ò 6 Bg ` @ · G Bg ` @ · - ! H. > 0 ² ? · T ø ¶ B0 å ∗

(1)

° Ë

ÑV È ¥ 7 _T $ [õ u § T Ó Þ X ¢ 7 _T $ [ ° Ç ¹ Å X ê sV ì Å

T

ò 6 Bg ` @ · G Bg ` @ · - ! H. > 0 ² ? · T ø ¶ B0 å ^∗

% ò

z @ / < Æ § Ó ü t o < Æõ , â í ß 712-749 (2006¸ 11 Z 4 9{ 9 ~ Ã Î6 £ §)

F

g$ 3 Ä » Y Us $ \ ¦ 6 x # Y Us $ \ P ~ ½ Ód ` ¦ s 6 x ô Ç J ' _ ç r Û ¼% 7 ` ¦ ½ ¨$ í % i . © s 1070 nm ¼ # F g ÷ &t · ú § É r F g$ 3 Ä » Y Us $ F g5 Å q É r F g 6 £ § ¾ Ó ¸l (AOM: acousto optic modulator)\ ¦ t

" f r] X ÷ & ¦, 2 " é ¶ Û ¼ ± ps 0 p x ô Ç X-Y ° ú ¸p ' (galvanometer)\ ¦ t " f ~ ½ Ó ¾ Ós ] j# Q ) a

. s F g5 Å q É r í& h o 254.4 nm f - θ E $ Ý ¼\ ¦ t è ß Ê ê ³ ð& h \ | 9 5 Å q > ) a . AOM É r ¼ # F g ÷ &

t

· ú § É r F g$ 3 Ä » Y Us $ F g5 Å q` ¦ Â Òì r& h Ü ¼ Ð ¼ # F g r v H כ ` ¦ · ú Ã º e % 3 . f - θ E $ Ý ¼\ ¦ t è ß F g _ í

&

h ß ¼l \ ¦ 8 £ ¤& ñ ô Ç õ H s : r& h > í ß ° ú כõ _ ° ú É r ° ú כ` ¦ Ð# Å Ò% 3 . AOM` ¦ : x K r] X ) a F g` ¦ f - θ E $ Ý ¼ Ð | 9 5 Å q % i ` ¦ M : í& h \ " f_ F g5 Å q / B N ç ß ì r í H Ä ºr î ß (Gaussian)\ î r ì r í\ ¦ Ð

#

Å Ò% 3 . AOMõ < Êa 2 " é ¶ Û ¼H _ ç © q ° ú ¸p ' \ ¦ ¸] X # 100 × 100 mm

²

_ % ò % i \ 5

g" f Y Us $ \ ¦ Å Ò 9 e _ _ + þ A` ¦ ë ß × ¼ H X < $ í / B N % i .

PACS numbers: 42.62.C, 42.60, 42.62.B

Keywords: Y Us $ \ P , ° ú ¸p ' , F g$ 3 Ä » Y Us $ , f - θ E $ Ý ¼, F g6 £ § ¾ Ó ¸l

I. " e Â ] Ø

Ä

»l µ 1 Ï F g s ¸× ¼ (OLED:Organic Light Emitting Diode) x 9 e-paperl ì ø Í_ 6 f# Qt H n Û ¼e ¦ Y Us (flexible display) > hµ 1 Ï\ e # Q" f Y Us $ \ P \ ¦ s 6 x ô Ç J ' _ ç (patterning) É r Ò q tí ß $ í s Ä ºÃ º # ´ ú § É r Å Ò3 l q` ¦ ~ Ã Î ¦ e

[1-5]. s l Õ ü t É r s _ e ç ß ¼# × W (ink-jet printing)

~

½ Ód Ð ¸ Z } É r Ò q tí ß $ í õ î ß & ñ $ í , ¦K © ¸_ 0 p x$ í ` ¦

Ð# Å Ò ¦ e Ü ¼ 9, í ß \ O _ µ 1 Ï ~ ½ Ó ¾ Ós @ /+ þ A o, $ o 1

p

x` ¦ Æ Ò½ ¨ ¦ e H Æ Ò[ j\ ´ ú H J ' _ ç ~ ½ ÓZ O s ¦ ½ + É Ã

º e [6,7]. " f & ³F OLED x 9 6 f# Qt H n Û ¼e ¦ Y

Us 1 p x` ¦ ½ ¨ & ³ < Ê\ e # Q" f l ^ 7 £ x Ã ÌZ O (vapor evapora- tion), e ç ß ¼# × W 1 p x` ¦ : x # " f H µ 1 Ï 0 p x$ í s ] jô Ç

&

h s > ÷ & ¦, # l \ Y Us $ \ P \ ¦ s 6 x ô Ç ~ ½ Ód É r 0 A _

9 כ ¹\ ¦ Ø æ7 á ¤ r & Å Ò H ~ ½ Ód s ¦ : r .

