Ë# b ÷ m ÇP É b Ø Ì ¦ R õ u § P c tÀ W ¥ m× D ÷ m ÇP É b Ø (SiO

(1)

Æ S

Ë# b ÷ m ÇP É b Ø Ì ¦ R õ u § P c tÀ W ¥ m× D ÷ m ÇP É b Ø (SiO

x

) U c lT c l; c" e ÷ m ÇP É b Ø x ¢+ s ÇX N Ë8 ý ] k ùV R Ë õ

m

Í ° Ë Ñ® o° Ë Ñ ¤V R Ë

T

?  · ç¡¤)ç · Ðg`@U · *×<ø¶BZ9^∗

y

©

"é¶@/<Æ§ Óüto<Æõ, ðr; 200-701 (2008¸ 4Z4 21{9 ~ÃÎ6£§)

:

r ½¨\"f {9E$ (SiH4) Û¼ü< íßo|9è (N2O) Û¼_ D¥½+ËÛ¼\¦ 6 x # e¦Ý¼ o<Æ l

\ P

%o # z´oBH (Si) ¸&ñ`¦ +þA$í ¦ ¸&ñ_ Fgµ1ÏFg (light emission) :£¤$í`¦ ½¨ %i

. íÐÀÒpW1HÛ¼ (PL) 8£¤&ñ~½ÓZO`¦ 6 x # eç# Si 0lx¸, \P%o :r¸ x9 \P%o rçß\ Ér Fg µ

1

ÏFg :£¤$í_ o\¦ ¸ %i. PL peak_ ©Ér Si 0lx¸, \P%o :r¸ x9 \P%o rçßs 7£x<Ê

\

©© Aá¤Ü¼Ð s1lx (redshift) H {9'a)a 1lxs 'a8£¤÷&%3. ÕªQ peak\"f PL_ [jl

H eç# Si "é¶_ 0lx¸ü< \P%o :r¸ s\ {9'a)a 'aº$í`¦ ?/t ·ú§¤Ü¼ \P%o rçßs 7£x

<Ê\ [jl 7£x H 1lx`¦ ?/%3. sQôÇ õ[þtÉr íßo z´oBH ~ÃÌ}`¦ s6 x # Fg

è ]j\ &h½+ËôÇ Fgµ1ÏFg Si ¸&ñ`¦ +þA$í½+É Ãº e6£§`¦ _pôÇ.

PACS numbers: 79.60.Jv, 73.61.Tm Keywords: z´oBH ¸&ñ, Fgµ1ÏFg

I. "e Â]Ø

1990¸ Canham\ _K /BN|9 z´oBH (porous sili- con)Ü¼ÐÂÒ' rFg %ò%i_ Fgµ1ÏFg (light emission)

&

³©s 'a¹1Ï)a sÊê [1], Fgè ]j¸\¦ 0AôÇ Ä»6 xôÇ Ó

ü

t|9Ð ¸&ñ z´oBHs ÅÒ3lq`¦ ~ÃÎ¦ e. Si ¸

&

ñ

_ Fgµ1ÏFg ´òÖ¦s BÄº Z}Ér כ Ér qµ1ÏFg F½+Ë`¦ 4

R¸H Ô¦íHÓüts <Ês &hl M:ëHs. ôÇ¼#, Fg

èÐ_ 6£x6 x ü@\ þjH q6fµ1Ï$í Bj¸o è6 x Si

¸&ñ floating gate\ 'aôÇ ½¨¸ Ö¸µ1Ïy '÷&¦ e

[2–7]. sQôÇ Si ¸&ñ\ 'aôÇ 'adÉr l>r_ z´ o

BH ìøÍ¸^\ lìøÍôÇ 6£x6 xlÕüt`¦ Õª@/Ð &h6 x½+É Ãº e

H ©&hs el M:ëHs. Si ¸&ñ_ 6£x6 x$í`¦ FG@/

o l 0AK"fH 9כ¹ôÇ ©_ Fgµ1ÏFg`¦ Ä»¸½+É Ãº e

¦ floating gate_ Bj¸o :£¤$í`¦ ¸]X½+É Ãº e¸2¤ ß¼l ü

< éß0A &h{© Ì Ãº\¦ ¸]X½+É Ãº eH Si ¸&ñ ]j¸

~

½

ÓZOs 9כ¹ .

