Design and characterization of conductive transparent filter using [TiO<sub>2</sub>|Ti|Ag|TiO<sub>2</sub>] multilayer
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(2) 7²æ B 13² B 4^,. 364. j 8ú. 2002. Ã&~æò &7F'~ R"& §jæ² B . > ;ï~ vþ& Ö jæ R"&f 9Úææò & 7F'~ R"Nf J®J Ôjæ² B . ¾B &7 F 'öB R"Nj ¸V * Ag ;ï~ '; vþº 13Û1 nm, r 380Ê650 nm~ 2Ë'öB ïR"N f 83% ç, 650 nm çöBº >ÒN NV Ã&~ R"N 6²~& . f ? JêB V º [V |TiO (24 nm)|Ag(13 nm)|TiO (24 nm)|FÒ]& >, R"N" >ÒNf â 2ö Fb ¾æÚî . .³;ï" F*Ú Öz;ï 7~º öB .³;ïj ÃO ê *ö F*Ú Öz;ïj ÃOrº "«>º Ö ² &Êö ~ .³;ï ÖzF > ® . ß® Agf ? Özö ~ 7ç>& ê³ æ&º .³f ÖzOæï > jº~ . [V|TiO |Ag|TiO |FÒ] &O z+ ~ ãÖ Ag ;ï *ö >wW Ê¢Vç O»b TiO ;ï j ÃO r Ag ;ï Ö²2¢®îf ö Â> Ag ;ï Öz 6º w÷>² >, &O z+~ V Ë *&® 6²~² B . ¾B Ag ;ï~ Özf w ÷j ïV * TiO ;ï" Ag ;ï Òö ÖzOæïb Ti, NiCr, Ta, W ~ Ö f .³;ïj ÃO . â 3f [V|TiO (24 nm)|Ag(13 nm)|TiO (24 nm)|FÒ]~ V öB Vf 7~º TiO ;ï" Ag ;ï Òö Ö zOæïb Ti ;ïj ÒÏ~&j ãÖ Ti ;ï~ vþæz ö V R"N" >ÒN~ æz¢ ¾æÞ © . Ti ;ï~ vþ& 1 nmO Ã& rî R"N 4~5%O 6²~ Ti ;ï~ vþ& 3 nm ãÖöº R"N 75% ~& B . f ? ÖzOæïf >& B R"Nj 6²Êº ö >V r^ö Ag~ Öz¢ ï R"N~ 6²¢ ² ~º '; vþ¢ F¢ ~, ¢>'b 1~2 nm vþ ~ ÖzOæï ÒÏB . öBº ÖzOæïb 1 nm~ Ti ;ïj ÒÏ~ *êW R"jV~ V ¢ [V|TiO (24 nm)|Ti(1 nm)|Ag(13 nm)|TiO (24 nm)|FÒ]~ Ag. 2. â 1. [V|TiO |Ag|TiO |FÒ] ~ *êW R" jVöB TiO ;ï~ vþ æzö V R"N" >ÒN~ æz. TiO ;ï vâò î> R"& Ë2Ë ãb ÿ . ;ï~ vþ : Ag=10 nm, TiO =20 nm(Ã), 25 nm(Ç), 30 nm(− −), 35 nm (−Â−). 2. 2. 2 2. 2. ;ï~ vþæzö V Ê¿Þ"~ æz¢ " ® . ¢ >'b &O z+öB ÒÏ>º Ag ;ï~ vþº 8~15 â 1öBº Ag ;ï~ vþ& 10 nm¢ r nm, TiO ;ï~ '. vþ¢ rj~ . TiO ;ï~ vþ& 20~35 nm Ã&> R"& Ë2Ëb ÿ . ¯ TiO ;ï~ vþ¢ .~ R"Nöº æz& ì R "&òj ö~º 'b ÿÒ > ® . r R"& 380~650 nm~ &7F ' TiO ;ï~ vþº 24 nm& >î . â 2º [V|TiO (24 nm)|Ag|TiO (24 m)|FÒ] öB Ag ;ï~ vþ æzö & Ê¿Þ"~ æz¢ ¾æÞ ©. . Ag ;ï~ vþ& Ã&> 'F'~ NÎ"º [1-3]. 2. 2. 2. 2. 2. 2. 2. [13]. 2. 2. 2. [1,5,7]. 2. [3,5-6]. 2. 2. 2. [1,5-6]. 2. â 2. [V|TiO |Ag|TiO |FÒ] ~ *êW R" jVöB Ag ;ï~ vþ æzö V R"N" >ÒN~ æz. Ag ;ï vâò î> &7F'~ R"N 6² ~ R"& §jê . 6 .Z jrj ãÖöê R"N 6²~² B . ;ï~ vþ : TiO =24 nm, Ag=8 nm(Ã), 13 nm(Ç), 20 nm(− −), 30 nm (−Â−). 2. 2. 2. 2. â 3. [V|TiO |Ti|Ag|TiO |FÒ] ~ *êW R" jVöB Ti ÖzOæï~ vþ æzö V R"N" >ÒN~ æ z. Ti ;ï 1 nm Ã& rî R"N 4~5%O 6² . ;ï~ vþ : TiO =24 nm, Ag=13 nm, Ti=0 nm(Ç), 1 nm(− −), 2 nm(−Â−), 3 nm(Ã). 2. 2. 2.
