Micro-optics and Nano-optic Technologies

Techno Forum on

Micro-optics and Nano-optic Technologies

송 석 호, 한양대학교 물리학과 [email protected]

1-(06/23) Introduction: Micro- and nano-optics based on diffraction effect for next generation technologies 2-(06/30) Guided-mode resonance (GMR) effect for filtering devices in LCD display panels

3-(07/07) Surface-plasmons: A basic 3-(07/07) Surface-plasmons: A basic

4-(07/14) Surface-plasmon waveguides for biosensor applications

5-(07/21) Efficient light emission from LED, OLED, and nanolasers by surface-plasmon resonance

Macros Millis Micros Nanos

λ limit

How to reach from Micros toward

How to reach from Micros toward Nanos Nanos? ?

λ limit

Plasmonics: the next chip-scale technology

Plasmonics is an exciting new device technology that has recently emerged.

A tremendous synergy can be attained by integrating plasmonic, electronic, and conventional dielectric photonic devices on the same chipand taking advantage of the strengths of each technology.

Plasmonic devices,

therefore, might interface naturally with similar speed photonic devices and similar size electronic components For these reasons plasmonics and similar size electronic components. For these reasons, plasmonics may well serve as the missing link between the two device

technologies that currently have a difficult time communicating. By increasing the synergy between these technologies, plasmonics may be able to unleash the full potential of nanoscale functionality and become the next wave of chip-scale technology.

1-(06/23) Introduction: Micro- and nano-optics based on diffraction effect for next generation technologies

We have five lectures on:

1-(06/23) Introduction: Micro- and nano-optics based on diffraction effect for next generation technologies 2-(06/30) Guided-mode resonance (GMR) effect for filtering devices in LCD display panels

3-(07/07) Surface-plasmons: A basic

4 (07/14) S f l id f bi li i

4-(07/14) Surface-plasmon waveguides for biosensor applications

5-(07/21) Efficient light emission from LED, OLED, and nanolasers by surface-plasmon resonance

R₀ T₀

GMR grating

Micros

D_core

SPP mode metal strip

core cladding

metal slab

core

cladding

Micro & nano-optics based on diffraction effect for next generation technologies

RAY DESIGN WAVE DESIGN PHOTON DESIGN

d > λ d ~ λ d < λ

RAY DESIGN WAVE DESIGN PHOTON DESIGN

Optical Technologies

RAY DESIGN

( )

WAVE DESIGN

( )

PHOTON DESIGN ( d > λ ) ( d ~ λ ) ( d < λ )

Geometrical Optics Ray tracing

Wave Optics Wave propagating

Photon Optics Photon localizing Reflection/Refraction

Etendue Limit:

Α x Ω ~ 1

Diffraction/Interference

Diffraction Limit:

d / λ ~ 1

Resonance/Confinement Confinement Limit:

ΔxΔp ~ 1

W d i f t ti

< An example: LEDs >

Wave design for extraction

(guided modes, surface scattering)

LED

Ray design for projection

(propagation modes, optical aberration)

Photon design for internal QE

(evanescent modes, spontaneous emission)

Optical Technology Roadmap

매출

RAY DESIGN WAVE DESIGN PHOTON DESIGN

(100억) 60

( d >> λ ) ( d ~ λ ) ( d << λ ) Geometrical Optics EM Wave Optics Photon Optics

50

OPU

ISM

LED lighting LASER

Geometrical Optics Ray tracing

EM Wave Optics Wave propagating

Photon Optics Photon localizing

굴절 / 반사

렌즈 설계 (lens design)

회절 / 간섭

회절격자 설계 (grating design)

공명 / 구속

나노구조 설계 (resonator design) 40

LED BLU SOS O-PCB

금형 (metal mastering) 사출 (injection molding) 조립 (assembling)

기판 (wafer mastering) 전사 (UV embossing) 합체 (packaging)

입자 (self assembling) 복제 (nano imprinting) 집적 (integrating)

20

측정 (MTF monitoring) 측정 (extraction efficiency)

( 현재 보유 기술) ( 확보 시급 기술) ( 미래 요구 기술)

측정 (quantum efficiency)

2004 2006 2008 2010 2012 2014

d > λ ^{RAY DESIGN}

Far-field diffraction

Far field diffraction

Fraunhofer diffraction

http://www.anteryon.com

Integrated Lens Stacks & Camera Modules g

L A O ti l St t

Large Area Optical Structures

Single Shot Light Field Cameras Single Shot Light Field Cameras

Mask

micrOOptics in nature

??

