ǵܟ-ʶझۊ Džؓԅڗ ۊ Reynolds Վ ٿʅࢳԒ ऺԆ
暧勆汆
·
決渆柣*
Analysis of Low Reynolds Number Flow in Nozzle and Diffuser
Gwi-Eun Song and Joon-Sik Lee
Key Words : Nozzle(
), Diffuser(
), Separation(
), Micropump(
) Abstract
An investigation of low Reynolds number flow in nozzles and diffusers which are widely used in the valveless micropump is presented. Flow characteristics in the nozzle and diffuser are explained in view of viscous effect and flow oscillation induced by pumping membrane. These calculation results show that the rectification property of valveless micropump is due to a flow separation in the diffuser and the separation is largely originated from the flow oscillation. Under the assumptions of steady flow velocity profile and flow separation in the diffuser, simplified analytical models are provided to see the dependency of rectification on the micropump geometry. Geometric parameters of channel length, nozzle throat, chamber size, and converging/diverging angle are depicted through the analytical models in low Reynolds number flow, and the prediction and experimental results are compared. This theoretical study can be used to determine the optimum geometry of valveless micropump.
h :
d :
l :
Q :
∆p :
α :
/
!"
# $
β :
%&'(
#$
ε :
)* +
1.
昢 嵦,
- .
/ 01 (
2 34 .
56 78
9
:
;
7 834 .
<
=
>
?@
AB
CDEF
G H
.
/IJ 78 KL MN OP
56 Q (
/ I J ,
-.
/01 RS O
T)U4 .
V
/W X G P
,
- .
YZ (
[\] ^
@CF
G H
.
_ `T (
>
?
S
OP Hab
c
*( ,
- .
YZ
@
d
T e
d f CgPh
,
LiU jk4. lJV
K P
jk4 .
l -
m n
J 3 b
jk <
opq4 9
56 7 8 Q (
2 3S G DO
p
r d bst
G DO
m nuP
vw
(valveless)
(
,
- .
YZ (
U3
' xCF
G H
. Valveless
,
- .
YZ P
LiU
?
` y@
u
4 z .
df
3K F
{ | b
? }.
~ b
] D9
H
.
b
=
X J U3 X G4 z .
,
-.
YZ (
X J p
X G H
.
H
$ m
n@ u
4 .
N O
/
I
@
m n.
C9
U CP
d
J X
G P
Q (
p r
st
@F
G H
.
rb
m
nuP ,
-.
YZ
( ?=
1989
Pol(1)
S(
N
d
/ Cg
4
, Stemme(2,3)
QS (
N
MEMS
@
L
3Kp
d f CF
{ b
t
d
/ CgH
. CFD
J 3Kp
!"
S O(
¡¢
b
`
N 8 Kp m n
u P ,
- .
YZ (
?
` £&J 7 8K¤
P
/
$
@
Olsson(4)
¥Singhal(5)
QS(
N O
¦D§
4
,
`
¨ tD
R P
PZT
Q(
%©
(
ª«¬
®£
,
O¯°; ±
Li
² ;
°;
£
E-mail : [email protected]
TEL : (02)880-7123 FAX : (02)880-7123 *
O¯°;±
Li
² ;
F
¤
t
$
Ullmann(6)
¥Pan(7)
S Nd
/ CgH
.
_ r9
_ `T (
>
?
S OP
m nu
P
,
- .
YZ (
?
` £&S
°b ³´
µ s
]
` ¶
·¸¹º
»¼
½
¶
¾¿À Áº
 ÂÃÄ
¶ Å
¿ ¿t
¨
d
/
CD
q4 µ s
] )
`S LÆ b ,
-.
YZ ¨
d
/ CD
q HÇ
b
E
«
È*
S O
¨
rb ,
- .
YZ (
?
` É ]
9Ê 9F
Ë* ÌÍ
S
OP bÎ
jÏ4 .
`
R P
YÐ ]Ñ
Òb HP
$
G g
4
À HÓ
>
?
S OP
Ë* ÌÍ
S O
$
!"(
` É ]4 .