(3) Ó¢^Ô[TiO |Ti|Ag|TiO ] [¢ Ï *êW R"jV~ Jê 5 ßWªC ßZÁËî 2. ; Jê~& . *êW R"jV¢ 2¢®î :Ê2. N6ö ÒÏ~V * Bº 900~1100 nmöB R"Nj 5~15% 6²B¢ ~ , F *¶V2¢ N~V * &f 1~2 Ω/ý& > Ú¢ ~, &7F'~ R"Nf ¸j¢ . [V |TiO |Ti|Ag|TiO |FÒ] öB 'F '~ R"Nj * º O»f ² v &æ& ® . V öB Ag ;ï~ v þ¢ '.® ¾Òº O»" V ¢ >~ f Ag ; ïj ® ÃO~º O» . *¶~ O»f Ag~ vþ & Ã&~ &7F '~ >ÒN ¸jæ R"&ê §jæº ê& ® ( â 2). ¾ V ¢ >~ Ag ;ï~ vþ¢ Ã&Ê R"&f §jææ pbB Ag ;ï~ vþº Ã&>Ú 'Fj N~ *êWj Ë çÒ > ® . &O Î"¢ &z~V * V ¢ ® >~ Ag ;ï~ vþ¢ Ã&Ê [V |(TiO |Ti|Ag|TiO ) |FÒ] (P=1,2,3) & B . -² Jê jVöBº 'F '~ Ôf R"N, &2 'F N ãÒ, Ò Ôf &j V& > ® . &7F ' ~ R"Nj ËçÊV *Bº jV Ú ZÊ& V ~ Ú ZÊö &r &ê Jê¢ . > ® . [9]. 2. 2. [1-3]. 2. 2. 365. 2. ¯ â 4(a)öB jV~ « Ú ZÊ& V~ Ú Z Ê "¾& >ê ~, &7F 'öB Z>Ò &j 9 ®V * 13 nm~ Ag ;ïj &ê V ¢ v ® > êö ^ ® "VöB Ag ;ï~ vþ¢ 17 nm ~&. . ¾B *êW R"jV~ 'zB Jêº [V|TiO (24 nm)|Ti(1 nm)|Ag(17 nm)|TiO (24 nm)|{TiO (24 nm)|Ti(1 nm)|Ag (13 nm)| TiO (24 nm)} |FÒ] . â 4(b)º «'b Jê 3"V *êW R"jV~ R "N" >ÒN . &7F '(380~650 nm)öB ïR" Nf 64% 800 nm ç~ 'F 'öBº 7.7% ~ . V ¢ >~ Ag ;ïj ^ [b ¾*Ú J ê~ 9f &7F 'öB ¸f R"Nj Fæ > ® b, vâòê Ag ;ïö ~ 'Fj Î"'b N > ® . 2. 2. 2. 2. P. [10-11]. 2. III.. þ. f TiO ;ïf çã 10 cm Agf Ti .³ æij ¦ O RF î JÞ Ê¢Vç Ëj¢ Ï~ ÃO~& . V6bº BK7 FÒf Si ¢(p-type, <100>)¢ ÒÏ®. . æi" V6~ Òº 52 mm .V êêº ²* ² *f V ª¶ ²*¢ Ï~ 5.0Ü10 Torr ò î . Agf Ti .