Handling Robots for Use in Vacuum

(1)

Handling Robots for Use in Vacuum

SEMISTAR - _{V Series}

YASKAWA ELECTRIC CORPORATION

2-1 Kurosakishiroishi, Yahatanishi-ku, Kitakyushu, 806-0004, Japan Phone: +81-93-645-7703 Fax: +81-93-645-7802

http://www.yaskawa.co.jp

YASKAWA AMERICA, INC. (MOTOMAN ROBOTICS DIVISION) 100 Automation Way, Miamisburg, OH 45342, U.S.A.

Phone: +1-937-847-6200 Fax: +1-937-847-6277 http://www.motoman.com

YASKAWA EUROPE GmbH (ROBOTICS DIVISION) Yaskawastrasse 1, 85391, Allershausen, Germany

Phone: +49-8166-90-100 Fax: +49-8166-90-103 http://www.yaskawa.eu.com

YASKAWA NORDIC AB

Verkstadsgatan 2, Box 504, SE-385 25 Torsas, Sweden Phone: +46-480-417-800 Fax: +46-486-414-10 http://www.yaskawa.se

YASKAWA ELECTRIC (CHINA) CO., LTD.

22F, One Corporate Avenue, No.222 Hubin Road, Huangpu District, Shanghai 200021, China Phone: +86-21-5385-2200 Fax: +86-21-5385-3299

http://www.yaskawa.com.cn

YASKAWA SHOUGANG ROBOT CO., LTD.

No.7 Yongchang North Road, Beijing E&T Development Area, Beijing 100076, China Phone: +86-10-6788-2858 Fax: +86-10-6788-2878

http://www.ysr-motoman.cn

YASKAWA ELECTRIC KOREA CORPORATION

35F, Three IFC, 10 Gukjegeumyung-ro, Yeongdeungpo-gu, Seoul, 07326, Korea Phone: +82-2-784-7844 Fax: +82-2-784-8495

http://www.yaskawa.co.kr

YASKAWA ELECTRIC TAIWAN CORPORATION

12F, No.207, Sec. 3, Beishin Rd., Shindian District, New Taipei City 23143, Taiwan Phone: +886-2-8913-1333 Fax: +886-2-8913-1513

http://www.yaskawa.com.tw

YASKAWA ASIA PACIFIC PTE. LTD.

30A Kallang Place, #06-01, 339213, Singapore Phone: +65-6282-3003 Fax: +65-6289-3003 http://www.yaskawa.com.sg

YASKAWA ELECTRIC (THAILAND) CO., LTD.

59, 1st-5th Floor, Flourish Building, Soi Ratchadapisek 18, Ratchadapisek Road, Huaykwang, Bangkok 10310, Thailand

Phone: +66-2-017-0099 Fax: +66-2-017-0199 http://www.yaskawa.co.th

PT. YASKAWA ELECTRIC INDONESIA

Secure Building-Gedung B Lantai Dasar & Lantai 1 Jl. Raya Protokol Halim Perdanakusuma, Jakarta 13610, Indonesia

Phone: +62-21-2982-6470 Fax: +62-21-2982-6471 http://www.yaskawa.co.id

YASKAWA INDIA PRIVATE LIMITED (ROBOTICS DIVISION)

#426, Udyog Vihar Phase-IV, Gurgaon, Haryana 122016, India Phone: +91-124-475-8500 Fax: +91-124-475-8542 http://www.yaskawaindia.in

LITERATURE NO. KAEP CM2010002F <8>-0 18-10-44

Published in Japan November 2018

In the event that the end user of this product is to be the military and said product is to be employed in any weapons systems or the manufacture thereof, the export will fall under the relevant regulations as stipulated in the Foreign Exchange and Foreign Trade Regulations. Therefore, be sure to follow all procedures and submit all relevant documentation according to any and all rules, regulations and laws that may apply.

Specifications are subject to change without notice for ongoing product modifications and improvements.

Certified for ISO9001 and ISO14001

JQA-EM0202 JQA-0813

QMS AccreditationR009

(2)

SEMISTAR- VD10S ^SEMISTAR- VD20S ^SEMISTAR- VD35S-G4A

Model

Payload

10 kg 20 kg 35 kg

SEMISTAR- VD40D-G6A ^SEMISTAR- VD95D

Model

40 kg / 95 kg /

SEMISTAR- VD10D ^SEMISTAR- VD20D ^SEMISTAR- VD35D-G4A

Model

Payload

10 kg / arm 20 kg / arm 35 kg / arm

Single - _{arm robots}

Dual - _{arm robots}

SEMISTAR - V Series

Complete product lineup of robots optimized for various different glass substrate sizes.

Handling Robots for Use in Vacuum

Features

Lar ge Small Glass substrate size

10 kg Payload 100 kg

2nd generation 400 mm × 500 mm class

4th generation (half size) 460 mm × 730 mm class

5.5th generation (quarter size) 650 mm × 750 mm class

4th generation 730 mm × 920 mm class

5.5th generation 1300 mm × 1500 mm class

8th generation (half size) 1250 mm × 2250 mm class

SEMISTAR-VD10D, S

SEMISTAR-VD20D, S

SEMISTAR-VD35D, S

SEMISTAR-VD40D, S

Applicable to photomask

SEMISTAR-VD95D

Processing room

A

Processing room

B

Processing room

E

Processing room

D

Processing roomC Completed

glass substrate To the next

process Glass substrate

Pretreatment room

Transfer room (vacuum chamber)

Vacuum robot

High - speed and high - precision robots with payloads ranging from 10 kg to 95 kg

4

6 5 3

2 1

7 High-rigidity arm and ARM* control for high-precision positioning and minimum vibration.

Reduced maintenance costs with long life.

