Single Focus Hypocycloidal Pinch X ê sV 8 ý X-ray U ê s û s Ú — ¤V R Ë

Single Focus Hypocycloidal Pinch X ê sV 8 ý X-ray U ê s û s Ú — ¤V R Ë

*

× <U  ý — ¡ ^∗ · ) í <a : @¦  ·  ™ »( å ] 8 ;

î

ß –1 l x @ /† < Ɠ § Ó ü t o † < Æõ , î ß –1 l x 760-749 (2005¸   10 Z 4 15{ 9  ~ à Î6 £ §)

HCP (hypocycloidal pinch)  © œu _   Ï ? @ Òì  r`  ¦ „  F G Ü ¼– Ð  6   x # Œ ô  Ç > h_  œ í& h s  ë “ By • ¸2 Ÿ ¤ à º& ñ

% i  . ~ ½ ӄ   Û ¼0 Au   H IPS (inverse pinch switch)\  ¦  © œ‚ Ã Ì # Œ [ O + « > õ & ñ \ " f Û ¼0 Au _   õ \  ¦ ~ ½ Ót 

% i  .  Ø ÔŒ 4 H Û ¼_  · ú š§ 4 õ  ~ ½ ӄ  „  · ú š    o\    É r plasma focus + þ A$ í `  ¦ › ' a ¹ 1 Ï % i  . s   © œu – ÐÂ Ò '

 µ 1 ÏÒ q t   H X-ray _  µ 1 ÏÒ q t : £ ¤$ í `  ¦ › ¸  % i  .  Ø ÔŒ 4 H Û ¼· ú š§ 4  80 ∼ 130 mtorr, „  · ú š 9 ∼ 17 kV_ 

% ò

% i \ " f plasma focus ¸ ú ˜ + þ A$ í ÷ &% 3  . X-ray detector\  ¦ s 6   x # Œ 8 £ ¤& ñ  ) a Û ¼& 7 ˜à Ô! 3 `  ¦ ì  r$ 3 ô  Ç    õ

   © œ 0.18 ∼ 7.4 keV(0.16 ∼ 6.7nm) % ò % i _  X-ray µ 1 ÏÒ q t % i  .

PACS numbers: 52.25. Nr

Keywords: HCP, ƒ  " l oÛ ¼‚  ,  Ø ÔŒ 4 H Û ¼, % i — 2 ;u Û ¼0 Au 

I. " e  ] Ø

R. Kurzweil“ É r > í ß –l _  $ í 0 p x“ É r à Ô ½ ™t Û ¼'  > hµ 1 Ï÷ &

l

 š ¸A  „   Ò'  t à º& h Ü ¼– Ð 7 £ x ÷ &# Q M ® o    H  כ `  ¦ t 

&

h  €  " f 2020¸  \  s Ø Ô€   B j— ¸o ü < Û ¼x × ¼ €  \ " f “   ç

ß –_  ¿ ºö &\  s \  ¦  כ s  “ ¦ \ Vƒ   % i   [1]. 2000¸  @ /

œ

íì ø Í\   H CMOS _  > s à Ô_  U  ´s  0.13 µms ~    כ s  2013¸  \   H 13 nm \  s Ø Ô“ ¦ 2019¸  \   H 6.5 nm – Ð ×  ¦ # Q [

þ

t  כ s  “ ¦ ô  Ç  [2]. s  Qô  Ç õ & ñ \ " f [ j@ /_  lithog- raphy\  ¦ 0 A # Œ ] jî ß –  ) a ~ ½ ÓZ O _  
 soft X-‚  _  s 6   x s

 . { 9 ì ø Í& h “   X-‚  “ É r   © œ % ò % i  5 pm\ " f 10 nm  s 

\

 e ”   H „   l  – Ð" f Õ ª ×  æ 0.1 nm ˜ Ð  |     © œ_  X-

‚

 `  ¦ soft X-‚  s  “ ¦ ô  Ç . Soft X-‚  “ É r ì ø ͕ ¸^ ‰ } 9  ] j Œ •

`

 ¦ 0 Aô  Ç lithography, “ ¦^ ‰ Ó ü t o  z  ´+ « >, Y Us $  * 3 i ç (laser pumping), X-‚   ‰ & ³p  â , ×  æ$ í   Ò q tí ß – (neutron yield), { 9 



 beam_  ~ ½ ÓØ  ¦ 1 p x \  s 6   x ) a  . Soft X-‚  `  ¦ % 3 l  0 Aô  Ç

~

½ ÓZ O \   H „    q e ” s 
 Y Us $ \  ¦ F K5 Å q ³ ð€  \  Ø  æ   r  v

  H ~ ½ ÓZ O , synchrotron ~ ½ Ó  F  g`  ¦ s 6   x   H ~ ½ ÓZ O , Õ ªo “ ¦

~

½ ӄ   õ & ñ \ " f µ 1 ÏÒ q t÷ &  H e  ¦  Û ¼ \  ¦ s 6   x   H ~ ½ ÓZ O  1 p x s

 e ”   [4,5].