³;ïj ÃO~V* Ê¢Vç &Ê Ar &Ê ¢ ÒÏ~&, Ö² &ʺ TiO ;ïj ÃO~V* >w W &Ê Î&~& . ;ï ÃO ~ êêº Agf Ti . ³;ïf 3.6Ü10 Torr TiO ;ïf 5.9Ü10 Torr î . 6 *K&êº Agf Ti ;ïf 1.23 W/cm , TiO ;ïf 3.1 W/cm ~&, ÃOf Ag, Ti, TiO ;ï '' 110 nm/min, 3 nm/min, 3.4 nm/minî . ;ï~ 7' ßWj ªC~V * ª77êê(Cary 500; Varian) R"N" >ÒNj G;~&, Ag, Tif TiO ;ï ~ 7ç>f vþº &æ' ª7æö CV(variable angle spectroscopic ellipsometer; VASE)¢ ÒÏ~ G;~& . ¯, FÒV6 *ö ' ;ïj ÃO ê VASE¢ Ï~ n, k, d¢ G;~&, ¦V ÃOj Ö;~& . ê vþ .f ÃO*j æzB& ;~& . vþ.~ ;{ Wj rjV * 1 nm~ Ti ;ïj ÿ¢ b ® ÃO Ö" 0.85~1.15 nm Ò Û15%~ JN¢ &. . Ag ;ïf 13 nm¢ ÃO~º Û8%~ JN¢ &b, TiO ;ïf 24 nm¢ ÃO r Û5%~ JN¢ & . J N¢ º "öf zV¢ ·ÿ~ºB Jº ©b ;ï ~ vþ& vâòî> JNN ·jr . ß® Ti ;ïf 1~2 nm Ö ² ÃO¢ ~æ, JN¢ *V * TiO fº Ò Ôf 2òöB ÃO~& . 7;ï~ ßWf ;ïj ÃO O»¾ êê, V6Nê, ÃO, >wVÚ { K ~ ÃOö V¢ N& ® . öB RF î JÞ Ê¢Vç O»b ÃO ;ï~ 7ç>º 1 ö ¾æÚîb, º ^^ò " ² N¢ ® . ;ï~ ;ç" Vº 7* ã" ö¶K* * ã(atomic force microscope; AFM)j ÒÏ~ G;~& . Ag. 2. −6. 2. −3. −3. 2. 2. 2. 2. 2. 2. 2. 2. â 4. 'z JêB jV~ (a)Ú ZÊ(2Ë=550 nm) (b)2 Ëö V R"N" >ÒN. [V|{TiO |Ti|Ag|TiO } |FÒ], P=1 (1 period), P=2 (2 period), [V|TiO |Ti|Ag'|TiO |{TiO |Ti|Ag|TiO } |FÒ], (3 period), ;ï~ vþ : TiO =24 nm, Ti=1 nm, Ag=13 nm, 2. 2. P. 2. 2. 2. Ag' = 17 nm.. 2. 2. 2. [11]. [14].
