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Research on the Thermal Reaction Characteristics of MEMS

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First Author : [email protected], 010-4949-7954 Corresponding Author : [email protected], 010-5156-7642

후 기

의 열 반응 특성 분석 고찰

MEMS

이희진

*

양형선

**

임정빈

***

목포해양대학교 대학원

목포해양대학교 교수

한국해양대학교 항해학부 교수

*

, **

, ***

Research on the Thermal Reaction Characteristics of MEMS

Hee-Jin Lee

*

Hyung-Seon Yang

**

Jeong-Bin Yim

***

* Graduated School of Navigation Science, Mokpo National Maritime University, Mokpo 58628, Korea ** Division of Navigation Science, Mokpo National Maritime University, Mokpo 58628, Korea *** Division of Navigation Science, Korea Maritime and Ocean University, Busan 49112, Korea 핵심용어 : 관성 관성측정장치, , MEMS, 열 반응 특성,

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