Extraction of light

d > λ

Single-order DOE Multiple-order DOE

-1.5 -1.0 -0.5 0.0 0.5 1.0 1.5

0.0 0.2 0.4 0.6 0.8

1.0 X0

XDF0R1 XDF30R1 XDF0R0.5

FDTD BPM

http://diffractive.optics.free.fr

DECAD ( Diffractive Element Computer Assisted Design ) is a powerful and versatile software developed by Dr Olivier MAGNIN for diffractive optics design

software developed by Dr. Olivier MAGNIN for diffractive optics design.

DECAD handles all steps of diffractive optics design from optical specifications to e-beam files generation.

Controls Controls

Window IFTA Window

Laser writing system

i i l l i i l l i i l l i i l l CGH

CGH CGH

CGH Digital Hologram Digital Hologram Digital Hologram Digital Hologram DOE Lens

DOE Lens DOE Lens DOE Lens

Waveguide Waveguide Waveguide Waveguide Micro Lens

Micro Lens Micro Lens

Micro Lens Micro prism Micro prism Micro prism Micro prism

Replication onto plastics

Exposure

data Original

t master

• Lens designg

• Waveguide design

• Algorithm

• Interface Laser writing

Maste r plate Replication

plate

• Electro plating

• Evaporating

• Hot embossing

• UV embossing Plastic optics

UV embossing

• molding

d ~ λ WAVE DESIGN

Near-field diffraction Fresnel diffraction

Bragg diffraction

Beam shaping : www.doc.com

Flexible BLU : www.modilis.com

N N E X X T

?

Photon Confinement – Photonic Crystal

Mechanisms of photon confinement Mechanisms of photon confinement

- Total Internal Reflection (TIR) Photonic Band Gap (PBG) - Photonic Band Gap (PBG)

Micro-disk

Micro-pillar

Micro-sphere

Micro pillar

Micro sphere

Photonic crystal slab 3 D h t i t l

<TIR

>

Photonic crystal slab 3-D photonic crystal

<TIR

PBG> <TIR PBG

> <PBG

>

Photonic Crystal Slab Devices

„

Point defect : micro-cavity laser, filter

„

Line defect : low-loss waveguide coupler

„

Line defect : low-loss waveguide, coupler

„

Periodic structure : light-emitting diode, band edge laser

Laser cavity Waveguide LED, Laser

(a) (b)

n-GaN

Photon

Sapphire

Exciton generation Radiation p-GaN

Sili b

reflector

InGaN MQW e-h

Silicon submount

Extraction efficiency

Photonic Crystal-LEDs Photonic Crystal LEDs

Baba

Limited by surface recombination

Good scheme!!!

Limited by surface recombination

Good scheme!!!

Lumiled

100 um device size achievable.

Several layer of PC for extraction.

Good internal quantum efficiency N d d ( 90%)

100 um device size achievable.

Several layer of PC for extraction.

Good internal quantum efficiency N d d ( 90%)

Needed (>90%).

Multiple pass limits device size (~10um).

Small volume needed.

Not so good for lighting Needed (>90%).

Multiple pass limits device size (~10um).

Small volume needed.

Not so good for lighting Not so good for lighting.

Surface recombination limited

Surface recombination limited.

Not so good for lighting.

Surface recombination limited

Surface recombination limited.