(4) 7²æ B 13² B 4^, 2002j 8ú 1. RF î JÞ Ê¢Vç Ëj ÃO ;ï~ 7ç>. 366. wavelength (nm) 350 400 450 500 550 600 650 700 750 800 850 900. Ag. TiO2 n 3.074 2.807 2.661 2.575 2.521 2.485 2.461 2.444 2.431 2.422 2.415 2.410. k 0.01587 0.00817 0.00487 0.00322 0.00230 0.00173 0.00137 0.00111 0.00093 0.00080 0.00070 0.00062. n 0.4076 0.1924 0.1218 0.1135 0.1196 0.1299 0.1432 0.1579 0.1725 0.1885 0.2049 0.2204. Ti. k 1.29677 1.88346 2.40322 2.87754 3.31099 3.69812 4.09516 4.48178 4.83849 5.21147 5.57941 5.92185. n 1.8434 1.8905 1.8254 1.8312 1.8421 1.8572 1.8991 1.9860 2.1187 2.3154 2.5619 2.8241. k 4.08778 3.45841 3.30508 3.22603 3.18659 3.19714 3.25692 3.35132 3.45200 3.54830 3.61033 3.62010. 2. *êW R"jV~ Þ ®^ Þ A [V|TiO |Ag|TiO |FÒ] Þ B [V|TiO |Ti|Ag|TiO |FÒ] Þ C [V|TiO |Ti|Ag'|TiO |(TiO |Ti|Ag|TiO ) |FÒ] Þ D [V|TiO |Ti'|Ag'|TiO |(TiO |Ti'|Ag|TiO ) |FÒ] 2. 2. 2. 2. 2. 2. 2. 2. 2. 2. 2. â 5. Jê, ÃO jV~ R", >ÒÊ¿Þ" jv. ÖzOæ ïj ÒÏ~æ pf ãÖöº Ag ;ï Öz>Ú ' F >Ò ßWj ²~&b¾ ÖzOæïj ÒÏ ãÖ öº Jê Ê¿Þ"" ¾ ¢~~ ® . : Simulation (Ç), Þ A(− −), Þ B(−Â−).. 2. 2. 2. TiO2 = 24 nm, Ag = 13 nm, Ag' = 17 nm, Ti = 1 nm, Ti' = 1.8 nm. ;ï~ *V' ßWf 46 ö»b &j G;~& . IV.. þÖ" 5 ¢~. :Ê2. VVÏ *êW R"jVº &7F 'öB~ ¸f R"N" 'F 'öB~ ¸f >ÒN, Ò Ôf & Ö 7º~ . ¾ ÃO ;ï~ z', 'b ^ æzöê jV~ Ê¿Þ" :2² >, ß ® ¾ .³;ï~ æ;f &~ Ã&¢ Fê~² B . ßWj rjV * öBº J «~ ~ jV¢ ÃO~&b 2ö ' jV~ ¢ ¾æÚî . [V|TiO |Ag|TiO |FÒ]~ &O z+öBº Ag ;ï *V *êW" 'F '~ Nö 7º j ~ ® . ¢>'b Ag ;ï~ *V *êWf ;ï~ ' Ö ö ~ Ag ÚÒ ÎÚê . öB RF î J Þ Ê¢Vç O»b ÃO Ag ;ïf 13 nm ç~ v þöB ³B ;ïb ;W> *V'b *êW ±f ßWj & . ¾ ÃOB Ag ;ï *ö >wW Ê¢V ç O»b TiO ;ïj ÃO~, Ag ;ï ö ~ w ÷¾ Ö² 2¢®îö ~ Öz>Ú 'F >ÒVË" * V *êWj ©² B . ¾B .³;ï~ Öz¢ ïV * ÖzOæïj ÒÏ~² >º, öBº ÖzOæ ïb Ti ;ïj ÃO~& . Ti ÖzOæï~ j rj V * ÖzOæï ìº Þ A([V|TiO |Ag|TiO |FÒ]) f ÖzOæï ®º Þ B([V|TiO |Ti|Ag|TiO |FÒ])¢ B·~ 7', ' ßWj jv~& . â 5º Þ A, B~ Jê Ê¿Þ"" ÃO ê G; Ê¿Þ"j jv [3]. 2. 2. 2. [1,5,7]. 2. 2. 2. 2. â 6. ÃO ;ï~ 7* ã Òê. ÖzOæïj ÒÏ~ æ pf ãÖöº Ag ;ï Ö² 2¢®îö ~ Ö z, {Ö>Ú TiO öB &VB . : (a)Þ A, (b) Þ B. 2.
