ARUPS õ u § T Ó Þ X ¢ Si(111) - 7 × 7 õ m Í Si(100) - 2 × 1 : 2 domain » ì Å8 ý ¹ Å
º
»Z Ì Ú ∗ · T + ä ® £ · »? # Ò · T ø ¶ B% · Â 6 Ò ç ¡] 8 ;
â
© @ / < Æ § õ < Æ@ / < Æ Ó ü t o < Æõ x 9 l íõ < Æ ½ ¨ è, 660-701
+ ä
< - >
í ½ Óí ß \ O õ < Æ ½ ¨" é ¶ G ' p" fr Û ¼% 7 ½ ¨z ´, 790-330
~ ç
¡+ ä ¬ £
d ¦a Ë :@ / < Æ § Ó ü t o < Æõ (2003¸ 8 Z 4 4{ 9 ~ Ã Î6 £ §)
í ¦ / B N \ " f L : F Mô Ç Si(111) - 7 × 7 ³ ð õ Si(100) - 2 × 1 : 2 domain ³ ð ` ¦ ï r q ô Ç 6 £ § 21.2 eV x 9 16.85 eV_ photon` ¦ { 9 r & ~ ½ ÓØ ¦ ÷ & H F g _ y ì r K Û ¼& 7 à Ô! 3 ` ¦ 8 £ ¤& ñ % i . Si(111) - 7
× 7 ³ ð surface Brillouin zone(SBZ)_ ¯ Γ - ¯ M õ ¯ Γ - ¯ K @ /g A ~ ½ Ó ¾ ÓÜ ¼ Ð 8 £ ¤& ñ ô Ç Û ¼& 7 à Ô! 3 \ " f S
1(-0.2 eV), S
2(-0.8 eV), S
3(-1.8 eV)_ [ j ³ ð © I \ ¦ S X % i Ü ¼ 9, Õ ª × æ \ " f S
3 © I H ô Ç ì rí ß ` ¦
? /% 3 . ¢ ¸ô Ç -2 eV ∼ -5 eV % ò % i \ " f H bulk © I \ " f f ] X s \ _ ô Ç ¿ º > h_ x s ß ¼\ ¦ S X
% i . Si(100) - 2 × 1 ³ ð SBZ_ ¯ Γ @ /g A& h \ " f Fermi \ -t A -0.5 eV\ ³ ð © I
z ¤ ¦, ¯J
0a,b@ /g A& h \ @ /K " f H -0.8 eV, -1.3 eV, -1.8 eVü < -3.3 eV\ " f ³ ð © I \ _ ô Ç x s ß
¼ z ¤ . -0.8 eV_ ³ ð © I H _ ì rí ß s \ O % 3 Ü ¼ 9 -1.3 eV_ © I H ì rí ß s e % 3 ¦ { ; ¤ É r
0.8 eV% i . -1.8 eVü < -3.3 eV_ ³ ð resonance\ " f ¸ ô Ç ì rí ß s e % 3 . ¯J
0a@ /g A& h õ ¯ J
0b@ /g A
&
h \ " f -0.7 eVü < -1.3 eV\ " f 8 £ ¤& ñ ) a x s ß ¼[ þ t É r ¯ J
0a,b@ /g A& h _ -0.8 eVü < -1.3 eV\ " f è ß © I ü
< 1 l x{ 9 % i .
PACS numbers: 68.35
Keywords: y ì r K F g ì rF gZ O , Si(111) - 7 × 7, 2½ ¨% i , ³ ð ½ ¨ ¸, Si(100) - 2 × 1
I. " e  ] Ø
¦^ ³ ð É r 3 " é ¶ Å Òl $ í s L :# Qf Ü ¼ Ð K bulkü <
H ¢ ¸ É r : £ ¤$ í ` ¦ . Õ ª × æ \ " f é ß & ñ Si ³ ð
É
r ¸Z þ t± ú / B N\ O \ " f Si t H l Õ ü t& h 8 £ ¤ \
"
f_ × æ כ ¹$ í õ L : F Mô Ç ³ ð s F ½ ¨$ í (reconstruction)
H : £ ¤ s ô Ç $ í | 9 M :ë H \ ´ ú § É r ½ ¨ s À Ò# Q ³ ð × æ _ s . L : F Mô Ç Si(111) É r 7 × 7Ü ¼ Ð F ½ ¨$ í ÷ &
9, [1,2] Si(100) É r 2 × 1Ü ¼ Ð F ½ ¨$ í ) a . [3] Si(111) - 7 × 7 í ½ ¨ ¸\ @ /K ´ ú § É r ½ ¨ [ þ t s K $ 3 ` ¦ r
¸ % i Ü ¼ 9, & ³F H Dakayanagi_ DAS(dimer-adatom- stacking fault) ¸4 S qs s ½ ¨ ¸\ ¦ © ¸ ú [ O " î H כ Ü ¼
Ð : r . [4] DAS ¸4 S q É r ô Ç unit cell\ 9> h_ dimer, 12> h
∗
E-mail: [email protected]
_ adatom, Õ ªo ¦ _ & h 8 £ x < Ê(stacking fault) 8 £ x Ü
¼ Ð ½ ¨$ í ÷ & 9, s ¸4 S q\ Ø Ô adatom\ 12> h, stack- ing fault 8 £ x \ 6> h, Õ ªo ¦ vacancy A \ e H " é ¶
\
1> h 1 p x 8 ú x 19 > h_ dangling bond unit cell ? /\ e
. Si(111) - 7 × 7 ³ ð ½ ¨ ¸\ @ /K Uhrberg 1
p x [5] É r 10.2 eV ∼ 21.2 eV % ò % i _ \ -t \ ¦ t H
¼ #
F g ) a photon` ¦ 6 x # ARUPS z ´+ « >` ¦ Ã º' % i .