&

³F lo<Æ&h ÂÒd\ _K ]j¸÷&H /BN$í Si

¸&ñ ü@\ Si "é¶ s:rÅÒ{9)a síßo½©è\¦ \P%o

# Si ¸&ñ`¦ +þA$íH ~½ÓZO [8], bulk z´oBH\ ¦\

-t YUs$\¦ ¸ # ÂÒìr&h Ö6x6 x\ _ôÇ Si ¸

∗E-mail: [email protected]

&

ñ

`¦ +þA$íH ~½ÓZO [9], q&ñ|9 z´oBH ~ÃÌ}`¦ s6 x # Si

¸&ñ`¦ +þA$íH ~½ÓZO [10] 1px Si ¸&ñ`¦ +þA$í H

ªôÇ ~½ÓZOs ]jr÷&¦ e.

:

r ½¨\"fH e¦Ý¼ o<Æ l© 7£xÃÌ (PECVD) ~½Ó Z

O

Ü¼Ð ]j¸)a eç# Si "é¶\¦ °úH íßo z´oBH (SiOx)

~ Ã

Ì}`¦ ¦:r \P%o # Si ¸&ñ`¦ +þA$íôÇ Êê

¸&ñ_ Fgµ1ÏFg :£¤$í`¦ ½¨ %i. eç# Si "é¶_ 0

l

x¸, \P%o :r¸ x9 \P%o rçß`¦ or& Si

¸&ñ`¦ +þA$í %iÜ¼ 9 íÐÀÒpW1HÛ¼ (photoluminescence)\¦ 8£¤&ñ # Fgµ1ÏFg :£¤$í`¦ ½¨ %i.

II. ÷mÇ]Mö Uês0nÉ

:

r ½¨\ 6 x)a íßo z´oBH (SiOx) ~ÃÌ}Ér {9E$ (SiH4) Û¼ü< íßo|9è(N2O)Û¼_ D¥½+ËÛ¼\¦ 6

x # e¦Ý¼ o<Æ l© 7£xÃÌ (PECVD) ~½ÓZO\ _K ]

j¸ %iÜ¼ 9, ¿ºaH @/|ÄÌ 250 nm s. ~ÃÌ}Ér (100)

~

½

Ó¾Ó_ p-+þA Czochralski Si lóøÍ 0A\ +þA$í %iÜ¼ 9, ~ÃÌ }

]j¸r e¦Ý¼ ìøÍ6£xl ?/_ Û¼ ·ú§4Ér 1 torr, l ó

ø

Í_ :r¸H 300^◦CÐ {9&ñ > Ä»t %i. {9E$ Û

¼ü< íßo|9è Û¼_ D¥½+ËqÖ¦Ér |9|¾Óâì2£§ ¸]Xl (MFC)\¦ :xK Û¼ âì2£§Ò¦Ð ¸]X %iÜ¼ 9, íßo z´o -139-

(2)

A 150 15 SiO1.09

C 150 25 SiO1.22

D 150 30 SiO1.33

E 150 45 SiO1.75

B 150 70 SiO1.95

B

H ~ÃÌ}_ eç# Si "é¶_ 0lx¸\¦ orvl 0AK {9 E

$

Û¼_ âì2£§Ö¦Ér 150 sccmÜ¼Ð ¦&ñrv¦ íßo |9

è_ âì2£§Ö¦`¦ or& ~ÃÌ}`¦ ]j¸ %i. ]j¸)a íß

o z´oBH ~ÃÌ}_ eç# Si "é¶_ 0lx¸H Auger Electron Spectroscopy (AES) ~½ÓZOÜ¼Ð ìr$3 %i. :r ½¨\ 6

x)a r«Ñ[þt_ ]j¸ ¸| x9 Si "é¶_ $íìr ¸$íqH Table 1\ lÕüt %i.

