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Magnetic Anisotropy in [Pt/Co5

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NM01

- 142 -

Magnetic Anisotropy in [Pt/Co

5

Ni

5

] multilayers structure

Young Chan Won1*, Sang ho Lim1,2† and Seong-rae Lee2

1Department of Nano Semiconductor Engineering, Korea University, Seoul 136-713, Korea

2Department of Materials Science and Engineering, Korea University, Seoul 136-713, Korea

Perpendicular magnetic anisotropy base magnetic tunnel junctions(p-MTJ) have attracted a lot of research interests. Because they have several advantages to realize high density magnetic random access memory(MRAM) over in-plane MTJ. Many perpendicular magnetic anisotropy(PMA) systems have researched, for examples, [Co/Pt]n multilayers, [Co/Pd]n multilayers, L10 compounds(CoPt, FePt). Particularly, [Co/NM]n multilayers structure is a promising candidate because of a controllable saturation magnetization(Ms) and a high anisotropy energy density. In order to make a commercial MRAM, however, a low switching current is needed for a low power consumption, in this reason, low Ms should be satisfied. In this respect, CoNi which has a low Ms is considered in this study.

The structure of Ta / Pt / Ru / [Co5Ni5(tCoNi)/Pt(tPt)]6 / Ru was fabricated on a Si/SiO2 substrate using a DC magnetron sputtering system. The base pressure was 7×10-8 Torr while working pressure was fixed at 2×10-3 Torr.

Post annealing was conducted in various temperature 300°C~500°C and magnetic properties were measured by a vibrating sample magnetometer.

It is well-known that PMA comes from the surface between top Co layer and bottom Pt layer, and recently many multilayers structures have a thinner Pt layer than a Co layer.[1] As shown in figure 1, however, only samples containing a thick Pt layer show PMA, though a thin Pt layer is favorable for a strong PMA. In figure 2, thick Pt and Co layer show PMA after annealing over 400°C, however PMA of [0.5 nm/ 0.5 nm]6 structure disappeared after post annealing at 500°C In terms of Ms, post annealing at 500°C reduced the values of Ms especially for thin Co layer samples.

-1.0 -0.5 0.0 0.5 1.0 -300

-200 -100 0 100 200

300 [0.25/0.25]

[0.25/0.5]

[0.5/0.25]

[0.5/0.5]

m (µemu)

H (T)

Figure 1. Hysteresis loop of out of plane for [Pt/CoNi]6 structure before post annealing

-1.0 -0.5 0.0 0.5 1.0 -400

-300 -200 -100 0 100 200 300

400 [0.25/0.25] 300°C [0.25/0.25] 500°C [0.25/0.5] 300°C [0.25/0.5] 500°C [0.5/0.25] 300°C [0.5/0.25] 500°C [0.5/0.5] 300°C [0.5/0.5] 500°C

m (µemu)

H (T)

Figure 2. Hysteresis loop of out of plane for [Pt/CoNi]6 structure after post annealing

References

[1] T. Y. Lee et al., J. Appl. Phys. 113, 216102 (2013)

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