ¦ ] j ô  Ç AxTran > s t \  ¦ > hµ 1 Ï # Œ 8

£

¤& ñ % ò % i `  ¦ 10

⁻¹⁰

Pa  t  ± ú Æ ҍ  H X < $ í / B N % i   [9–11].



 " f s “ : r > s t _  ESD s “ : r_   Ž Ø  ¦ õ  % 3 ] jl Õ ü t“ É r / B I XHV µ 1 ÏÒ q tõ  > 8 £ ¤_  l ì ø Íl Õ ü t s  ÷ &Ù ¼– Ð s \  @ /ô  Ç ƒ  ½ ¨



 H ' ‘ é ß – ”  / B N l Õ ü t µ 1 τ  \  ß ¼>  l # Œ½ + É  כ Ü ¼– Ð ó ø Íé ß – ) a  .

 

² D G ”  / B N6   x l _  ~ ½ ÓØ  ¦ l ^ ‰| ¾ Ós  Á ºr  | ¨ c & ñ • ¸– Ð ± ú  “ ¦ 

€ 

 XHV 8 £ ¤& ñ ô  Ç> \ " f X-rayü < ESD s “ : r_   © œ  ñç ß –\  x 9  ] X

ô  Ç › ' aº  $ í s  B Ä º < É ª p  e ”   H Å Ò] j | ¨ c à º• ¸ e ” `  ¦  כ Ü

¼– Ð ˜ Г   .

‘

: r ƒ  ½ ¨\ " f  H ' ‘ é ß –í ß –\ O _  l ì ø Íl Õ ü t – Ð € 9 à º& h “   F G

“

¦”  / B N l Õ ü t_  ×  æ כ ¹$ í \  q Æ Ò# Q SUS304 ”  / B N F « і Ð 



© œ ™  ¥ô  Ç ~ ½ ÓZ O Ü ¼– Ð F G “ ¦”  / B N`  ¦ µ 1 ÏÒ q tr v   H ] X  ü < ~ ½ ÓZ O 

`

 ¦ ™ è> h % i  . Õ ªo “ ¦ F G “ ¦”  / B N6   x s “ : r > s t \ " f „   o

 s “ : r õ  ESD s “ : r_  ì  r o   Ž Ø  ¦ õ  „  · ú š 8 £ ¤& ñ Õ ªo “ ¦ QMS\  ¦ s 6   xô  Ç ï ß –À Ól ^ ‰  Òì  r· ú š : £ ¤$ í z  ´+ « >  õ \  ¦ ˜ Г ¦ ô 

Ç .

II. ÷ m Ç] M ö X ê sV 

Fig. 1“ É r ] j Œ • ) a  © œu _  > h| Ä Ì• ¸s  9 ”  / B N6   x l  (vac- uum chamber), f ” § > =– Ð ƒ     ) a ¿ º> h_  “ ¦”  / B N ' ˜ Ðì  r  

*

3 á Ô (turbomolecular pump, TMP), $ ”  / B N6   x  s  á Ô Ï þ

› * 3 á Ô, [ j > h_  s “ : r > s t , “ : r • ¸>  (resistance tem- perature device, RTD), Õ ªo “ ¦ 
_  QMS– Ð ½ ¨$ í ÷ &

#

Qe ”  .  © œu _  é ß –\  e ”   H * 3 á Ô[ þ t`  ¦ ] jü @ “ ¦  H Ï ã L l  (bake-out)6   x y ' – Ð  4 Re ” Ü ¼ 9 6   x l \  ¦ \ P  l  0 Aô  Ç

½ +

ɖ Ð
 pÏ þ ›á ԍ  H W = >  ? / Ò\  “ ¦& ñ % i “ ¦ \ P ’ < Hz  ´`  ¦ ×  ¦ s l  0 A # Œ W = > \  ¦ s ×  æ Ü ¼– Ð ] X ƒ   # Œ Ï ã L l  ´ òÖ  ¦`  ¦ Z  }% i  .

6  

x l   H SUS304 – Ð / B N ÷ &% 3 Ü ¼ 9 » 1 ÏÛ ¼| ¾ Ó`  ¦ ×  ¦ # Œ F G “ ¦

”