s
[ þ t É r Ä » + þ A(free electron like) ì rí ß ` ¦ þ j 7
á
x © I (final state)_ { \ ¦ Ð ¦ % i Ü ¼ 9, s \ ¦ s 6 x
#
Si(111) - 7 × 7\ @ /ô Ç Û ¼& 7 à Ô! 3 \ " f bulk {
(valence band)_ þ j © 0 A ¿ º > h_ { ÐÂ Ò' f ] X s
\
_ ô Ç F g ~ ½ ÓØ ¦` ¦ S X % i . ¢ ¸ô Ç Fermi \ -t
A -0.2 eV, -0.8 eVü < -1.8 eV\ " f [ jt ³ ð © I
\
¦ µ 1 Ï| % i . Hammers 1 p x [6] É r current imaging tun-
neling spectroscopy(CITS)\ ¦ s 6 xô Ç z ´+ « >` ¦ : x # F g
-327-
ì rF g (UPS) z ´+ « >\ " f µ 1 ß) [ j ³ ð © I _ H" é ¶ s adatom_ half filled dangling bond(S
1), adatom_ back bond(S
3), Õ ªo ¦ rest atom_ filled dangling bond(S
2)e
`
¦ µ 1 ß+ À I .
L
: F Mô Ç Si(100) ³ ð É r 2 × 1Ü ¼ Ð F ½ ¨$ í ) a ¿ º > h_
½
¨% i ` ¦ t H ³ ð s 9 F ½ ¨$ í É r ê ø Í > & ñ § > = ) a Si dimer M :ë H \ è ß . Dimer_ C \ P [ þ t É r [011] ~ ½ Ó ¾ Óõ [01¯ 1] ~ ½ Ó ¾ ÓÜ ¼ Ð Z ~ # | 9 Ã º e Ü ¼ 9, dimer_ ~ ½ Ó ¾ Ó\ 2
× 1 ½ ¨ ¸ü < 1 × 2 ½ ¨ ¸\ ¦ ¿ º ½ ¨% i Ü ¼ Ð ¾ º# Q4 R e
. ¢ ¸ô Ç s ½ ¨ ¸ H é ß " é ¶ 8 £ x_ Z } s \ ¦ . [7] L :
F
Mô Ç Si(100) ³ ð \ @ /K " f ¸ s : r& h Ü ¼ Ð z ´+ « >& h Ü ¼ Ð
´ ú
§ É r ½ ¨ e % 3 . [8–10] ³ ð F ½ ¨$ í ) a Si(100)-2 × 1
³
ð \ @ /ô Ç Y > > h_ ½ ¨ ¸& h ¸4 S qs ] jr ÷ &% 3 Ü ¼ [9, 11, 12] & ³F H þ j © 0 A " é ¶ 8 £ x \ + þ A$ í ) a dimer Ð ½ ¨$ í ) a
¸4 S q Ð s ³ ð _ " é ¶ ½ ¨ ¸\ ¦ [ O " î ¦ e . 7 £ ¤, s ¸ 4
S q\ " f H þ j © 8 £ x \ e H ¿ º > h_ " é ¶ [ þ t s " f Ð bonding
<
ÊÜ ¼ Ð+ F ½ ¨$ í ÷ &t · ú § É r bulk-exposed õ q §½ + É M :
³
ð _ dangling bond_ Ã º\ ¦ ì ø ÍÜ ¼ Ð × ¦ # Q[ þ t > # î ß
&
ñ ô Ç © I \ ¦ s ê r . Õ ª! 3 \ ¸ p K ë H ] j& h [ þ t s z
e Ü ¼ 9, Õ ª × æ H dimer [ þ t s @ /g A < Ê É r q
@
/g A H כ s . [13,14] s : r& h Ü ¼ Ð > í ß ) a @ /g A dimer ¸4 S qõ q @ /g A dimer ¸4 S q s _ \ -t H Å
Ò Ü ¼Ù ¼ Ð ³ ð \ ¿ º 7 á x À Ó_ dimer [ þ t s / B N > r½ + É Ã º e Ü
¼ 9, [14] STM ' a¹ 1 Ï\ " f ¸ ¿ º 7 á x À Ó_ dimer[ þ t s _ ° ú
É
r כ Ü ¼ Ð z ¤ . [15,16] Si(100) - 2 × 1 ³ ð _
½
¨ ¸\ @ /K " f ¸ ´ ú §s ½ ¨÷ &% 3 . [13,17] @ /g A dimer ¸ 4
S q\ H ô Ç ³ ð { ½ ¨ ¸ > í ß \ _ Si(100) ³ ð É r F
K5 Å q$ í ` ¦ ? / ¦ e t ë ß , [18] photoemission z ´+ « > õ
Si(100)³ ð É r ì ø Í ¸^ $ í e ` ¦ ? / ¦ e . [13, 19]
q
@ /g A dimer ¸4 S q\ @ /ô Ç s : r& h > í ß \ " f ¿ º > h_ dangling bond { ì r o ÷ &% 3 ¦ Õ ª õ ³ ð { ç ß s
z ´+ « >& h ì ø Í ¸^ $ í õ { 9 u % i . [20]
: r ½ ¨\ " f H " é ¶ & h Ü ¼ Ð L : F Mô Ç Si(111) - 7 × 7 ³ ð
õ Si(100) - 2 × 1 ³ ð _ ½ ¨ ¸\ ¦ ½ ¨ % i .
$
LEED\ ¦ s 6 x # Si(111) - 7 × 7 ³ ð õ Si(100) - 2
× 1 ³ ð ½ ¨ ¸\ ¦ ' a¹ 1 Ï # s [ þ t ³ ð _ SBZ ÐÂ Ò' @ /g A
~
½ Ó ¾ Ó` ¦ & ñ ô Ç 6 £ § ARUPS\ ¦ s 6 x # ³ ð @ /g A ` ¦
F g Û ¼& 7 à Ô! 3 ` ¦ 8 £ ¤& ñ ¦ s [ þ t ¿ º ³ ð _
½
¨ ¸\ ¦ & ñ % i .
II. ÷ m Ç ] M ö
: r z ´+ « > É r VG ESCA Lab III ARUPS © u \ ¦ s 6 x
#
à º' % i . s © u \ H ³ ð ½ ¨ ¸\ ¦ ' a¹ 1 Ͻ + É Ã º e H Õ
ªa Ë > 1. (a) The surface Brillouin zone (SBZ) of the Si(111) - 7 × 7 surface and (b) the SBZ of the Si(100) - 2 × 1 : 2 domain surface.