IC í ß –\ O \ " f lithography_  t 5 Å q& h “   µ 1 τ  s  t ƒ  ÷ &“ ¦ e ”

  H s Ä »  H D h– Ðî  r  © œq \  ¦ • ¸{ 9    H X < } Œ •@ /ô  Ç q 6   x s 

€ 9

כ ¹ l  M :ë  H s  . s \  ¦ K    l  0 A # Œ s p  > hµ 1 Ï

 )

a # Œ Q ~ ½ ÓZ O  ×  æ \ " f ™ è½ ©— ¸ z  ´+ « >z  ´\ " f F  g " é ¶ _  : £ ¤$ í ,

∗

E-mail: [email protected] Tel : 054-820-5448, FAX: 054-823-1628

lithogrphy x 9  soft X-‚  _  6 £ x6   xz  ´+ « >`  ¦ ½ + É Ã º e ”   H  © œu 

 plasma focus  © œu s  . Plasma focus  © œu   H 1960¸  

@

/ p ² D G _  Matherü < ™ èº  _  Filippov 1 l x» ¡ ¤+ þ A e  ¦  Û ¼



  © œu \  ¦   + þ Ar †    כ Ü ¼– Ð ¿ º „  F G _  U  ´s  U  ´“ ¦ ì ø Í â s

  Œ •“ É r Mather+ þ Aõ  ¿ º „  F G _  U  ´s   ú ª“ ¦ ì ø Í â s   H Filippov+ þ AÜ ¼– Ð
Ð ü t à º e ”   [6–10]. 1977¸   p ² D G _  J.E.

Lee  H DPF (dense plasma focus)  © œu \  ¦ > h‚   # Œ HCP (hypocycloidal pinch)\  ¦ > hµ 1 Ï % i   [11]. { 9 ì ø Í& h “   e  ¦   Û

¼   © œu   H soft X-ray µ 1 ÏÒ q t r  hard X-ray 1 l x r \  µ 1 Ï Ò q

t >  ÷ &  H X <, HCP  © œu   H DPF  © œu \  q K  |   e  ¦   Û

¼  ´ n u r ç ß –õ   H e  ¦  Û ¼  ^ ‰& h Ü ¼– Ð “   # Œ soft X- ray µ 1 ÏÒ q ts  Ä »o  • ¸2 Ÿ ¤ “ ¦î ß –ô  Ç  © œu s   [3,4,11]. HCP



 H soft X-ray _  µ 1 ÏÒ q t\  B Ä º Ä »o ô  Ç & h `  ¦ t “ ¦ e ” Ü ¼


Š

© œÜ ¼– Ð  ) a 6 £ §F G ó ø Íõ  
_  € ª œF G ó ø ÍÜ ¼– Ð “  K  focus Š © œ Ü

¼– Ð + þ A$ í  ) a    H é ß –& h s  e ” % 3  . s  ƒ  ½ ¨\ " f  H s  Qô  Ç é ß

–& h `  ¦ > h‚   # Œ 
_  € ª œF G ó ø Íõ  6 £ §F G ó ø ÍÜ ¼– Ð HCP  © œ u

\  ¦ ½ ¨$ í # Œ ô  Ç > h_  focus + þ A$ í ÷ &>  % i Ü ¼ 9, Û ¼ 0

Au – Ѝ  H spark gap Û ¼0 Au \  ¦ > h‚  ô  Ç IPS(inverse pinch switch)\  ¦  6   x % i “ ¦ Arl ^ ‰_  ~ ½ ӄ  „  · ú šõ  Ar · ú š§ 4 _ 



  o\    É r e  ¦  Û ¼  focus_  + þ A$ í : £ ¤$ í `  ¦ › ¸  “ ¦, X- ray detector\  ¦ s 6   x # Œ soft X-ray_  µ 1 ÏÒ q t : £ ¤$ í `  ¦ › ¸ 

% i  .

II. ÷ m Ç] M ö U ê s0 n É

z 

´+ « >  © œu _  ½ ¨$ í “ É r ß ¼>  ”  / B N r Û ¼% 7 ›, ~ ½ ӄ   © œu , ~ ½ ӄ   Û

¼0 Au  x 9  \  -t  / B N/ å L  © œu “   „  " é ¶  Òü < & J r '  Ñ Ÿ ß ¼

-380-

–

Ð ½ ¨$ í % i  . \  -t  / B N/ å L  © œu   H W 1“ : r à Ô ½ ™Û ¼(20 kV, 20 mA) ü < “ ¦· ú š  s š ¸× ¼\  ¦  6   x # Œ ] j Œ • % i  . f ” § > =