~N `
"²(
µ
° Ô
¨ tD
YÐ
@
Ñ K H P
$
G
gHÇ Õ
>
?
S OP
µ s
] Ö
¸ ¹
ÄÃ×
º º Ø Ù
S O
d
/Ú
(
dst d
LK FÀ
` %&
@
Û¸
XS
(b Ü
Ý
L
H P
µ )
Þ
¡`S
(
N O
$ ßà X G
áâã
4
À
R (
`
)
ä
$7å J
@
)Kp S OP
º
׿
¹Ø
¼ »ç Ø
ÃÄ
` è é
J À
!"
S O( ê
¸ëë¸ ¹
ìí
î
ȕ
¸º
` è é
J é
3K F
%&`
d
/ Kp í
!"(
v
S ð Ó
m nu
P
,
- .
YZ (
]Ñ
d
/ Kñ HÇ
2.
廎決畲嵢 煊嘖櫖昢汞 歛懻氦壟 瞿昷m n@
u P ,
-.
YZ ( f
` £&
P
Fig.
1
S ò/CD
G ó
@
h
S G P
ô õ
S Mö
b
%© A`
K
C÷
ô õ
R (
A
`S ð Ý
^
@
P
ø ù
K Ú H
.
^øÚ
=
!"
aÎ
4 .
`
b
4
.
ú û
K
9
üýK Ú H
.
þ!
"
S ð Ó
`
"²
O
.
ÿ
ÝO b
LS
°
Kp U7 Kp
÷
`
"²
U
= bÎ
j Ï4
.
lJ ¤
R Ú H
.
ð ÝO
!"
J v]K F
G P ,
-
.
RS P
l
@ Þ
¡ `K P
Ú
H
.
R(
Þ
¡ `S
°b
N8
(10)
=
¤
G4
Ù
(1)
. ÚH
. Fig. 2
SOP
ä
$ 7å
(11)
J ò/KpH
. Fig. 2
SO
~
X G ó
Þ
¡ `
(
X
@
÷
(
@
h y
7
=
ô õ
:¥ `
b
(phase)
4. ª«
¨
÷
èS
OP s
] (
.
~Kp M
@
ßà bH
.
ðÝO
X
@
=
S P
ä
$ 7å
@
M
u
¤A
parabolic
vwJ K
¨
=
X (
S P
@
h
ÌÍ
÷
èS P
M
@
ßàKp
Í*@
ßà X G H
.
,
-.
Y
Z
(
U~ X
(3)
P
500 Hz
4
.
rb
M
@
b ÌÍ
H
.
ðÝO
-
!"
RS O(
` $ d
. P
¥
=
µ)
Þ
¡ `S L~
b
y
U
Í*@
K
, CFD
J NO
b
` É ]
~
X G H
.
2
1
=
o−
i treal
i cosh i
u u e
cosh i
ω ω ω
λ δξ
ωλ λ δξ δξ
λ δξ
δδδδ δδδδ
(1)
2
0
p h x u λ
λλ
λ ρ ν ρ ν ρ ν ρ ν
= ∂
∂
, = h ω ω ω ω δδδδ ν νν ν
, y
ξξξξ = h
3.
噾準 氦壟 微塾,
- .
R (
6l (
! "
= °y
7 f=
-
L¥ U
=
4 .
~N
Ë* ÌÍ
S G
4z .
#]S (b
Ì
Ï
HP s
]S (b
@
úU
ÝP Ü
X G H
.
_r9
L
(
>
?
(2~9)
SOP
{
÷
U (
µ +
¨
F
¤
b
Bernoulli
Ù
3Kp `
t
d
<
=
J
CgH
.
Fig. 1 Schematic drawing of Valveless micropump
ξ ξ ξ ξ (y/h)
0.0 0.2 0.4 0.6 0.8 1.0
V e lo c ity (u /u
0)
-1.0 -0.5 0.0 0.5 1.0
Fig. 2 Velocity profile in oscillating channel flow at
different time
!"
S O(
` É ]
$ N
KL MN O
µ )
`
%
U4 .
N 8 K P
Ü=
<
= D
¤ª ð ÓH
.
ðÝO Õ
>
?