OLED H 1960¸ @ / Anthracene_ µ 1 Ï F g Ü ¼ Ð > hµ 1 Ïs r

÷ &# Q, 1987¸ Eastman Kodak _ Dr.Tangs Å Ò { 9

l 0 p x` ¦ ì r o ( / B N Å Ò{ 9 8 £ x, Å Ò{ 9 8 £ x) K " f & h 8 £ x ô Ç 0 l q Ò

o µ 1 Ï F g n s Û ¼\ ¦ > hµ 1 Ïô Ç כ s z ´6 x o_ [ t ½ ¨ ÷ &# Q y

² D G \ " f > hµ 1 Ïs : r o ÷ &% 3 . s Ê ê 1990¸ % ò ² D G Ö r Ú

Ôo t @ / < Æ\ " f H PPV e ¦ o Q (Polymer) µ 1 Ï F g s ¸

×

¼ (LED) : £ ¤$ í ` ¦ µ 1 Ï| % i . s Qô Ç OLED_ µ 1 Ï F g " é ¶ o

∗

E-mail: [email protected]

H Ä »l F « Ñ_ EL (Electroluminescence) & ³ © ` ¦ s 6 x ô Ç

è Ð" f, OLED è \ · ú ` ¦ ª F G \ " f Ä » l

8 £ x _ HOMO (Highest Occupied Molecular Orbital) Ð

&

ñ / B N(Hole) s Å Ò{ 9 ) a . 6 £ §F G \ " f H Ä »l 8 £ x _ LUMO(

Lowest Occupied Molecular Orbital) Ð Å Ò{ 9 ÷ & ¦, Å

Ò{ 9 ) a -& ñ / B N _ F ½ + Ë \ -t Ð µ 1 Ï F g8 £ x _ Ä »l ì r

# l (excitation) ) a . s Ò q t$ í ) a # l { © I

Ð ;s " f µ 1 Ï F g ô Ç [8].

&

³F { 9 Â Ò l \ O \ " f H Y Us $ \ P " é ¶ o \ ¦ s 6 x ô

Ç LITI (Laser Induced Thermal Imaging)~ ½ ÓZ O Ü ¼ Ð 30

⁰⁰

UXGA LCD \ ª ô Ç ½ + Ë8 £ x (small molecule, hybrid, polymer)1 p x \ CW Nd:YAG Y Us $ (1064 nm, 8.0 W Ø ¦

§

4 , í& h ì ø Í â - 300 ×40 µm)\ ¦ 6 x # J ' _ ç H ~ ½ Ó d

` ¦ 6 x ¦ e [9].

: r 7 Hë H \ " f H Nd:YAG Y Us $ F g$ 3 Ä » (fiber) Y Us $ \ ¦ s 6 x ô Ç \ P ~ ½ Ód õ r Û ¼% 7 ` ¦ ½ ¨ & ³

¦ ¨ î ô Ç . K © ¸ H 30 µm, Å Ò (scan)# 3 0 A H 100 × 100 mm

²

` ¦ 3 l q ³ ð Ð % i ¦, 10 W/ å L F g$ 3 Ä » Y Us $ (IPG Korea, YLM-10-SC)\ ¦ \ P F g " é ¶ Ü ¼ Ð 6 x % i . ¢ ¸ ô

Ç ' ~ ½ Ó ¾ Ó ý aÄ º Ð ¹ ¡ §f s H b a Ë > (dithering) ~ ½ Ód õ c

$ í + þ A (Beam shaping) 1 p x` ¦ s 6 x ô Ç ] j# Q\ ¦ < ÊÜ ¼ Ð" f

\ P

J ' _ ç _ z ´ & ³0 p x$ í ` ¦ Ð# Å Ò% 3 .

-537-

(2)

Fig. 1. The experimental set up for laser thermal print- ing.

Fig. 2. The polarization states of fiber laser beam after acousto optic modulator transmission.

II. ÷ m Ç] M ö õ m Í + s ÇÊ Ý

z

´+ « > © u ¸ H Fig. 1 \ ü < e . © s 1,070 nm q

¼ # F g ) a F g$ 3 Ä » Y Us $ \ " f : r F g É r F g 6 £ § ¾ Ó ¸l (acousto optic modulator)\ ¦ s 6 x # r] X y ` ¦ ¸] X < Ê Ü

¼ Ð+ ] j# Q ¦, 2 " é ¶ Û ¼ ± ps 0 p x ô Ç X-Y ° ú ¸p '

(galvanometer)\ ¦ t > ô Ç . s F g É r í& h o

254.4 nm f - θE $ Ý ¼\ ¦ t > ÷ & ¦ ³ ð& h \ | 9 5 Å q >

)

a . ¢ ¸ô Ç ITO (indium Tin Oxide) Ä »o ó ø Í x 9 / B N # 9 2

£ § (donor film)` ¦ ¸ ú Å Òl 0 Aô Ç / B N \ O @ / (vacuum chuck)` ¦ ] j # z ´+ « >\ 6 x % i .

F

g$ 3 Ä » Y Us $ \ " f : r F g` ¦ F g6 £ § ¾ Ó ¸l (AOM:

acousto optic modulator)\ ¦ t > # r] X ´ òÖ ¦ x 9 r ] X

y ` ¦ 8 £ ¤& ñ H z ´+ « >` ¦ % i . AOM` ¦ t è ß F g É r þ j

@

/ 110 MHz_ F g6 £ § ¾ Ó \ _ # r] X ÷ &# Q ' ~ ½ Ó ¾ Ó s

1.7 ¸ , # Q 1 r] X F g s ÷ &# Q 0 F g \ " f ì r o ) a

. r] X ´ òÖ ¦ É r 65 % \ ¸² ú % i . s © u \ ¦ : x K Y U s

$ c ` ¦ > h` (on-off) ½ + É Ã º e # Q Û ¼0 Au _ % i ½ + És 0

p x .