LEED, ï ß À Ó l ^ ì r$ 3 6 x RGA, ³ ð Ô ¦í HÓ ü t` ¦ ] j ½ + É Ã º e
H ion sputter gun s © à Ì÷ &# Q e ¦, y ì r K 8 £ ¤& ñ ` ¦ 0 A ô
Ç goniometerü < \ -t ì r$ 3 l Ð CHA © à Ì÷ &
#
Q e . F g " é ¶ Ü ¼ Ð H 1 p x C l d _ ü @ Ï þ á Ô Ð He < Ê
É r Ne` ¦ ~ ½ Ó r & µ 1 ÏÒ q t H ü @ ` ¦ s 6 xô Ç . F g
Ø ¦ \ H collection aperture f â 1 mm, y ì r K 0 p x s
±2
◦& ñ ¸ CHA\ ¦ 6 x # pass energy\ ¦ { 9 & ñ > ¿ º
¦ y 5 Å q · ú ` ¦ 8 £ ¤& ñ _ \ -t \ or v H
~
½ ÓZ O FTA(fixed analyzer transmission) ¸× ¼\ ¦ 6 x
%
i . 6 xô Ç l ó ø Í É r q $ ½ Ós 5Ωcm P doped ) a Si(111) x 9 Si(100) wafer% i . $ wafer\ ¦ 3.5 mm x 20 mm_ ß ¼l Ð ] X é ß ô Ç Ê ê 10%_ HF 6 xÓ o\ { Õ ª# Q í ß
o} ` ¦ ] j ¦ 17 MΩcm_ » 1 Ï s : r à º\ ' ç H Ê ê | ¸ ô
Ç N
2\ Ô ¦ # Q ´ ú 2 ; 6 £ § G e ! Q\ © Ã Ì % i ¦ 150
◦C \
"
f 27r ç ß & ñ ¸ baking Ê ê 2 × 10
−10Torr_ í ¦ /
B
N \ ¸² ú % i . í ¦ / B N \ " f sample holder\ DC\ ¦
:
x r & 800
◦C \ " f 15ì rç ß \ P # Ô ¦í HÓ ü t` ¦ 7 £ xµ 1 Ï r
6 £ § 1200
◦C \ " f à º íç ß flash heating` ¦ à º r ì ø Í4 ¤
# L : F Mô Ç ³ ð ` ¦ % 3 % 3 . L : F Mô Ç Si(111) ³ ð É r 7 × 7 Ü ¼ Ð F ½ ¨$ í ÷ &# Q e % 3 ¦, Si(100) ³ ð É r 2 × 1Ü ¼ Ð F
½
¨$ í ÷ &# Q e % 3 Ü ¼ Ã ºf ô Ç ~ ½ Ó ¾ ÓÜ ¼ Ð ¿ º > h_ domains + þ
A$ í ÷ &# Q e % 3 . Õ ªa Ë > 1 É r Si(111) x 9 Si(100) - 2 × 1 : 2 domain \ @ /ô Ç ³ ð SBZ Ð y @ /g A& h É r ' a Y V& h Ü ¼ Ð 6
x H l ñ\ ¦ | Ã Û . Õ ªa Ë >\ " f · ú Ã º e H ü < ° ú s Si(100) ³ ð _ SBZ\ " f [010] @ /g A ~ ½ Ó ¾ Ó É r Si(100) ³ ð _ domain ´ òõ \ ¦ x ½ + É Ã º e H ~ ½ Ó ¾ Ós . Si(111) \
@
/ô Ç ARUPS 8 £ ¤& ñ r ³ ð \ Ã ºf ô Ç ~ ½ Ó ¾ Ó\ @ /K θ
i= 53
◦_ ~ ½ Ó ¾ ÓÜ ¼ Ð photons { 9 ÷ & 9, ~ ½ ÓØ ¦ ÷ & H F g H
³
ð \ Ã ºf ô Ç ~ ½ Ó ¾ Ó\ @ /K θ
e= 0
◦\ " f 60
◦t 2
◦ç ß
Ü ¼ Ð ¯ Γ - ¯ M, ¯ Γ - ¯ K ~ ½ Ó ¾ Ó\ @ /K 8 £ ¤& ñ % i . Si(100)
\
@ /K " f H θ
i= 55
◦ Ð ¦& ñ r v ¦ θ
e= 0
◦\ " f 46
◦t
2
◦_ ç ß Ü ¼ Ð [010], [011], [01¯1] ~ ½ Ó ¾ Ó\ @ /K 8 £ ¤& ñ
% i .
III. + s ÇÊ Ý õ m Í À X Ø8 ý
r
« Ñ_ { 9 < ÊÃ º H 8 £ ¤& ñ H \ ç ß m É r X <
Õ
ª s Ä » H ³ ð _ " é ¶ C \ P \ x 9 ¸ ì r í ² ú
t Ù ¼ Ð y ³ ð _ ( J $ [ > © # 4 _ Z } s Ø Ôl M :ë H s
. " f Si(111) õ Si(100) _ { 9 < ÊÃ º ¸ Ø Ô .
{ 9
< ÊÃ º H 6 £ §d \ _ K ½ ¨K .
E
c− eV
b= ϕ
Si− ϕ
spec(1)
#
l " f E
c H = å S # Q! Qa Ë >(cut off) î r1 l x \ -t , V
b H r « Ñ\
# Qï r bias · ú , ϕ
spec É r \ -t ì r$ 3 l _ { 9 < ÊÃ ºs .