 / B N µ 1 ÏÒ q t`  ¦ ~ 1 >  l 0 A # Œ ? / ҍ  H „  K ƒ    % ƒo  

%

i  . — ¸Ž  H e  ¦E $ ™t  (flange)  H ] j› ¸ r  ³ ðr   ) a ½ ©  

¾

¡

§`  ¦  6   x # Œ Ï ã L l  Ê ê\  e  ¦E $ ™t _  \ P Ø Ÿ ‚ ½ Ó> à º_  s 

–

Ð Ò q tU  ´ à º e ”   H o ß ¼ (leak) \ O • ¸2 Ÿ ¤ % i  . Å Ò ' ˜ Ð ì

 r  * 3 á Ô (Pfeiffer Vacuum TMU 521)  H | 9 ™ è_  C l 5 Å q

6.5 × 10 s % Ü ¼ 9 ˜ Л ¸6 ™ è+ þ A ' ˜ Ðì  * á Ô (Alcatel ATP 80 C)_  C l 5 Å q • ¸  H 80 L/s s % 3 “ ¦ à º™ è_  · ú š» ¡ ¤ q   H 300 Ü ¼– Ð  ™ è  Œ •“ É r ¼ # \  5 Å qÙ þ ¡ . s “ : r > s t – Ѝ  H Stabil- ion > s t  (Granville-Phillips 370, IG

^A

), Extractor > s  t

 (Leybold IE514, IG

B

), Õ ªo “ ¦ AxTran> s t  (Ulvac ISX2, IG

C

)   6   x ÷ &% 3 Ü ¼ 9 ] j› ¸ r _   € ª œ\  _  €   þ

j™ è 8 £ ¤& ñ ° ú כ“ É r y Œ •y Œ • 1 × 10

⁻⁹

Pa, 2 × 10

⁻¹⁰

Pa, Õ ªo “ ¦ 5 × 10

⁻¹¹

Pa s % 3  . Table 1“ É r ] j› ¸ r \ " f ] jr ô  Ç  

€

ª œ`  ¦ & ñ o ô  Ç  כ s  . s  > s t [ þ t`  ¦ (  `  ¦ M : s “ : r„  À Ó

"

f– Ð ç ß –[ O `  ¦ { 9 Ü ¼&  Ò q tU  ´ à º e ”   H 8 £ ¤& ñ ° ú כ_  Ô  ¦î ß –& ñ ´ òõ 

\

 ¦ \ O E l  0 A # Œ > s t z o  " f– Ð & ñ €  Ü ¼– Ð  Å Ò ˜ Ðt 

·

ú §• ¸2 Ÿ ¤ f ” y Œ •Ü ¼– Ð ½ ¨Â Ò Q”   e  ¦E $ ™t \  > s t [ þ t`  ¦  ҂ Ã Ì 

%

i  . 6   x l \  ¦ Ï ã L  H 1 l xî ß –\   H 250

^◦

C  t  | n   H “ ¦“ : r6   x H

s ^  ¦ – Ð ƒ     ) a Extractor > s t – Ð · ú š§ 4 `  ¦ — ¸m '  % i  Ü

¼ 9, ï ß –À Ól ^ ‰_   Òì  r· ú š 8 £ ¤& ñ \   H Pfeiffer  r _  200 amu Prisma QMS   6   x ÷ &% 3  .

Fig. 1. Schematic diagram of extremely high vacuum

system. Key abbreviations, IG: hot cathode ioniza-

tion gauge; CFF: con-flat flanges; TMP: turbomolecu-

lar pump; DP: dry pump; RTD: resistance temperature

device.

Fig. 2. Residual gas partial pressure with ion current before bakeout the chamber as a function of atomic mass unit.

Fig. 3. Residual gas partial pressure with ion current in- tensity after bakeout the chamber as a function of atomic mass unit. The main residual gases were H

2

and F (m/e

= 19).

III. + s ÇÊ Ý õ m Í À X Ø8 ý

1. SUS304 à à ŠŒ Ÿ «“ Ó ÞM 8 ý Œ £ ;w Š à à ŠŒ Ÿ « ®  ot  

z 

´+ « >_  ' Í é ß –> – Ð ô  ǁ  • ¸ Ï ã L l   ) a & h s  \ O   H SUS304

”

 / B N6   x l \  ¦ 1 × 10

⁻⁷

Pa  t  C l  % i  . Fig. 2  H · ú š§ 4  1.66 × 10

⁻⁷

Pa \ " f ‘ : r ï ß –À Ól ^ ‰_  Û ¼& 7 ˜à Ô! 3 s  9 ŠҖ Ð H

2

(m/e = 2) ü < H

2

O (m/e = 18)  e ” % 3 “ ¦ ™ è| ¾ Ó_  CO (m/e = 28) ü < CO

2

(m/e = 44) • ¸  Ž Ø  ¦ ÷ &% 3  . Õ ª Ê ê 6   x l

\  ¦ W = > – Ð  “ ¦ 1é ß –> – Ð “ : r • ¸\  ¦ " f" fy  `  ¦  9 240

^◦

C – Ð 4{ 9  1 l xî ß – Ï ã L l \  ¦ > 5 Å q % i Ü ¼ 9 Ï ã L l \  ¦ " 3 Æ Ò“ ¦  © œ“ : r \ " f _  { 9 “ É r · ú š§ 4 “ É r 10

