or ( . ¼ # F g ) a F g$ 3 Ä » Y Us $ ( © 1060 ∼ 1070 nm) c É r F g 6 £ § ¾ Ó ¸l (AOM: acousto optic modulator)\ ¦ t " f r] X ÷ & ¦, r] X ) a c É r F g5 Å qS X @ /l \ ¦ t è ß 6 £ § \ 2 " é ¶ Å Ò 0 p x

(1)

F

g6 £ § ¾ Ó ¸l \ ¦ s 6 x # l ó ø Í\ { 9 ÷ & H F g$ 3 Ä » Y Us $ _ ¨ î ç H& h \ -t / B N ç ß ì r í\ ¦ ª

>

or ( . ¼ # F g ) a F g$ 3 Ä » Y Us $ ( © 1060 ∼ 1070 nm) c É r F g 6 £ § ¾ Ó ¸l (AOM: acousto optic modulator)\ ¦ t " f r] X ÷ & ¦, r] X ) a c É r F g5 Å qS X @ /l \ ¦ t è ß 6 £ § \ 2 " é ¶ Å Ò 0 p x ô

Ç X-Y ° ú ¸ Ö ¦` ¦ t è ß . s Y Us $ c É r í& h o 160 nm f − θE $ Ý ¼\ ¦ t è ß Ê ê l ó ø Í\ | 9 5

Å

q > ) a . ñµ 1 ÏÒ q tl ÐÂ Ò' : r , é ß + þ A , d v m 1 p x _ ª ô Ç ] j# Q ñ\ ¦ AOM \ { 9 § 4 r

v , AOM` ¦ t " f r] X ) a y n C_ r] X y É r { 9 § 4 ô Ç ] j# Q ñ_ · ú \ q Y V # o % i .

(

É Ó' \ _ # ] j# Q÷ & H ° ú ¸ Ö ¦` ¦ s 6 x # ot \ f ¸ ª Ü ¼ Ð | 9 5 Å q ) a Y Us $ c ` ¦ { 9

r ( õ 1 l x r \ ] j# Q ñ\ ¦ AOM \ Ð? /" f ª ô Ç / B N ç ß ì r í\ ¦ % 3 % 3 . Y Us $ , ñµ 1 ÏÒ q tl , F g 5

Å

qS X @ /l , ] j# Q ( É Ó' , ° ú ¸ Ö ¦, f − θE $ Ý ¼, / B N6 x l 1 p x _ ¸ H \ P © u \ ¦ ü @+ þ As Z } s 1.5 p

' , ; ¤ 0.65 p ' , U ·s 0.65 p ' F K5 Å q © 5 Å q \ ? / © % i .

PACS numbers: 42.62.C, 42.60, 42.62.B

Keywords:YUs$ c /BNçß ìrí, YUs$ \P, °ú¸Ö¦, f − θE$Ý¼,Fg6£§¾Ó ¸l

I. " e Â ] Ø

Y

Us $ \ P © u H Ä »l µ 1 Ï F g s ¸× ¼ (OLED: Or- ganic Light Emitting Diode)\ ¦ ] j H D h Ðî r ~ ½ ÓZ O Ü ¼

Ð Å Ò3 l q` ¦ ~ Ã Î ¦ e [1–5]. & ³F © ´ ú §s 6 x ÷ & H OLED ] j Z O É r èì r (small molecule)\ ¦ l ^ \ P 7 £ x

