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Microstructure analyses of aluminum nitride (AlN) using transmission electron microscopy (TEM) and electron back-scattered diffraction (EBSD)

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Academic year: 2021

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Fig. 1. Sample preparation procedures of EPD, EBSD, and TEM analysis.
Fig. 1 에서와 같이  3가지 방법 모두 정확한 분석을 위 해  표면  연마가  필요하다.  특히  투과전자현미경(TEM) 분석은  전자가  투과할  수  있는  두께까지  얇게  연마해야 하므로 시편이 부서지지 않도록 항상 주의해야 한다
Fig. 4. EBSD image of the AlN specimen. (a) SEM image, (b)~(d) IPF X, Y, Z color images, (e) Phase color image, (f) Showing the zinc blende region.

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