ƒ

   ô  Ç ¿ º > h_  “ ¦· ú š  s š ¸× ¼(10 kV)\  ¦ ô  Ç › ¸– Ð   H Ú Ô o

t   r– Ð\  ¦ ½ ¨$ í # Œ þ j@ / „  · ú šs  20 kV t  Ø  ¦§ 4 ÷ &• ¸ 2

Ÿ

¤ % i  . ß ¼l  280 mm × 355 mm × 685 mm“   6   x

|

¾ Ó 6 µF(? /„  · ú š60 kV, Maxwell )_  » ¡ ¤„  l  2> h\  ¦ # î § > =

ƒ

    # Œ capacitor bank\  ¦ ½ ¨$ í % i  .

Fig. 1 \  HCP  © œu \  ¦ ç ß –é ß – > 
 ? /% 3  . { 9 ì ø Í& h 

“

  HCP  © œu \ " f  H lower electrode\  ¦ ×  æd ” Ü ¼– Ð  A  Â Ò ì

 r \  0 A_   Òì  r õ  ° ú  “ É r „  F G`  ¦ C u  # Œ @ /g A& h Ü ¼– Ð ~ ½ Ó

„

 s  { 9 # Q
l  M :ë  H \  ~ ½ ӄ  r \  e  ¦  Û ¼  Ÿ í& Û ¼ @ / g A& h Ü ¼– Ð ë ß –[ þ t # Qt • ¸2 Ÿ ¤ “ ¦ s [ þ t`  ¦ # î \ P  ƒ     # Œ 1 l x



Œ

•r v   H r Û ¼% 7 ›`  ¦ : Ÿ x # Œ Y Us $ _  µ 1 ϔ  \   6   x % i 

~

   כ “  X <. s \  ¦ à º& ñ # Œ é ß –{ 9  Ÿ í& Û ¼ ë “ By • ¸2 Ÿ ¤ ô  Ç

 כ

s  . „  F G“ É r 813 × 360 × 13 mm

³

“   Aló ø Í`  ¦ # î § > =

ƒ

    # Œ  6   x % i Ü ¼ 9, F G ó ø Í  s _  ] X ƒ  `  ¦ 0 A # Œ # Œ



Q   _  mylar\  ¦  6   x % i  . HCP © œu _  " é ¶ ì ø Í+ þ A ~ ½ ӄ   F

G ó ø Í  s _  ç ß –  “ É r 26 mm – Ð" f 6 £ §F G _  ×  æd ”  Ò\  f ”  â 50 mm _  ½ ¨" í `  ¦ ë ß –[ þ t # Q Ÿ í& Û ¼\  ¦ › ' a ¹ 1 Ͻ + É Ã º e ” • ¸2 Ÿ ¤ 

%

i  . „  À Ó sheet focus\  ¦ + þ A$ í ½ + É M : „  F G _   — ¸\  ¦ ~ ½ Ó t

 “ ¦ X-‚  _  µ 1 ÏÒ q t`  ¦ 6   x s  >  l  0 A # Œ € ª œF G _  ×  æ d ”

 Ò\  f ”  â 50 mm_  " é ¶ ó ø Íõ  6 £ §F G _  = å Q  Òì  r \  “ ¦o  — ¸

€

ª œ_   9 `  ¦ ]  t o Ú ÔD ! pÜ ¼– Ð ] j Œ • # Œ y Œ •y Œ •  ҂ Ã Ì % i  . € ª œ  

ñô  Ç ] X ƒ  `  ¦ 0 A # Œ € ª œF G õ  6 £ §F G  s \  ¿ ºa  3 mm, ? /

 â

120 mm, ü @ â 163 mm“   $ 3 % ò Ä »o \  ¦ V , % 3  . " é ¶: Ÿ x+ þ A vacuum chamber  H stainless steel – Ð ë ß –[ þ t% 3 “ ¦ # Œ Q t  8

£ ¤& ñ l ½ ¨\  ¦ [ O u ½ + É Ã º e ” • ¸2 Ÿ ¤ ƒ  f ” ‚  õ  30

^◦

_  ~ ½ ӆ ¾ Ó\  4 > h_  ‚ ½ Ó(window)`  ¦, Õ ªo “ ¦ ƒ  f ”  © œ~ ½ Ó\  ô  Ç > h_  ‚ ½ Ó`  ¦ y

Œ

•y Œ • [ O u  % i  .

{ 9

ì ø Í& h Ü ¼– Ð  6   x ÷ &  H spark gap Û ¼0 Au _  é ß –& h `  ¦ ˜ Ð

¢ -

a l  0 A # Œ IPS(inverse pinch switch)\  ¦  6   x % i  .