The arm can be detached for easy hoisting during maintenance.

Sensors for substrate detection can be wired internally.

Vacuum seal uses mag- netic fluid and bellows for use in high-vacuum environments.

SEMISTAR - V series offers high - _precision

transport and transfer of OLED, LCD, and solar panel glass substrates with minimum vibration.

Coordination of 3 to 4 axes enables a variety of motions, including rotation, extension, and elevation.

Ideal for cluster tools in high - vacuum

environments. *

: Advanced Robot Motion

SEMISTAR- VD40S

40 kg

(3)

SEMISTAR- VD10S ^SEMISTAR- VD20S ^SEMISTAR- VD35S-G4A

Model

Payload

10 kg 20 kg 35 kg

SEMISTAR- VD40D-G6A ^SEMISTAR- VD95D

Model

Payload

40 kg / arm 95 kg / arm

SEMISTAR- VD10D ^SEMISTAR- VD20D ^SEMISTAR- VD35D-G4A

Model

Payload

10 kg / arm 20 kg / arm 35 kg / arm

Single - _{arm robots}

Dual - _{arm robots}

SEMISTAR - V Series

Complete product lineup of robots optimized for various different glass substrate sizes.

Handling Robots for Use in Vacuum

Features

Lar ge Small Glass substrate size

10 kg Payload 100 kg

2nd generation 400 mm × 500 mm class

4th generation (half size) 460 mm × 730 mm class

5.5th generation (quarter size) 650 mm × 750 mm class

4th generation 730 mm × 920 mm class

5.5th generation 1300 mm × 1500 mm class

8th generation (half size) 1250 mm × 2250 mm class

SEMISTAR-VD10D, S

SEMISTAR-VD20D, S

SEMISTAR-VD35D, S

SEMISTAR-VD40D, S

Applicable to photomask

SEMISTAR-VD95D

Processing room

A

Processing room

B

Processing room

E

Processing room

D

Processing roomC Completed

glass substrate To the next

process Glass substrate

Pretreatment room

Transfer room (vacuum chamber)

Vacuum robot

High - speed and high - precision robots with payloads ranging from 10 kg to 95 kg

4

6 5 3

2 1

7 High-rigidity arm and ARM* control for high-precision positioning and minimum vibration.

Reduced maintenance costs with long life.

The arm can be detached for easy hoisting during maintenance.

Sensors for substrate detection can be wired internally.

Vacuum seal uses mag- netic fluid and bellows for use in high-vacuum environments.

SEMISTAR - V series offers high - _precision

transport and transfer of OLED, LCD, and solar panel glass substrates with minimum vibration.

Coordination of 3 to 4 axes enables a variety of motions, including rotation, extension, and elevation.

Ideal for cluster tools in high - vacuum

environments. *

: Advanced Robot Motion

SEMISTAR- VD40S

40 kg

2 3

(4)

SEMISTAR - _VD 10 S

Dimensions

Units: mm

Features

・ Capable of transporting and transferring glass substrates of sizes up to 400 mm × 500 mm in vacuum environments.

・ High-rigidity construction and ARM control to realize high-precision positioning with minimum vibration.

・ Capable of transporting and transferring glass substrates of sizes up to 400 mm × 500 mm in vacuum environments.

・ High-rigidity construction and ARM control to realize high-precision positioning with minimum vibration.

UltimateMax.

Pressure

1

^×

10 ^-5

Pa Single - arm robot, payload: 10 kg

Manipulator Specifications

Item Model

Type

Controlled Axes

Repeatability*² Horizontal Trajectory Payload

Allowable Inertia (GD²/4) Max. Ultimate Pressure Approx. Mass

Applicable Controller Type

Specifications SEMISTAR-VD10S XU-RVD960S5-A12 3 (Horizontally articulated)

1485 mm

−170° − +170° 65 mm 2.5 s or less 4.9 s or less 4.9 s or less

±0.2 mm for each axis

±3.0 mm or less 10 kg 2.5 kg･m² max.

1×10^-5 Pa 160 kg ERDR-VD0010S-A00

Remarks

Stroke of 1485 mm Stroke of 340 degree (L=0) Stroke of 65 mm

At center of end effector mounted part

Horizontal direction, at center of end effector mounted part Including mass of end effector

Including mass of end effector, at center of end effector mounted part

Three-phase 200 VAC, 1.5 kVA Range of

Motion Operating Time*¹ (at max. speed)

L-axis S-axis U-axis L-axis S-axis U-axis

(Extension) (Rotation) (Up/Down) (Extension) (Rotation) (Up/Down)

*

¹^:The actual operation speed will differ from the maximum speed.

Dimensions

Units: mm

SEMISTAR - _VD 10 D

Manipulator Specifications

Specifications SEMISTAR-VD10D XU-RVD960D5-A12 4 (Horizontally articulated)

1485 mm

±4.0 mm or less 10 kg/arm 2.5 kg･m² max.