⁻⁹

Pa s % 3  . 2é ß –> – Ð “ : r • ¸\  ¦ 150

^◦

C



t   r  `  ¦  9 €  • 100 r ç ß – Ï ã L l \  ¦ % i Ü ¼ 9, s  Ï ã L l  ×  æ Extractor > s t \  ¦ » 1 ÏÛ ¼ (degassing)ô  Ç  6 £ § W = > \  ¦ ]

j  “ ¦ t r > ü < G ' p" f H s ^  ¦`  ¦ ƒ     # Œ AxTran>  s

t , Stabil-ion> s t , Õ ªo “ ¦ QMS\  @ /ô  Ç » 1 ÏÛ ¼\  ¦

Y VX <– Ð Ã º' Ÿ  % i  . s [ þ t`  ¦ $ “ : r \ " f » 1 ÏÛ ¼ €   ~ ½ Ó Ø

 ¦ ) a l ^ ‰  r  6   x l ³ ð€  \  f  ¨‚ à Ì÷ &# Q 6   x l  š ¸% i ÷ &

Fig. 4. Pressures vs. bakeout temperatures as a function of elapse time. The maximum bakeout temperature was 240

^◦

C.

Fig. 5. Principle of electron stimulated desorption (ESD) ions. (a) Particles leaves the anode surface as molecules.

(b) The grid temperature is increased and particles are desorbed. (c) The quantity of particles on the surface is reduced after degassing, but adsorption and desorption is on going process.

#

Q · ú š§ 4   © œ5 p x_  " é ¶ “  s  ÷ &l  M :ë  H \  Å Ò_ K   ô  Ç . Ï ã L l

 ¢ - a„  y  = å Qè ß – + ' Šҁ   “ : r • ¸  © œ“ : r \  • ¸² ú ˜Ù þ ¡`  ¦ M : Extractor > s t – Ð { 9 “ É r · ú š§ 4 “ É r 1.02 × 10

⁻⁹

Pa s % 3 Ü ¼

  © œ“ : r \ " f  © œl ç ß – C l Ù þ ¡`  ¦ M : · ú š§ 4 “ É r 10

⁻¹⁰

Pa \  • ¸

²

ú ˜ % i  . Ï ã L l  ¢ - a„  y  = å Q
“ ¦ QMSë ß – (  `  ¦ M : ‘ : r ï ß – À

Ól ^ ‰_  Û ¼& 7 ˜à Ô! 3 “ É r Fig. 3 õ  ° ú  s  ŠҖ Ð H

²

 ´ ú §€ Œ ¤Ü ¼


\

V © œu  3 l wô  Ç fluorine (F, m/e = 19)s   Ž Ø  ¦ ÷ &% 3 Ü ¼ 9 CO ü

< CO

₂

  H @ / Òì  r ] j ÷ &% 3  . { 9 ì ø Í& h Ü ¼– Ð SUS304 6   x l 

\

" f ^  ¦ à º \ O   H F  H   • ¸ QMS_  s “ : r" é ¶ (ion source) :

£

¤ y  Õ ªo × ¼ F « Ñ\ " f
“ : r  כ Ü ¼– Ð \ V © œ ) a  . Fig. 4  H Ï

ã

L l  õ & ñ \ " f à º¨ î » ¡ ¤`  ¦ r ç ß –Ü ¼– Ð ¢ , aA á ¤ à ºf ” » ¡ ¤`  ¦ · ú š§ 4  Ü

¼– Ð Õ ªo “ ¦ š ¸ É rA á ¤ à ºf ” » ¡ ¤`  ¦ “ : r • ¸– Ð Z  ~ “ ¦ Õ ª 2 ; Õ ªA á Ô s

 .

2. T  Æ X Ø4 T U 8 ý  ¹ ÅP T  Æ X Ø õ m Í ESD T  Æ X Ø

Fig. 5  H / B Nç ß –õ  Õ ªo × ¼ ³ ð€  \ " f_  { 9  î  r1 l x`  ¦  

„

½ ÓÜ ¼– Ð ESD s “ : r`  ¦ [ O " î l  0 Aô  Ç Õ ªa Ë >s  . Fig. 5_ 

(a)  H s “ : r > s t _  € 9  F ' pà Ô\ " f Ò q t$ í  ) a \ P „    Õ ª

Fig. 6. Ion current profile obtained by IG

C

gauge as a function of V

BE

. The profile measured at a pressure of 2.38 ×10

⁻⁹

∼ 2.68 × 10

⁻⁹

Pa. The profile shows almost same to Dr. Akimichi’s result [8].