Ã

ÌZ O (thermal deposition method)` ¦ 6 x # 8 £ x Ü ¼ Ð Á

ú

¢ H ~ ½ ÓZ O s . s ~ ½ ÓZ O É r ¦ / B N 5 Å q \ " f s À Ò# Qt Ù ¼ Ð Ò q

tí ß é ß ` ¦ ¦, \ P \ y © ô Ç èì r ë ß Å Ò Ð s 6 x s

0 p x . èì r \ ¦ s 6 x ô Ç OLED H F G Ü ¼ Ð 6 x

H F K5 Å q ~ Ã Ì} ü @\ ¸ & ñ / B N s 1 l x (hole transport), & ñ / B N Å Ò { 9

, µ 1 Ï F g8 £ x, Å Ò{ 9 , s 1 l x1 p x _ # Q 8 £ x Ü ¼ Ð ½ ¨$ í ÷ &

#

Q e . èì r H s ° ú s 8 £ x Ü ¼ Ð Á ú ¢ É r ì r 8 £ x _ : £ ¤

$ í

` ¦ or v 9 µ 1 Ï F g ´ òÖ ¦` ¦ > h r & M ® o Ü ¼ 9, Ã º" î s U

´ ¦ î ß & ñ ÷ &# Q" f © ´ ú §s s 6 x ÷ & ¦ e . ô Ç¼ # , ¦ì r

8 £ x` ¦ s 6 x # OLED\ ¦ ] j H â Ä º H e ç ß ¼# ×

W (ink-jet printing) ~ ½ Ód s Å Ò Ð > hµ 1 Ï÷ & ¦ e . ¦ì r

\

¦ 6 x K # ¸a ¦ Ð W H e ç ß ¼# × ~ ½ Ód É r B Ä º V , É r

& h ` ¦ ~ 1 ¦ Ø Ô> ] j ½ + É Ã º e H © & h s e . t ë ß

6 x B \ 6 x K ) a ¦ì r \ ¦ l > r _ ¦ì r 8 £ x 0 A\ Í Òo

l > r _ 8 £ x \ í < Ê ) a ì r 6 x K ÷ & " f ¿ º 8 £ x _ ì r

∗E-mail: jhyi@yu.ac.kr

[ O # ! Qo Ù ¼ Ð 8 £ x ] j s B Ä º j Ë µ[ þ t . ´ ú § É r ½ ¨

' × æ s Ã º" î õ ´ òÖ ¦ \ " f f èì r Ð ] j ô Ç OLED\ ¦ 3 l w ¦ e .

Y

Us $ \ P Z O É r Fig. 1 \ " f Ð1 p w Y Us $ \ ¦ ¸ ú f ¨ Ã

º # \ P Ð ¨ 8 H Ó ü t| 9 ` ¦ p o É r 9 2 £ § \ èì r

<

Ê É r ¦ì r 1 p x _ Ä »l Ó ü t| 9 ` ¦ / B N 7 £ x Ã Ì < Ê É r Û ¼ 2 ; ïh A

~

½ Ód Ü ¼ Ð Â Ò Ã Ìr . s 9 2 £ § \ Y Us $ \ ¦ ¸ Y U s

$ \ -t H \ P Ð ¨ 8 ÷ &# Q" f 9 2 £ §` ¦ Ø ½ Ór v ¦, Ø

½ Ó ) a 9 2 £ § \ x 9 9 : r Ä »l Ó ü t| 9 É r Ð A \ x 9 Ã Ì ) a ITO (Indium Tin Oxide) 7 £ x Ã Ì ) a Ä »o \ Â Ò Ã Ì ) a . Y U s

$ \ ¦ ¸ ô Ç 6 £ § \ 9 2 £ §` ¦ b # Q? / x 9 9 : r Â Òì r _

Ä »l Ó ü t| 9 ë ß ITO Ä »o \ z e ¦ \ P s ² ú ÷ &t · ú §

É

r Â Òì r É r " é ¶ A 9 2 £ § \ z e > ) a . s ~ ½ ÓZ O ` ¦ s 6 x

/ B N¨ 8 â ` ¦ ë ß [ þ t t · ú § 8 ¸ Ä »l ì r \ ¦ " é ¶ H 8 £ x ë

ß p u Â Ò Ã Ì # Á ú ¢` ¦ Ã º e . ¢ ¸ô Ç, 6 x B \ ] jô Ç÷ &t · ú §

¦ èì r < Ê É r ¦ì r \ ¦ " é ¶ H 8 £ x ë ß p u Â Ò Ã Ì # Á ú ¢` ¦ Ã

º e # Q : £ ¤ y 8 £ x ½ ¨ ¸ Ð ] j l # Q 9î r ¦ì r \ ¦ s

6 x ô Ç OLED ½ ¨\ B Ä º Ä »6 x [6–9].

