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Lecture #1 (2010-Feb-02)

(2)

Welcome to EEW508

Introduction to Surface Physics and Chemistry

Time: Tuesday & Thursday 14:30-16:00, Spring 2010 Location: Creative Building Room 101

Instructor: Prof. Jeong Young Park (

박정영

) (EEWS Graduate School

Email: jeongypark at kaist.ac.kr Tel: 350-1713

Room: 2309, building N5)

Teaching Assistant: Kim, Sunmi (

김선미

)

(3)

Welcome to EEW508

Introduction to Surface Physics and Chemistry

http://scale.kaist.ac.kr/lecture

Or Google “EEW508”

(4)

EEW508

Introduction to Surface Physics and Chemistry

The class will cover the introduction of Surface Physics and Chemistry The subject of the class will include

• Structure, electronic structure, thermodynamic properties, mechanical properties of surfaces.

• Surface characterization (microscopy and spectroscopy)

• Energy dissipation at surfaces

• Heterogeneous catalysis and renewable energy conversion

Prerequisition: the attendance of general physics and chemistry are

recommended.

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EEW508

Introduction to Surface Physics and Chemistry

Text book (primary)

Introduction to Surface Chemistry and Catalysis, Gabor A. Somorjai, (1994, Wiley, New York)

Text book (supplemental)

Introduction to Surface Physics

M. Prutton (1994, Clarendon Press, Oxford)

Modern techniques of surface technique

D. P. Woodruff and T. A. Delchar (1994 Cambridge Univ

Press, Cambridge)

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EEW508

Introduction to Surface Physics and Chemistry

Text book (supplemental)

Physics at Surfaces

Andrew Zangwill (1988 Cambridge Univ Press, Cambridge)

Introduction to Solid State Physics Charles Kittel (1986, Wiley, New York)

Physics of Semiconductor Devices

S. M. Sze (1986, Wiley, New York)

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Introduction to Surface Physics and Chemistry

Grading

Homework (problem sets) 30%, Presentation 30%,

Attendance 10%

Final term 30%

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Introduction to Surface Physics and Chemistry

What is Surface Science?

study of physical and chemical phenomena that occur at the interface of

two phases such as solid-liquid interfaces.

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Introduction to Surface Physics and Chemistry

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Introduction to Surface Physics and Chemistry

Types of interfaces

Surface Chemistry and Catalysis

G. A. Somorjai (1994)

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What is Surface ? - surface versus bulk

surface

bulk

Introduction to Surface Physics and Chemistry

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Surface property:

Adsorption, catalysis, oxidation Friction, adhesion, lubrication Bulk property:

Electrical conductance, Thermal conductance, Melting temperature, Heat capacity

Modulus, hardness surface

bulk

Surface property versus bulk property

Introduction to Surface Physics and Chemistry

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Types of surfaces

Introduction to Surface Physics and Chemistry

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D (dispersion) = Number of surface atoms Total number of atoms

The role of surface is more important as the size of object gets small

Surface Chemistry and Catalysis

G. A. Somorjai (1994)

Introduction to Surface Physics and Chemistry

(15)

Dependence of shape of particles on dispersion

cube

Truncated cube

Introduction to Surface Physics and Chemistry

(16)

Rh monolayer is used for

catalysis such as NO/CO

Diamon d coating

Magneti c disk – lubricant layer

Introduction to Surface Physics and Chemistry

External Surfaces-Thin film technology

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EUV lithography mask

External Surfaces-Thin film technology

Figure 2. High resolution TEM image of Si, Mo multi- layers and Ru capping layer in EUV mask.

Figure 1: Schematic of photomask for EUV lithography.

Introduction to Surface Physics and Chemistry

(18)

External Surfaces

-Miniaturization of microelectronic devices

Introduction to Surface Physics and Chemistry

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nanoparticle systems – Two or three dimensional systems

(b) (a)

(a) TEM image of two- dimensional (2D) TTAB coated platinum

nanoparticle arrays and (b) TEM image of three- dimensional (3D)

platinum nanoparticle encapsulated in

mesoporous silica (SBA- 15).