(5) Ó¢^Ô[TiO |Ti|Ag|TiO ] [¢ Ï *êW R"jV~ Jê 5 ßWªC ßZÁËî 2. 367. 2. © . Ti ÖzOæïj ÒÏ ãÖº Jê Ö"f. Ö FÒ R"N" >ÒNj & . ¾ Ti ÖzOæï ìº ~ jVº 'F~ >Ò ßW ²~ ' F '~ R"N Ã&~ ® . 6 7* ãb ;çöBº â 6(a)öBf ? w÷B Ag ÚÒ j " > ® . ©f Ag ;ï îæï TiO ;ï~ ÃO"; 7 2¢®îö ~ " WzB Ö²ö ~ Öz> TiO ;ïb {Ö>Ú w÷B Ag ;ï ö º © b Îê . ¾ ÖzOæï Ti ;ïj ÃO Þ Bº & 3.54 Ω/ý *V *êW ® â 6(b)öB º ©¾" ~ ;ç }~& . â 5, 6~ Ö" öB 1 nm~ Ti ÖzOæïb Ö² 2¢®î¦V Ag ; ïj ^ > ® º ©j r > ®î . â 7f V ¢ ^ ® > 'Jêf ÃO jV ~ R", >Ò Ê¿Þ"j G;~ jv © . â 7(a) º Ti ÖzOæï~ vþ& 1 nm Þ Cö & Ö", â 7(b)º ÖzOæï~ vþ& 1.8 nm Þ Dö & Ö" . Þ CöBº 380Ê650 nm~ &7F 'öB ïR"N 61%, 800 nm ç~ "'F 'öBº 2. 2. [7]. ~¢ 'F~ NßW ¸² ¾æÒ . ¾ "¾~ R"Nf Jê R"N" £ 11%;ê N & ® â 7(a)). Þ Dº &7F '~ ïR"N 800 nmöBº 5.6%î . Ti ÖzOæï~ v þ& vâò^B >& Ã&~ &7F '~ R"Nf 6²~&b¾ Jê R"N" ~ N& ìÚr ( â 7(b)). Þ Cf DöB G; R"N *ÖÎ~ö ~ êÖB R"N" N¢ º Fº Ñ >wW Ê¢Vç O»b TiO ;ïj ÃO r Ti ÖzOæï ¢¦ Öz& > Ú TiO ~ îÚ ãê[ W>² B º © . æ JêöB Ti ÖzOæï" TiO [ Òö ãê[j ã«~ ¢ò Jêf G;~ Ê¿Þ" ¢~~² B . ¾ öBº ãê[~ Î"¢ 'Ï~æ p~V r^ ö Jêf G;~ Ê¿Þ" N¢ º ©b Îê. . ß® ÖzOæï~ vþ& f ãÖöº ÖzOæï~ Ö zöò jî¢ Ag ;ïræ ¢¦ Öz& ê¯>Ú z ôf N¢ º ©b 6B . ~ Fº *ÖÎ~fº Ò B ÃO";öBº ;ï ò Úæ² >, öB~ Ö¦ö ~ &7F'öB R"N 6²~² B . º Þ Cf D~ j AFMb G; â 8öB { > ® . ÖzOæï~ vþ& 1 nm â 8(a)~ ãÖöº ~ ;ê¢ ¾æÚº BïB" (root mean square; rms)8 20.7 nmî, ÖzOæï~ vþ& 1.8 nm â 8(b)º 5.98 nmî . ÖzOæï f ãÖöº z År(grain) ô ¾æÒ . º Ag ;ï ¦ª'b w÷>¾ F*Ú [b {Ö >B År j ;W~² >º ©b Îæ â 7(a)öB 450 nm '~ R"N Ôjæ² >º ©b 6B . 6 Þ BöB 1 nm~ ÖzOæï j ÒÏ ãÖ Jê Ê¿Þ"" G; Ê¿Þ" ~ 6.6% 450 nm ( 53%. 2. x. 2. [13]. [3,15-16]. â 7. Jê, ÃO jV~ R", >ÒÊ¿Þ" jv. ÖzOæ ï~ vþ& 1 nm Þ CöBº Jê Ê¿Þ"" ôf N¢ æò, ÖzOæï~ vþ& 1.8 nm Þ DöBº Jê Ê¿Þ"" ¾ ¢~ . : (a)Þ C, (b)Þ D.. â 8. ÃO jV~ AFM Òê. ÖzOæï~ vþ& 1 nm ÞC öBº Ag ;ï~ Öz, w÷j Ϫ® ïæ á ;ï >îæò, ÖzOæï~ vþ& 1.8 nm Þ DöBº z jÚ ;ï >î . V(BïB"; rms) : (a)Þ C=20.7 nm, (b)Þ D=5.98 nm..