s

~ ½ ÓZ O \ " f H Y Us $ _ \ P ` ¦ s 6 x # Ä »l Ó ü t| 9 ` ¦ l

ó ø Í\ Ù ¼ Ð " é ¶ H µ 1 Ï F g è _ J ` ¦ Y Us $ Ð

½

¨$ í H ~ ½ ÓZ O õ , 9 2 £ § \ Â Ò Ã Ì ) a Ä »l Ó ü t| 9 s ç H{ 9 >

¸ ú

b # Q4 R ITO Ä »o \ Â Ò Ã Ì÷ &> H כ s B Ä º × æ כ ¹

. s \ ¦ 0 AK " f H l ó ø Í\ " f Y Us $ _ / B N ç ß & h ì r í\ ¦

-257-

(2)

Fig. 1. The principle of laser thermal printing.

ª > ì r ír ~ ´ Ã º e H Ã ºé ß _ > hµ 1 Ïs 9 כ ¹ . : r

7 Hë H \ " f H F g6 £ § ¾ Ó ¸l (Acousto Optics Modulator:

AOM)` ¦ s 6 x # " é ¶ H e _ _ + þ A © ` ¦ ] j % i .

AOM É r Y Us $ _ ' ~ ½ Ó ¾ Ó` ¦ or v ¦ r ç ß \ É r

o ª © É r ñµ 1 ÏÒ q tl Ð ] j# Q # " é ¶ H + þ A © ` ¦ % 3

% 3 .

II. ÷ m Ç] M ö X ê sV

Y

Us $ \ P © u H F g$ 3 Ä » Y Us $ , ñµ 1 ÏÒ q tl , /

B

N 6 x l , ( É Ó' , AOM ½ ¨1 l x l , / B N * 3 á Ô, F g < Æ r Û ¼% 7 ,

° ú

¸ Ö ¦, f − θE $ Ý ¼ 1 p x Ü ¼ Ð ½ ¨$ í ÷ &# Q e . s ¸ H

© u H s 1 l x _ ¼ # o $ í õ É r ^ & h ` ¦ 0 A # Fig. 2\ " f

Ð1 p w, Ð 0.65 p ' , Z } s 1.5 p ' , U ·s 0.8 p ' _ F K 5

Å

q © 5 Å q \ ? / © % i . F g$ 3 Ä » Y Us $ H + þ A ¼ # F g ÷ &

#

Q e Ü ¼ 9, © É r 1,060 ∼ 1,070 nm, Ø ¦§ 4 É r 10 W s .

s

Y Us $ H ¼ # F g Ä »t é ß { 9 ¸× ¼ F g$ 3 Ä »\ _ # H s Û

¼ © é ß _ Fig. 3\ : r F g < Æ> Ð ² ú ) a .

F

g$ 3 Ä »\ " f : r y n C É r F g5 Å q & ñ ï r l \ _ # f â 5mm _ c Ü ¼ Ð S X @ /÷ & 9, s c ` ¦ AOM (AA Opto elec- tronic, DTS-X-250) Ü ¼ Ð Ð · p . AOM_ þ j@ / ½ ¨ â É r 4.5 × 4.5 mm