o

× ¼\  Ø  æ[  t # Œ { 9  [ þ t s  ~ ½ ÓØ  ¦ ÷ &# Q · ú š§ 4   © œ5 p x כ ¹“  s 

÷ &  H  כ `  ¦ ˜ Г    כ s  . (b)  H s “ : r > s t \  ¦ » 1 ÏÛ ¼ ½ + É M

: Õ ªo × ¼ ³ ð€   “ : r • ¸ B Ä º Z  }  4 R" f { 9  [ þ t s  ~ ½ ÓØ  ¦ (desorption) ÷ &  H ‰ & ³ © œs  . (c)  H (b)_  » 1 ÏÛ ¼– Ð “  K 

³

ð€  _  { 9  [ þ t s  ´ ú §s  ] j ÷ &% 3 t ë ß – Õ ªA • ¸ ™ èà º_  \ P 

„ 

  ³ ð€  \  Ø  æ[  t # Œ ESD s “ : r s  Ò q t$ í ÷ &  H õ & ñ `  ¦

Fig. 7. Schematic diagram of ESD ion measurement of the IG

C

gauge [9]. V

BE

controlled by the computer be- tween 0 to 160 Volt. The voltage applied to the electrode of V

GF

, V

F E

, V

f il

, V

BA

are 80 V, 60 V, 20 V, and 130 V, respectively.

Fig. 8. Gauge output (V

DC

) vs. room temperature (

^◦

C) as a function of elapse time in IG

B

. Pressures varied from 2.2 ×10

⁻¹⁰

Pa to 4.3 ×10

⁻¹⁰

Pa as room temperature changed from 21

^◦

C to 31

^◦

C.

˜

Г    כ s   [5].   ² D G s  ESD s “ : r[ þ t s  / B Nç ß –×  æ \  e ”   H

„ 

o s “ : r õ  [ O # Œ" f c + t 7 ˜' \  à º| 9 ÷ &Ù ¼– Ð · ú š§ 4  t r u \  ¦ Z

 } s   H " é ¶ “  s   ) a  . Akimichi 1 p x“ É r s “ : r > s t _  „  o  s

“ : r õ  ESD s “ : r_  œ íl  î  r1 l x \  -t  à º eV s 


“

¦ / B Nç ß – „  0 A à ºz   V  Ø Ô   H & h \  ‚ à Ìî ß – # Œ s “ : r c + t

 7

˜' ü < Õ ªo × ¼  s \  K t   H „  · ú š (V

BE

)`  ¦   r  v

€  " f s [ þ t s “ : r[ þ t`  ¦ ì  r o K " f 8 £ ¤& ñ % i   [9, 10]. s  M

:  6   xô  Ç s “ : r > s t  IG

C

  H ESD s “ : r`  ¦ é ß – l  0 A K

 \  -t  € 9 ' \  ¦ ? / © œ “ ¦ e ” Ü ¼ 9  € ª œ\  _  €   s  >  s

t   H ½ + Ë$ í Ô  ¦S X ‰ • ¸ (combined uncertainty) t r · ú š§ 4  _  15 %s   [11]. Fig. 6“ É r Akimichi  z  ´+ « >ô  Ç  כ õ  ° ú  

“ É

r ~ ½ ÓZ O Ü ¼– Ð IG

^C

\  “   „  · ú š`  ¦    or v €  " f % 3 “ É r „   o

 s “ : r õ  ESD s “ : r Ü ¼– Ð Akimichi µ 1 ϳ ðô  Ç   õ ü <  â

†

¾ Ós   _  { 9 u  % i  . s  Õ ªA á ԍ  H emission „  À Ó I

e

\  ¦ 1 mA – Ð “ ¦& ñ r v “ ¦, V

^BE

„  · ú š`  ¦ 0  Ò'  160 V t  { 9 & ñ ô  Ç ç

ß –  Ü ¼– Ð 7 £ x r v €  " f s “ : r c + t 7 ˜'  „  À Ó\  ¦ 8 £ ¤& ñ % i Ü ¼ 9 z  ´+ « > ×  æ ”  / B N6   x l _  · ú š§ 4 “ É r 2.38 ×10

⁻⁹

∼ 2.68×10

⁻⁹

Pa s % 3  . s  > s t _  ESD z  ´+ « >  õ   H 6   x l  ? /\ " f s 

“

: r o ) a „  o  s “ : rë ß – & ñ S X ‰ >   Ž Ø  ¦ l  0 AK " f  H V

BE

„ 

· ú š`  ¦ 60 ∼ 70 V– Ð “ ¦& ñ r v   H  כ s   | à Ðf ”  ô  Ç  כ Ü ¼– Ð

 z Œ ¤ . Õ ªa Ë >\ " f ^  ¦ à º e ”   H  ü < ° ú  s  ESD s “ : r„   À

Ӎ  H „  o  s “ : r_  €  • 20 %\  K { © œ÷ & 9 : £ ¤ y  100 ∼ 110 V ½ ¨ç ß –\ " f ‰ & ³$  >  ß ¼> 
 z Œ ¤ . Õ ª Q
 ESD „  À Ó