q

¼ # F g ) a F g$ 3 Ä » Y Us $ AOM` ¦ t è ß Ê ê ¼ # F g \ ¦ :

x õ r & r] X ÷ &t · ú § É r F g õ r] X ) a F g _ ¼ # F g © I \ ¦

'

a8 £ ¤ % i . õ H Fig. 2 \ ü < e Ü ¼ 9 r] X ÷ &t · ú §

É

r F g É r Ã ºf ~ ½ Ó ¾ ÓÜ ¼ Ð 45 %, Ã º¨ î ~ ½ Ó ¾ ÓÜ ¼ Ð 55 %_ ¼ # F

g © I \ ¦ Ð# Å Ò ¦ r] X ) a F g s ¼ # F g \ ¦ t è ß Ê ê F g _

¼

# F g © I H Ã ºf ~ ½ Ó ¾ ÓÜ ¼ Ð 64 %, Ã º¨ î ~ ½ Ó ¾ ÓÜ ¼ Ð 36 %_

Fig. 3. Spot size of fiber laser beam at focus when the laser beam size was expanded (D

_F

= 30 µm).

Fig. 4. Modulation of diffracted beam direction by driv- ing frequency change from f+F

min

to f+F

max

.

¼

# F g © I \ ¦ Ð# º ¡ § Ü ¼ Ð" f q ¼ # F g ) a F g É r AOM` ¦ t

>

÷ & Â Òì r ¼ # F g ) a H כ ` ¦ ' a8 £ ¤ % i .

F

g$ 3 Ä » Y Us $ \ " f ¸ H f â 1 _ F g` ¦ í& h o 254.4 mm f - θ \ ¦ : x K ³ ð& h \ | 9 5 Å q r & F g _ í& h ß ¼ l

\ ¦ 8 £ ¤& ñ K Ð ¤ . í& h ß ¼l \ ¦ ½ ¨ H s : rd É r 6 £ § õ

° ú [10].

D

f

= M

²

4λf πD

L

(1)

#

l " f M

²

H c | 9 (beam quality factor)s 9, é ß { 9

¸× ¼ F g$ 3 Ä » Y Us $ _ â Ä º M

²

=1 s . λ = 1070 nm,

í& h o 254.4 mm\ ¦ @ /{ 9 # ½ ¨ô Ç s : r& h F g _ í

&

h ß ¼l H 173 µm s ¦, z ´8 £ ¤ ô Ç F g _ í& h ß ¼l H 164 µm Ð" f f - θE $ Ý ¼\ ¦ t è ß F g s í& h ` ¦ ¸ ú ë B# QÅ Ò 9 s : r

&

h d õ _ { 9 u % i . C Ö ¦ s 6C F g5 Å q S X @ /l (beam expander)\ ¦ : x õ r & D

^L

= 6 mm Ð S X @ /r v

¦ s : r& h í& h ß ¼l ü < z ´8 £ ¤ u \ ¦ · ú Ð ¤ . s : r& h Ü

¼ Ð : r F g _ í& h f â (spot size) É r 29 µm s ¦ Fig.

3 \ : r z ´] j Ð 8 £ ¤& ñ ô Ç F g _ í& h f â É r 30 µm s .

s

: r& h í& h ß ¼l õ z ´8 £ ¤ ô Ç í& h ß ¼l Ä » < Ê` ¦ ' a 8

£

¤ % i ¦, : r z ´+ « >_ 3 l q& h ¦ K © ¸\ ¦ s Ò ¦ Ã º e 6 £ §

`

¦ S X % i .

(3)

AOM _ r] X : £ ¤$ í s c \ p u H % ò ¾ Ós ß ¼Ù ¼ Ð : r

½ ¨\ " f 6 x ô Ç AOM_ r] X : £ ¤$ í ` ¦ ¶ ú ( R Ð ¤ . > h

½

¨ (aperture) 1.5 × 2 mm

²

, F g È Òõ Ö ¦ 95 % s 9, 110 MHz _ Å Ò Ã º\ ¦ RF \ ¦ V , ` ¦ â Ä º r] X ÷ & H F g _ y

¸ H 24.1 mrad Ð M ® o . ¢ ¸ô Ç r] X ) a F g` ¦ b a Ë >

(dithering) r v l 0 A # s Å Ò Ã º\ ¦ ¸r v Fig.

4 ü < ° ú s þ j@ / 30 MHz\ " f 7.6 mradÜ ¼ Ð ] j# Q ÷ & H ¸ _

þ

v` ¦ ' a8 £ ¤ ½ + É Ã º e % 3 .

AOM` ¦ s 6 x # F g _ / B N ç ß & h 0 Au \ ¦ ¸r v c _

0 Au < Ê\ " f ¦& ñ ) a 0 Au \ Z ~ F g Ø ¦ l

\ [ þ t # Q H ñ\ ¦ r ç ß & h Ü ¼ Ð + þ Ar ~ ´ Ã º e .

z

´+ « >\ H < ÊÃ º µ 1 ÏÒ q t µ 1 ÏÒ q tl \ ¦ AOM \ # y ,

, d v m x 9 DC ¸á Ô! Ó (offset)õ \ ¦ ½ + Ë$ í

# y y V , ¦ F g Ø ¦ l \ ¦ : x K F g _ r ç ß & h + þ A` ¦ ' a 8

£

¤ % i . Fig. 5 H d v m ü < DC ¸á Ô! Ó (offset)+

\ ¦ y y V , É r â Ä º\ @ / # r ç ß & h + þ A` ¦ Ð# Å Ò 9

"

é

¶ H ¸ ª _ r ç ß & h + þ AÜ ¼ Ð or ~ ´ Ã º e 6 £ §` ¦ Ð

#

Å Ò% 3 .