Fig. 1. Cross-sectional view of the HCP device

Spark gap Û ¼0 Au _   â Ä º ~ ½ ӄ  s  { 9 # Q
€   ~ ½ ӄ   „  À Ó

a

% v“ É r ~ ½ ӄ    ⠖ Ð\  ¦    â ìØ Ô>   ) a  . s  M : „  À Ó  ^ ‰

ë

ß –× ¼  H  l  © œ\  _ K  „  À Ól Ñ ü æ _  ×  æd ” » ¡ ¤`  ¦ † ¾ Ó # Œ „   À

Ó · ú š» ¡ ¤ ÷ &  H z-pinch \  _ K  Û ¼0 Au  „  F G _  ×  æd ”  Ò\ 

„

 À Ó | 9 5 Å q ) a  . Õ ª   õ – Ð „  À Ó x 9 • ¸ & t l  M :ë  H

\

 ² D G ™ è& h Ü ¼– Ð \ P ÷ &# Q „  F G s   — ¸÷ &€  " f „  F G ³ ð€  

\

 Ô  ¦í  HÓ ü t s  Ò q t$ í ÷ &# Q ~ ½ ӄ   / B N ç ß –s  a % v  t “ ¦, 5 Å q ) a s 

“

: r[ þ t _  Ø  æ  \  _ K  ~ ½ ӄ   Òì  r s  ’ < H  © œ  ) a  .

ì

ø ̀  \  IPS  H current sheet  „  F G ³ ð€  `  ¦    â ìØ Ô



 H r ç ß –s   ú ª“ ¦, 6 £ §F G s  ¿ º    6 f# Q4 R e ” # Q" f ì ø Í@ / ~ ½ ӆ ¾ Ó Ü

¼– Ð â ìØ Ô  H „  À Óz o  " f– Ð p   H j Ë µ`  ¦  # Œ „  À Ó_  | 9  5

Å

q`  ¦ ~ ½ ÓK ô  Ç . Õ ª   õ  spark gap Û ¼0 Au \  q  # Œ „   F

G õ  ] X ƒ  ^ ‰_  ’ < H  © œs  & h # Q Û ¼0 Au _  à º" î `  ¦  s `›   U  ´> 

½

+ É Ã º e ” `  ¦ ÷  r ë ß –  m  ,  Œ •“ É r „  À Ó x 9 • ¸ü < „  F G ³ ð€  \ 

"

f_  current sheet_  ’  5 Å q ô  Ç s 1 l x M :ë  H \  ~ ½ ӄ  „  À Ó\  ¦ 1 MA s  © œÜ ¼– Ð Z  } # Œ ×  ¦ à º e ” “ ¦, “ ¦Ä » “   ü ‡  Û ¼  Œ •  ~ ½ Ó

„

 _  š ¸2 £ § r ç ß –`  ¦  ú ª>  K  ×  ¦ à º e ”  . IPS  H S ! 1 l x Ü ¼– Ð ë

ß –[ þ t% 3   H X <, » ¡ ¤„  l _  (−)é ß – \  ƒ    ÷ &# Q e ”   H " é ¶: Ÿ x+ þ A ü

@ ҄  F G õ  » ¡ ¤„  l _  (+)é ß – \  ƒ     ) a ? / ҄  F G  s 

\

 [ j b ”  ] X ƒ  ^ ‰\  ¦ z 0 >" f › ¸w n  % i  . IPS ? / ҄  F G

×

 æd ”  Ò\  ½ ¨" í `  ¦ Ý ü Š # Q ”  / B N > : Ÿ x õ  ƒ     # Œ ”  / B N Û ¼0 A u

– Ð" f_  l 0 p x`  ¦ à º' Ÿ  • ¸2 Ÿ ¤ % i  .  À »  Òì  r`  ¦ ¿ ºa  10 mm“   È Ò" î  ß ¼w n =– Ð W = # Q ~ ½ ӄ  Ô  ¦y n C`  ¦ ^  ¦ à º e ” • ¸2 Ÿ ¤ 

%

i “ ¦ 8> h_  1 l x» ¡ ¤ cable`  ¦  6   x # Œ HCP  © œu ü < ƒ     

% i  .

~

½ ӄ  õ & ñ \ " f { 9 # Q
  H IPS _  „  · ú š   o  H “ ¦· ú š „ à Рg Ë

>(high voltage probe, BK precision28; 1000 : 1)`  ¦ :

Ÿ

x # Œ 8 £ ¤& ñ “ ¦ „ à Ðg Ë >\ " f
š ¸  H ’    ñ\  ¦ š ¸z  ´– ÐÛ ¼ ï á

Ô(LECROY 9310M)\ " f { 9 # Q? /# Q ( Ž É Ó' \  { 9 § 4  “ ¦ l

2 Ÿ ¤ % i  . ”  / B N  Òì  r  © œé ß –_  window\  pin hole (pin- hole diameter;500 µm) õ  video camera( Œ ™$ í SV-H38)\  ¦ [ O

u  “ ¦, ND(neutral density) filter\  ¦ : Ÿ x õ r &  focus\  ¦ O É

Œ% ò % i  .

Fig. 2. Photograph of plasma focus through a 0.5 mm

pinhole with ND filter at Ar pressure 100 mtorr.