S O
P
!"
S O(
`
b
L `T U7
Kp ¨ tD
A )
` 4 .
@
)K F
# # (
v
S O(
ä
$ 7å J
@
)Kp U &
b
`
d
/ K F
Kñ H
.
%
U N8
MN O
Re
X@ f
4 #$
@
f=
.
U3 'M J b
)Kñ H
.
α 1 α α
α , 1
2 α Q α α α ν νν ν
`S
°b
>
ä
j) Ù
` j) Ù
S
non-slip
i}(
U3K F
,
R(
`
=
ss
{
÷
) D
* P
v
S
°
Kp
lubrication
è é
J 3Kp ) D
* P
R (
`
N8
X G H
.
J N SO(
ä
$ 7å J
+ (
Ù
4 .
)& X G H
.
( )
( ) ( )
2
3 1
4
Q
cony
u x , y
dh x h x
= − (2)
M (
Ù
S O
-
é
(
#i Ù
,L
MN O
M
( Ù
j Ï4 .
U7 Kp )&K
÷
+ (
Ù
$ X G H
.
( )
( )
22 2
3 2
4 1
con con
p Q
dh
η αη
η η αη αη
η αη
µ µ µ µ
αη αη αη αη
∆ = − +
+
(3)
( )
1h x ≅ h − α α α α x , η η η η ≡ l h
2Fig. 4
P
9÷O
S (b
potential
S -@
9@÷O
`S -.
.C
P Ü
p
F
G H
.
#$@
/X0 :
@
b Ü
1 X G H
.
4.
娚秮洆 氦壟 微塾!"
S O(
` $ `
-
H
2
3 H
. Jeffery-Hamel
`4. èé@
@
Ñ K
9
,
(
# $
@ fF
f=
S N8
N P
`S O
,
=
X Ù
yx
¨ H
2F
4
=
X Ù
4 .
)&Ú H
.
ðÝO
l (
`
S -@
potential
S-.
.C P Ü
Fig. 6
N O
~ X G H
.
Ü=
#$
@ fF
U4 ` %&
@
K
3
S P
-
!"
J ! 2
P
l (
j ÏS ð Ó
`
"²
4
,
- .
Y
ZS (b
YÐ 5
@
Ñ6
( bH
.
ðÝO
Õ
>
?
S
OP O%
S O
7 8
Kñ ó
S OP
` %&
@ uP
)
` 4 .
@
)K F
,
!"
S OP
%&
@
G P
)
`4 .
@
)Kñ H
. Fig. 5
SO
1 X G ó
!"
S O(
`
2
9(
ÌÍ
4 .
9:D
@
h y
7
=
%&
@
u
P !"
` ~
Jeffery-Hamel
` èé
J
_
°
. é
3K F
,
÷
è
(
Í* y
7
=
3
&S³´ b
lubrication
`4. èé;
X G H
.
r
b
è é
J MN O
<
y
7
9:P
%&
'
(separation line)
) (
X G H
.
%&'=
@
( '
4 .
) j Ï !"
Í
j Ï ! "
@
U
4 .
=
3$ 0 © P
<>
@
u P
©4 .
1
X G4
,
@'
S OP
ä
$¥ `
(
5>
ä
K
3 P Ü
4 .
@
)Kp X
;
U
4 .
X G H
.
rb
è éP
CFD
i?
@
S O
$ ~ X G4
÷
è
(
Í*Ì
Í
) j Ï !"
é
S ä
$
@
0
~ A6
~ X G4
,
Õ
>
?
S OP
'
Fig. 3 Geometry of nozzle/diffuser
ξξξ ξ (l/h1)
0 2 4 6 8 10
∆∆∆
∆p
-100 -80 -60 -40 -20 0 20
αα αα = 5o α α α α = 4o αα αα = 3o αα αα = 2o α α α α = 1o 3µµµµQ
4dhl2
( )
Fig. 4 Dimensionless pressure drop along the converging channel
Fig. 5 Two flow regions with flow separation and
imaginary separation line in diffuser
« 4 .
@
)Kñ
.
rb
%&
@
K P
¡¢
b
`
N 8 K
L MN
O H(
@
) t
Kñ H
.