1×10^-5 Pa 430 kg ERDR-VD0010D-A00

Dual - arm robot ， payload: 10 kg/arm

Features Features Features

Item Model

Type

Controlled Axes

Remarks

Stroke of 1485 mm

Stroke of 340 degree (L, R=0) Stroke of 100 mm

L-, R-axis S-axis U-axis L-, R-axis S-axis U-axis

*

UltimateMax. Pressure

1

^×

10 ^-5

Pa

C1 500

O-ring (V430)

985

465 dia. (Hole for robot fixing bolt) 1485 (L-axis stroke)

630 20°

Direction of arm extension

S=0° S-axis motion

prohibition area (20°)

S-axis motion prohibition area (20°)

Location hole

65 (U-axis stroke)289

Detail of mounting surface for end effector

S-axis working envelope 4×M6 (Depth: 11)

(There is no screw in the 2 mm depth of hole entrance)

57.5

Mounting surface for end effector

45^°±1^°

Location hole 233.5 R115

10 (Center of R 90) R90

500 500

35

410 dia. (Max. outside diameter) 420 dia. (Hole diameter) 436 dia. (O-ring)

490 dia. (Flange diameter)^−0.02_−0.06

102 dia.

70 dia.^−0.03_−0.06

1230 dia. (Min. rotation radius )

+170°

−170°

*

^:

Note: To adjust the end effector, the mounting hole must be elongated by one degree on each side to create an oval hole. When attaching the end effector, adjust the attachment so that the end effector direction is the extension/retraction direction.

30^°

60° 45° (Cable direction)

174.5 40570184.5

O-ring (V690) C2

Connector panel

399

C2

8 (Allowance for fit tolerance

)

500 985

1485 (L-, R-axis stroke)

Location hole

20°

R115

500 500

4×M6 (Depth: 14)

63

45^°±1^° L-axis

R-axis

100 (U-axis stroke) U-axis

Height of end effector’s attachment S-axis

S=0° R90

10 (Center of R90) 60^°

Detail of mounting surface for end effector (L-, R-axis)

−170_° (S-axis stroke) 1439 dia. (Min. rotation radius

)

740 dia. (Ｈole for robot fixing bolt) 622 dia. (Max. outside diameter) 672 dia. (Hole diameter) 702 dia. (O-ring) 700 dia. (Max. diameter of S-axis)

770 dia. (Flange diameter)_−0.2⁰

70 dia.^−0.03_−0.06 104 dia.

Grease hole (4 dia.)*

(770 dia.)_−0.2⁰

+170° (S-axis stro ke)

155155

12×10 dia. holes

17 dia. counter boring (Depth: 12) (Recommended bolts: M8×40)

Also set up the 4 mm dia. hole in the end effector.

Grease-up is possible without detaching end effector.

12×15 dia. holes

*

:Also set up the 4 mm dia. hole in the end effector. Grease-up is possible without detaching end effector.

92 dia.

60 dia. 92 dia.

(Equally spaced) (Equally

spaced)

(5)

SEMISTAR - _VD 10 S

Dimensions

Units: mm

Features

・ Capable of transporting and transferring glass substrates of sizes up to 400 mm × 500 mm in vacuum environments.

・ High-rigidity construction and ARM control to realize high-precision positioning with minimum vibration.

・ Capable of transporting and transferring glass substrates of sizes up to 400 mm × 500 mm in vacuum environments.

・ High-rigidity construction and ARM control to realize high-precision positioning with minimum vibration.

UltimateMax.

Pressure

1

^×

10 ^-5

Pa Single - arm robot, payload: 10 kg

Manipulator Specifications

Item Model

Type

Controlled Axes

Specifications SEMISTAR-VD10S XU-RVD960S5-A12 3 (Horizontally articulated)

1485 mm

±3.0 mm or less 10 kg 2.5 kg･m² max.

1×10^-5 Pa 160 kg ERDR-VD0010S-A00

Remarks

* *

1 2 : :

The actual operation speed will differ from the maximum speed.

Due to the shape of the end effector and the rigidity of the end effector mounted part, resonance might occur. Change operation speeds if resonance occurs.

Conforms to ISO 9283 standards. Changes in loads, speeds, and temperatures are not taken into consideration.

Dimensions

Units: mm

SEMISTAR - _VD 10 D

Manipulator Specifications

Specifications SEMISTAR-VD10D XU-RVD960D5-A12 4 (Horizontally articulated)

1485 mm

±4.0 mm or less 10 kg/arm 2.5 kg･m² max.

1×10^-5 Pa 430 kg ERDR-VD0010D-A00

Dual - arm robot ， payload: 10 kg/arm

Features Features Features

Item Model

Type

Controlled Axes

Remarks

Stroke of 1485 mm

* *

1 2 : :

UltimateMax.

Pressure

1

^×

10 ^-5

Pa

C1 500

O-ring (V430)

985

465 dia. (Hole for robot fixing bolt) 1485 (L-axis stroke)

630 20°

Direction of arm extension

S=0° S-axis motion

Location hole

65 (U-axis stroke)289

S-axis working envelope 4×M6 (Depth: 11)

(There is no screw in the 2 mm depth of hole entrance)

57.5

45^°±1^°

Location hole 233.5 R115

10 (Center of R 90) R90

500 500

35

410 dia. (Max. outside diameter) 420 dia. (Hole diameter) 436 dia. (O-ring)

490 dia. (Flange diameter)^−0.02_−0.06

102 dia.

70 dia.^−0.03_−0.06

1230 dia. (Min. rotation radius )

+170°

−170°

*

^:

30^°

60° 45° (Cable direction)

174.5 40570184.5

O-ring (V690) C2

Connector panel

399

C2

)

500 985

Location hole

20°

R115

500 500

4×M6 (Depth: 14)

63

45^°±1^° L-axis

R-axis

100 (U-axis stroke) U-axis

Height of end effector’s attachment S-axis

S=0° R90

10 (Center of R90) 60^°

−170_° (S-axis stroke) 1439 dia. (Min. rotation radius

)

740 dia. (Ｈole for robot fixing bolt) 622 dia. (Max. outside diameter) 672 dia. (Hole diameter) 702 dia. (O-ring) 700 dia. (Max. diameter of S-axis)

70 dia.^−0.03_−0.06 104 dia.