 H Ø  ¦ % ƒü < € ª œ`  ¦ & ñ S X ‰ >  ½ ¨ì  r l  # Q 9Ö  ¦ ÷  rë ß –  m 



 > s t _  ½ ¨› ¸
, F « Ñ, ß ¼l ,  6   x s § 4  1 p x \     ² ú ˜



| 9  à º e ” Ü ¼Ù ¼– Ð # Œ„  y  F G “ ¦”  / B N µ 1 ÏÒ q ts 
 & ñ S X ‰ô  Ç >  8

£

¤`  ¦ 0 AK " f Û  ¦ # Q  ½ + É ¸ n q ] j– Ð z Œ ™ e ”  . Fig. 7“ É r ESD s

“ : r 8 £ ¤& ñ `  ¦ 0 AK  ½ ¨$ í ô  Ç > h| Ä Ì• ¸s   [9]. # Œl \ " f “  

„ 

· ú š V

GF

, V

F E

, V

f il

, V

BA

  H y Œ •y Œ • 80 V, 60 V, 20 V, Õ ª o

“ ¦ 130 Vs % 3  .

Fig. 9. Total pressure measurement results by IG

A

, IG

B

, and IG

C

. IG

A

indicated higher pressure than IG

B

and IG

C

. The maximum pressure difference of two gauges was about 30 %, but mostly within the uncertainty limits of the gauges.

3. T  Æ X Ø4 T U  õ u § T  “ Ó Þ” X ¢  ¹ Å°  q (total pressure) • ¤ X N

Ë

Fig. 8“ É r Fig. 4_  6   x l  Ø  æì  r >  C l   ) a  © œI \ " f Extractor > s t  
ë ß – & “ ¦ · ú š§ 4 õ  Šҁ  “ : r • ¸\  ¦ 8 £ ¤& ñ

# Œ · ú š§ 4 `  ¦ ¢ , aA á ¤ à ºf ” » ¡ ¤ Ü ¼– РŠҁ   “ : r • ¸   o\  ¦ š ¸ É rA á ¤ Ã

ºf ” » ¡ ¤ Ü ¼– Ð  â õ r ç ß –`  ¦ à º¨ î » ¡ ¤ Ü ¼– Ð Z  ~ “ ¦ Õ ª 2 ; Õ ªA á Ôs 



. # Œl \ " f Extractor > s t _  ì  r K 0 p x`  ¦ Z  } s l  0 A 

#

Œ · ú š§ 4    o\  ¦ n t _ O  ^  ¦ à Ôp ' \  ¦ s 6   x # Œ 8 £ ¤& ñ % i Ü ¼ 9, „  · ú š ° ú כ`  ¦  € ª œ\  Å Ò# Q”   d ” \     > í ß – €   ~ 1 > 

· ú

š§ 4 `  ¦ > í ß –½ + É Ã º e ”  . z  ´+ « >   õ  6   x l  Šҁ   “ : r • ¸ 26 ± 4

^◦

C \ " f · ú š§ 4 “ É r 2.5 ×10

⁻¹⁰

Pa ∼ 5 ×10

⁻¹⁰

Pa – Ð   Ù þ ¡ Ü

¼ 9 s   H 6   x l _  · ú š§ 4 s  F G “ ¦”  / B N \  • ¸² ú ˜Ù þ ¡6 £ §`  ¦ _ p  ô 

Ç . # Œl \ " f ˜ Г   · ú š§ 4    o  H > s t   ^ ‰_  “ : r • ¸ : £ ¤

$ í

÷  rë ß –  m   “ : r • ¸ M :ë  H \       H 6   x l _  » 1 ÏÛ ¼| ¾ Ó   

 o• ¸ Ÿ í† < Ê “ ¦ e ” t ë ß – s \  ¦ ½ ¨ì  r l   H # Q 9 ° ? .