Si(111) ³ ð \ @ /K 8 £ ¤& ñ ô Ç z ´+ « >° ú כ[ þ t É r ϕ
spec= 4.53 eV, V
b= 6.28 eV, E
c= 6.33 eV Ð+ { 9 < ÊÃ º H 4.58 eV% i ¦, s
° ú כ É r Ð ¦ ) a ° ú כ 4.60 eVü < _ 1 l x{ 9 . [21, 22]
Si(100) ³ ð \ " f H ϕ
spec= 4.53 eV, V
b= 6.13 eV, E
c= 6.57 eV Ð Si(100) ³ ð _ { 9 < ÊÃ º 4.97 eV Ð Ð ¦ ) a
°
ú כ 4.85 eV Ð 0.12 eV_ s z ¤ . [19,23]
Õ
ªa Ë > 2 H Si(111) - 7 × 7 ³ ð \ He I(21.22 eV)õ Ne I(16.85 eV)_ photon` ¦ { 9 r ( ` ¦ M : ¯ Γ - ¯ K ~ ½ Ó ¾ ÓÜ ¼
Ð θ
e= 10
◦ Ð ~ ½ ÓØ ¦ ÷ & H F g _ EDC(energy distribu- tion curve) s . Û ¼& 7 à Ô! 3 \ è ß ü < ° ú s ¸ ú · ú 9
Si(111) ³ ð F ½ ¨$ í \ _ ô Ç © I Fermi \ -t A
-0.2 eV(S
1), -0.8 eV(S
2), Õ ªo ¦ -1.8 eV(S
3) \ e
. [24, 25] Õ ª s ü @\ -2 eV\ " f ' a8 £ ¤ ÷ & H x s ß ¼ [
þ
t É r f ] X ;s \ _ K H bulk { ½ ¨ ¸\ _ ô Ç © I
s . S
1 É r Fermi ï r0 A\ " f metallic edge\ ¦ + þ A$ í 9 Õ
ªa Ë > 2. Normalized photoemission spectra for Si(111) - 7 × 7 surface taken at θ
e= 10
◦by hν = 21.2 eV and hν
= 16.85 eV.
adatom \ " f_ half filled dangling bond\ @ /6 £ x H © I
s . S
2 H rest atom \ 0 Au ô Ç filled dangling bond\
@
/6 £ x H © I s 9 S
3 H adatom õ Õ ª Ð A \ e H Si " é ¶ s _ back bond\ @ /6 £ x H © I s . [6] { 9
photon_ y © ¸\ ¦ { 9 & ñ > # ¸ ¿ º Û ¼& 7 à Ô! 3 _ y ©
¸ s H כ É r { 9 photon \ -t \ @ /ô Ç Si " é ¶ _
F g s : r o é ß & h (photoionization cross section)s s
e l M :ë H s . 7 £ ¤ Si-3p C ¸ [ þ t É r 21.2 eV_
\
-t \ ¦ photon(He I) Ð 16.85 eV_ \ -t \ ¦
photon(Ne I)\ @ /K 3.5 C & ñ ¸ 8 H F g s : r o é
ß & h ` ¦ . [26]
Õ
ªa Ë > 3 É r \ -t 16.85 eV photon` ¦ { 9 r & ¯ Γ - M ~ ¯ ½ Ó ¾ Ó x 9 ¯ Γ - ¯ K ~ ½ Ó ¾ Ó\ @ / # ~ ½ ÓØ ¦y θ
e\ ¦ or v
"
f 8 £ ¤& ñ ô Ç F g _ EDC Û ¼& 7 à Ô! 3 s ¦, Õ ªa Ë > 4 H 21.2 eV_ photon` ¦ { 9 r & ¯ Γ - ¯ M ~ ½ Ó ¾ Ó x 9 ¯ Γ - ¯ K ~ ½ Ó ¾ Ó\ @ / K
8 £ ¤& ñ ô Ç F g _ EDC Û ¼& 7 à Ô! 3 s .
ARUPS Ð 8 £ ¤& ñ ô Ç Û ¼& 7 à Ô! 3 \ " f y x s ß ¼[ þ t \ K { ©
H F g _ ½ + Ë \ -t \ ¦ 8 £ ¤& ñ < ÊÜ ¼ Ð+ íl © I _ \ -t { ½ ¨ ¸\ ¦ % 3 ` ¦ Ã º e . î r1 l x| ¾ Ó Ð > r Z O g Ë :
\
F g [ þ t s / B N Ü ¼ Ð ~ ½ ÓØ ¦| ¨ c M : Ã º 7 ' (wave
Õ
ªa Ë > 3. ARUPS spectra of Si(111) - 7 × 7 surface taken by 16.85 eV photon along (a) the ¯ Γ - ¯ M direction and (b) ¯ Γ - ¯ K direction.
vector)_ r « Ñ ³ ð \ ê ø Íô Ç $ í ì r(k
i,k) É r ¦^ ? /\ " f
_ × æ © I Ã º 7 ' _ r « Ñ ³ ð \ ê ø Íô Ç $ í ì
r(k
f,k) õ ° ú . / B N ï r0 A\ ¦ l ï r Ü ¼ Ð ô Ç ? /Â Ò ( J $ [ >
V
0(V
0<0), Fermi ï r0 A\ ¦ l ï r Ü ¼ Ðô Ç ? /Â Ò ( J $ [ > E
0(E
0<0) x 9 r « Ñ_ { 9 < ÊÃ º ϕ (ϕ > 0) s _ ' a > H
6 £ § õ ° ú .
V
0= E
0− eϕ (2) Õ
ª Q íl © I _ _ Ã º 7 ' H
~ k
i,⊥= q
2m( −V
0+ E
k0cos
2θ
e)
= p
2m[(E
i+ hν − eϕ) cos
2θ
e− V
0] (3)
~ k
i,k= q
2mE
0ksin θ
e= p
2m(E
i+ hν − eϕ) sin θ
e(4) Õ
ªa Ë > 4. ARUPS spectra of Si(111) - 7 × 7 surface taken by 21.2 eV photon along (a) the ¯ Γ - ¯ M direction and (b) Γ - ¯ ¯ K direction.
