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Dry Ice Pellet Cleaning

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로드 중.... (전체 텍스트 보기)

전체 글

(1)

에어로졸 건식세정기술 현황 및 연구개발 동향 (2)

중앙대학교 화학공학과 김선근

산업세정연구회 세미나

2005. 11. 24

(2)

Removal Efficiencies of Other Contaminants

Contaminant Materials Dimension Remarks

Bearing grease film on glass Polystyrene latex film on glass Fingerprints(oil droplets) on glass Wax residue spots on silicon

Glass microspheres on silicon

Polystyrene latex microspheres on silicon Silicon debris on silicon

~50microns

~30microns 1.6 microns

0.6, 0.5&0.3 microns 0.1~30 microns

Complete removal Complete removal Not removed

Not removed

Complete removal Complete removal Complete removal

Argon Snow Cleaning Applications

(3)

Argon Snow Cleaning Applications

(4)

Compression Compression

Expansion Expansion

Extrusion Extrusion

Blasting Blasting

Surface Cleaning Surface Cleaning

COCO22Recovery&PurificationRecovery&Purification

Dry Ice pellet Dry Ice pellet Dry Ice Snow

Dry Ice Snow

Pellet 제조

Dry Ice Pellet Cleaning

(5)

Schematic diagram of dry ice pellet blasting

Pellets

Pelletizer (Extruder)

Blasting nozzle Pellet feeder

Compressor

Dry ice hopper

Dry Ice Pellet Cleaning Pellet 제조

(6)

특징

1 5

10 Diamond

Alumina Silica Plastic Starch Dry ice

Moh’s hardness

Dry Ice Pellet Cleaning

(7)

Pelletizer and blaster

Dry Ice Pellet Cleaning

(8)

분사방법

•High pressure air

•More aggressive

•Lower noise levels

•Abrasive loss

•Effective dry ice delivery

•To minimize surface cooling effect

Dry Ice Pellet Cleaning

(9)

Pellet

• 크기

• 경도

• 형태 Equipment

• Hose의 길이 및 직경

• 노즐의 형태 및 크기

• Pellet의 저장 및 공급

• Blasting 형태

Process Variables

• 공기 압, 유량, 습도, 온도

• Pellet 공급속도

• 노즐 기판 거리

• Jet angle

Cleaning 세정력 Power

Variables in 분사변수

Dry Ice Pellet Cleaning

Cleaning Object

• 오염종류

• 표면 경도, 열전도도, 거칠

(10)

Applications

• dirt - dust

• surface corrosion-rust

• oxidation

• plaster

• sealant

• Teflon

• adhesives

• mold

• chemicals - polymers

• petroleum

• scale

• marine growth

• anti-fouling coat

• oil - grease - tar

• carbon build-up

• coatings paint graffiti varnish

• moss

• cement

• weld splash/weld slag

• mortar

• isolate-separate-release agents

• protective films

• glue - silicones - wax - resin

• rollers cups

• soot

Dry Ice Pellet Cleaning

(11)

Applications

Industries

Nuclear --

for nuclear decontamination of fixed and smearable activity.

Chemical & Petroleum --

cleaning resins, glues and deposits on equipment and inside tanks.

Electrical Power & Rotating Machinery --

cleaning electric motors, SRC banks, open relays,bearings, etc.

Electronics Manufacturing --

fully adjustable to allow very delicate components to be cleaned.

Food Processing --

Retards bacterial growth (CO2 is a disinfectant) and uses pharmaceutical/food grade Dry ice to clean surfaces

completely.

Printing --

quickly and easily removes ink and grease and significantly extends the life of printing equipments.

Dry Ice Pellet Cleaning

(12)

Applications

Industries

Marine --

paint comes off dry and can be vacuumed right at the work site, or collected in cloths beneath it. Even underwater removal can be accomplished safely.

Mass Transit --

surface preparation of aluminum, plastic, rubber and glass simultaneously without damage makes this method ideal for electric motors, escalators, elevators, rail cars, buses, floors, etc.