(770 dia.)_−0.2⁰

+170° (S-axis stro ke)

155155

12×10 dia. holes

Also set up the 4 mm dia. hole in the end effector.

Grease-up is possible without detaching end effector.

12×15 dia. holes

*

:Also set up the 4 mm dia. hole in the end effector. Grease-up is possible without detaching end effector.

Note: To adjust the end effector, the mounting hole must be elongated by one degree on each side to create an oval hole.

When attaching the end effector, adjust the attachment so that the end effector direction is the extension/retraction direction.

92 dia.

60 dia. 92 dia.

(Equally spaced) (Equally

spaced)

4 5

(6)

Dimensions

Units: mm Dimensions

Units: mm

・ Capable of transporting and transferring glass substrates of sizes up to 460 mm × 730 mm in vacuum environments.

・ High-rigidity construction and ARM control to realize high-precision positioning with minimum vibration.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

SEMISTAR - _VD 20 S

Single - arm robot, payload: 20 kg Dual - arm robot, payload: 20 kg/arm

SEMISTAR - _VD 20 D

Features Features

・ Capable of transporting and transferring glass substrates of sizes up to 460 mm × 730 mm in vacuum environments.

・ High-rigidity construction and ARM control to realize high-precision positioning with minimum vibration.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Features Features

Manipulator Specifications

Specifications SEMISTAR-VD20S XU-RVD800S6-A10 (with sensor cable)

3 (Horizontally articulated) 1300 mm

±2.0 mm or less 20 kg 14 kg･m² max.

1×10^-6 Pa 430 kg ERDR-VD0020D-A00 Item

Model Type

Controlled Axes

Remarks

Manipulator Specifications

Specifications SEMISTAR-VD20D XU-RVD800D6-A10 (with sensor cable)

±2.0 mm or less 20 kg/arm 14 kg･m² max.

Model Type

Controlled Axes

Remarks

Stroke of 1300 mm

Three-phase 200 VAC, 2.0 kVA

*

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

1

^×

10 ^-6

Pa

183.5 40

570 100 (U-axis stroke)

285

U-axis

702 dia. (O-ring)

740 dia. (Hole for robot fixing bolt) 672 dia. (Hole diameter) 622 dia. (Max. outside diameter)

O-ring (V690) C2 S-axis motion

580

30° 137

)

C2

720 1300 (L-axis stroke)

Location hole

64 64 64 64 64

340

12×M8 (Depth: 15)

260

80

Connector panel

O-ring (V690)

Connector panel

508.5

L-axis (Sensor cable 1.5 ^ｍ)

R53

137

R53 R108

26.5 26.5 460

50

Center of end effector mounted part

40

103

Height of end effector’s attachment Install cable clamp to

secure sensor cable on the end effector.

Install cable clamp to secure sensor cable on the end effector. Grease holes*

(4 dia.) (2 holes)

12×M8 (Depth: 15) Center of end effector mounted part

Grease holes* (4 dia.) (2 holes)

1560 dia.

(Min. r

otation radius )

1560 dia. (Min. r

otation radius )

702 dia. (O-ring)

−165_° (S-axis stroke) +165^° (S-axis stroke)

183.5 40

285

U-axis 580

30° 137

1300 (L-, R-axis stroke)720

Location hole

508.5

L-axis

(Sensor cable 1.5^ｍ

)

R53

137R

53

103

Height of end effector’s attachment R108

R-axis

S-axis S=0°

137

460 460

−165_° (S-axis stroke) S-axis motion

64 64 64 64 64 10

340

260

80

26.5

40 50 26.5

C2 12×15 dia. holes

700 dia. (Max. diameter of S-axis)

*

: Also set up the 4 mm dia. hole in the end effector. Grease-up is possible without detaching end effector.

*

+165^° (S-axis stroke)

)

12×15 dia. holes

24 dia. counter boring (Depth: 18)

(Recommended bolts: M12×45) 700 dia. (Max. diameter of S-axis)

Range of Motion Operating Time*¹ (at max. speed)

509.5 (Max. height) 509.5 (Max. height)

8 (Allowance

for fit tolerance)

(7)

Dimensions

Units: mm Dimensions

Units: mm

・ Capable of transporting and transferring glass substrates of sizes up to 460 mm × 730 mm in vacuum environments.

・ High-rigidity construction and ARM control to realize high-precision positioning with minimum vibration.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

SEMISTAR - _VD 20 S

Single - arm robot, payload: 20 kg Dual - arm robot, payload: 20 kg/arm

SEMISTAR - _VD 20 D

Features Features

・ Capable of transporting and transferring glass substrates of sizes up to 460 mm × 730 mm in vacuum environments.