Ð Å Ò# Q . # l " f mõ e H _ | 9 | ¾ Óõ s 9, E
iü < E
0k É r y y ¦^ ? /\ " f_ _ íl © I ü < × æ
© I _ \ -t \ ¦ ? / 9, ? /Â Ò ( J $ [ > E
0 H { 9 ì ø Í& h Ü ¼
Ð s : r > í ß \ " f ½ ¨ô Ç muffin tin ( J $ [ > ` ¦ · p . í l
© I _ ½ ¨ ¸ H à º 7 ' _ à º¨ î $ í ì r Ü ¼ РÒ'
½
¨½ + É Ã º e . ¢ ¸ô Ç ¯ M @ /g A& h \ " f H k
⊥° ú כs 0.94˚ A
−1, K ¯ @ /g A& h \ " f H k
k° ú כs 1.08˚ A
−1 Ð 8 £ ¤& ñ ÷ &% 3 . " f s
' a > ü < (4)d ` ¦ s 6 x # E(~k)_ ì rí ß ' a > \ ¦ ½ ¨½ + É Ã º e
.
Õ
ªa Ë > 5 H (4)d ` ¦ s 6 x # ¯ Γ - ¯ M ~ ½ Ó ¾ Ó, ¯ Γ - ¯ K ~ ½ Ó ¾ Ó\
É r íl © I à º 7 ' _ à º¨ î $ í ì r Ü ¼ РÒ' ½ ¨ô Ç í l
\ -t _ ì rí ß ' a > \ ¦ · p כ s . Õ ªa Ë >\ " f ◦Ü ¼
Ð ³ ðr ô Ç כ É r 16.85 eV_ photon` ¦ s 6 x # % 3 É r כ s 9, •Ü ¼ Ð ³ ðr ô Ç כ É r 21.2 eV photon` ¦ s 6 x # % 3 É r
כ
s . Õ ªa Ë >\ " f z ´ Ü ¼ Ð ³ ðr ô Ç כ É r Ihm 1 p x [27] s
Õ
ªa Ë > 5. Experimental initial state energy versus ¯ k
kplots along the ¯ Γ - ¯ M and ¯ Γ - ¯ K directions for Si(111) - 7 × 7 surface.
s
: r& h Ü ¼ Ð > í ß ô Ç ì rí ß ' a > s . S
1³ ð © I H ¿ º ~ ½ Ó
¾ Ó ¸¿ º 8
◦Â Ò H \ " f © H y © ¸\ ¦ Ðs 9, ¯ Γ - ¯ M ~ ½ Ó
¾ Ó, ¯ Γ - ¯ K ~ ½ Ó ¾ ÓÜ ¼ Ð ì rí ß É r ' a¹ 1 Ï÷ &t · ú § ¤ . Õ ªo ¦ S
1
© I Ð # ARUPS Û ¼& 7 à Ô! 3 [ þ t É r @ / Òì r_ ½ ¨ç ß \
"
f F K5 Å q$ í = å Q` ¦ ? / ¦ e . s Qô Ç õ H Si(111) - 7 × 7 ³ ð s F K5 Å q$ í e ` ¦ · p . S
2 H SBZ % ò % i \
"
f Ì º§  s Ðs 9, ì rí ß % i r ' a¹ 1 Ï÷ &t · ú § ¤ . Houzay 1
p x [2] É r ¼ # F g ) a photon` ¦ s 6 x # L : F Mô Ç Si ³ ð \ @ / ô
Ç ½ ¨\ ¦ : x K S
2³ ð © I H y © ô Ç p
zorbital$ í \ l
ô Ç dangling bond © I e ` ¦ Ð ¦ô Ç e . S
3 © I H θ
e20
◦Â Ò H \ " f © H y © ¸\ ¦ ? /% 3 . É r ³ ð
© I ü < H ² ú o s © I H ô Ç íl \ -t _ ì rí ß ' a
>
µ 1 Ï| ÷ &% 3 H X < θ
e= 10
◦\ " f -1.78 eV_ íl \ - t
\ ¦ t 9 s \ ¦ l ï r Ü ¼ Ð θ
e& t t Z }
É
r íl \ -t ~ ½ Ó ¾ ÓÜ ¼ Ð s 1 l x` ¦ 9 { ; ¤ É r 0.2 eV s
. [28] s ü < ° ú É r ì rí ß É r ¯ Γ - ¯ K ~ ½ Ó ¾ Ó\ @ /K " f ¸ 1 l x { 9
> z ¤ . Fermi \ -t A -2 eV ∼ -5 eV
% ò
% i \ " f 8 £ ¤& ñ ) a Û ¼& 7 à Ô! 3 [ þ t É r ~ ½ ÓØ ¦y s 7 £ x < Ê\ Z
} É r \ -t ~ ½ Ó ¾ ÓÜ ¼ Ð ì rí ß s { 9 # Q H Y > > h_ ½ ¨ ¸[ þ t s
' a¹ 1 Ï÷ &% 3 . s ½ ¨ ¸[ þ t É r bulk { ½ ¨ ¸[ þ t РÒ' f ] X
s \ _ ô Ç כ Ü ¼ Ð Ò q ty ) a . Uhrberg 1 p x [5] É r 10.2 eV
\
" f 17.0 eV_ photon \ -t % ò % i _ ¼ # F g ) a y n C` ¦ s 6 x
# ARUPS Ð Si(111) - 7 × 7 x 9 Si(100) - 2 × 1_ ³ ð
x 9 bulk ½ ¨ ¸\ ¦ ½ ¨ % i . s [ þ t É r -2 eV ∼ -5 eV s _ % ò % i \ " f ' a8 £ ¤ ÷ & H x s ß ¼ [ þ t É r ¿ º > h_ þ j
© 0 A { ÐÂ Ò' f ] X s \ _ ô Ç כ Ü ¼ Ð Ð ¦
%
i . Õ ªa Ë > 5\ " f bulk © I Ð Ðs H ½ ¨ ¸[ þ t s s : r& h Ü
¼ Ð ½ ¨ô Ç bulk © I _ ì rí ß ' a > [ þ t õ © { © y ¸ ú { 9 u < Ê
`
¦ ^ ¦ Ã º e .
Õ
ªa Ë > 6. ARUPS spectra of Si(100) - 2 × 1 surface taken by 21.2 eV photon along (a) the [010] direction, (b) [011]
direction and (c) [01¯ 1] direction.