²

s # Q" f S X @ / ) a c Ð é ß s " f { 9

H c _ Å Ò Â Ò\ ¦ " é ¶+ þ A ¸o > h\ ¦ s 6 x # é ß

#

c _ ß ¼l \ ¦ 4 mm Ð × ¦% i . AOM_ r] X ´ òÖ ¦ É r { 9

c _ { 9 y \ B Ä º y > % i . " f r

@ /0 A\ AOM` ¦ ` ¦ 9 ¿ º# Q" f p [ j > y ` ¦ ¸] X % i Ü

¼ 9, Z } É r ´ òÖ ¦ Ð { 9 r] X c s 6 §` ¦ & h ü @ × ¼

\

¦ s 6 x # S X ô Ç 6 £ § \ 0 Au \ ¦ ¦& ñ % i . þ j@ / r ] X

´ òÖ ¦ É r 70 % s % 3 . r] X ÷ &t · ú § É r Y Us $ c É r

Fig. 2. Schematic diagram of compact laser thermal printing device. (AOM= Acousto-Optic Modulator).

c

ü á Ô (beam dump) Ð Ð? /" f é ß ô Ç . AOM\

ñ\ ¦ Ð? /t · ú §Ü ¼ c ü á Ô\ _ # { 9 H Y Us $ c

s ^ é ß ) a . s AOM É r 30 ∼ 50 MHz _ n

¸ (Radio Frequency: RF)\ ¦ # 49 mrad (2.8 ¸)# 3 0 A_ y ` ¦ or . o÷ & H y É r RF Å Ò Ã

º\ _ > r 9, s Å Ò Ã º H RF ½ ¨1 l x l (AA Opto elec- tronic, DRFA10Y-D-33) \ H ü @Â Ò_ · ú _ ß ¼ l

\ _ # ] j# Q ) a . AOM` ¦ t è ß y n C É r Ö ¦ \ _

# ì ø Í ÷ &# Q" f F g5 Å qS X @ /l (LINOS) Ð Ð · p . F g5 Å q @ / l

H 2 C \ " f 8C _ C Ö ¦` ¦ t 9, ° ú ¸ Ö ¦ _ f â s

10 mms Ù ¼ Ð C Ö ¦` ¦ ¸] X # c _ f â ` ¦ 8 mm Ð 2 C S X @ /r ( . c _ f â \ ì ø Íq Y V # c _ í& h ß ¼ l

(spot size) t ¦, ì r K 0 p x É r a % ~ [10,11]. S X

@

/ ) a c É r ° ú ¸ Ö ¦ (Scan cube, Hurry Scan) Ð Ð? /

. þ j@ / Û ¼ ± p y ¸ H ± 0.38 rad s 9, s y ` ¦ 65535 > h

Ð ¾ º# Q ] j# Q Ù ¼ Ð þ j@ / p [ j ] j# Qy É r 11 µrad s .

° ú

¸ Ö ¦ _ ~ ½ Ó ¾ Ó É r ( É Ó' \ _ # ] j# Q÷ & 9, ( É Ó'

Ð ¸î ß ô Ç e _ _ + þ A © ` ¦ l ó ø Í 0 A\ ? /> % i . ° ú

¸ Ö ¦ \ _ # ~ ½ Ó ¾ Ós & ñ K c É r í& h o 160 mm f − θE $ Ý ¼ (Scan cube 10)\ _ # í¨ î \ | 9 5

Å

q ) a . ° ú ¸ Ö ¦ õ f − θE $ Ý ¼ Ð Y Us $ c ` ¦ 2 " é ¶ Ü ¼

Ð Å Ò (scan) 9 | 9 5 Å q r ~ ´ Ã º e H þ j@ / & h É r 100 × 100 mm

²

s . í& h 0 Au \ ITO (Indium Tin Oxide)

7 £

x Ã Ì ) a Ä »o \ ¦ ¿ º ¦ | 9 5 Å q ) a c ` ¦ { 9 ³ ð _ ITO

: r ¸ ¦ : r Ü ¼ Ð ` ¦ " f ITO ~ Ã Ì} \ p [ jô Ç ç H\ P s

Ò q t| . s ç H\ P _ ; ¤` ¦ & ³p â Ü ¼ Ð S X @ / # 8 £ ¤& ñ ô Ç

õ , 30 µm_ í& h ß ¼l Ð | 9 5 Å q ÷ & H כ ` ¦ S X % i Ü ¼ 9 s

כ s s © u _ ì r K 0 p x \ K { © ô Ç .