・ High-rigidity construction and ARM control to realize high-precision positioning with minimum vibration.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Features Features

Manipulator Specifications

Specifications SEMISTAR-VD20S XU-RVD800S6-A10 (with sensor cable)

Model Type

Controlled Axes

Remarks

Manipulator Specifications

Specifications SEMISTAR-VD20D XU-RVD800D6-A10 (with sensor cable)

Model Type

Controlled Axes

Remarks

Stroke of 1300 mm

Three-phase 200 VAC, 2.0 kVA

* *

1 2 : :

* *

1 2 : :

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

183.5 40

285

U-axis

702 dia. (O-ring)

O-ring (V690) C2 S-axis motion

580

30° 137

)

C2

720 1300 (L-axis stroke)

Location hole

64 64 64 64 64

340

12×M8 (Depth: 15)

260

80

Connector panel

O-ring (V690)

Connector panel

508.5

L-axis (Sensor cable 1.5 ^ｍ)

R53

137

R53 R108

26.5 26.5 460

50

40

103

Height of end effector’s attachment Install cable clamp to

Install cable clamp to secure sensor cable on the end effector.

Grease holes*

(4 dia.) (2 holes)

12×M8 (Depth: 15) Center of end effector mounted part

Grease holes*

(4 dia.) (2 holes)

1560 dia.

(Min. r

otation radius )

1560 dia.

(Min. r

otation radius )

702 dia. (O-ring)

−165_° (S-axis stroke) +165^° (S-axis stroke)

183.5 40

285

U-axis 580

30° 137

1300 (L-, R-axis stroke)720

Location hole

508.5

L-axis

(Sensor cable 1.5^ｍ

)

R53

137R

53

103

Height of end effector’s attachment R108

R-axis

S-axis S=0°

137

460 460

−165_° (S-axis stroke) S-axis motion

64 64 64 64 64 10

340

260

80

26.5

40 50 26.5

C2 12×15 dia. holes

*

)

12×15 dia. holes

24 dia. counter boring (Depth: 18)

(Recommended bolts: M12×45) 700 dia. (Max. diameter of S-axis)

Range of Motion Operating Time*¹ (at max. speed)

509.5 (Max. height) 509.5 (Max. height)

8 (Allowance

for fit tolerance)

6 7

(8)

SEMISTAR - _VD 35 D - _G 4 A SEMISTAR - _VD 35 S - _G 4 A

Dimensions

Units: mm Dimensions

Units: mm

Features Features

・ Capable of transporting and transferring glass substrates of sizes up to 730 mm × 920 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Single - arm robot, payload: 35 kg

Features Features

・ Capable of transporting and transferring glass substrates of sizes up to 730 mm × 920 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Dual - arm robot, payload: 35 kg/arm

Manipulator Specifications

Specifications SEMISTAR-VD35S-G4A XU-RVD1230S6-A10 (with sensor cable)

Model Type

Controlled Axes

Remarks

Manipulator Specifications

Specifications SEMISTAR-VD35D-G4A XU-RVD1230D6-A10 (with sensor cable)

Model Type

Controlled Axes

Remarks

Stroke of 2050 mm

*

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

1

^×

10 ^-6

Pa

L-axis

R-axis

30°

U-axis

150 (U-axis stroke)

683191.5 40 556.5

556.5

O-ring (V690)

(325

)

993 1057

426 80 80 80 80 80

330 48

70

4896

13

12×M10 (Depth: 20)

137

600 600

137

R70

R85 R108

330

R60

Connector panel

(Sensor cable 1.5 m)

559.5 (Max. height)

C2 S-axis motion

prohibition area (30°) Center of end effector

mounted part

130

Height of end effector’s attachment 2480 dia. (Min. r

otation radius )

−165^° (S-axis stroke)

330

Location hole +165^° (S-axis stroke) 42680 80 80

80 80

48 330

70

96

13

12×M10 (Depth: 20)

48

150 (U-axis stroke)

702 dia. (O-ring)

740 dia. (Hole for robot fixing bolt) 700 dia. (Max. diameter of S-axis)

652 dia. (Max. outside diameter) 672 dia. (Hole diameter) Location hole

993 1057

2050 (L-axis stroke)

137

600 600

R60

30°

2480 dia. (Min. r

otation radius ) L-axis

U-axis

683191.5 40556.5

(325

)

Connector panel

C2

O-ring (V690)

130

Height of end effector’s attachment 12×15 dia. holes

12×15 dia. holes

24 dia. counter boring (Depth: 18) (Recommended bolts: M12×45) Install cable clamp to

secure sensor cable

on the end effector. Install cable clamp to

770 dia. (Flange diameter)−0.2⁰

740 dia. (Hole for robot fixing bolt) 770 dia. (Flange diameter)_−0.2⁰ 330

559.5 (Max. height)

702 dia. (O-ring)

652 dia. (Max. outside diameter) 672 dia. (Hole diameter) +165^° (S-axis stroke)

−165_° (S-a

xis stroke)

(9)

SEMISTAR - _VD 35 D - _G 4 A SEMISTAR - _VD 35 S - _G 4 A

Dimensions

Units: mm Dimensions

Units: mm

Features Features

・ Capable of transporting and transferring glass substrates of sizes up to 730 mm × 920 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Single - arm robot, payload: 35 kg

Features Features

・ Capable of transporting and transferring glass substrates of sizes up to 730 mm × 920 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Dual - arm robot, payload: 35 kg/arm

Manipulator Specifications

Specifications SEMISTAR-VD35S-G4A XU-RVD1230S6-A10 (with sensor cable)

Model Type

Controlled Axes

Remarks

Manipulator Specifications

Model Type

Controlled Axes

Remarks

Stroke of 2050 mm

* *

1 2 : :

* *

1 2 : :

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

L-axis

R-axis

30°

U-axis

150 (U-axis stroke)

683191.5 40 556.5

556.5

O-ring (V690)

(325

)

993 1057

426 80 80 80 80 80

330 48

70

4896

13

12×M10 (Depth: 20)

