An Experimental Study on Pumping Speed of Disk-Type Drag Pumps for Spiral Channels in Rarefied Gas Flows

1. 서 론

희박기체영역에서의 나선형 홈을 가진

원판형 드래그펌프의 배기속도에 관한 실험적 연구

권명근 ^* 양성민 ^* 이승재 ^* 황영규 ^† 허중식 ^**

An Experimental Study on Pumping Speed of Disk-Type Drag Pumps for Spiral Channels in Rarefied Gas Flows

Myoung-Keun Kwon, Seoung-Min Yang, Seung-Jae Lee Young-Kyu Hwang and Joong-Sik Heo

Key Words: Pumping Speed(배기속도), Compression ratio(압축비), Ultimate Pressure(최대도달진 공도)

Abstract

Experimental investigations are performed for the rarefied gas flows in a disk-type drag pump (DTDP). The pump considered in this paper consists of grooved spiral channel on rotors and planar stators. The flow-metre method is adopted to calculate the pumping speed. Compression ratio and pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001~4 Torr. The maximum of compression ratio was about 3300 for three-stage DTDP, 1000 for two-stage and 100 for single-stage DTDP at zero throughput. The number of stage influences the pumping speed of DPDT

†

E-mail : [email protected]

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대한기계학회 2003년도 춘계학술대회 논문집

2. 실험장치 및 방법

2.1 실험장치

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대한기계학회 2003년도 춘계학술대회 논문집

2.2 실험방법

3. 실험 결과

3.1 최대도달 진공도와 압축비

10

10

10

10

10

10

1x10

1x10

10

10

10

10

10

In le t p re ss ure (T orr )

Outlet pressure (Torr) Three-stage

Two-Stage Single-stage (BSC) Single-stage (OSC)

10^-3 10^-2 10^-1 10⁰ 10¹ 10⁰

10¹ 10² 10³ 10⁴

C om pre ss io n ra tio

Outlet pressure (Torr)

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대한기계학회 2003년도 춘계학술대회 논문집

10

10

10

10

100

P ump in g speed (L /s)

Inlet pressure (Pa)

Three-stage Two-stage Single-stage

3.2 배기속도

4. 결 론

후 기

이 논문은 2002년도 한국학술진흥재단의 지원 에 의하여 연구되었음(KRF-2002-041-D00098).

참고문헌

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대한기계학회 2003년도 춘계학술대회 논문집