Steel Foundry --

cleaning of permanent molds, hot molds core boxes, isocure cores all without down time

.

Tire & Rubber --

From cleaning large in-situ molds to small O-ring cavities.

Dry Ice Pellet Cleaning

(13)

Applications

Other than Surface Cleaning

Airport and Highway :

Fog dissipation

Weather control :

Seeds for artificial rain formation

Dry Ice Pellet Cleaning

(14)

Cleaning of Large Electric Motors

Before After

Dry Ice Pellet Cleaning Applications

(15)

Dry Ice Pellet Cleaning Applications

(16)

Pellet feeding Mass flow

Rotary feeder

Dry Ice Pellet Cleaning Issues

Positive pressure system Negative pressure system

(17)

Pellet transport

Pressure drop vs. gas velocity vs. pellet mass flow rate

Dry Ice Pellet Cleaning Issues

(18)

제조 및 세정원리

Microcluster beam cleaning

(19)

제조 및 세정원리 Microcluster beam cleaning

Formation of droplets – Rayleigh limit

Electrohydrodynamic atomization modes

(20)

제조 및 세정원리 Microcluster beam cleaning

Particles

Contaminating films

(21)

제조 및 세정원리 Microcluster beam cleaning

Outer diameter of capillary: < 710 μm Electric field: ~10kV

Solution flow rate: 0.5~2μL/min

Solutions: Water:methyl-2-pyrrolidone mixture + Ammonium acetate

Glycerol

(22)

제조 및 세정원리 Microcluster beam cleaning

Impact energy 가속 voltage

Cluster 속도 용액 유량

전기장 voltage 용액 전도도

Cluster 크기 Specific charge Cluster 조성

Cluster 물성 제어변수

Flow rate

Cluster size Cluster size

Electric field E-field

constant Flow rate

constant

(23)

제조 및 세정원리 Microcluster beam cleaning

Impulsive force

Van der Waals force

a

i

r V

F

2

1 2 1 0

) (

4 π ε γ

=

8

2

~ z

F

v

Hr

π

8.4×10-5 3.2×10-7

1.00

2.7×10-5 3.2×10-8

0.10

8.4×10-6 3.2×10-9

0.01

Fi(N) Fv(N)

Particle radius(μm)

m mN /

=5

γ Va =10kV z =0.4nm H =8.0eV =1.28×1018J

(24)

Applications Microcluster beam cleaning

Probe needle cleaning

(25)

Applications

Microcluster beam cleaning

(26)

Microcluster beam cleaning 특징

-Crevices에 갇힌 오염입자의 효과적 제거

-반도체 제조에서 진공상태의 전후 공정에 부합 -Valve, fitting, seal 등이 없어 고순도를 유지

-세척수 사용 저감

-건식공정의 과도한 기체사용 저감

(27)

• 세정력 향상

• 세정범위 확대

• 공정 및 장치 최적화

• Hybridization(+ UV, ozone, other aerosol) Aerosol Cleaning

-

clean, effective, economic, versatile

전망

참조

관련 문서

Huggins, 1989, Physical response of winter orographic clouds over the Sierra Nevada to airborne seeding using dry ice or silver iodide.. Pitter, 1988, Rapid

Conventional ECP is a non-contact surface polishing method used to improve surface quality without leaving the mechanical scratch marks often encountered

This study makes use of statistical method in estimating the spread of oil supply disruption, which will be the starting point of analysis on oil

- Renewable energy makes certain of energy security and is a clean energy without contaminants. -

• LED, Light Emitting Diode embedded GFRP, Glass Fiber

Garden waste Clear glass Colour glass Metal Tin Non-metal Aluminum cans Other aluminum Hazardous waste Dust/sand Other organic Non-organic

In this study, paper purposes to evaluate characteristics of machined surface using Atomic Force Microscope in the precision cutting of aluminum( Al 6061 )

In this thesis, a study on the appendages for the reduction of ice induced resistance in ice breaking ship has been carried out and G/T 6950ton class ice breaking