>

s t [ þ t_  „  · ú š : £ ¤$ í z  ´+ « >“ É r 6   x l _  Ï ã L l  ×  æ » 1 ÏÛ ¼ ô 

Ç > s t [ þ t`  ¦ > 5 Å q & é  H  © œI \ " f Šҁ   “ : r • ¸ 24

^◦

C   H % ƒ

\

" f à º' Ÿ ÷ &% 3  . Fig. 9  H 8 £ ¤& ñ   õ – Ð Ã ºf ” » ¡ ¤ \  ³ ðr   ) a

· ú

š§ 4 \ " f IG

A

, IG

_B

, IB

_C

 t r  ° ú כ`  ¦ 1 l x r \  ( Ž É Ó' – Ð

—

¸m '  ô  Ç  כ s  . # Œl \ " f à º¨ î » ¡ ¤“ É r 8 £ ¤& ñ à º\  ¦
 ? / 9  t } Œ • ° ú כ“ É r 107 r ç ß –\  K { © œ ) a  . s  Õ ªa Ë >\ " f œ íl 

· ú

š§ 4 s  @ /^ ‰– Ð Z  }“ É r  כ “ É r > s t \  ¦ (  `  ¦ M : » 1 ÏÛ ¼  ) a l 

^

‰ Ø  æì  r >  C l ÷ &t  · ú §€ Œ ¤l  M :ë  H{ 9  à º• ¸ e ” “ ¦ > s  t

 Šҁ  “ : r • ¸_  p [ jô  Ç s \  _ ô  Ç l ^ ‰ ~ ½ ÓØ  ¦| ¾ Ó s { 9  Ã

º• ¸ e ” t ë ß – s \  ¦ & ñ S X ‰ >  ½ ¨ì  r l  0 Aô  Ç z  ´+ « >“ É r à º' Ÿ 

t  · ú §€ Œ ¤ . z  ´+ « >  õ  1 l x{ 9 ô  Ç 6   x l _  · ú š§ 4 \ " f IG

^A

  H IG

B

ü < IG

C

˜ Ð  €  • 10C \ " f 100C  & ñ • ¸ Z  } >  8 £ ¤& ñ   H

 כ

Ü ¼– Ð
 z Œ ¤Ü ¼ 9, s    õ ë ß –`  ¦ ˜ Ѐ    € ª œ\  ³ ðr   ) a  

^

‰ Ô  ¦S X ‰ • ¸ 5 %  H  Á º   _ p  \ O Ü ¼ 9 s Ä »  H " î S X ‰ 

Fig. 10. Residual H

2

peak ion current (A) measurement results by IG

_A

, IG

_B

, and IG

_C

. IG

_A

indicated more than 50 % higher than IG

_B

current.

t

  H · ú §t ë ß – IG

A

G ' p" f
 t r >  z  ´+ « > ×  æ ë  H ] j Ò q t  

`

 ¦  כ Ü ¼– Ð Æ Ò8 £ ¤ ) a  . IG

^B

ü < IG

C

  H @ /^ ‰– Ð & ñ S X ‰ô  Ç · ú š§ 4 

`

 ¦ 8 £ ¤& ñ ô  Ç  כ Ü ¼– Ð ˜ Ðs  9 œ íl  · ú š§ 4 \ " f_  s  €  • 30

% & ñ • ¸– Ð ( Ž Ü ¼
 @ /^ ‰– Ð s  IG

^B

10 %, IG

C

15 %“  

¿

º > s t _  Ô  ¦S X ‰ • ¸ # 3 0 A î ß –\ " f { 9 u    H  כ Ü ¼– Ð
  z

Œ ¤ . : £ ¤ y  IG

B

> s t   H f ” ‚  $ í s  a % ~“ É r  כ Ü ¼– Ð ˜ Ð% i Ü ¼ 9 IG

C

  H  â õ r ç ß –s  U  ´# Q| 9 à º2 Ÿ ¤ t r · ú š§ 4 s  ± ú  t   H

 â

† ¾ Ó`  ¦ ˜ Ð% i  . s  z  ´+ « >\ " f · ú ¡\ " f ‘ : r Extractor > s t 


ë ß – (  `  ¦ M : { 9 “ É r • ¸² ú ˜· ú š§ 4  10

⁻¹⁰

Pa \  q K  t r · ú š

§

4 s   s `›   Z  }“ É r  כ “ É r [ j > h_  > s t \  ¦ 1 l x r \  (  l  M : ë

 H \  Ò q t|   » 1 ÏÛ ¼| ¾ Ó 7 £ x  M :ë  H s  .