Introduction to Surface Physics and Chemistry

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External Surfaces -Biointerfaces

Introduction to Surface Physics and Chemistry

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Internal surface – trapping of molecules in molecular seive

Introduction to Surface Physics and Chemistry

Sorption pump

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Surface study and vacuum

Introduction to Surface Physics and Chemistry

MRT P F N A

= 2

From the kinetic theory of gases, the flux F of molecules striking The surface of unit area at a given pressure P is

) (

) /

(

) 10 (

51 . 3 sec)

/ /

(

2 22

K T

mole g

M

Torr cm P

atoms

F = 

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If P= 3 x 10

–6

Torr, M=28 g/mole (say, CO), T=300K, We obtain 10

15

molecules/cm

2

/s

If each incident molecules stick on the surface (or sticking coefficient is unity), then the surface is covered with one monolayer of molecules.

For this reason, the unit of gas exposure of 10

-6

Torr sec is called the Langmuir (L).

If we achieve UHV (1.0 x 10

-10

Torr), it may take three hours before a surface is covered completely.

Surface study and vacuum

Introduction to Surface Physics and Chemistry

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Mean free path of electron in vacuum Surface study and vacuum

Introduction to Surface Physics and Chemistry

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Hybrid system of high pressure and UHV system Surface science techniques

Introduction to Surface Physics and Chemistry

(a) (b)

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Surface thermodynamics:

Microcalorimetry, adsorption/desorption

Surface vibration and reaction dynamics:

Electron energy loss spectroscopy, Helium atom scattering, IR spectroscopy, Raman spectroscopy, Sum-frequency generation spectroscopy, Molecular beam surface scattering

Surface electronic structure:

Second harmonic generation, Ultraviolet photoelectron spectroscopy, X-ray emission spectroscopy, Scanning tunneling spectroscopy

Surface structure:

Low-energy electron diffraction, Transmission electron microscopy, Atom diffraction, Atomic force microscopy, Scanning tunneling

microscopy, Surface X-ray diffraction, X-ray absorption fine structure Surface Composition:

Auger electron spectroscopy, X-ray photoelectron spectroscopy, Secondary ion mass spectrometry, Ion scattering spectroscopy

Surface Science Techniques for Molecular-Level Studies

Surface thermodynamics:

Microcalorimetry, adsorption/desorption

Surface vibration and reaction dynamics:

Electron energy loss spectroscopy, Helium atom scattering, IR spectroscopy, Raman spectroscopy, Sum-frequency generation spectroscopy, Molecular beam surface scattering

Surface electronic structure:

Second harmonic generation, Ultraviolet photoelectron spectroscopy, X-ray emission spectroscopy, Scanning tunneling spectroscopy

Surface structure:

Low-energy electron diffraction, Transmission electron microscopy, Atom diffraction, Atomic force microscopy, Scanning tunneling

microscopy, Surface X-ray diffraction, X-ray absorption fine structure Surface Composition:

Auger electron spectroscopy, X-ray photoelectron spectroscopy, Secondary ion mass spectrometry, Ion scattering spectroscopy

Surface Science Techniques for Molecular-Level Studies Surface science techniques

Introduction to Surface Physics and Chemistry

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Application of Surface Science

Introduction to Surface Physics and Chemistry

Catalysis

Microelectronic semiconductor Tribology

Electrochemistry

Renewable energy conversion Corrosion

Environmental chemistry

Biointerface

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What you are going to learn after taking this class

Introduction to Surface Physics and Chemistry

Will learn concepts of surface physics and chemistry (structure, electronic structure, mechanical properties) Will learn knowledge of vacuum science

Will learn basic operation modes of surface techniques

including spectroscopy, and microscopy

수치

Figure 2. High resolution TEM image of Si, Mo multi- multi-layers and Ru capping layer in EUV mask.
Figure 1: Schematic of photomask for EUV  lithography.

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