F

g _ / B N ç ß & h + þ A` ¦ ' a8 £ ¤ H z ´+ « >` ¦ % i . $ F

g$ 3 Ä » Y Us $ \ " f ¸ H F g` ¦ CCD (charge coupled device)\ ¦ : x K % ò © o # ( É Ó' Ð ' a8 £ ¤ % i Ü ¼ 9, ¼ # F

g \ ¦ : x õ ô Ç F g` ¦ CCD Ð ' a8 £ ¤ K Ð ¤ . Fig. 6(a)\

Ðs 1 p w s F g _ / B N ç ß & h ì r í H ¼ # F g \ ¦ : x õ t · ú § É r F

g _ / B N ç ß & h ì r í Ä ºr î ß (Gaussian) ì r í\ Ä »

> M ® o ¦ ¼ # F g \ ¦ : x õ ô Ç F g _ ì r í H { 9 Õ ª Q ¸ _

þ

Fig. 5. Temporal variation of fiber laser beam observed at fixed point. The beam was modulated by (a) saw- tooth wave and (b) DC offset + sine wave.

o < Ê` ¦ · ú Ã º e . r] X ) a F g _ / B N ç ß & h ì r í\ ¦ y y

y , , d v m \ ¦ V , # Q CCD\ ¦ : x K ' a8 £ ¤ % i

. Fig. 6(b) H \ ¦ s 6 x # ¸r ( ` ¦ M :_ ¸ _

þ

v` ¦ Ð# ï r . y ¸_ þ v _ o\ " f F g _ / B N ç ß & h + þ A

`

¦ + þ Aµ 1 ÏÒ q tl \ ¦ : x # ] j# Q 0 p x < Ê` ¦ · ú Ã º e % 3 .

Fig. 6. (a) The spatial pattern of fiber laser beam before and after the beam was transmitted the polarizer. (b) The spatial beam pattern obtained while modulating the laser beam by sine wave.

Fig. 7. The spatial pattern of the laser beams at the

focus of f-theta lens when (a) the beam diameter was 1

mm and (b) 6 mm after beam expansion.

(4)

F

g$ 3 Ä » Y Us $ \ " f : r F g` ¦ CCD\ ¦ : x K f â ` ¦ ' a 8

£

¤ % i . Õ ª õ Fig. 7(a)\ " f Ð1 p w CCD\ ¦ : x K % ò

ô Ç í& h ß ¼l \ ¦ Ð# Å Ò% 3 . Fig. 7 (b) H C Ö ¦ s 6C F

g5 Å qS X @ /l \ ¦ t > # F g _ f â ` ¦ 6 mm Ð V , 2 ³ Ê ê CCD\ ¦ : x K % ò © o ô Ç F g _ í& h ß ¼l Ð f â s 30 µm s % 3 . s [ þ t _ 8 £ ¤& ñ ° ú כ É r s : r& h F g _ í& h ß ¼l ü <

° ú ¸p ' (galvanometer)\ ¦ : x K % ò % i 100 × 100 mm

²

? /\ " f ] j# Q 0 p x < Ê` ¦ Ð# Å Ò% 3 .

III. + s Ç Â ] Ø

: r 7 Hë H \ " f H F g$ 3 Ä » Y Us $ \ ¦ F g " é ¶ Ü ¼ Ð 6 x # \ P

Ç Ê ê_ 1 r] X ) a F g _ r] X ´ òÖ ¦ õ ¼ # F g $ í ì r` ¦ ' a8 £ ¤

% i . F g$ 3 Ä » Y Us $ c _ / B N ç ß & h ì r í\ ¦ ¼ # F g \ ¦ t

l õ t è ß Ê ê\ ¦ q §ô Ç õ , ¼ # F g \ ¦ t è ß c É r /

B

N ç ß & h ì r í { 9 & ñ t · ú § ¤ . AOM` ¦ t è ß F g _ ¼ # F g

Us $ _ / B N ç ß & h ì r í\ % ò ¾ Ó` ¦ p g Ë >` ¦ · ú ¤ . AOM\

< ÊÃ º µ 1 ÏÒ q tl \ " f : r ¸ \ ¦ V , # Q" f r] X ) a F g _ r ç

ß & h ì r íü < / B N ç ß & h ì r í\ ¦ ' a8 £ ¤ ô Ç õ 1 r] X ) a c _

/ B N ç ß & h ì r íü < r ç ß & h ì r í\ ¦ e _ Ð + þ A½ + É Ã º e 6 £ §

`

¦ z ´7 £ x % i . F g$ 3 Ä » Y Us $ _ í& h f â ` ¦ 8 £ ¤& ñ ¦ F

&

¸p ' \ ¦ 6 x # 100 × 100 mm

²

% ò % i \ " f e _ _ + þ A

P

c p 8 ý ò k >

: r ½ ¨ H í ß \ O " é ¶ Â Ò t % i + À : G ' p' (' é ß n Û ¼e ¦ Y Us ]

Y

c p w Ã U Ø ô

[1] S. T. Lee, J. Y. Lee, M. H. Kim, M. C. Suh, T.