137

600 600

137

R70

R85 R108

330

R60

Connector panel

559.5 (Max. height)

C2 S-axis motion

prohibition area (30°) Center of end effector

mounted part

130

Height of end effector’s attachment 2480 dia. (Min. r

otation radius )

330

Location hole +165^° (S-axis stroke) 42680 80 80

80 80

48 330

70

96

13

12×M10 (Depth: 20)

48

150 (U-axis stroke)

702 dia. (O-ring)

740 dia. (Hole for robot fixing bolt) 700 dia. (Max. diameter of S-axis)

652 dia. (Max. outside diameter) 672 dia. (Hole diameter) Location hole

993 1057

137

600 600

R60

30°

2480 dia. (Min. r

otation radius ) L-axis

U-axis

683191.5 40556.5

(325

)

Connector panel

C2

O-ring (V690)

130

Height of end effector’s attachment 12×15 dia. holes

12×15 dia. holes

24 dia. counter boring (Depth: 18) (Recommended bolts: M12×45) Install cable clamp to

secure sensor cable

on the end effector. Install cable clamp to

770 dia. (Flange diameter)−0.2⁰

740 dia. (Hole for robot fixing bolt) 770 dia. (Flange diameter)_−0.2⁰ 330

559.5 (Max. height)

702 dia. (O-ring)

652 dia. (Max. outside diameter) 672 dia. (Hole diameter) +165^° (S-axis stroke)

−165_° (S-a

xis stroke)

8 9

(10)

SEMISTAR - _VD 40 S

Dimensions

Units: mm

Single - arm robot ， payload: 40 kg

Manipulator Specifications

Specifications SEMISTAR-VD40S

XU-RVD2200S6-A10 (with sensor cable) 3 (Horizontally articulated)

3800 mm

L, S-axis: ±0.3 mm U-axis: ±0.4 mm

±5.0 mm or less 40 kg 65 kg･m² 1×10^-6 Pa 1850 kg ERDR-VD0040D-A00 Item

Model Type

Controlled Axes

Remarks

Horizontal direction, at end effector mounted part (2000 mm area of expansion position) Including mass of end effector

Features

・ Capable of transporting and transferring glass substrates of sizes up to 1250 mm × 2250 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Features

*

SEMISTAR - _VD 40 D - _G 6 A

Dimensions

Units: mm

Dual - arm robot ， payload: 40 kg/arm

Manipulator Specifications

L, R, S-axis: ±0.3 mm U-axis: ±0.4 mm

±5.0 mm or less 40 kg/arm

65 kg･m² 1×10^-6 Pa 1900 kg ERDR-VD0040D-A00 Item

Model Type

Controlled Axes

Remarks

Stroke of 3800 mm Stroke of 340 degree (L, R=0) Stroke of 200 mm

Features

・ Capable of transporting and transferring glass substrates of sizes up to 1250 mm × 2250 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Features

*

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

1

^×

10 ^-6

Pa

Recommended O-ring (V845) (ID845, OD869)

24×18 dia. holes

28 dia. counter boring (Depth: 20) (For bolts to mount manipulator) (Bolts M16×60)

350 (Required bending radius of cable)

770

1600 2200

220

R555 (Min. r

otation radius of S -axis)

58

1225 1225

(120

)

Height of end effector’s attachment

770 (Max. height) 267.5200 (U-axis)356.5 22054363698 98

160

15075

6

R50 R50

R105

R140

3rd. arm* Center of end effector mounted part

L-axis

R-axis S-axis motion prohibition area (20°)

U-axis S-axis

20°

905 dia. (Hole for robot fixing bolt) 782 dia. (Max. outside diameter) 815 dia. (Hole diameter) 955 dia. (Flange diameter)_−0.2⁰ +170^° (S-axis stroke)

−170° (S-axis stroke) 3910 dia. (Min. rotation radius )

*

: L-, R-axis 3rd. arm design can be modified in accordance with shape of end effector’s attachment.

8×11 dia. holes

20 dia. counter boring (Depth: 15) (For mounting end effectors) 3rd. arm*

8×11 dia. holes

20 dia. counter boring (Depth: 15) (For mounting end effectors)

24×18 dia. holes

28 dia. counter boring (Depth: 18) (For bolts to mount manipulator) (Recommended bolts: M16x60)

S=0° (Sensor cable

1.5 _ｍ)

770

1600 2200

220

58 267.5

1225 1225

200 (U-axis)

(120

)

670 (Max. height) 356.5

S=0°

(906) (1178

)

225265

(502

)

Dummy arm (Does not work)

12

R50 R140

R50

R555 (Min. r

3910 dia. (Min. rotation radius ) R105 L-axis

S-axis

20^°

U-axis

905 dia. (Hole for robot fixing bolt) 782 dia. (Max. outside diameter) 815 dia. (Hole diameter) 955 dia. (Flange diameter)_−0.2⁰

220543636

98 98 160

15075

6

*

: L-axis 3rd. arm design can be modified in accordance with shape of end effector’s attachment.