Noda

Guided-mode resonance (GMR) filters

I n c i d e n t l i g h t

0

0

≥ + 1 ≤ − 1

λ-scale fabrication

λ-scale fabrication

Holographic Lithography

Aperture[variable]

Sample 부착용 Rotation stage (PRM1-z7)

Controller (TDC001)

Linear stages (NRT100) Controller

Mirror Holder[75 x 75]

Controller (BSC103)

Rotation stage (NR360S)

Linear stage (NRT150) Controller

(NR360S) Controller (BSC101) Controller

(BSC103)

NANO

NANO EGGBOX EGGBOX

d < λ PHOTON DESIGN

Evanescent waves

Localized modes

Localized modes

Light transmission through a metallic subwavelength hole

Ag film, hole diameter=250nm, groove periodicity=500nm,

Science, Vol. 297, pp. 820-822, 2 August 2002.

g p y ,

groove depth=60nm, film thickness=300nm

Size Mismatch

between Nano-scale Components and Dielectric Photonics

Photonic integrated system with subwavelength scale components subwavelength scale components

CMOS Tr

Q t d t

Quantum dots

Medium-sized molecule

dielectric waveguide

~ 10 λ

Size Mismatch Æ Metallic waveguides ( ~ 10 nm)

50nm

Plasmons at Planar Metal-Dielectric Interfaces

Harry Atwater, California Institute of Technology

surface plasmons are longitudinal

charge density fluctuations on the

8

ω =c k

charge density fluctuations on the

surface of a conductor Surface Plasmon dispersion relation for Ag in air

(Light line)

λ = 337 nm

ε : dielectric

6

x

λ =337 nm; ε

1

= -1

)

( g )

ε ₁ : metal ε ₂ : dielectric

4 ω (10

s

)

surface plasmon dispersion relation: λ << 337 nm

1

x

0

ω 2

surface plasmon dispersion relation:

Plasmon Dispersion Relation

λ 337 nm

k ₌ ω ε ε 1 2

0 20 40 60 80 100

0

k

( μ m

)

Pl hi hl l li d t t l di l t i i t f t ti l f

1 2

k

c ε ε

= +

Plasmons are highly localized at metal-dielectric interfaces, so potential for:

• Ultra small Optical Devices

• “2D-Optics” on metal surfaces

Size Mismatch Æ Metal nanowire ( ~ 10 nm)

Metal (surface plasmon) waveguides

dielectric

Metal t=20 nm dielectric

W=10υm

Metal (surface plasmon) waveguide sensors

D metal strip

ε

ε

D

D SPP mode w

metal strip

ε

ε

metal slab cladding

L f l l it t i d bl l t d t t

Long-range surface plasmon polaritons on asymmetric double-electrode structures Yang Hyun Joo, Seok Ho Song, et. al. / APL 92, 161103 (2008)

350

Sensing arm

Output signal

50 100 150 200 250 300

Intensity (uW) 14.3um

2.28um

Au

SPP waveguide

1.330 1.331 1.332 1.333 1.334 1.335 1.336 0

50

Refractive index of water

Reference arm

Au

Nanocavity lasers

Nanocavity lasers

Nanocavity lasers

Optical Technologies : Macro Î Micro Î Nano

S G WAVE DESIGN PHOTON DESIGN

d > λ d ~ λ d < λ

RAY DESIGN WAVE DESIGN PHOTON DESIGN

Micro lens DOE lens

Flexible BLU

Beam shaping Enhanced lighting Nanocavity laser DOE lens

Hybrid lens BLU

LED lighting

LED lighting

Resonance grating WDM filters

DFB DBR

Nanocavity laser Nanowire waveguide Nano-photonics

Surface plasmonics

Beam shaping DFB, DBR, …

PhC device

Silicon device

Next lecture at 06/30

(06/23) Introduction: Micro- and nano-optics based on diffraction effect for next generation technologies (06/30) Guided-mode resonance (GMR) effect for filtering devices in LCD display panels

(07/07) Surface-plasmons: A basic

(07/14) Surface plasmon waveguides for biosensor applications (07/14) Surface-plasmon waveguides for biosensor applications

(07/21) Efficient light emission from LED, OLED, and nanolasers by surface-plasmon resonance

Possible to use GMR films in LCD panel???

Guided-mode resonance (GMR) filters

Diffuser

Polarized

RED GREEN BLUE RED GREEN BLUE

LCD panel

GMR grating Light

Emission

Reflector Light guide film LED

Unpolarized light beam