4. QMS õ u § T  “ Ó Þ” X ¢ ” ¼ Ä Z Ø°  q (partial pressure) • ¤X N Ë

‘

: r z  ´+ « >\ " f  H ï ß –À Ól ^ ‰ì  r$ 3 l – Ð  © œ ´ ú §s   6   x ÷ &“ ¦ e ”

  H QMS – Ð 6   x l _  ï ß –À Ól ^ ‰\  ¦ 8 £ ¤& ñ % i  . ¸ ú ˜ · ú ˜ 9”   X

<– Ð XHV 6   x l \  ï ß –À Ó   H l ^ ‰  H  © œu \      \  ¦ Ã

º e ” t ë ß – @ / Òì  r s  H

2

s Ù ¼– Ð ´ ú §“ É r  | à Ð[ þ t s  H

2

_  µ 1 ÏÒ q t

"

é

¶ x 9  € ª œ\  @ /K " f ƒ  ½ ¨\  ¦ “ ¦ e ”  . KRISS ”  / B NG ' p' 

\

" f  H Ï ã L l  Ø  æì  r >   ) a SUS304 œ í“ ¦”  / B N6   x l ? /_  H

2

ï ß –À Ól ^ ‰ 98 % s  © œs  “ ¦ ˜ Г ¦ % i   [12]. z  ´+ « >

“

É r XHV 6   x l ? /_  H

2

€ ª œ ˜ Ð • ¸ y Œ •y Œ •   É r s “ : r > s t 

\

 ¦ (  `  ¦ M : ~ ½ ÓØ  ¦ ÷ &  H H

2

 Òì  r· ú š : £ ¤$ í \  œ í& h `  ¦ ´ ú Æ Ò# Q" f Ã

º' Ÿ ÷ &% 3  . s  s Ä »  H 6   x l \   ҂ à ̝ ) a > s t    ] j› ¸

 r   Ø ÔÙ ¼– Ð ½ ¨› ¸ü < F | 9 \    É r l ^ ‰ ~ ½ ÓØ  ¦| ¾ Óõ  7 á x À

Ó  \  ¦ à º e ” l  M :ë  H s  . > s t _  € 9  F ' pà Ô F « э  H Table 1 õ  ° ú  s  IG

A

ü < IG

_B

  H W s “ ¦ IB

C

  H Ir/Y

2

O

₃

s 

% 3  .

Â

Òì  r· ú š 8 £ ¤& ñ “ É r B Ä º   \  v “ ¦ š ¸ כ ¹“  • ¸ ´ ú §Ü ¼Ù ¼– Ð s 

\

 ¦ þ j™ è o l  0 A # Œ IG

A

, IG

B

, IG

C

y Œ •y Œ •\ " f ~ ½ ÓØ  ¦ ) a l

^ ‰ 6   x l  ? /Â Ò ³ ð€  \  f  ¨‚ à Ì÷ &# Q  6 £ § z  ´+ « >\  % ò † ¾ Ó`  ¦

6  

x l _  · ú š§ 4 “ É r QMS l ^ ‰ ~ ½ ÓØ  ¦| ¾ Ós   8K & ’ `  ¦  כ s Ù ¼– Ð Z

 }“ É r 10

⁻⁹

Pa & ñ • ¸{ 9   כ Ü ¼– Ð Æ Ò8 £ ¤ ) a  .   " f s “ : r > s  t

 7 á x À Ó\      Òì  r· ú š ° ú כ\  s  e ” 6 £ §`  ¦ · ú ˜ à º e ” % 3  Ü

¼ 9 H

2

 XHV\  ¦ z  ´‰ & ³   H X <  © œ  H ë  H ] j“    כ `  ¦ S X ‰

“

  % i  .

IV. + s Ç Â ] Ø

]

j Œ • ) a F G “ ¦”  / B N  © œu \  ] j› ¸ r    É r [ j > h_  s 

“

: r > s t ü < ô  Ç > h_  | 9 | ¾ Óì  r$ 3 l \  ¦  ҂ Ã Ì % i  . s “ : r >  s

t _  „  o  s “ : r õ  ESD s “ : r`  ¦ ì  r o    H z  ´+ « >`  ¦ à º' Ÿ 

# Œ ESD s “ : r s  F G “ ¦”  / B N 8 £ ¤& ñ ô  Ç> \  ¦ ± ú Æ ҍ  H X < ×  æ כ ¹ ô 

Ç  © œE כ ¹“  e ” `  ¦ S X ‰ “   % i  . s “ : r > s t \  ¦ s 6   xô  Ç F G

“

¦”  / B N „  · ú š : £ ¤$ í z  ´+ « >   õ  > s t \     · ú š§ 4 8 £ ¤& ñ ¼ # 

 B Ä º ( Ž Ü ¼ 9 d ” ô  Ç  â Ä º þ j@ / 100C  & ñ • ¸_  s \  ¦

˜

Ðs l • ¸ % i  .   " f & ñ S X ‰ô  Ç · ú š§ 4 `  ¦ 8 £ ¤& ñ l  0 AK 

"