M. Kang, Y. J. Choi, J. Y. Park, J. H. Kwon and H. K. Chung, Society for Information Display 2002 International Symposium Digest (2002), p. 784.

[2] R. Young and B. Young, Alternative Technology Display Report: OLED Technology (Display search, Austin, 2004).

[3] J. L. Johnson, Principle of Nonimpact Printing (Palatino Press, Irvine, 1992).

[4] M. B. Wolk et al., US Patent 6,582,876.

[5] H. Yamada et al., Appl. Surf. Sci. 197, 411 (2002).

[6] H. K. Chung, OLEDs 2003 Conference Proceedings, (2003).

[7] M. Mansuripur, G. A. Neville Connell and J. W.

Goodman, Appl. Opt. 21, 1106 (1982).

[8] Jan Kalinowski, Organic Light Emitting Diodes (Marcel Dekker, New York, 2005).

[9] S. T. Lee, B. D. Chin, Mu Hyun Kim, T. M. Kang, M. W. Song, J. H. Lee, H. D. Kim, H. K. Chung, M. B. Wolk, E. Bellmann, J. P. Baetzold, S. Laman- sky, V. Savvateev, T. R. Hoffend Jr., J. S. Staral, R.

R. Roberts and Y. Li, Society for Information Dis- play 2004 International Symposium Digest (2004), p. 1008.

[10] J. F. Ready, Industrial Applications of Lasers, 2nd

edition, (Academic Press, Sandiego, 1997).

(5)

Study of a Laser Thermal Pattering System Using Fiber Laser

Dong Hyun Lee, Ill Hyun Park, Jin hyuk Kwon and Jonghoon Yi

^∗

Department of Physics, Yeungnam University, Gyeongsan 712-749

(Received 9 November 2006)

A laser thermal printing system was developed to fabricate organic light emitting diodes. A single-mode fiber laser was used for patterning of the pixel. The laser had a 1070 nm wavelength, and the laser beam was diffracted by using an acousto-optic modulator. The diffracted beam was sent to a galvanometer to pattern an arbitrary pixel shape. The laser beam was expanded and focused by using f - θ a lens with a focal length of 254.4 mm. The diffracted fiber laser beam was partially polarized, and the polarized beam had irregular spatial beam pattern. The diffracted beam showed a Gaussian shape at the focus. By adjusting the galvanometer, we could scan the laser beam over an area of 100 × 100 µm.

PACS numbers: 42.62.B, 42.60, 42.62.C

Keywords: Aser thermal patterning, Galvanometer, Fiber laser, f-theta lens, Acousto optic modulator

∗

E-mail: [email protected]

ò 6 Bg ` @ ·    G  Bg ` @ · - ! H. > 0 ² ? · T ø ¶ B0 å  ∗

° Ë

ÑV È ¥ 7 _T $ [õ u § T  Ó Þ X ¢ 7 _T $ [ °  Ç ¹ Å  X ê sV   ì Å 

T

 ò 6 Bg ` @ ·    G  Bg ` @ · - ! H. > 0 ² ? · T  ø ¶ B0 å  ∗

% ò

z  @ / < Æ § Ó ü t o  < Æõ ,  â í ß  712-749 (2006¸  11 Z 4 9{ 9  ~ Ã Î6 £ §)

F

  " f r] X ÷ & ¦, 2 " é ¶ Û ¼ ± ps  0 p x ô  Ç X-Y ° ú   ¸p '  (galvanometer)\  ¦ t    " f ~ ½ Ó ¾ Ós  ] j# Q  ) a

. s  F g5 Å q É r  í& h  o  254.4 nm   f - θ E $ Ý ¼\  ¦ t è ß  Ê ê ³ ð& h \  | 9 5 Å q >   ) a . AOM É r ¼ # F g ÷ &

t

 · ú § É r F g$ 3 Ä » Y Us $  F g5 Å q`  ¦ Â Òì  r& h Ü ¼ Ð ¼ # F g r v   H  כ `  ¦ · ú  Ã º e  % 3  . f - θ E $ Ý ¼\  ¦ t è ß  F g _   í

&

#

Å Ò% 3  . AOMõ   < Êa  2 " é ¶ Û ¼H _ ç  © q   ° ú   ¸p ' \  ¦  ¸] X  #  100 × 100 mm

_  % ò % i \     5

g" f Y Us $ \  ¦ Å Ò   9 e  _ _  + þ A`  ¦ ë ß × ¼  H X < $ í / B N % i  .

PACS numbers: 42.62.C, 42.60, 42.62.B

Keywords: Y Us $  \ P    , ° ú   ¸p ' , F g$ 3 Ä » Y Us $ , f - θ E $ Ý ¼, F g6 £ §  ¾ Ó    ¸l 

I. " e Â ] Ø

Ä

 [1-5]. s  l Õ ü t É r s   _  e ç ß ¼# ×    W (ink-jet printing)