XR-100T(AMPTEK INC.)\  ¦  6   x # Œ HCP– РÒ' 

~

½ ÓØ  ¦ ÷ &  H X-‚  `  ¦  Ž Ø  ¦ % i  . XR-100T  H \ P „   & h Ü ¼

–

Ð Í ‰ ty Œ •  ) a Si-PIN photodiode\  ¦  6   x   H detector – Ð

"

f X-ray detector, á Ôo Ó  rá Ô, Í ‰ ty Œ •> : Ÿ x Ü ¼– Ð ÷ &# Q e ” Ü ¼ 9, soft X-ray ) ‡6   x # 3 0 A\ " f  6   x ÷ &  H ¿ ºa  25 µm_  Be window\  ¦  6   x ô  Ç . XR-100T_  „  " é ¶“ É r „  " é ¶  © œu  x 9

 7 £ x; Ÿ ¤  © œu “   PX2T (AMPTEK INC.)\  ¦ : Ÿ x # Œ / B N /

å

L ) a  . PX2T\  ¦  6   x # Œ 8 £ ¤& ñ ô  Ç soft X-ray_  ’    ñ\  ¦ MCA8000(multichannel analyzer; AMP TEK) \  ˜ Ð? /“ ¦ MCA8000 \ " f % ƒo ô  Ç Ø  ¦§ 4 `  ¦ ( Ž É Ó' \  ƒ     # Œ ì  r$ 3 

• ¸2 Ÿ ¤ % i  . MCA8000_  X» ¡ ¤ \  -t  ° ú כs  i ” ! s q  Å 

!

Q– Ð
 
>  ÷ &# Q e ”   H X < s  ° ú כ[ þ t`  ¦ ³ ðï  r ~ ½ Ó ‚  " é ¶( s  z 

´+ « >\ " f  H

²⁴¹

Am`  ¦  6   x % i  .)õ  q “ § # Œ ( Ž É Ó' – Ð

¨ 8

Š í ß – • ¸2 Ÿ ¤ ÷ &# Q e ”  .



r„   ”  / B N * 3 á Ô\  ¦  6   x # Œ HCP  © œu  ? / Ò_  ”  / B N • ¸

 40 mtorr & ñ • ¸ ÷ &% 3 `  ¦ M : 2 ∼ 3 r ~ ½ ӄ   r †   Ê ê  © œu 

?

/ Ò_  ”  / B N • ¸ 10 mtorr s  – Ð ? / 2 ; Ê ê\  Arl ^ ‰\  ¦ /

B

N/ å L % i  . HCP ? / Ò_  Ar l ^ ‰_  · ú š§ 4 õ  / B N/ å L „  · ú š

`

 ¦    o r & €  " f focus ë “ By   H Õ ªA á Ô\  ¦ › ' a ¹ 1 Ï “ ¦, focus  ”  `  ¦ window\  ¦ : Ÿ x # Œ O É Œ% ò “ ¦, focus  + þ A$ í

÷

&  H › ¸| `  ¦ ½ ¨ % i  .

III. + s ÇÊ Ý õ m Í w Š²  o

Ar _  l · ú šõ  „  · ú š`  ¦    o r & €  " f focus + þ A$ í `  ¦ › ¸



 % i  . Fig. 2  H 6 £ §F G \  Ý ü Š  9e ”   H t 2 £ § 50 mm _  " é ¶ + þ

A½ ¨" í \ 
 
  H focus\  ¦ t 2 £ § 0.5 mm“   — 2 ; f . Ë`  ¦ : Ÿ x õ  r

&  q n š ¸ B j – Ð O É Œ% ò ô  Ç  ”  `  ¦
  · p  כ s  .   Ø

Ԍ 4 H l ^ ‰_  · ú š§ 4  100 mtorr, “  „  · ú š 9 kV, 11 kV, 13 kV{ 9  M : Ò q t$ í  ) a œ í& h \  › ' a ô  Ç  כ s  .  Ø ÔŒ 4 H · ú š§ 4  100

Fig. 3. Voltage signal of the IPS operating at 13 kV and 80 mtorr

mtorr, “  „  · ú š 13 kV{ 9  M : œ í& h s  ¸ ú ˜ ë ß –[ þ t # Qt   H  כ Ü ¼

–

Ð › ' a ¹ 1 Ï÷ &% 3  .  Ø ÔŒ 4 H · ú š§ 4  200 mtorr s  _   â Ä º\  œ í

&

h s  ¸ ú ˜ + þ A$ í H † d`  ¦ ^  ¦ à º e ” % 3  .  Ø ÔŒ 4 H l ^ ‰_   â Ä º · ú š

§

4  80 mtorrs  , „  · ú š 8 kV s  \ " f  H œ í& h s  › ' a ¹ 1 Ï÷ &

t

 · ú §€ Œ ¤Ü ¼ 9, 9 kV\ " f Ò'  €  •ç ß –m ”  œ í& h s  ë ß –[ þ t # Qt “ ¦ 10 kV s  © œ \ " f  H B Ä º ¸ ú ˜ + þ A$ í H † d`  ¦ ^  ¦ à º e ” % 3  . · ú š§ 4  80 ∼ 130 mtorr, „  · ú š10 ∼ 17 kV\ " f œ í& h s  ¸ ú ˜ + þ A$ í ÷ &

%

3 “ ¦, œ í& h _  f ”  ⠓ É r 4 ∼ 8 mm & ñ • ¸% i  .

