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Indium Gallium Zinc Oxide(IGZO) Thin-film transistor operation based on polarization effect of liquid crystals from a remote gate

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P-93 2018년도 한국표면공학회 춘계학술대회 논문집

Indium Gallium Zinc Oxide(IGZO) Thin-film transistor operation based on polarization effect of

liquid crystals from a remote gate

김명언a*, 이상욱a, 허영우a, 김정주a, 이준형a a,*경북대학교 신소재공학부 ([email protected])

Abstract: This research presents a new field effect transistor (FET) by using liquid crystal gate dielectric with remote gate. The fabrication of thin-film transistors (TFTs) was used Indium tin oxide (ITO) for the source, drain, and gate electrodes, and indium gallium zinc oxide (IGZO) for the active semiconductor layer. 5CB liquid crystal was used for the gate dielectric material, and the remote gate and active layer were covered with the liquid crystal. The output and transfer characteristics of the LC-gated TFTs were investigated.

P-94 2018년도 한국표면공학회 춘계학술대회 논문집

구형 Sn 표면의 SnO

2

나노와이어 네트워크: 합성과 NO

2

감지 특성

SnO

2

Nanowire Networks on a Spherical Sn Surface: Synthesis and NO

2

sensing properties

Pham Tien Hung, Hyunil Jo*, Vu Xuan Hien, Sang-Wook Lee, Joon-Hyung Lee, Jeong-Joo Kim, Young-Woo Heo 팜티엔헝a, 조현일a,*, 슈엔하이엔뷔엔a, 이상욱a, 이준형a, 김정주a, 허영우a

a,*경북대학교 신소재공학부(E-mail:[email protected])

Abstract: One-dimensional metal oxide nanostructures have attracted considerable research activities owing to their strong application potential as components for nanosize electronic or optoelectronic devices utilizing superior optical and electrical properties. In which, semiconducting SnO2 material with wide-bandgap Eg = 3.6 eV at room temperature, is one

of the attractive candidates for optoelectronic devices operating at room temperature [1, 2], gas sensor [3, 4], and transparent conducting electrodes [5]. The synthesis and gas sensing properties of semiconducting SnO2 nanomaterials

have become one of important research issues since the first synthesis of SnO2 nanowires. In this study, SnO2 nanowire

networks were synthesized on a basis of a two-step process. In step 1, Sn spheres (30–800 nm in diameter) embedded in SiO2 on a Si substrate was synthesized by a chemical vapor deposition method at 700°C. In step 2, using the source of

these Sn spheres, SnO2 nanowire (20–40 nm in diameter; 1–10 µm in length) networks on a spherical Sn surface were

synthesized by a thermal oxidation method at 800°C. The Au layers were pre-deposited on the surface of Sn spherical and subsequently oxidized Sn surface of Sn spherical formed SnO2 nanowires networks. Field emission scanning electron microscopy and high-resolution transmission electron microscopy images indicated that SnO2 nanowires are single

crystalline. In addition, the SnO2 nanowire is also a tetragonal rutile, with the preferred growth directions along [100] and

a lattice spacing of 0.237 nm. Subsequently, the NO2 sensing properties of the SnO2 network nanowires sensor at an

operating temperature of 50–250°C were examined, and showed a reversible response to NO2 at various NO2

concentrations. Finally, details of the growth mechanism and formation of Sn spheres and SnO2 nanowire networks are

also discussed.

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