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Optimal Electron Beam Characteristics by Lenses Analysis Using Scanning Electron Microscopy

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Fig. 2 Schematic structure of the thermionic SEM (2)
Fig. 3 Simplification of a real column system
Fig. 9 Distribution of the magnetic potential in the lens
Table 2 Results by the column system analysis  CL 1  CL 2  OL  Demag  Excitation  [Ampererturns]  552.8595  1009.5304  677.4963  0.0006 Max   [T] 0.11841 0.24403 -0.14589  Peak location [mm]  95.09065  183.312  373.765  Image Plane [mm]  110.766  183.312
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