Ar · ú š§ 4  60 ∼ 400 mtorr, ~ ½ ӄ  „  · ú š 8 ∼ 17 kV t    



or v €  " f ~ ½ ӄ   r  IPS_  „  · ú š’    ñ  + þ Aõ  e  ¦  Û ¼  focus _  + þ A$ í  © œI \  ¦ › ¸  % i  . Voltage spike\  ¦ 1 l x ì ø Í

  H € ª œ  ñô  Ç y Œ ™û Z”  1 l x  + þ A[ þ t s   Ø ÔŒ 4 H · ú š§ 4  80 - 300 mtorr, ~ ½ ӄ   „  · ú š 10 ∼ 17 kV # 3 0 A\ " f › ' a ¹ 1 Ï÷ &% 3  . ~ ½ Ó

„

 õ & ñ \ " f { 9 # Q
  H IPS _  „  · ú š   o\  ¦ „  l „ à Ðg Ë >(high voltage probe, BK precision28; 1000 : 1) \ " f 8 £ ¤& ñ ô  Ç ’    

ñ\  ¦ š ¸z  ´– ÐÛ ¼ ïá Ô(LECROY 9310M)\  ¦  6   x # Œ › ' a ¹ 1 Ï

# Œ % 3 “ É r Õ ªA á Ô\  ¦ ì  r$ 3  % i  . „  ^ ‰ % ò % i \ " f % 3 “ É r @ /

³

ðu – Ð" f Å Òl   H 8 µs, rising frequency  H 125 kHz y Œ ™û Z

“

  (damping factor) ፠ H 1.08 × 10

⁵

s

⁻¹

– Ð 8 £ ¤& ñ ÷ &% 3 



. > í ß –  ) a inductance  H 133 nH s “ ¦  r– Ð_  e ” x ~  Û ¼  H 29 mΩ s  . Rise time“ É r t

r

= 2 µs s “ ¦ Peak „  À Ó i

^p

=101 kA, s  .

241

Am`  ¦ X-ray detector(XR-100T) · ú ¡\  ¿ º“ ¦ 8 £ ¤& ñ 

#

Œ MCA8000_  X» ¡ ¤ _  channel à º\  ¦ \  -t (keV)– Ð ½ ¨

% i  .

²⁴¹

Am _  Û ¼& 7 ˜à Ô! 3 \ " f peak\  K { © œ   H 59.54 keV, 26.36 keV, 24.94 keV, 1 p x 8 ú x 8 > h_  peak_  0 Au \  ¦ l

ï  r Ü ¼– Ð 8 £ ¤& ñ u \  ¦ ½ ¨ % i  . s M :_  ¨ 8 Š í ß –/ B Nd ” “ É r

y = 0.0291x + 0.1559

–

Ð" f y  H keV – Ð ¨ 8 Š í ß –ô  Ç \  -t , x  H cursor à º\  ¦ y Œ •y Œ •

 ? /“ ¦ e ”  . s d ” _   © œ › ' a > à º  H 1 – Ð
 z Œ ¤ .

Fig. 4. X-ray spectra of plasma radiation from HCP at

Ar 10 kV - 80 mtorr, 12 kV - 80 mtorr and 15 kV - 85

mtorr.

Fig. 5. X-ray spectra of plasma radiation from HCP at input voltage 13 kV, He pressure 180, 190 and 200 mtorr.

Fig. 4  H Ar l ^ ‰ · ú š§ 4  80 mtorr, “  „  · ú š y Œ •y Œ • 10 kV, 12 kV“    â Ä ºü < Ar l ^ ‰ · ú š§ 4  85 mtorr, “  „  · ú š 15 kV, “    â Ä º\  @ /ô  Ç z  ´+ « >   õ \  ¦ y Œ •y Œ •
 ? /“ ¦ e ”  .

y

Œ

• z  ´+ « >_   â Ä º\  5 r ~ ½ ӄ  r †   Ê ê\  8 £ ¤& ñ ô  Ç ° ú כ`  ¦ 2 [ 

%

i “ ¦

²⁴¹

Am Û ¼& 7 ˜à Ô! 3 `  ¦ l ï  r Ü ¼– Ð # Œ y Œ • 8 £ ¤& ñ u \  K  {

© œ   H \  -t \  ¦ ½ ¨ % i  . s  Û ¼& 7 ˜à Ô! 3 Ü ¼– РÒ'  % 3 “ É r

 