~

½ Ód   Ð  ¸ Z  } É r Ò q tí ß $ í õ  î ß & ñ $ í ,  ¦K  ©  ¸_  0 p x$ í `  ¦



Ð# Å Ò ¦ e  Ü ¼ 9, í ß \ O _  µ 1 Ï  ~ ½ Ó ¾ Ós  @ /+ þ A o, $   o 1

p

x`  ¦ Æ Ò½ ¨  ¦ e    H Æ Ò[ j\  ´ ú   H J ' _ ç ~ ½ ÓZ O s   ¦ ½ + É Ã

º e    [6,7].   " f  & ³F  OLED x 9 6 f# Qt   H n Û ¼e  ¦ Y

Us  1 p x`  ¦ ½ ¨ & ³ < Ê\  e  # Q" f l ^ 7 £ x  Ã ÌZ O  (vapor evapora- tion), e ç ß ¼# ×    W 1 p x`  ¦ :  x # " f  H µ 1 Ï  0 p x$ í s  ] jô  Ç

&

h s >  ÷ & ¦, # l \  Y Us $  \ P    \  ¦ s 6 x ô  Ç ~ ½ Ód   É r 0 A _

  9 כ ¹\  ¦ Ø  æ7 á ¤ r & Å Ò  H ~ ½ Ód  s   ¦  : r .

OLED  H 1960¸  @ / Anthracene_  µ 1 Ï F g Ü ¼ Ð > hµ 1 Ïs  r 





÷ &# Q, 1987¸  Eastman Kodak _  Dr.Tangs    Å Ò { 9

 l 0 p x`  ¦ ì  r o  (  / B N Å Ò{ 9 8 £ x,    Å Ò{ 9 8 £ x) K " f & h 8 £ x ô  Ç 0 l q Ò 

o µ 1 Ï F g n  s Û ¼\  ¦ > hµ 1 Ïô  Ç כ s  z ´6 x o_  [  t ½ ¨ ÷ &# Q y



² D G \ " f > hµ 1 Ïs   : r  o ÷ &% 3  . s  Ê ê 1990¸  % ò ² D G Ö  r Ú

Ôo t  @ / < Æ\ " f  H PPV e  ¦ o  Q (Polymer) µ 1 Ï F g s  ¸

×

¼ (LED) : £ ¤$ í `  ¦ µ 1 Ï| % i  . s  Qô  Ç OLED_  µ 1 Ï F g " é ¶ o 

E-mail: [email protected]



 H Ä »l F « Ñ_  EL (Electroluminescence) & ³ © `  ¦ s 6 x ô  Ç



è  Ð" f, OLED è \    · ú `  ¦       ª F G \ " f Ä » l

8 £ x _  HOMO (Highest Occupied Molecular Orbital) Ð

&

ñ / B N(Hole) s  Å Ò{ 9  ) a . 6 £ §F G \ " f  H Ä »l 8 £ x _  LUMO(

Lowest Occupied Molecular Orbital)  Ð     Å Ò{ 9 ÷ & ¦, Å

Ò{ 9  ) a    -& ñ / B N _  F   ½ + Ë \  -t  Ð µ 1 Ï F g8 £ x _  Ä »l ì  r  

 # l  (excitation)  ) a . s  Ò q t$ í  ) a # l    {   © I 



Ð  ;s    " f µ 1 Ï F g ô  Ç  [8].



&

³F  { 9 Â Ò l \ O \ " f  H Y Us $  \ P     " é ¶ o \  ¦ s 6 x ô

 Ç LITI (Laser Induced Thermal Imaging)~ ½ ÓZ O Ü ¼ Ð 30

UXGA LCD \   ª ô  Ç   ½ + Ë8 £ x (small molecule, hybrid, polymer)1 p x \  CW Nd:YAG Y Us $  (1064 nm, 8.0 W Ø  ¦

§

4 ,  í& h  ì ø Í â - 300 ×40 µm)\  ¦  6 x #  J ' _ ç   H ~ ½ Ó d 

`  ¦  6 x  ¦ e    [9].



: r  7 Hë  H \ " f  H Nd:YAG Y Us $     F g$ 3 Ä » (fiber) Y Us $ \  ¦ s 6 x ô  Ç \ P     ~ ½ Ód  õ  r Û ¼% 7 `  ¦ ½ ¨ & ³ 



¦ ¨ î ô  Ç . K  ©  ¸  H 30 µm, Å Ò  (scan)# 3 0 A  H 100 × 100 mm

`  ¦ 3 l q ³ ð Ð % i  ¦, 10 W/ å L F g$ 3 Ä » Y Us $  (IPG Korea, YLM-10-SC)\  ¦ \ P     F g " é ¶ Ü ¼ Ð  6 x % i  . ¢ ¸ ô

 Ç   '  ~ ½ Ó ¾ Ó ý aÄ º Ð ¹ ¡ §f  s   H b  a Ë > (dithering) ~ ½ Ód  õ  c 

 $ í + þ A (Beam shaping) 1 p x`  ¦ s 6 x ô  Ç ] j# Q\  ¦  < ÊÜ ¼ Ð" f

\ P

    J ' _ ç _  z ´ & ³0 p x$ í `  ¦  Ð# Å Ò% 3  .

-537-

Fig. 1. The experimental set up for laser thermal print- ing.

Fig. 2. The polarization states of fiber laser beam after acousto optic modulator transmission.