ITO Ä »o _ / B N ç ß & h 0 Au H / B N \ O @ /\ _ # ¦& ñ

)

a . / B N \ O @ /ü < f − θE $ Ý ¼ s _ o \ ¦ ¸] X # ITO l ó ø Í` ¦ í& h 0 Au \ & ñ S X y ¿ ºl 0 A # / B N \ O

@

/\ ¦ Z } s î r à Ô (Z-stage) 0 A\ ` ¦ 9¿ º% 3 . s

(3)

Fig. 3. Optical layout of beam delivery system in the laser thermal printing device.

î

r à Ô_ ¸] X 0 p x Z } s H 5 mm & ñ ¸s . / B N \ O

@

/ H / B N * 3 á Ôü < ÷ &# Q e Ü ¼ 9, ô Ç / B N` ¦ Ä » ¸

#

0 A\ ` ¦ 9 ITO Ä »o l ó ø Í` ¦ l · ú s \ ¦ s 6 x # {

© | . s © u H B Ä º · û ª É r / B N # 9 2 £ § (donor film)` ¦ ITO Ä »o l ó ø Í\ x 9 Ã Ìr v H X < ¸ Ä »6 x . : r ½ ¨\

"

f H donor film` ¦ 6 x l \ © u _ : £ ¤$ í ` ¦ ¸ ô Ç

. Ä »l Ó ü t| 9 _ l & h : £ ¤$ í É r í ß èü < Ã ºì r \ B Ä º y

. Ä »K ô Ç l ^ \ ¦ ] j ¦ | 9 è ¨ 8 â Ü ¼ Ð G î r + '\

\ O l 0 A # / B N \ O @ /\ ¦ / B N 6 x l 5 Å q \ [ O u

%

i . / B N 6 x l \ # Q > h_ ½ ¨" í ` ¦ / B N ¦, s ½ ¨" í

\

) a È ÓÚ Ô x 9 # Q > h_ ì Á Ú Ô\ ¦ ¸ # / B N l \ ¦ /

B

N/ å L C Ø ¦ > % i . s ° ú É r ½ ¨ ¸\ ¦ s 6 x #

/ B N6 x l 5 Å q _ / B N l H / B N \ O @ /\ ) a 1 l x{ 9 ô Ç /

B

N * 3 á Ô\ _ # C l ÷ &> % i . / B N6 x l _ \

H & h ü @ é ß Ä »o Ð ) a ½ Ó` ¦ Â Ò Ã Ì # Y Us $ ¸

÷

& H Â Ò0 A\ ¦ & h ü @ B j ü < ¹ ¢ ¤ î ß Ü ¼ Ð ' a ¹ 1 Ï > % i

. ° ú ¸ Ö ¦` ¦ ] j# Q H ñ H ñµ 1 ÏÒ q tl (Agilent, 33220A) ÐÂ Ò' µ 1 ÏÒ q t ) a , d v m , é ß + þ A (square wave)\ ¦ ñ\ ¦ s 6 x % i .

III. ÷ m Ç] M ö + s ÇÊ Ý

í¨ î \ | 9 5 Å q ÷ & H c _ / B N ç ß & h ì r í H AOM \ Ð? /

H ñ_ Å Ò Ã º ß ¼l x 9 + þ Aõ ° ú ¸ Ö ¦ _ r 5 Å q

¸\ & ñ ) a . | 9 5 Å q ) a Y Us $ c _ / B N ç ß & h ì r í

\

¦ ¶ ú ( R Ðl 0 A # í¨ î \ ITO Ä »o ó ø Í @ / \ y F g

ó ø Í` ¦ ¿ º ¦ Y Us $ c ` ¦ ÐÍ Ç x . 6 £ § _ Fig. 4 H 1 kHz _ , é ß + þ A , d v m \ ¦ Ð? /# Q AOM` ¦ ¸

Fig. 4. The dependences of beam pattern on the applied waveforms. The applied waveforms are square, sine, and ramp respectively. (amplitude of waveform = 1V, fre- quency of waveform = 1 kHz, beam scan speed in focal plane = 500 mm/s).