õ   H µ 1 ÏÒ q t   H X‚  [ þ t s  0.5 nm Â Ò   H \ " f  © œ G ' p Ø  ¦

§ 4

`  ¦ ”   soft x-ray % ò % i _  4 Ÿ ¤  ‚  s  ~ ½ ÓØ  ¦ ÷ &  H  כ `  ¦
 

? /“ ¦ e ”  . — 2 ;f . Ë B j \  ¦  6   x # Œ › ' a ¹ 1 Ïô  Ç   õ \ " f

 è ß –  כ õ  ° ú  s   Ø ÔŒ 4 H l ^ ‰ · ú š§ 4 s  80 mtorr ˜ Ð  ± ú 

“

¦ ~ ½ ӄ  „  · ú šs  8 kV s  _  % ò % i \ " f  H Ÿ í& Û ¼ ¸ ú ˜ ë “ B )

€t t  · ú §“ ¦ · ú š§ 4  80 ∼ 130 mtorr, ~ ½ ӄ  „  · ú š 10 ∼ 17 kV

“

  % i % i \ " f  H œ í& h s  ¸ ú ˜ ë “ By “ ¦ y Œ ™û Z”  1 l x  + þ As  ¸ ú ˜ + þ A

$ í

 ) a · ú ¡ ‚   ƒ  ½ ¨_    õ ü < Ä » ô  Ç € ª œ © œ`  ¦
 ? /“ ¦ e ” 6 £ §

`

 ¦ Û ¼& 7 ˜à Ô! 3  › ' a ¹ 1 Ï`  ¦ : Ÿ x # Œ S X ‰ “  ½ + É Ã º e ” % 3  .

HCP  © œu \  He l ^ ‰\  ¦ Å Ò{ 9  # Œ z  ´+ « >ô  Ç   õ \  ¦ Fig.

5 \ 
 ? /% 3  .

He l ^ ‰\  ¦ Å Ò{ 9  # Œ 8 £ ¤& ñ ô  Ç  â Ä º\   H Ar l ^ ‰\  ¦  6   x ô

 Ç  â Ä º\  q  # Œ l ^ ‰ · ú š§ 4 s   8¹ ¡ ¤ Z  }“ É r % ò % i \ " f ~ ½ Ó

„

 s  ¸ ú ˜ { 9 # Qz Œ ¤  H X < Fig. 5\ " f › ' a ¹ 1 Ͻ + É Ã º e ”   H  כ % ƒ! 3  1

l x{ 9 ô  Ç „  · ú š`  ¦ K ŠҀ  " f · ú š§ 4 `  ¦    or v €  " f z  ´+ « >ô  Ç

 

õ  · ú š§ 4 s  & | 9 à º2 Ÿ ¤ Ø  ¦§ 4 _  [ jl  y Œ ™™ è   H % ò % i s  e ”

6 £ §`  ¦ ˜ Ð# ŒÅ ғ ¦ e ”  . s  Qô  Ç  ⠆ ¾ ӓ É r Ar l ^ ‰\  ¦  6   x ô  Ç

 â

Ä º\ " f• ¸ › ' a ¹ 1 Ïs  ÷ &“ ¦ e ”   H ‰ & ³ © œs  . : £ ¤ s ½ + É ë ß –ô  Ç   z 

´“ É r Ar l ^ ‰\  ¦  6   x   H  â Ä ºü < He\  ¦  6   x   H  â Ä º\  ¦ q

“ § % i `  ¦ M : Û ¼& 7 ˜à Ô! 3   © œ\ " f Ø  ¦§ 4 s  / å L  y  7 £ x  



 H % ò % i _  0 Au  ¿ º l ^ ‰ — ¸¿ º q 5 p w ô  Ç % ò % i e ” `  ¦ S X ‰ “  ½ + É Ã

º e ” % 3  . Õ ª s Ä »– Ð" f z  ´+ « >õ & ñ \ " f | 9 ™ è Û ¼ Ÿ í† < Ê

 )

a  כ s  s Ä »{ 9  à º• ¸ e ”    H & ñ \  | 9 ™ èl ^ ‰\  ¦ Å Ò{ 9 

# Œ z  ´+ « >`  ¦ à º' Ÿ  # Œ ˜ Ѐ Œ ¤ . Fig. 6\ 
 
 e ”   H   ü

< ° ú  s  | 9 ™ è\  ¦ Å Ò{ 9  # Œ z  ´+ « >ô  Ç   õ  Û ¼& 7 ˜à Ô! 3 s  › ' a8 £ ¤

Fig. 6. X-ray spectra of plasma radiation from HCP at input voltage 10 kV, N

2

gas pressure 100, 120 and 125 mtorr.

÷

&  H % ò % i s  hard X-ray % ò % i Ü ¼– Ð `  …  4 R e ” 6 £ §`  ¦ ^  ¦ à º e ”

% 3  . s    õ \  ¦ ž Ð@ /– Ð | 9 ™ èl ^ ‰  H s  z  ´+ « >\ " f Å Ò  ) a

%

i ½ + É`  ¦ t  · ú §€ Œ ¤6 £ §`  ¦ S X ‰ “  ½ + É Ã º e ” % 3  .

