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Influence of Film Growth Temperature of Electrochromic Tungsten Oxide Film 정 훈1,2, 김연홍

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Theories and Applications of Chem. Eng., 2006, Vol. 12, No. 1 2439

화학공학의 이론과 응용 제12권 제1호 2006년

Influence of Film Growth Temperature of Electrochromic Tungsten Oxide Film 정 훈

1,2

, 김연홍

1,2

, 김도형

1,2,*

1

전남대학교;

2

BK21 기능성나노신화학소재사업단

(kdhh@chonnam.ac.kr*)

화학 기상 증착법을 이용하여 변색소자인 WO3를 제조하였다. Electrochromic Tungsten Oxide films 은 ITO glass 위에 증착시키고 Tungsten hexacarbonyl[W(CO)6]와 oxygen(O2)을 각각 전구체와 대 응반응물로 사용하였다. 235℃ ~ 265℃에서 공정을 진행하였고 성장 온도에 따른 전기변색 특성을 평가하기 위해 films의 두께를 1500nm으로 일정하게 하였다. 전해액으로 LiClO4를 사용하고 Cyclic voltammetry를 이용하여 Coloring과 bleaching 특성을 평가하였다. 막의 특성은 XRD, FESEM를 이 용하여 평가하였다.

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