(6) 368. 7²æ B 13² B 4^,. j 8ú. 2002. ~ ÒÏ j>'î . 6 [ .> ÖzOæï ~ vþ¢ z vó² ÃO¢ ~º ©j {~& . ÖzO æï~ vþ¢ 1 nmf 1.8 nm ÃO *êW R"jV~ ïR"Nf &7F 'öB '' 61.1%, 53.4%¢ & , 800 nm ç~ 'F 'öBº 6.6%, 5.6% òî b, &f 0.9 Ω/ý, 1.16 Ω/ý Ôf &j & . -² B· jVº &7F 'öB R"N ¸, " 'F 'öBº R"N Ôb, *¶2 Ë(EMI)¢ Î "'b Oæ > ®j ;ê & Ô~ .. 6Ò~ & º 2000jê ~&v B* j~ æöb >¯>îb, æöö 6Ò ãî .. â 9. 1~3"V *êW R"jV~ &.. ¢~~ 1 nm~ ÖzOæï Ö² 2¢®î¦V Ag ;ï j Ϫ® ^ > ®º ©b ¾æÒæò, Þ CöBº ÖzOæïj 1 nm z vó² ÃO¢ò ~º ©b ¾ æÒ . º jV~ [>& Ã&b V6ã~ ;ï. f 2¢®îö Â>º * ^Úæ² >Ú ÖzOæï *¦ Öz& B ê, Ag ;ïræê ¢¦ Öz, w÷ > º ©b Îê . jV~ *V' ßWf 46 ö»b &j G;~ ªC~& . jV~ *V*êº .³[ Ag ;ïö ~ Úææ Ag ;ï~ Öz 5 æ;j ïº © 7º~ . ÖzOæïj ÒÏ~æ p~~ jV f Ag ;ï Ö²2¢ ®îö ~ Öz 6º w÷>Ú *êWj ç ~&æò, Ö zOæïj ÒÏ~ *êW ;ïj B· > ®î . Ag ; ï~ vþ¢ Ã&ÊV * V ([TiO |Ti|Ag|TiO ])¢ >~ ÃO ãÖ >²>¢ 1~3b ¾Ò &(R ý)f 1 nm vþ~ ÖzOæïj ÒÏ ãÖº 3.5 Ω/ýöB 0.9 Ω/ý, 1.8 nm vþ~ ÖzOæïj ÒÏ ãÖº 3.7 Ω/ýöB 1.16 Ω/ý 6²~& ( â 9). º >²> & Ã&b Ag ;ï~ C vþ& Ã&~ &8 6 ²~&V r^ . -² B· *êW R"jVº *¶2 Ë(EMI)¢ Î"'b N > ®j ©b V&B . 2. 2. [9]. V.. Ö . :Ê2. VVö ÒÏ > ®º *êW R"jV¢ Jê ~&b RF î JÞ Ê¢Vç O»b ÃO~& . & 7F~ R"'j 9® Ôf &j <º jV¢ ÃO~ V * [TiO |Ti|Ag|TiO ] V ¢ ^ ® >~º 10[~. [;ï ¢ Ú ZÊ O»j Ï~ Jê~& . Ag ;ïf 13 nm çöB ³' ;ï >Ú Ö> *V*êWj & . ¾ >wW Ê¢Vç O»b TiO ;ïj ÃO~º ";öB Ag ;ïf 2¢®î~ " >w &Ê Ö²ö ~ w÷ 6º Öz>Ú 'F >ÒßW" *V*êW ²>îb, ¢ ïV *Bº ÖzOæï 2. 2. 2. ^^ò [1] J. J. Finley, “The evolution of solar infrared reflective glazing in automobiles,” in 44th Annual Technical Conference Proc., SVC, Philadelphia, Pennsylvenia, USA, pp. 193-203, 2001. [2] P. H. Berning, “Principles of design of architectural coatings,” Appl. opt., vol. 24, pp. 4127-4141, 1983. [3] H. J. Gläser, Large area glass coating (Von Ardenne, Dresden, 2000), pp. 206, 220-226. [4] H. Schilling, J. Szczyrbowski, M. Ruske, and W. Lenz, “New layer system family for architectural glass based on dual twin-magnetron sputtered TiO2,” in 41th Annual Technical Conference Proc., SVC, Boston, MA, USA, pp. 165173, 1998. [5] O. Treichel, V. Kirchhoff, and G. Bräuer, “The influence of the barrier layer on the mechanical properties of IR-reflecting (low-E) multilayer systems on glass,” in 43rd Annual Technical Conference Proc., SVC, Denver, USA, pp. 121126, 2000. [6] R. Hermann and G. Bräuer, in R. E. Hummel and K. H. Guenther (ed.), Handbook of Optical Properties vol. 1 (CRC, Boca Raton, Fla., 1995), pp. 174-175. [7] , , , , , ,“ TiO2/M/Ag/M/TiO2 ,” , 5 2 , pp. 147-155, 1996. [8] R. Dannenberg and D. Glenn, “Microstructural comparison of Ag films grown on amorphous TiO2 and polycrystalline ZnO,” in 44th Annual Technical Conference Proc., SVC, Philadelphia, Pennsylvenia, USA, pp. 218-224, 2001. [9] H. Ohsaki and Y. Kokubu, “Global market and technology trends on coated glass for architectural, automotive and display applications,” Thin Solid Films, vol. 351, pp. 1-7, 1999. [10] H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics Publishing, Bristol, UK, 2001), pp. 37-85, 579, 583-585. [11] , ( , , 2001), pp. 57-68, 110-118, 184-196, 313-318.. ã& ê ;"ÿ fê* f'~ JW {ÖOæ ïö V R« . ;ï~ 7' Wî ê²æ B ² ^. c² ;ï7 W BÞ.