]

j¸)a íßo z´oBH ~ÃÌ}`¦ 'a© \P lÐ\¦ 6

x # @/l·ú_ |9è ìr0Al \"f ¦:r \P%o õ&ñ

`

¦ :xK Si ¸&ñ`¦ +þA$í %iÜ¼ 9, ¸&ñ_ +þA$í

#

ÂÒH ÈÒõ&³pâ (TEM)`¦ 6 x # SX %i.

íÐÀÒpW1HÛ¼ (PL) 8£¤&ñ`¦ :xK Si ¸&ñ_ Fgµ1ÏFg :

£

¤$í`¦ ¸ %i. PL 8£¤&ñ r #l Fg"é¶Ü¼ÐH © 488 nm ØÔ4H s:r YUs$\¦ 6 x %iÜ¼ 9, r«ÑÐ Â

Ò' ¸H PL\¦ ìrFgl (monochromator)\ :xõr&

©Z>Ð ìrFgr Êê \PèÐ Íty)a CCD ©u\¦ s

6 x # ©\ Ér PL [jl\¦ 8£¤&ñ %i.

III. +sÇÊÝ õmÍ w²o

Ä

º íßo z´oBH ~ÃÌ}`¦ \P%oôÇ Êê Si ¸&ñ _

+þA$í #ÂÒ\¦ ·úÐl ÈÒõ&³pâ(TEM)`¦ 6

x # ~ÃÌ}_ éß`¦ ¸ %iÜ¼ 9, Fig. 1Ér r«Ñ D (SiO1.33)_ éß TEM `¦ ·p כ s. Fig.

1(a)H \P%o l _ ~ÃÌ}_ TEM `¦ ·p

כ

s 9, Fig. 1(b)H 1100 ^◦C\"f 1rçß 1lxîß \P%o ôÇ Ê

ê OÉ%òôÇ TEM `¦ ·p כ s. \P%o t ·ú§

É

r r«Ñ\H #Q*ôÇ ¸{9¸ >rF ·ú§6£§`¦ Ð# Å

Ò¦ e. ÕªQ Fig. 1(b)\"f ^¦ Ãº e1pws \P%o ô

Ç r«Ñ_ âÄº ¸{9[þts ½Ó|9 (SiO2 matrix)\ 8

ú

§8ú§s +þA$í÷&#Q e. ¸{9_ >rF\¦ ~1> SX½+É Ã

º e¸2¤ Y> >h_ ¸&ñ[þt`¦ ¸ÏÒoÜ¼Ð ³ðr %i Ü

¼ 9, [þts ½©gË:&hÜ¼Ð C\P÷& e6£§`¦ SX½+É Ãº e

. sQôÇ õH r«Ñ\ +þA$í)a ¸{9 Si &ñ{9

e`¦ ?/ 9, Si ¸&ñ_ ß¼lH @/|ÄÌ 3 nm s 9 é

ß

0A &h{© &ñ{9_ ÃºH  4 × 10¹²cm⁻²s.

Fig. 1. TEM images of sample D (a) before and (b) after thermal annealing at 1100 ^◦C for 1 hour. The white circles represent typical Si nanocrystals.

Fig. 2. Photoluminescence spectra of sample D before and after thermal annealing at 1100 ^◦C for 1 hour.

(3)

Fig. 3. Intensity and wavelength at PL peak plotted as a function of x value for SiOx films. The films were annealed at 1100 ^◦C for 1 hour.

Fig. 4. Intensity and wavelength at PL peak of sample D as a function of annealing temperature. The sample was annealed for 1 hour at each temperature.

{ 9

ìøÍ&hÜ¼Ð Ãº ¸p' ß¼l_ Si ¸&ñs í<Ê

)

Ç ´ú§Ér ½¨õ[þts Ð¦÷&#Q e. ÕªQ Si ¸

&

ñ

s í<Ê)a SiO2~ÃÌ}_ Fgµ1ÏFg "é¶\ @/K"fH ß¼>

¿

º t_ Bj&m7£§s ]jr÷&¦ e. H Si ¸

&

ñ

?/\ ª&hÜ¼Ð ½¨5Åq÷&#Q eH "lor:r[þt_ F½+Ë

\

_ôÇ Fgµ1ÏFg Bj&m7£§s¦ [1,10], Ér H Si

¸&ñ`¦ ÑütQ ¦ eH SiO₂ ?/_ <Êõ 'aºôÇ

ü< &ñ/BN_ µ1ÏFg F½+Ë\ _ôÇ Fgµ1ÏFg Bj&m7£§s [11,12]. íßo z´oBH ~ÃÌ}`¦ 6 x # +þA$í)a Si ¸