II. ÷ m Ç] M ö õ m Í + s ÇÊ Ý

z

´+ « >  © u  ¸  H Fig. 1 \  ü < e   .  © s  1,070 nm  q

ò 6 Bg ` @ · G Bg ` @ · - ! H. > 0 ² ? · T ø ¶ B0 å ∗

ÑV È ¥ 7 _T $ [õ u § T Ó Þ X ¢ 7 _T $ [ ° Ç ¹ Å X ê sV ì Å

ò 6 Bg ` @ · G Bg ` @ · - ! H. > 0 ² ? · T ø ¶ B0 å ^∗

z @ / < Æ § Ó ü t o < Æõ , â í ß 712-749 (2006¸ 11 Z 4 9{ 9 ~ Ã Î6 £ §)

" f r] X ÷ & ¦, 2 " é ¶ Û ¼ ± ps 0 p x ô Ç X-Y ° ú ¸p ' (galvanometer)\ ¦ t " f ~ ½ Ó ¾ Ós ] j# Q ) a

. s F g5 Å q É r í& h o 254.4 nm f - θ E $ Ý ¼\ ¦ t è ß Ê ê ³ ð& h \ | 9 5 Å q > ) a . AOM É r ¼ # F g ÷ &

· ú § É r F g$ 3 Ä » Y Us $ F g5 Å q` ¦ Â Òì r& h Ü ¼ Ð ¼ # F g r v H כ ` ¦ · ú Ã º e % 3 . f - θ E $ Ý ¼\ ¦ t è ß F g _ í

Å Ò% 3 . AOMõ < Êa 2 " é ¶ Û ¼H _ ç © q ° ú ¸p ' \ ¦ ¸] X # 100 × 100 mm

_ % ò % i \ 5

g" f Y Us $ \ ¦ Å Ò 9 e _ _ + þ A` ¦ ë ß × ¼ H X < $ í / B N % i .

Keywords: Y Us $ \ P , ° ú ¸p ' , F g$ 3 Ä » Y Us $ , f - θ E $ Ý ¼, F g6 £ § ¾ Ó ¸l

[1-5]. s l Õ ü t É r s _ e ç ß ¼# × W (ink-jet printing)

½ Ód Ð ¸ Z } É r Ò q tí ß $ í õ î ß & ñ $ í , ¦K © ¸_ 0 p x$ í ` ¦

Ð# Å Ò ¦ e Ü ¼ 9, í ß \ O _ µ 1 Ï ~ ½ Ó ¾ Ós @ /+ þ A o, $ o 1

x` ¦ Æ Ò½ ¨ ¦ e H Æ Ò[ j\ ´ ú H J ' _ ç ~ ½ ÓZ O s ¦ ½ + É Ã

º e [6,7]. " f & ³F OLED x 9 6 f# Qt H n Û ¼e ¦ Y

Us 1 p x` ¦ ½ ¨ & ³ < Ê\ e # Q" f l ^ 7 £ x Ã ÌZ O (vapor evapora- tion), e ç ß ¼# × W 1 p x` ¦ : x # " f H µ 1 Ï 0 p x$ í s ] jô Ç

h s > ÷ & ¦, # l \ Y Us $ \ P \ ¦ s 6 x ô Ç ~ ½ Ód É r 0 A _

9 כ ¹\ ¦ Ø æ7 á ¤ r & Å Ò H ~ ½ Ód s ¦ : r .

OLED H 1960¸ @ / Anthracene_ µ 1 Ï F g Ü ¼ Ð > hµ 1 Ïs r

÷ &# Q, 1987¸ Eastman Kodak _ Dr.Tangs Å Ò { 9

l 0 p x` ¦ ì r o ( / B N Å Ò{ 9 8 £ x, Å Ò{ 9 8 £ x) K " f & h 8 £ x ô Ç 0 l q Ò

o µ 1 Ï F g n s Û ¼\ ¦ > hµ 1 Ïô Ç כ s z ´6 x o_ [ t ½ ¨ ÷ &# Q y

² D G \ " f > hµ 1 Ïs : r o ÷ &% 3 . s Ê ê 1990¸ % ò ² D G Ö r Ú

Ôo t @ / < Æ\ " f H PPV e ¦ o Q (Polymer) µ 1 Ï F g s ¸

¼ (LED) : £ ¤$ í ` ¦ µ 1 Ï| % i . s Qô Ç OLED_ µ 1 Ï F g " é ¶ o

H Ä »l F « Ñ_ EL (Electroluminescence) & ³ © ` ¦ s 6 x ô Ç

è Ð" f, OLED è \ · ú ` ¦ ª F G \ " f Ä » l

8 £ x _ HOMO (Highest Occupied Molecular Orbital) Ð

ñ / B N(Hole) s Å Ò{ 9 ) a . 6 £ §F G \ " f H Ä »l 8 £ x _ LUMO(

Lowest Occupied Molecular Orbital) Ð Å Ò{ 9 ÷ & ¦, Å

Ò{ 9 ) a -& ñ / B N _ F ½ + Ë \ -t Ð µ 1 Ï F g8 £ x _ Ä »l ì r

# l (excitation) ) a . s Ò q t$ í ) a # l { © I

Ð ;s " f µ 1 Ï F g ô Ç [8].

³F { 9 Â Ò l \ O \ " f H Y Us $ \ P " é ¶ o \ ¦ s 6 x ô

Ç LITI (Laser Induced Thermal Imaging)~ ½ ÓZ O Ü ¼ Ð 30

UXGA LCD \ ª ô Ç ½ + Ë8 £ x (small molecule, hybrid, polymer)1 p x \ CW Nd:YAG Y Us $ (1064 nm, 8.0 W Ø ¦

4 , í& h ì ø Í â - 300 ×40 µm)\ ¦ 6 x # J ' _ ç H ~ ½ Ó d

` ¦ 6 x ¦ e [9].