# MöSO
P
y
jÏ4.P
(
:
@ u
)K
=
E
«
&
x
S(
N O
¨ bH
.
)jÏ`
=
Jeffery-Hamel
`4. èé
K
,
÷
è
(
%&
ÌÍ=
lubrication
`4. èébH
.
b !"(
#$
@
fF
Re
X$ f H
P
@
) MS O
%
U
$NB X G H
.
ð ÝO
Í
jÏ ` )jÏ `
y
7 ##
(
` è é
S
O H(
é
(
#i Ù
t é
3 X G H
.
( )
( )
( )
2 2
2 4
3 2
4 1
cor cor
p Q
d h h
ζ βζ
ζ ζ ζ βζ βζ βζ µ
µ µ µ
βζ βζ βζ βζ
∆ = +
− +
(4)
( )
( )
( )
1 2
2 2
1
3 2
3 2
4 2 1
rec rec
p Q
d h
ξ α β ξ
ξ ξ α β ξ α β ξ
ξ α β ξ
µ µ µ µ
α β ξ α β ξ α β ξ α β ξ
+ −
∆ =
+ −
(5)
2 4
l h h ζζζζ ≡
− ,
3
2 l ξξξξ ≡ h
= Í* ÌÍ
9
)
* ÌÍ
9
=
y
MöS O
< HF
@
)Kñ4 z .
div cor rec
p p p
∆ = ∆ = ∆ (6)
b
Í* ÌÍ
S O(
)
*
ÌÍ(
(
C=
!"
J
9 P
D
C
z .
div cor
2
recQ = Q − Q (7)
@(
%&
'
(separation line)
SOP
{2 (
5
>
ä
K
34 z .
H(
i }(
U
3 X G H
.
( ) (
12( ) )
cor rec
u u
y θ θ θ θ β β β β y θ θ θ θ α β α β α β α β
∂ ∂
= = = −
∂ ∂
(8)
# ÌÍ
S
°b
ä
$ 7åS O
M (
i
}(
U3K
÷ H (
Ù
,
X G H
.
( ) ( )
2 2
rec cor
rec cor
Q Q
h x = h x (9)
( )
12 4 12( )
h
recx ≅ h + α β α β α β α β − x
( )
2 4h
corx ≅ h − h + β β β β x
M (
Ù
(8), (9)
3Kp H
/ )&K
÷ H (
{ b
Ù
4 .
)&
;
X G H
.
( )
21 1 2 1
div cor
Q Q C
C α β η α β η α β η α β η βη βη βη βη + −
= −
− +
(10)
4 2
C h
≡ h
þ
C
P
Fig. 3
SO
L CD
G ó
!"
ý
?
S O
ý
?(
-
LS
° b
%&
'(
-
L
(
µ
H
.
E=
Re
X¥ ý?@
# A vw
~
£ x
. y
*F
v]Ú ý
?
~
S ð Ý
ÿ
ÝP
E
H
.
ðÝO
%&
'=
β
¥C
S(
N O
_ É ]
@
) C
!"(
` m
nuP ,
- .
YZ (
É]S G Ì
Ï
HH
.
XÙ
H
/ Ù
(6)
Ù
(7)
S°
ýKp )&K
÷ H
( Ù
,
X G H
.
( )( ) ( )
( )
2 2
2 2 3 1 2 1
2
C C C C
C
ηα ηα ηα β ηα
β β
β η η η η
− − + −
= −
(11)
M
( Ù
N O
C
@
0
S IèK÷
β
@α
SIè K
Í*
S (b
0
4. XJKP Ü
X G4
, C
@
1
S Iè K÷
β
P
0
S IèK
P Ü
X G H
.
rb
X Ùt
3Kp
!"
S O(
é
(
#iJ $ X G H
.