&

ñ

s í<Ê)a SiO2~ÃÌ}_ Fgµ1ÏFg :£¤$í`¦ sK l 0AK PL 8£¤&ñ`¦ z´r %iÜ¼ 9 Õª õH Fig. 2ü< °ú . Fig.

2H Fig. 1_ r«Ñ[þt\ @/ # 8£¤&ñôÇ PL Û¼&7àÔ!3`¦

·p כ s. ÕªaË>_ õH \P%o l õ Êê_ r

«

Ñ ¸¿º\"f PLs >rF<Ê`¦ Ð#ÅÒ¦ e. \P%o

Fig. 5. Intensity and wavelength at PL peak of sample D as a function of annealing time. The sample was annealed at 1100 ^◦C.

t

·ú§Ér r«Ñ_ PLÉr 700 nm H%\"f PL peak

èß ìøÍ, \P%o ôÇ r«Ñ_ PLÉr 830 nm H%\"f PL peak`¦ Ð#ÅÒ¦ e. ¢¸ôÇ \P%o ôÇ r«Ñ_ PL [j l

H \P%o t ·ú§Ér r«Ñ_ PL_ [jlÐ BÄº 9þt÷r ë

ß

É

r r«Ñ_ PL Û¼ØþàÔ!3Ér Û¼&7àÔ!3_ :£¤$íÜ¼Ð óøÍéß

|

X< SiO2 ?/_ <Ê\ _ôÇ PLõ Ä» 9 [13,14], ¢¸ ô

Ç ¸&ñs >rF t ·ú§H Fig. 1(a)_ õÐ ^¦ M: SiO2 ?/_ <Ê\ lôÇ PLÐ óøÍéß)a. sQôÇ ìr$3

É

r \P%o ôÇ r«Ñ_ PLÉr ~ÃÌ} ]j¸r +þA$í)a ¦Ä»

<

Ê\ lôÇ Fgµ1ÏFgsl ÐH fçß]X&hÜ¼Ð Si ¸

&ñõ x9]Xy 'a÷&#Q H PLÐ ÆÒ&ñ)a.

:

r ½¨\"f ]j¸)a Si ¸&ñ ~ÃÌ}_ Fgµ1ÏFg :£¤$í

`

¦ 7á§ 8 ½¨^&hÜ¼Ð ·úÐl 0AK íßo z´oBH ~ÃÌ} ?/ _

Si "é¶_ 0lx¸, \P%o :r¸ x9 \P%o rçß\ Ér PL peak_ 0Au x9 peak\"f_ PL [jl_ o\¦ ¸

%i. Fig. 3Ér Si 0lx¸ Ér #Qt íßo z´oBH (SiOx) ~ÃÌ}`¦ 1100^◦C\"f 1rçß 1lxîß \P%o ôÇ Êê 8£¤

&

ñ

ôÇ PL peak ü< peak\"f_ PL [jl\¦ x °úכÜ¼Ð ·p

כ

H z´`¦ Ð#ÅÒ¦ e. sQôÇ õH Si 0lx¸ &h

`

¦ âÄº Si ¸&ñ_ ß¼l tH õÐ K$3)a

. ìøÍ peak\"f PL [jlH Si 0lx¸ü< Ìº§Â ôÇ 'a$í

`

¦ Ð#ÅÒt ·ú§¦ eÜ¼ 9, x=1.33 H%\"f PL [jl

©

@/&hÜ¼ ß¼> z`¦ Ð#ÅÒ¦ e. sQôÇ õH x=1.33 H%_ Si 0lx¸{9 M: Fgµ1ÏFg ´òÖ¦\ l# H Si

Ë# b ÷ m ÇP É b Ø Ì ¦ R õ u § P c tÀ W ¥   m× D ÷ m ÇP É b Ø (SiO

Æ S