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마이크로 성형기를 위한 미세 변위 측정에 관한 연구

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Fig.  1  Schematic  diagram  of  the  measurement  system  for  the  motion  accuracy  of  X-Y  stage
Fig.  3  The  optical  setup  and  experiment
Fig.  4  Simplified  block  diagram  of  the  low-frequency  acceleration  standard
Fig.  6  Functional  layout  of  the  LIST  technique
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