Õ
ªa Ë > 6 É r 21.2 eV_ { 9 photon \ -t \ ¦ 6 x # Si(100) - 2 × 1 SBZ\ " f [010], [011] x 9 [01¯ 1] ~ ½ Ó ¾ Ó\ @ /
# 8 £ ¤& ñ ô Ç ARUPS Û ¼& 7 à Ô! 3 s . (a) H [010] ~ ½ Ó ¾ Ó\
@
/ô Ç כ Ü ¼ Ð Fermi \ -t A -0.5 eV\ " f Å Ò y © ô Ç x
s ß ¼ ' a¹ 1 Ï÷ &% 3 . ~ ½ ÓØ ¦y θ
e7 £ x < Ê\ { ° ú
f (band split)s { 9 # Q 9, ° ú © I × æ \ " f Fermi
\
-t A -0.7 eV_ © I H ì rí ß s _ { 9 # Q t · ú § t
ë ß , É r © I H ì rí ß s Ì º§  9 { ; ¤ É r 0.8 eV% i
. θ
e24
◦\ " f 42
◦ % ò % i \ " f -2 eV H~ ½ Ó\ Ì º§  ô Ç ì
rí ß ` ¦ Ðs H © I ü < -3.3 eV\ " f ô Ç ì rí ß ` ¦ Ðs t
ë ß H y © ¸\ ¦ ? / H © I y y ' a8 £ ¤ ) a . Fermi
\
-t A -4 eV ∼ -5 eV s \ ' a8 £ ¤ ÷ & H x s ß ¼ [
þ
t É r bulk © I Ð Ò q ty ) a . [011] @ /g A ~ ½ Ó ¾ Ó(b)õ [01¯ 1]
@
/g A ~ ½ Ó ¾ Ó(c)\ " f ¸ % i r Fermi \ -t A -0.5 eV
\
³ ð © I ' a¹ 1 Ï÷ &% 3 Ü ¼ 9 θ
e7 £ x < Ê\ { ° ú
f s ' a¹ 1 Ï÷ &% 3 . 8 £ ¤& ñ ) a EDC Û ¼& 7 à Ô! 3 \ " f S X ½ + É Ã
º e H ü < ° ú s Si(100) - 2 × 1 ³ ð É r Si(111) - 7 × 7 ³ ð õ ² ú o ì ø Í ¸^ $ í ` ¦ · p . s Qô Ç õ H ë H
³\ Ð ¦ ) a õ [19]ü < & ñ $ í & h Ü ¼ Ð ° ú É r õ Ð+ @ / g A dimer ¸4 S qõ H © ì ø Í÷ & ¦ q @ /g A dimer ¸4 S qõ H { 9 u
ô Ç .
Õ
ªa Ë > 7\ " f H Si(100) - 2 × 1 ³ ð _ [ j @ /g A ~ ½ Ó ¾ Ó\ @ / ô
Ç íl © I à º 7 ' _ à º¨ î $ í ì r \ @ /ô Ç íl \ -t _ ß ¼l \ ¦ · p כ Ü ¼ Ð (a) H [010] ~ ½ Ó ¾ Ó, (b) H [011] ~ ½ Ó
¾ Ó, Õ ªo ¦ (c) H [01¯ 1]~ ½ Ó ¾ Ó\ @ /ô Ç כ s . (a)_ & h É r 1
× 1 SBZ\ " f linearized augmented plane wave(LAPW)
~ ½
ÓZ O ` ¦ 6 xô Ç { ½ ¨ ¸ > í ß Ü ¼ ÐÂ Ò' % 3 # Q bulk { ½ ¨
¸\ ¦ & h Ü ¼ Ð ³ ðr ô Ç כ s . [29] ¢ ¸ô Ç (b)ü < (c)\ " f z
´ Ü ¼ Ð Õ ª 9 כ É r q @ /g A dimer ¸4 S q\ H # s
: r& h Ü ¼ Ð > í ß ) a © I [ þ t s 9, & h É r 1 × 1 SBZ\ @ /
#
È Ò% ò ) a bulk { ½ ¨ ¸_ = å Q Â Òì r` ¦ · p . [30] Õ ªa Ë >
\
" f Ð H ü < ° ú s ¯J
0a@ /g A& h õ ¯ J
0b@ /g A& h \ " f -1.3 eV x 9 -0.7 eV\ " f ' a¹ 1 Ï ) a © I _ ì rí ß É r s : r& h Ü ¼ Ð > í
ß ô Ç õ ü < © { © y q 5 p w < Ê` ¦ · ú Ã º e .