¦ 500 mm/s Ð ° ú ¸ Ö ¦` ¦ Å Ò " f % 3 É r í& h \

"

f_ + þ A © s . Ð[ j Ð © _ \ ¦ 3.4 cm × 3.4 cm \

5 g 0.6 cm ç ß Ü ¼ Ð Õ ªo > % i y ` ¦ S X @ / #

Ð , , é ß + þ A , d v m \ É r _ y + þ A © _

o\ ¦ · ú Ã º e . c _ C & h É r K ï r + þ A_ r ç ß & h

oü < B Ä º Ä » . 7 £ ¤, Ö ¦` ¦ ô Ç ~ ½ Ó ¾ ÓÜ ¼ Ð s 1 l x

"

f C & h ` ¦ Õ ª 2 ; כ s Ù ¼ Ð ¸z ´ ÐÛ ¼ ïá Ô \ " f_ c C & h õ

¸ ° ú É r ¸ ª ` ¦ ? /> ) a כ s .

6 £ § _ Fig. 5 H ¸ · ú \ É r _ Ï ã T l o\ ¦

Ð# ï r . AOM` ¦ t " f c _ ' y s θë ß p u 7

, s c s í& h o f E $ Ý ¼\ ¦ t " f í& h \ " f _

c 0 Au H f θ ë ß p u s 1 l x > ) a . þ j@ / ¸ · ú 10 V \ " f ¼ # ¾ Óy s 49 mrad o Ù ¼ Ð í& h o 160 mm E $ Ý ¼\ ¦ t í& h 0 Au H 7.8 mm _ Ã º¨ î s 1 l x s

Ò q tl > ) a . 1 V_ d v m ¸ · ú ` ¦ % i ` ¦ M :,

\ " f Ï ã T É r _ ; ¤ É r 0.8 mms % 3 . Õ ªa Ë >_

Ð õ [ j Ð _ Ï ã T l H " f Ð Ø Ô . Ï ã T É r Ð \ " f

¸÷ & H כ ` ¦ Ì º§ Â > Ðs ¦ e . ° ú ¸ Ö ¦ × æ

\ " f H c _ { 9 õ Ö ¦ _ ¸ ~ ½ Ó ¾ Ós Ã ºf ¦

É r _ ° ú ¸ Ö ¦ \ " f H _ ¨ î ' ô Ç © I s .

" f ¸ ) a ´ òõ H # QÖ ¼ ô Ç ~ ½ Ó ¾ ÓÜ ¼ Ðë ß è ß .

t ë ß ¢ - a y Ö ¦ õ ~ ½ Ó ¾ Ós ´ ú Æ Ò# Qt t · ú § É r õ ,

_ Ã ºf \ " f ¸ ç ß _ ¸ ) a c _ / B N ç ß & h ì r í

(4)

Fig. 5. The dependences of line width of lattice pat- tern on the modulation amplitude (MA) of applied wave- forms. The MA of applied waveform are 0.5, 1, 1.5, 2.0 V respectively. (frequency of waveform = 1 kHz, beam scan speed in focal plane = 500 mm/s).

\

¦ ^ ¦ Ã º e . Ö ¦ \ { 9 H c _ ¸ ~ ½ Ó ¾ Ó` ¦ ¸ ú

¸] X ô Ç ¿ º ~ ½ Ó ¾ ÓÜ ¼ Ð ° ú É r Ï ã T l Ð ¸ ÷ &> ½ + É Ã º e

. Õ ªa Ë >\ " f Ð1 p w, 0.5 V \ " f 2 V t 0.5 V ç ß Ü ¼ Ð

¸ · ú ` ¦ or v 9 % 3 É r õ \ " f, ¸ ) a Ð _

; ¤ É r ¸ · ú \ q Y V < Ê` ¦ · ú Ã º e .