(Sensor cable 1.5 _ｍ)

(11)

SEMISTAR - _VD 40 S

Dimensions

Units: mm

Single - arm robot ， payload: 40 kg

Manipulator Specifications

Specifications SEMISTAR-VD40S

XU-RVD2200S6-A10 (with sensor cable) 3 (Horizontally articulated)

3800 mm

L, S-axis: ±0.3 mm U-axis: ±0.4 mm

±5.0 mm or less 40 kg 65 kg･m² 1×10^-6 Pa 1850 kg ERDR-VD0040D-A00 Item

Model Type

Controlled Axes

Remarks

Features

・ Capable of transporting and transferring glass substrates of sizes up to 1250 mm × 2250 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Features

* *

1 2 : :

SEMISTAR - _VD 40 D - _G 6 A

Dimensions

Units: mm

Dual - arm robot ， payload: 40 kg/arm

Manipulator Specifications

L, R, S-axis: ±0.3 mm U-axis: ±0.4 mm

±5.0 mm or less 40 kg/arm

65 kg･m² 1×10^-6 Pa 1900 kg ERDR-VD0040D-A00 Item

Model Type

Controlled Axes

Remarks

Features

・ Capable of transporting and transferring glass substrates of sizes up to 1250 mm × 2250 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

Features

* *

1 2 : :

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

UltimateMax.

Pressure

1

^×

10 ^-6

Pa

24×18 dia. holes

770

1600 2200

220

R555 (Min. r

58

1225 1225

(120

)

770 (Max. height) 267.5200 (U-axis)356.5 22054363698 98

160

15075

6

R50 R50

R105

R140

3rd. arm*

L-axis

R-axis S-axis motion prohibition area (20°)

U-axis S-axis

20°

905 dia. (Hole for robot fixing bolt) 782 dia. (Max. outside diameter) 815 dia. (Hole diameter) 955 dia. (Flange diameter)_−0.2⁰ +170^° (S-axis stroke)

−170° (S-axis stroke) 3910 dia. (Min. rotation radius )

*

8×11 dia. holes

20 dia. counter boring (Depth: 15) (For mounting end effectors) 3rd. arm*

8×11 dia. holes

20 dia. counter boring (Depth: 15) (For mounting end effectors)

24×18 dia. holes

28 dia. counter boring (Depth: 18) (For bolts to mount manipulator) (Recommended bolts: M16x60)

S=0° (Sensor cable

1.5 _ｍ)

770

1600 2200

220

58 267.5

1225 1225

200 (U-axis)

(120

)

670 (Max. height) 356.5

S=0°

(906) (1178

)

225265

(502

)

Dummy arm (Does not work)

12

R50 R140

R50

R555 (Min. r

3910 dia. (Min. rotation radius ) R105 L-axis

S-axis

20^°

U-axis

905 dia. (Hole for robot fixing bolt) 782 dia. (Max. outside diameter) 815 dia. (Hole diameter) 955 dia. (Flange diameter)_−0.2⁰

220543636

98 98 160

15075

6

*

: L-axis 3rd. arm design can be modified in accordance with shape of end effector’s attachment.

(Sensor cable 1.5 _ｍ)

10 11

(12)

Manipulator Specifications

Specifications SEMISTAR-VD95D

XU-RVD1450D6-A10 (with sensor cable) 4 (Horizontally articulated)

2300 mm

Model Type

Controlled Axes

Remarks

Dimensions

Units: mm

SEMISTAR - _VD 95 D

Dual - arm robot, payload: 95 kg/arm Features

Features

・ Capable of transporting and transferring glass substrates of sizes up to 730 mm × 920 mm in vacuum environments.

・ Realizes high rigidity through link mechanism on arm.

・ Low gas emissions by eliminating use of belt drive in vacuum environments.

・ Sensors for substrate detection can be wired internally.

*

DX 100 Controller (for Vacuum Robots)

Items Configuration Dimensions, Mass Cooling System Ambient Temperature Relative Humidity Power Supply Grounding

Digital l/Os

Positioning System Programming Capacity Expansion Slots LAN (Connection to Host) Interface

Control Method Drive Units

Specifications Dust proof

425 (W) × 450 (D) × 1250 (H) mm, 100 kg Indirect cooling

During operation: 0˚C to +25˚C During storage: −10˚C to +60˚C 90% max. (non-condensing)

Three-phase 200/220 VAC (+10% to −15%), 60 Hz (±2%) (Japan) Three-phase 200 VAC (+10% to −15%), 50 Hz (±2%) (Japan) Grounding resistance : 100 Ω or less

Specialized signals: 23 inputs and 5 outputs General signals: 40 inputs and 40 outputs Max. I/O (optional): 2,048 inputs and 2,048 outputs Serial communications (absolute encoder) JOB: 200,000 steps, 10,000 instructions CIO ladder: 20,000 steps

PCI: 2 slots for main CPUs and 1 slot for servo CPU 1 additional slot for sensor board

1 (10BASE-T/100BASE-TX) RS-232C: 1ch

Software servo control

SERVOPACK for AC Servomotors (can be controlled up to 8 axes)

Programming Pendant

Specifications 169 (W) × 50 (D) × 314.5 (H) mm 0.990 kg

Reinforced plastics

Select keys, axis keys, numerical/application keys, Mode switch with key (mode: teach, play, and remote), emergency stop button, enable switch, compact flash card interface device (compact flash is optional.), USB interface device

5.7-inch color LCD, touch panel 640 × 480 pixels (alphanumeric characters, Chinese characters, Japanese letters, others) IP65

Standard: 8 m, Max.: 36 m (with optional extension cable) Items

Dimensions Mass Material

Operation Device

Display

IEC Protection Class Cable Length UltimateMax.

Pressure

1

^×

10 ^-6

Pa

50 50 50

50 25

5050

12×M10 screws (For mounting end effector)

7065

100

Detail of mounting surface for end effector (L-axis)

Detail of mounting surface for end effector (R-axis) 300

100 50 25 50 50 50

6570

5050

12×M10 screws (For mounting end effector)

3rd. arm*

268.5 710

426.5

(Arm height

) 695

2300 (L-, R-axis stroke) 1450

220220

350 (Required bending radius of cable) 700

R50

Height of end effector’s attachment L-axis

R-axis

U-axis R105

58

Recommended O-ring (V845) (ID845, OD869) (provided by users)

785 90 (Pitch between end effectors)

850

20°

2460 dia.