(7) Ó¢^Ô[TiO |Ti|Ag|TiO ] [¢ Ï *êW R"jV~ Jê 5 ßWªC ßZÁËî 2. 2. [12] P. Grosse, R. Hertling, and T. Müggenberg, “Design of low emissivity systems based on a three-layer coating,” Journal of Non-Crystalline Solids, vol. 218, pp. 38-43, 1997. [13] B. T. Sullivan and K. L. Byrt, “Metal/dielectric transmission interference filters with low reflectance. 2. Experimental results,” Appl. Opt., vol. 34, pp. 5684-5694, 1995. [14] D. W. Linch, W. R. Hunter, and G. W. Ribarsky, “Comments on the optical constants of metals and an introduction to the data for several Metals,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic,. Orlando, Fla., 1985), pp. 350-368. [15] H. Weis, T. Müggenberg, P. Grosse, L. Herlitze, I. Friedrich, and M. Wutig, “Advanced characterization tools for thin films in low-E systems,” Thin Solid Films, vol. 351, pp. 184-189, 1999. [16] G. Leftheriotis, P. Yianoulis, and D. Patrikios, “Deposition and optical properties of optimized ZnS/Ag/ZnS thin films for energy saving applications,” Thin Solid Films, vol. 306, pp. 92-99, 1997.. Design and characterization of conductive transparent filter using [TiO2|Ti|Ag|TiO2] multilayer Seung-Hyu Lee†, Jang-Hoon Lee, and Chang Kwon Hwangbo Department of Physics, Inha University, Incheon 402-751, KOREA † E-mail: [email protected]. (Received April 1, 2002 ; revised manuscript received June 12, 2002). We have designed conductive transparent filters using a low-emissivity coating such as [dielectric|Ag|dielectric] for display applications. The design is the repetition of [TiO2 |Ti|Ag |TiO2] to increase the transmittance in the visible and decrease the transmittance in the near IR. The conductive transparent filters are deposited by a radio frequency(RF) magnetron sputtering system. The optical, structural and electrical properties of the filters were investigated and the optical spectra are compared with simulated spectra. The thickness of the deposited Ag films is above 13 nm to increase the conductivity and that of TiO2 films is 24 nm to increase the transmittance in the visible range. Ti blockers are employed to prevent the Ag films from being oxidized by an oxygen gas during the reactive sputtering process. Also, it is shown that the thicker Ti film is necessary as the period increases. Finally, a filter with repetition of the basic structure three times shows the better cut-off near infrared(NIR) and the sheet resistance as low as 2 Ω/ which is enough to shield an unnecessary electromagnetic waves for a display panel. Classification codes : DT.010, OM.010, OM.020.. ý. 369.
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