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Design and Analysis of a Laser Lift-Off System using an Excimer Laser

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FIG. 1. Schematic diagram of laser lift-off system.I.  서    론최근 반도체 산업에서 높은 효율과 정밀도를 요구하는 분야에 레이저를 이용한 광학계의 수요가 늘어나고 있다
FIG. 2. Beam homogenenizer design by Kongju university.
TABLE 1. Specification of Coherent co. excimer laser model Specification LPXpro 210 Maximum Pulse Energy 800 mJ Maximum Repetition Rate 100 Hz Maximum Average Power 80 W
FIG. 7. The Transmittance change of dielectric attenuator for  angle of incidence.
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