(Min. rotation radius )

24×18 dia. holes

R555 (Min. r

otation radius of S -axis) 700

783 dia. (Max. outside diameter) 815 dia. (Hole diameter)

150 (U-axis stroke)

C1

905 dia. (Hole for robot fixing bolt) 955 dia. (Flange diameter) −0.2⁰

50

*

+170° (S-axis stroke)

−170^° (S-axis stroke) R140

Handling Robots for Use in Vacuum

Handling Robots for Use in Vacuum

SEMISTAR - V Series

SEMISTAR - V Series

SEMISTAR- VD10S SEMISTAR- VD20S SEMISTAR- VD35S-G4A

10 kg 20 kg 35 kg

SEMISTAR- VD40D-G6A SEMISTAR- VD95D

40 kg / 95 kg /

SEMISTAR- VD10D SEMISTAR- VD20D SEMISTAR- VD35D-G4A

10 kg / arm 20 kg / arm 35 kg / arm

Single - arm robots

Dual - arm robots

SEMISTAR - V Series

Complete product lineup of robots optimized for various different glass substrate sizes.

Handling Robots for Use in Vacuum

Features

Lar ge Small Glass substrate size

10 kg Payload 100 kg

2nd generation 400 mm × 500 mm class

4th generation (half size) 460 mm × 730 mm class

5.5th generation (quarter size) 650 mm × 750 mm class

4th generation 730 mm × 920 mm class

5.5th generation 1300 mm × 1500 mm class

8th generation (half size) 1250 mm × 2250 mm class

Applicable to photomask

High - speed and high - precision robots with payloads ranging from 10 kg to 95 kg

4

6

5 3

2 1

7

High-rigidity arm and ARM* control for high-precision positioning and minimum vibration.

Reduced maintenance costs with long life.

The arm can be detached for easy hoisting during maintenance.

Sensors for substrate detection can be wired internally.

Vacuum seal uses mag- netic fluid and bellows for use in high-vacuum environments.

SEMISTAR - V series offers high - precision

transport and transfer of OLED, LCD, and solar panel glass substrates with minimum vibration.

Coordination of 3 to 4 axes enables a variety of motions, including rotation, extension, and elevation.

Ideal for cluster tools in high - vacuum

environments. *

SEMISTAR- VD40S

40 kg

SEMISTAR- VD10S SEMISTAR- VD20S SEMISTAR- VD35S-G4A

10 kg 20 kg 35 kg

SEMISTAR- VD40D-G6A SEMISTAR- VD95D

40 kg / arm 95 kg / arm

SEMISTAR- VD10D SEMISTAR- VD20D SEMISTAR- VD35D-G4A

10 kg / arm 20 kg / arm 35 kg / arm

Single - arm robots

Dual - arm robots

SEMISTAR - V Series

Complete product lineup of robots optimized for various different glass substrate sizes.

Handling Robots for Use in Vacuum

Features

Lar ge Small Glass substrate size

10 kg Payload 100 kg

2nd generation 400 mm × 500 mm class

4th generation (half size) 460 mm × 730 mm class

5.5th generation (quarter size) 650 mm × 750 mm class

4th generation 730 mm × 920 mm class

5.5th generation 1300 mm × 1500 mm class

8th generation (half size) 1250 mm × 2250 mm class

Applicable to photomask

High - speed and high - precision robots with payloads ranging from 10 kg to 95 kg

4

6

5 3

2 1

7

High-rigidity arm and ARM* control for high-precision positioning and minimum vibration.

Reduced maintenance costs with long life.

The arm can be detached for easy hoisting during maintenance.

Sensors for substrate detection can be wired internally.

Vacuum seal uses mag- netic fluid and bellows for use in high-vacuum environments.

SEMISTAR - V series offers high - precision

transport and transfer of OLED, LCD, and solar panel glass substrates with minimum vibration.

Coordination of 3 to 4 axes enables a variety of motions, including rotation, extension, and elevation.

Ideal for cluster tools in high - vacuum

environments. *

SEMISTAR - _{V Series}

SEMISTAR - _{V Series}

SEMISTAR- VD10S ^SEMISTAR- VD20S ^SEMISTAR- VD35S-G4A

SEMISTAR- VD40D-G6A ^SEMISTAR- VD95D

SEMISTAR- VD10D ^SEMISTAR- VD20D ^SEMISTAR- VD35D-G4A

Single - _{arm robots}

Dual - _{arm robots}

SEMISTAR - V series offers high - _precision

SEMISTAR- VD10S ^SEMISTAR- VD20S ^SEMISTAR- VD35S-G4A

SEMISTAR- VD40D-G6A ^SEMISTAR- VD95D

SEMISTAR- VD10D ^SEMISTAR- VD20D ^SEMISTAR- VD35D-G4A

Single - _{arm robots}

Dual - _{arm robots}

SEMISTAR - V series offers high - _precision

SEMISTAR - _VD 10 S

10 ^-5

SEMISTAR - _VD 10 D

10 ^-5

SEMISTAR - _VD 10 S

10 ^-5

SEMISTAR - _VD 10 D

10 ^-5

SEMISTAR - _VD 20 S

SEMISTAR - _VD 20 D