6 £ § _ Fig. 6 É r ¸ · ú ` ¦ 1 V Ð { 9 & ñ > % i ` ¦ M

:, ¸ ñ_ Å Ò Ã º\ É r Ð _ / B N ç ß & h ì r í

o\ ¦ Ð# ï r . ° ú ¸ Ö ¦ _ r 5 Å q ¸ H c s í¨ î

\

" f 500 mm/s_ 5 Å q ¸\ ¦ ° ú ¸2 ¤ ¿ º% 3 . Å Ò Ã º 0.1 kHz â Ä º, ¸ Å Òl 10 mss . Õ ªa Ë >\ " f ô Ç {

Ð, c _ Å Ò 5 Å q ¸ % ò % i \ 5 g 500 mm/s Ð [ O & ñ

° ú

כõ Ä » < Ê` ¦ Ð# ï r . Å Ò Ã º 1 kHz, 10 kHz Ð & h

&

h À 1 Ï t " f d v m _ p [ jô Ç + þ As & h & h ½ ¨ì r s ÷ &

t

· ú §` ¦ & ñ ¸ Ð 0.8 mm ; ¤ _ Ð s ç H{ 9 > Õ ª# Qf

`

¦ · ú Ã º e .

Ð < Ê É r [ j Ð s ç H{ 9 > Õ ª# Q4 R Ä »l Ó ü t| 9 s

ITO l ó ø Í\ ¦Ø Ô> Â Ò Ã Ì ) a . ¦Ø Ô> Õ ªÜ ¼ 9 Å Ò

H c s B Ä º ¸x 9 > ¸÷ & " f & ñ K J ` ¦ ë ß [

þ

t # Q ô Ç . _ ¸x 9 ô Ç & ñ ¸\ ¦ & ñ H כ É r ¸ Å Ò

Ã ºü < Ö ¦ _ Å Ò 5 Å q ¸ s _ q Ö ¦ Ð & ñ ) a . ¸ Å

Ò Ã º Z }` ¦ Ã º2 ¤, Å Ò 5 Å q ¸ Ö ¼w n =Ã º2 ¤ É r ¸x 9 K

. Fig. 7\ " f 1 l x{ 9 ô Ç ¸Å Ò Ã º\ " f ¸ Û ¼ ± p 5 Å q ¸\ ¦ 500 mm/s \ " f 5000 mm/s Ð 10C 7 £ x r v _ ¸ x 9

ô Ç & ñ ¸ 10C & ñ ¸ ² ú f ` ¦ ^ ¦ Ã º e . s M :,

¸ · ú É r 1 V Ð { 9 & ñ > ¿ º% 3 .

Fig. 6. The dependences of line profile on the frequency of applied modulation waveforms. The applied frequen- cies are 0.1, 1, 10 kHz respectively. (amplitude of mod- ulation = 1 V, beam scan speed in focal plane = 500 mm/s).

Fig. 7. The dependences of line profile on the beam scan speed in focal plane. The scan speeds are 500 mm/s and 5000 mm/s. The applied waveform is sine wave.

(amplitude of modulation = 1 V, modulation frequency

= 1 kHz).

IV. + s Ç Â ] Ø

Y

| 9 r & í ß èü < _ þ v l \ ¦ C ] jô Ç ¨ 8 â \ " f Ä »l l ó ø Í` ¦ ]

0 p x ô Ç l ó ø Í_ ß ¼l H 10 cm × 10 cm s % 3 .

Ó

ü t| 9 ` ¦ + þ AÜ ¼ Ð l ó ø Í\ Â Ò Ã Ì½ + É M :, _ ; ¤ É r F g6 £ §

¾ Ó ¸l (AOM)\ [ þ t # Q H ½ ¨1 l x · ú _ ; ¤` ¦ o r

( Ü ¼ Ð+ 30 µm\ " f 8 mm t or ~ ´ Ã º e % 3 .