f  H & h ½ + Ëô  Ç > s t _  ‚  & ñ õ  “ §& ñ (calibration)s  B Ä º

×

 æ כ ¹    H  כ `  ¦ · ú ˜ à º e ” % 3  .  ×  æF G | 9 | ¾ Óì  r$ 3 l – Ð Â Ò ì

 r· ú š`  ¦ › ¸ ô  Ç   õ  H

₂

 ï ß –À Ól ^ ‰_  @ / Òì  r`  ¦ t  

%

i Ü ¼
 „  ) € \ V8 £ ¤ t  3 l wô  Ç F  Ž Ø  ¦ ÷ &% 3 Ü ¼ 9 s   H ŠҖ Ð

>

s t _  Õ ªo × ¼ F « Ñ\ " f
“ : r  כ Ü ¼– Ð · ú ˜ 94 R e ”  . Õ ª



Q
 œ í“ ¦”  / B N \ " f  H ¸ ú š6 £ §’    ñ
   É r l ^ ‰ · ú š§ 4 \  ¶ n s )

€ ½ ¨ì  r l  # Q 9 ° ?~   F F G “ ¦”  / B N \ " f ‚  " î >   Ž  Ø

 ¦H † d Ü ¼– Ð" f s  ¢ ¸ô  Ç F G “ ¦”  / B N µ 1 ÏÒ q ts 
 > 8 £ ¤ \   H  © œK  כ

¹“  s  ÷ &Ù ¼– Ð K   K  ½ + É D h– Ðî  r ë  H ] je ” `  ¦ D h\  v >  “   d ”

 % i  . y Œ •y Œ •   É r s “ : r > s t \  ¦ (  `  ¦ M : H

2

 Òì  r· ú š

s  þ j@ / 50 % t  s  z Œ ¤Ü ¼Ù ¼– Ð  © œu _  6   x • ¸\ 

´ ú

  H > s t _  ‚  & ñ • ¸ ×  æ כ ¹ô  Ç  כ Ü ¼– Ð ó ø Íé ß – ) a  .

[1] Tsukuba, J. Vac. Soc. Jpn. 37, 9 (1994).

[2] P. A. Redhead, Foundations of Vacuum Science and Technology (John Wiley & Sons, New York, 1998), p. 625.

[3] H. Akimichi and M. Hirata, Books of Abstract and Programme of the 4th CCM Iternational Conference on Pressure Metrology from Ultra-High Vacuum and very High Pressure (Institute of Physics, London, 2005), p. 17.

[4] G. W. Weston, Ultrahigh Vacuum Practice (Butter- worths, Butterworths, 1985), p. 34.

[5] Y. H. Shin, K. J. Lee and K. H. Chung, Vacuum 47, 679 (1996).

[6] Hot Cathode Gauges for UHV Pressures, Leybold Vacuum 1 (1998).

[7] K. H. Chung, S. S. Hong and Y. H. Shin, Metrologia 36, 675 (2001).

[8] Ionivac Operating Instructions, Leybold Heraeus, 1 (1998).

[9] H. Akimichi, N. Takahashi, T. Tanaka, K. Takeuchi, Y. Tuzi and I. Arakawa, Vacuum 47, 561 (1996).

[10] H. Akimichi, K. Takeuchi, Y. Tuzi and I. Arakawa, J. Vac. Sci. Technol. A 17, 2021 (1999)

[11] Axtran ISX2 Instruction Manual, Ulvac Inc., No.

010912, 1 (1999)

[12] S. S. Hong, J. Y. Lim, Y. H. Shin, K. H. Chung and

I. Arakawa, SAEMULLI 47, 152 (2003).

Characteristics Study of Hot Cathode Ionization Gauges and Partial Pressure Measurements at the SUS304 Extremely High Vacuum

Chamber by Using a Quadrupole Mass Spectrometer

S. S. Hong,

^∗

Y. H. Shin and K. H. Chung

Vacuum Center, Korea Research Institute of Standards and Science, Daejeon 305-600

I. Arakawa

Department of Physics, Gakushuin University, Tokyo, Japan (Received 21 February 2005, in final form 2 June 2005)

An extremely high vacuum system in the range of 10

⁻¹⁰

Pa was constructed by using ordinary SUS304 chamber material, electro-polished surface processing, turbomolecular pumping, and bake- out techniques. The characteristics of three different types of hot cathode ionization gauges were studied and the partial pressure in the chamber was measured using a quadrupole mass spectrom- eter. The results showed that the dominant residual gas of the chamber was hydrogen and that little fluorine was present.

PACS numbers: 07.03.K, 07.03.D

Keywords: Extreme high vacuum, Total pressure, Partial pressure, Electron stimulated desorption, Hydrogen

∗

E-mail: [email protected]; Tel: 042-868-5122 Fax: 042-868-5645