Õ
ªa Ë > 8-(a) H ¯ Γ ü < ¯ J
0a,b@ /g A& h , Õ ªo ¦ (b) H ¯ Γ ü < ¯ J
0a, J ¯
0b@ /g A& h \ " f 8 £ ¤& ñ ) a F g Û ¼& 7 à Ô! 3 ` ¦ q §ô Ç כ s
. (a)\ " f S X ½ + É Ã º e H ü < ° ú s ¯ Γ @ /g A& h \ " f H Fermi \ -t A -0.5 eV\ " f H y © ¸\ ¦ © I
S X ÷ &% 3 Ü ¼ -2 eV ∼ -5 eV % ò % i \ " f H ¢ - aë ß ô Ç Û ¼
&
7 à Ô! 3 Ü ¼ Ð K Ì º§  ô Ç ½ ¨ ¸\ ¦ S X l # Q§ > . ¯J
0a,b@
/g A& h \ " f H à ºf ~ ½ ÓØ ¦ õ ² ú o -0.8 eV(B), -1.3 eV(A), -1.8 eV(G) ü < -3.3 eV(D)\ " f © I ' a¹ 1 Ï÷ &% 3 . ¯J
0a,b@ / g A& h \ " f ' a¹ 1 Ï ) a A, B, D x s ß ¼[ þ t É r ³ ð © I < Ê É r ³ ð
resonances . [13] © I A H dangling bond \ _ ô Ç
© I s 9 © I B H íl  Ò' 7 HÔ q t_ @ / © s ÷ &# Q : r © I
Ð 2 × 1 dimer ¸4 S q\ H ô Ç { ½ ¨ ¸ > í ß \ " f
t · ú § H © I s t ë ß single domain\ " f ¸ ' a¹ 1 Ï÷ &# Qt
H © I s . ¯ Γ @ /g A& h \ " f ' a¹ 1 Ï÷ & H -0.5 eV\ " f_ x
s ß ¼ H © I Aü < © I B_ × æ^ o ?Ü ¼ Ð è ß õ s
. © I A_ { ; ¤ É r 0.8 eV & ñ ¸ Ð ' a¹ 1 Ï÷ &# Q& H X <
ë
H ³\ Ð ¦ ) a õ ü < ¸ ú { 9 u ô Ç . [13,31,32] Õ ª Q ¯ Γ
@
/g A& h \ " f Aü < B_ × æ^ o ?\ _ ô Ç x s ß ¼_ 0 Au H -0.5 eV & ñ ¸ Ð, s \ Ð ¦ ) a õ -0.7 eV Ð 0.2 eV & ñ ¸ 8 Z } . © I D H ¯ J
0a,b\ ¦ ¾ ÓK íl \ -t
& t H ~ ½ Ó ¾ ÓÜ ¼ Ð ì rí ß s ' a¹ 1 Ï÷ &# Qt H X < à º è f ¨ à Ì
\
y ô Ç ³ ð resonance Ð y n C_ ¼ # F g_ z$ í ì r \ y © > Õ
ªa Ë > 7. Experimental initial state energy versus ¯ k
kplots along (a) the [010] direction, (b) [011] direction and (c) [01¯ 1] direction for Si(100) - 2 × 1 surface.
_
> r& h e s Ð ¦ ) a e . [13] G_ ì rí ß É r ¯ J
0a,b` ¦ l ï r Ü
¼ Ð y © ô Ç @ /g A` ¦ Ð# SBZ\ @ /K @ /g A& h s 9, photon
\
-t _ o\ @ /K x s ß ¼_ 0 Au y t 3 l w Ù
¼ Ð ³ ð resonance Ð ] jr ÷ &% 3 Ü ¼ 9 1×1 bulk { ç ß
?
/\ è ß . [33, 34] s ½ ¨ ¸ H ¢ ¸ô Ç Si(100) - 2 × 1 : H \ " f ¸ z ¤Ü ¼ , Si(100) - 3 × 1 : H ³ ð \ H
t · ú §l M :ë H \ 2 × 1 : Hü < L : F Mô Ç 2 × 1 ³ ð
© _ dimer bondü < ' aº ) a © I Ð ] jî ß ÷ &% 3 . [33] s ü
@\ M˚ artensson 1 p x [17] É r ARUPS\ ¦ s 6 x # heavily
n
+- doped Si(100) wafer ÐÂ Ò' % 3 É r two domain ³ ð
Õ
ªa Ë > 8. Photoemission spectra taken at (a) ¯ Γ and ¯ J
0a,bsymmetry points and, (b) ¯ Γ, ¯ J
0aand ¯ J
0bsymmetry points in the SBZ of Si(100) - 2 × 1 : 2 domain surface.
_
Fermi ï r0 A H % \ " f ³ ð © I \ ¦ ' a¹ 1 Ï % i H X <, ¯ Γ @ / g A& h õ ¯ J
0a,b@ /g A& h Â Ò H \ " fë ß s Qô Ç ³ ð © I \ ¦ ' a
¹
1 Ï % i . s ³ ð © I H ¢ ¸ô Ç single domain\ " f ¸ ' a
¹
1 Ï ÷ &% 3 Ü ¼ Õ ª y © ¸ s ` # é ß t ¯ Γ @ /g A& h  Ò
H \ " fë ß ' a¹ 1 Ï÷ &% 3 . s Qô Ç Fermi ï r0 A\ " f_ ³ ð © I
H : r z ´+ « >\ " f H ' a¹ 1 Ï÷ &t · ú § ¤ . Õ ª s Ä » H z ´+ « >
\
6 xô Ç r « Ñ heavily n
+- doped ) a wafer m % 3 l
M :ë H Ü ¼ Ð Ò q ty ) a . Õ ªa Ë > 8-(b)\ " f ¯J
0a@ /g A& h \ " f H -0.7 eV, -1.3 eV, -1.8 eV, -3.3 eV \ " f © I [ þ t s ' a¹ 1 Ï÷ &
%
3 Ü ¼ 9, ¯J
0b@ /g A& h \ " f H -0.7 eV, -1.3 eV ü < -3.2 eV\ " f
© I [ þ t s ' a¹ 1 Ï ) a . ¯J
0a@ /g A& h \ " f ' a¹ 1 Ï÷ & H -1.3 eV ü <
-0.7 eV_ © I H y y ¯ J
0a,b\ " f ' a¹ 1 Ï ) a © I A x 9 Bü <
Ä
» . [011] @ /g A ~ ½ Ó ¾ Óõ [01¯ 1] @ /g A ~ ½ Ó ¾ Ó\ " f Û ¼& 7 à Ô
!
3 s q 5 p w > H s Ä » H z ´+ « >\ 6 xô Ç r « Ñ
two domain s % 3 l M :ë H s . 7 £ ¤, domain a_ â Ä º [011]
~
½ Ó ¾ ÓÜ ¼ Ð 8 £ ¤& ñ s s À Ò# Q s Û ¼& 7 à Ô! 3 \ domain b_ [01¯ 1] @ /g A ~ ½ Ó ¾ Ó_ Û ¼& 7 à Ô! 3 s [ O # " f l M : ë
H s . " f Si(100) - 2 × 1 : 2 domain ³ ð \ " f % 3
`
¦ à º e H & ñ Ð H ô Ç& ñ | ¨ c à º µ 1 Ú\ \ O .
IV. + s Ç Â ] Ø
í ¦ / B N \ " f L : F Mô Ç Si(111) - 7 × 7 ³ ð õ Si(100) - 2 × 1 : 2 domain ³ ð \ @ / # ARUPS\ ¦ s 6 x # F g
ì rF g ì r$ 3 ` ¦ Ã º' # % 3 É r : r É r 6 £ § õ ° ú .
