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BU Electronic Materials

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BU Electronic Materials

AZ P4000 Series resist(s) Ellipsometrc Absorbance

Normalized to 1/µm

0.00 0.50 1.00 1.50 2.00 2.50 3.00 3.50 4.00 4.50 5.00

175 200 225 250 275 300 325 350 375 400 425 450 475 500

Wavelength (nm )

Absorbance ('k')

'k' ellipsometric: P4000

AZ ® P4000 Bleached Absorbance Curve

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BU Electronic Materials

AZ ® P4000 Unbleached Absorbance Curve

AZ P4000 Series resist(s) Ellipsometrc Absorbance

Normalized to 1/µm

0.00 0.50 1.00 1.50 2.00 2.50 3.00

175 200 225 250 275 300 325 350 375 400 425 450 475 500

Wavelength (nm )

Absorbance ('k')

'k' ellipsometric: P4000

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