( )
( )
2 2
2
1
4
3 2
con con
Q p dh αη αη αη αη
µ η αη
µ η αη
µ η αη
µ η αη
= −∆ × + +
(12)
( )
( )
2 2
2
1
4
3 2
div div
Q p dh αη αη αη αη K
µ η αη
µ η µ η αη αη
µ η αη
= ∆ + ×
+
(13)
( ) ( )
( ) ( )
(
( ))
( )2 2 2
2
1 2 1
2
2 2 2 1
C C C
K C
βη α β η
βη α β η
βη α β η
βη α β η
η αη η η αη αη η αη
η βη
η η βη βη
η βη
αη αη αη αη
− − + − + −
≡ +
− +
+
(14)
ζ ζζ ζ
(l/h2)0 5 10 15 20
-5 0 5 10 15 20 25 30
αα αα = 1o α α α α = 2o αα αα = 3o α α α α = 4o αα αα = 5o
( 3 4
22)
p
divQ dh µ
∆
Fig. 6 Dimensionless pressure drop along the
diverging channel
KLM
N OPQ
RS TU
V WX
Y Z[ \ ]
^_
X`
ab ca d e X
f
(14)
_
g Xh
K
i_
X j
k g hl
. K
Q
Re
m,
no
p _
X j
kgq r stS u v
wd x y_
K
Q
1
_
m
z{
r
,
stS uv
| x y_Q
0
}U mz`l
.
5.
噾準-
娚秮洆 笛旇櫖 娶幾 欇窫N OPQ
RS T U
V WX
ab ~ x y
_
v
q Q
ab U
rectification efficiency ε(5)
`l.
Sε
Q ` }UXs~ m Q
r g
st[
st X
U
g X
q r u
X
f
(15)
U
h l
.
f(13)
[(14)
}U
f
(6)
X
~ w
{
rectification efficiency ε
Q K
¡X
¢m U
g£
¤
m l
.
( ) ( )
( ) ( )
1 1
con div
con div p
Q p Q p K
Q p Q p K
εεεε ≡ ∆ − −∆ = −
∆ + −∆ +
(15)
e X
f X
¥w¦ x y
§¨
©ªw c
aS «¬
X
N OPQ
RS T U
V WX
abc a
[ QlQ
®~ ¯ m l
.
stS °d xy_Q
ε
0
_
±
² {³
s~
`
} U
m Q
V
´
c aS µµ
¡¶
°u· ®
Sr
,
stS | xy_Q
1
_
±
² {³
¸ ¹
º
w¦ ab ~
³»
m
¼
~ ¯ m l
.
e _M
s½ h
f¾ ~ ¿ jM
ÀÁ X
½
α
ÃÄÅÆÇh
ÀÁ È
S
η
_ KÉ Y Z[ \]^Xst
-
ÊË ÌÍÃ VW
ab X
gaw Î Ç
¯
m }r
, Fig. 7~8
~ ¿jMQ
K
Ï¡
u Ð L
rectification efficiency ε
½§¨ Ñ m l.
ÀÁÈ
S _
X`
Ò
~
Fig. 7
_M
Ñ m QÓ
,
ÀÁS ÈÔ
·mÕ _Ö
X
Î
×
S Øw}
U
Ù Ô
Ú
m } Û U
rectification ratio
ÜQ
®}
U
Ý
¦ m l
.
Þ`
Fig. 8
_M
Ñ m ß
S Y
Z
/
\]^
X
 ½ àm Õ N OPQ
RS TU
V
WX `
} U
V
´
m Q
abS áu Q
®
~ Ý
¦ m l
.
KLM
stS °â
,
 ½η η η η
0 10 20 30 40 50
K
0.65 0.70 0.75 0.80 0.85 0.90 0.95
α = 1o α = 2o α = 3o α = 4o
η η η η
0 10 20 30 40 50
εεεε
0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.16 0.18 0.20
α = 1o α = 2o α = 3o α = 4o
Fig. 7 Rectification efficiency with different nozzle/diffuser channel length
α α α α
0 2 4 6 8 10
K
0.60 0.65 0.70 0.75 0.80 0.85 0.90
η = 40 η = 60 η = 80 η = 100
α α α α
0 2 4 6 8 10
εεεε
0.04 0.06 0.08 0.10 0.12 0.14 0.16 0.18 0.20 0.22
η = 40 η = 60 η = 80 η = 100