: r 7 Hë H \ " f H Nd:YAG Y Us $ F g$ 3 Ä » (fiber) Y Us $ \ ¦ s 6 x ô Ç \ P ~ ½ Ód õ r Û ¼% 7 ` ¦ ½ ¨ & ³

¦ ¨ î ô Ç . K © ¸ H 30 µm, Å Ò (scan)# 3 0 A H 100 × 100 mm

` ¦ 3 l q ³ ð Ð % i ¦, 10 W/ å L F g$ 3 Ä » Y Us $ (IPG Korea, YLM-10-SC)\ ¦ \ P F g " é ¶ Ü ¼ Ð 6 x % i . ¢ ¸ ô

Ç ' ~ ½ Ó ¾ Ó ý aÄ º Ð ¹ ¡ §f s H b a Ë > (dithering) ~ ½ Ód õ c

$ í + þ A (Beam shaping) 1 p x` ¦ s 6 x ô Ç ] j# Q\ ¦ < ÊÜ ¼ Ð" f

J ' _ ç _ z ´ & ³0 p x$ í ` ¦ Ð# Å Ò% 3 .

´+ « > © u ¸ H Fig. 1 \ ü < e . © s 1,070 nm q

¼ # F g ) a F g$ 3 Ä » Y Us $ \ " f : r F g É r F g 6 £ § ¾ Ó ¸l (acousto optic modulator)\ ¦ s 6 x # r] X y ` ¦ ¸] X < Ê Ü

¼ Ð+ ] j# Q ¦, 2 " é ¶ Û ¼ ± ps 0 p x ô Ç X-Y ° ú ¸p '

(galvanometer)\ ¦ t > ô Ç . s F g É r í& h o

254.4 nm f - θE $ Ý ¼\ ¦ t > ÷ & ¦ ³ ð& h \ | 9 5 Å q >

)

a . ¢ ¸ô Ç ITO (indium Tin Oxide) Ä »o ó ø Í x 9 / B N # 9 2

£ § (donor film)` ¦ ¸ ú Å Òl 0 Aô Ç / B N \ O @ / (vacuum chuck)` ¦ ] j # z ´+ « >\ 6 x % i .

g$ 3 Ä » Y Us $ \ " f : r F g` ¦ F g6 £ § ¾ Ó ¸l (AOM:

acousto optic modulator)\ ¦ t > # r] X ´ òÖ ¦ x 9 r ] X

y ` ¦ 8 £ ¤& ñ H z ´+ « >` ¦ % i . AOM` ¦ t è ß F g É r þ j

/ 110 MHz_ F g6 £ § ¾ Ó \ _ # r] X ÷ &# Q ' ~ ½ Ó ¾ Ó s

1.7 ¸ , # Q 1 r] X F g s ÷ &# Q 0 F g \ " f ì r o ) a

. r] X ´ òÖ ¦ É r 65 % \ ¸² ú % i . s © u \ ¦ : x K Y U s

$ c ` ¦ > h` (on-off) ½ + É Ã º e # Q Û ¼0 Au _ % i ½ + És 0

p x .

¼ # F g ) a F g$ 3 Ä » Y Us $ AOM` ¦ t è ß Ê ê ¼ # F g \ ¦ :

x õ r & r] X ÷ &t · ú § É r F g õ r] X ) a F g _ ¼ # F g © I \ ¦

'

a8 £ ¤ % i . õ H Fig. 2 \ ü < e Ü ¼ 9 r] X ÷ &t · ú §

É

r F g É r Ã ºf ~ ½ Ó ¾ ÓÜ ¼ Ð 45 %, Ã º¨ î ~ ½ Ó ¾ ÓÜ ¼ Ð 55 %_ ¼ # F

g © I \ ¦ Ð# Å Ò ¦ r] X ) a F g s ¼ # F g \ ¦ t è ß Ê ê F g _

# F g © I H Ã ºf ~ ½ Ó ¾ ÓÜ ¼ Ð 64 %, Ã º¨ î ~ ½ Ó ¾ ÓÜ ¼ Ð 36 %_

# F g © I \ ¦ Ð# º ¡ § Ü ¼ Ð" f q ¼ # F g ) a F g É r AOM` ¦ t

÷ & Â Òì r ¼ # F g ) a H כ ` ¦ ' a8 £ ¤ % i .

g$ 3 Ä » Y Us $ \ " f ¸ H f â 1 _ F g` ¦ í& h o 254.4 mm f - θ \ ¦ : x K ³ ð& h \ | 9 5 Å q r & F g _ í& h ß ¼ l

\ ¦ 8 £ ¤& ñ K Ð ¤ . í& h ß ¼l \ ¦ ½ ¨ H s : rd É r 6 £ § õ

° ú [10].

l " f M

H c | 9 (beam quality factor)s 9, é ß { 9

¸× ¼ F g$ 3 Ä » Y Us $ _ â Ä º M

=1 s . λ = 1070 nm,

í& h o 254.4 mm\ ¦ @ /{ 9 # ½ ¨ô Ç s : r& h F g _ í

h ß ¼l H 173 µm s ¦, z ´8 £ ¤ ô Ç F g _ í& h ß ¼l H 164 µm Ð" f f - θE $ Ý ¼\ ¦ t è ß F g s í& h ` ¦ ¸ ú ë B# QÅ Ò 9 s : r