AOM \ { 9 § 4 ÷ & H ¸ ñ\ ¦ , d v m , é ß + þ A Ð

or v " f l ó ø Í\ { 9 ) a c _ / B N ç ß & h ì r í o\ ¦

'

a ¹ 1 Ïô Ç õ ¸z ´ ÐÛ ¼ ïá Ô\ " f ' a8 £ ¤ ô Ç ¸ ñ_ + þ

Aõ Ä » % i . ¸ _ r ç ß & h ¸ ª , ¸ Å Ò Ã ºü <

° ú

¸ Ö ¦ _ Å Ò 5 Å q ¸ H í¨ î \ " f Y Us $ c _ / B N ç ß

(5)

P

c p 8 ý ò k >

: r ½ ¨ H í ß \ O " é ¶ Â Ò t % i + À : G ' p' (' é ß n Û ¼e ¦ Y Us ]

Y

c p w Ã U Ø ô

[1] S. T. Lee, J. Y. Lee, M. H. Kim, M. C. Suh, T.

M. Kang, Y. J. Choi, J. Y. Park, J. H. Kwon and H. K. Chung, Society for Information Display 2002 International Symposium Digest (Boston, 2002), p.

784. [2] R. Young and B. Young, Alternative Technology Display Report: OLED Technology (Display search, Austin, 2004).

[7] M. Mansuripur, G. A. Neville Connell and J. W.

Goodman, Appl. Opt. 21, 1106 (1982).

[8] Jan Kalinowski, Organic Light Emitting Diodes (Marcel Dekker, New York, 2005).

[9] S. T. Lee, B. D. Chin, Mu Hyun Kim, T. M. Kang, M. W. Song, J. H. Lee, H. D. Kim, H. K. Chung, M. B. Wolk, E. Bellmann, J. P. Baetzold, S. Laman- sky, V. Savvateev, T. R. Hoffend Jr., J. S. Staral, R.

R. Roberts and Y. Li, Society for Information Dis- play 2004 International Symposium Digest (Seattle, 2004), p. 1008.

[10] J. F. Ready, Industrial Applications of Lasers, 2nd ed. (Academic Press Sandiego, 1997).

[11] D. H. Lee, I. H. Park, J. H. Kwon and J. H. Yi,

SAEMULLI (New Phys.) 53, 537 (2006).

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Study on the Laser Beam Profile Variation by Using an Aocusto-optic Modulator in a Thermal Pattering Device

Ill Hyun Park, Jin hyuk Kwon and Jonghoon Yi

^∗

Department of Physics, Yeungnam University, Gyeongsan 712-749

(Received 9 October 2007)

The fiber laser beam (wavelength = 1060 ∼ 1070 nm) profile variation incident on the base plate in a laser thermal printing device was studied. The polarized fiber laser beam was sent to an acousto-optic modulator (AOM), and the direction of beam propagation was deflected by using an acousto-optic modulator. The deflection angle was proportional to the amplitude of the modulation waveform fed into the AOM. The applied modulation waveforms were sine, saw tooth, and square waves. The deflected beam was sent to a galvanomirror’s. The galvanomirror angle was controlled by using a computer to image an arbitrary pattern on a focal plane of 100 × 100 mm

²

in size. The controlled beam was focused on a photographic plate by using an f − θ lens with a focal length of 160 mm. The variations in the laser beam profile were studied as a function of the beam scan speed, the modulation waveform, and the modulation amplitude. All equipment, such as the computer, the beam expander, the function generator, and the vacuum chamber, were compacted inside a metal box of 1.5 × 0.65 × 0.65 m

³

size.

PACS numbers: 42.62.B, 42.60, 42.62.C

Keywords: Laser beam shaping, Laser thermal patterning, f-theta lens, Acousto-optic modulator

∗E-mail: jhyi@yu.ac.kr

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