IV. + s Ç Â ] Ø

HCP  © œu \  ¦ à º& ñ # Œ é ß –{ 9  œ í& h s  ë “ By   H / B M \ " f X- ray  µ 1 ÏÒ q t • ¸2 Ÿ ¤ “ ¦  © œu \  Arl ^ ‰ü < He l ^ ‰\  ¦ y Œ • y

Œ

• Å Ò{ 9  “ ¦ l ^ ‰_  · ú š§ 4 õ  ~ ½ ӄ  „  · ú š\    É r X-ray _  µ 1 Ï Ò q

t : £ ¤$ í `  ¦ › ¸  % i  . „  l „ à Ðg Ë >`  ¦  6   x # Œ 8 £ ¤& ñ ô  Ç „   l

’    ñ\  ¦ š ¸z  ´– ÐÛ ¼ ïá Ô\ " f { 9 # Q ~ ½ ӄ    © œI \  ¦ › ¸  % i 

“

¦, Ÿ í& Û ¼ ë “ By   H  כ `  ¦ 1 : 1 — 2 ; f . Ë õ  ND€ 9 ' \  ¦ : Ÿ x õ  ô

 Ç  ”  `  ¦ O É Œ% ò # Œ › ¸  % i  . soft X-ray_  µ 1 ÏÒ q t Û ¼& 7 ˜ à

Ô! 3 “ É r XR-100T X-ray detector\  ¦  6   x # Œ % 3 “ É r ’    ñ

\

 ¦ MCA8000`  ¦ : Ÿ x õ r v “ ¦ ( Ž É Ó' \ " f % ƒo ô  Ç  « і Ð Â

Ò'  2 [ % i  . HCP  © œu \ " f Ar · ú š§ 4  80 ∼ 130 mtorr,

~

½ ӄ  „  · ú š 10 ∼ 17 kV # 3 0 A\ " f IPS_  ~ ½ ӄ  „  · ú š ’    ñ\ 

"

f € ª œ  ñô  Ç y Œ ™û Z”  1 l x  + þ Aõ  voltage spike
 z Œ ¤Ü ¼ 9 s

 M : focus ¸ ú ˜ + þ A$ í ÷ &% 3  . XR-100T X-ray detector\  ¦



6   x # Œ › ¸ ô  Ç Û ¼& 7 ˜à Ô! 3 `  ¦ ì  r$ 3 ô  Ç   õ  · ú š§ 4  80 ∼ 130 mtorr, „  · ú š 10 ∼ 17 kV{ 9  M : 0.18 ∼ 7.4 keV(0.16 ∼ 6.7 nm) _  X-ray µ 1 ÏÒ q t % i  . He l ^ ‰\  ¦  6   x # Œ z  ´+ « >ô  Ç

 

õ   8¹ ¡ ¤ Z  }“ É r l ^ ‰ · ú š§ 4  \ " f• ¸ s % ò % i _  X-ray B  Ä

º € ª œ  ñ >  µ 1 ÏÒ q t† < Ê`  ¦ ^  ¦ à º e ” % 3  . Ä » ô  Ç z  ´+ « > › ¸| 

\ " f | 9 ™ èl ^ ‰\  ¦ Å Òe ”  # Œ z  ´+ « >ô  Ç   õ  @ / Òì  r hard X-ray % ò % i _  Ø  ¦§ 4 Û ¼& 7 ˜à Ô! 3 s   Ž Ø  ¦ ÷ &% 3  .

P

c p 8 ý ò k >

‘

: r ƒ  ½ ¨  H 2004¸  • ¸ î ß –1 l x @ /† < Ɠ § : £ ¤Z > t " é ¶ƒ  ½ ¨q  t " é ¶

\

 _  # Œ à º' Ÿ ÷ &% 3 6 £ §

Y

c p w Š à U Ø ”  ô

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IEEE Trans. Plasma Science 13, 202 (1985).

Characteristics of X-ray Radiation from a Single Focus Hypocycloidal Pinch

Z. H. Yoon,

^∗

Y. K. Sohn and B. W. Lim Department of Physics, Andong 760-749

(Received 15 October 2005)

The argon-gas plasma-focus formation and soft X-ray characteristics of an improved single focus HCP (hypocycloidal pinch) with an IPS (inverse pinch switch) were investigated. The soft X-ray emission was detected by using an XR-100 X-ray detector and the voltage spike curve. For Ar gas pressures of 80 ∼ 130 mTorr and HCP electrode voltages of about 9 ∼ 17 kV the plasma focus formation curve and a photograph of the plasma focus were observed. The X-ray measurements showed thar the wavelengths of the soft X-rays were distributed in the region of 0.18 ∼ 7.4 keV (0.16 ∼ 6.7 nm).

PACS numbers: 52.25,Nr

Keywords: HCP, Soft X-ray, Ar gas, IPS

∗

E-mail: [email protected]