Si(111) - 7 × 7 ³ ð _ â Ä º SBZ_ ¯ Γ - ¯ M @ /g A ~ ½ Ó ¾ Óõ Γ - ¯ ¯ K @ /g A ~ ½ Ó ¾ ÓÜ ¼ Ð 8 £ ¤& ñ ô Ç Û ¼& 7 à Ô! 3 Ü ¼ ÐÂ Ò' [ j > h_
³
ð © I S
1(-0.2 eV), S
2(-0.8 eV), Õ ªo ¦ S
3(-1.8 eV)
\
¦ S X % i Ü ¼ 9, Õ ª × æ \ " f S
3 © I H ô Ç ì rí ß ` ¦
? /% 3 . ¢ ¸ô Ç -2 eV ∼ -5 eV % ò % i \ " f è ß ¿ º > h _ x s ß ¼ H bulk © I \ " f f ] X s \ _ ô Ç x s ß ¼% i
.
Si(100) - 2 × 1 ³ ð _ â Ä º ¯ Γ @ /g A& h \ " f_ ³ ð © I
H -0.5 eV\ " f ' a¹ 1 Ï÷ &% 3 Ü ¼ 9 s כ É r s \ ' a¹ 1 Ï
÷
&% 3 ~ -0.7 eV x s ß ¼\ q K 0.2 eV & ñ ¸ s z ¤
. [010] @ /g A ~ ½ Ó ¾ Ó_ â Ä º ¯J
0a,b@ /g A& h \ @ /K " f H -0.8 eV, -1.3 eV, -1.8 eV ü < -3.3 eV\ " f ³ ð © I \ _ ô
Ç x s ß ¼ ' a¹ 1 Ï÷ &% 3 . -0.8 eV\ " f ' a¹ 1 Ï ) a ³ ð © I
H ì rí ß s _ { 9 # Q t · ú § ¤Ü ¼ 9 -1.3 eV\ " f ' a
¹
1 Ï ) a ³ ð © I H ì rí ß s ' a¹ 1 Ï÷ &% 3 ¦ Õ ª { ; ¤ É r 0.8 eV% i . -1.8 eV\ " f è ß ³ ð resonance H ¯ J
0a,b@ /g A
&
h ` ¦ l ï r Ü ¼ Ð ì rí ß s e % 3 . -3.3 eV\ " f ' a¹ 1 Ï ) a ³ ð resonance H ô Ç ì rí ß s ' a¹ 1 Ï÷ &% 3 . [011] @ /g A ~ ½ Ó ¾ Ó_
¯ J
0a@ /g A& h õ [01¯ 1] @ /g A ~ ½ Ó ¾ Ó_ ¯ J
0b@ /g A& h \ " f ' a8 £ ¤ ) a - 0.7 eV ü < -1.3 eV_ x s ß ¼[ þ t É r [010] @ /g A ~ ½ Ó ¾ Ó_ ¯ J
0a,b@ / g A& h \ " f 8 £ ¤& ñ ) a -0.8 eV ü < -1.3 eV_ x s ß ¼[ þ t õ ° ú É r
© I s .
P c
p 8 ý ò k >
: r ½ ¨ H ô Dz D G < ÆÕ ü t < É ª F é ß _ × æ& h ¹ ¢ ¤$ í ½ ¨ è t
"
é
¶(2001-005-D00006) õ ô Dz D G õ < ÆF é ß _ t " é ¶(R05-2002-
000-00638-0) \ _ K Ã º' ÷ &% 3 l \ y × ¼w n m .
Y c
p w à U Ø ô
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The Electronic Structures of the Si(111) - 7 × 7 Surface and the Si(100) - 2 × 1 : 2 Domain Surface by Using Angle Resolved Ultraviolet
Photoelectron Spectroscopy
Kun-Ho Kim,
∗Tae-Gyun Im, Jeoung-Ju Lee, Jong-Duk Lee and Sang-Wook Han Department of Physics and the Research Institute of Natural Science,
Gyeongsang National University, Chinju 660-701
Jae-In Chung
The Research Institute of Science and Technology, Pohang 790-330
Jeong-Soo Kang
Department of Physics, The Catholic University of Korea, Bucheon 422-743 (Received 4 August 2003)
The electronic structures of the Si(111) -7 × 7 and the Si(100) - 2 × 1 : 2 domain surfaces were studied by using angle–resolved ultraviolet photoelectron spectroscopy with 21.2 eV or 16.85 eV photons. Three surface states were identified at -0.2 eV (S
1), -0.8 eV (S
2), and -1.8 eV (S
3) below the Fermi level, from the spectra measured along the ¯ Γ - ¯ M and the ¯ Γ - ¯ K symmetry directions in the surface Brillouin zone (SBZ) of the Si(111) - 7 × 7 surface, and only the S
3state had a weak dispersion. Two weak features originated from the direct transition in the bulk valence band appeared at about -2 eV and ∼ -5 eV below the Fermi level. A strong surface state was observed at about -0.5 eV below the Fermi level in the photoemission spectrum taken from the ¯ Γ symmetry point of the SBZ of the Si(100) - 2 × 1 surface. Four surface states, about -0.8 eV, -1.3 eV, -1.8 eV, and -3.3 eV below the Fermi level, were observed in the spectra taken from the ¯ J
0a,bsymmetry point of the SBZ of the Si(100) -2 × 1 surface. The state at -1.3 eV had dispersion with a bandwidth of about 0.8 eV. The surface state at -1.8 eV and the surface resonance state at -3.3 eV also had weak dispersions, but the state at -0.8 eV had no dispersion. The peaks observed at about -0.7 eV and -1.3 eV below the Fermi level measured at the ¯ J
0aand the ¯ J
0bsymmetry points were the same states of -0.8 eV and -1.3 eV measured at the ¯ J
0a,bpoint.
PACS numbers: 68.35
Keywords: ARUPS, Si(111) - 7 × 7, 2-domain, Surface electronic structure, Si(100) - 2 × 1
∗