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An Experimental Study on Wafer Demounting by Water Jet in a Waxless Silicon Wafer Mounting System

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Fig. 3. Microscopic morphology of porous surface on the wafer mounting template.
Fig. 6. Detailed frontal view of wafer mounted carrier block with the water nozzle arrangement.
Fig. 8. Effect of water flowrate per nozzle on wafer demounting time.
Fig. 9. Transient evolution of air bubble formation underneath the wafer mounted on the porous template in wafer demounting by water jet.

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